JPH0633009U - Ultrasonic potentiometer - Google Patents

Ultrasonic potentiometer

Info

Publication number
JPH0633009U
JPH0633009U JP711391U JP711391U JPH0633009U JP H0633009 U JPH0633009 U JP H0633009U JP 711391 U JP711391 U JP 711391U JP 711391 U JP711391 U JP 711391U JP H0633009 U JPH0633009 U JP H0633009U
Authority
JP
Japan
Prior art keywords
carriage
leaf spring
magnetostrictive
slide sheet
sheet member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP711391U
Other languages
Japanese (ja)
Other versions
JP2556380Y2 (en
Inventor
純一 遠藤
裕之 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1991007113U priority Critical patent/JP2556380Y2/en
Publication of JPH0633009U publication Critical patent/JPH0633009U/en
Application granted granted Critical
Publication of JP2556380Y2 publication Critical patent/JP2556380Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Abstract

(57)【要約】 【目的】比較的簡単な構成で磁歪線と検出ヘッドの間隔
を一定に保つことができる超音波ポテンショメ―タを提
供することにある。 【構成】磁歪線の長手方向に沿って磁歪線の両側に磁歪
線と同一面になるようにスライドシ―ト部材を設け、平
面の垂直方向および平面に軸を持つ回転方向の剛性は小
さく平面の水平方向の剛性は大きく形成されている板バ
ネを介して検出ヘッドをキャリッジのフレ―ムに取り付
け、板バネのスライドシ―ト部材との対向面にはスライ
ダを設け、シャフトおよびガイドでキャリッジを押圧す
ることによりスライダをスライドシ―ト部材に押圧する
ように構成する。
(57) [Abstract] [Purpose] To provide an ultrasonic potentiometer capable of keeping a constant gap between a magnetostrictive wire and a detection head with a relatively simple structure. [Structure] A slide sheet member is provided on both sides of the magnetostrictive line so as to be flush with the magnetostrictive line along the longitudinal direction of the magnetostrictive line, and the rigidity in the direction perpendicular to the plane and the rotational direction having the axis in the plane is small. The detection head is attached to the frame of the carriage through a leaf spring that has a large horizontal rigidity, and a slider is provided on the surface of the leaf spring that faces the slide sheet member. The slider is pressed against the slide sheet member by pressing.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は、超音波ポテンショメ―タに関するものであり、詳しくは、検出ヘッ ドの改善に関するものである。 The present invention relates to an ultrasonic potentiometer, and more particularly, to an improved detection head.

【0002】[0002]

【従来の技術】[Prior art]

本考案の出願人は、非接触で指針や記録ペンなどの可動部の位置に対応した位 置帰還信号を得る手段として、磁歪材料が線状に構成された磁歪線内部を伝搬す る超音波信号を利用した超音波ポテンショメ―タを提案し(例えば特公昭60-550 20号)、実用化している。 図3は従来のこのような超音波ポテンショメ―タの検出ヘッド周辺の一例を示 す断面構成説明図である。図において、1はリボン状に形成された磁歪線であり 、一方の側辺は他方の側辺が台座2の段付面3から突出するように台座2の段付 面3に取り付けられている。4はガイド板であり、一方の側辺は他方の側辺が台 座2の段付面3と対向するように台座2の頂面5に取り付けられている。6はキ ャリッジであり、台座2と平行に配置された案内軸7に移動可能に嵌め合わされ ている。このキャリッジ6には検出ヘッド8およびガイド9が一体化されている 。検出ヘッド8は台座2の段付面3から突出する磁歪線1の側辺を両面から非接 触状態で挟むようにコ字形に形成されている。ガイド9は台座2の頂面5から突 出するガイド板4の側辺を両面から挟んだ状態で摺動するようにコ字形に形成さ れている。 The applicant of the present invention, as a means for obtaining a position feedback signal corresponding to the position of a movable part such as a pointer or a recording pen in a non-contact manner, an ultrasonic wave propagating inside a magnetostrictive wire composed of a linear magnetostrictive material. An ultrasonic potentiometer using signals has been proposed (for example, Japanese Patent Publication No. 60-55020) and put into practical use. FIG. 3 is a sectional configuration explanatory view showing an example of the periphery of a detection head of such a conventional ultrasonic potentiometer. In the figure, 1 is a magnetostrictive wire formed in a ribbon shape, and one side is attached to the stepped surface 3 of the pedestal 2 so that the other side protrudes from the stepped surface 3 of the pedestal 2. . Reference numeral 4 denotes a guide plate, which is attached to the top surface 5 of the pedestal 2 so that one side of the guide plate faces the stepped surface 3 of the pedestal 2. A carriage 6 is movably fitted to a guide shaft 7 arranged parallel to the pedestal 2. A detection head 8 and a guide 9 are integrated with the carriage 6. The detection head 8 is formed in a U-shape so as to sandwich the side of the magnetostrictive wire 1 protruding from the stepped surface 3 of the pedestal 2 from both sides in a non-contact state. The guide 9 is formed in a U shape so that it slides while sandwiching the sides of the guide plate 4 protruding from the top surface 5 of the pedestal 2 from both sides.

【0003】 このような構成において、超音波ポテンショメ―タの測定精度を確保するため には磁歪線1と検出ヘッド8の相対距離を一定に保つ必要がある。 これは、図4に示すように、出力波高値のレベルに基づいて超音波伝搬遅延時 間を測定することによってキャリッジ6の位置を求めているので、相対距離の変 動に伴って出力波高値が変動すると超音波伝搬遅延時間の計測にΔtの誤差を生 じるからである。In such a configuration, in order to secure the measurement accuracy of the ultrasonic potentiometer, it is necessary to keep the relative distance between the magnetostrictive wire 1 and the detection head 8 constant. This is because the position of the carriage 6 is obtained by measuring the ultrasonic wave propagation delay time based on the level of the output peak value as shown in FIG. 4, so that the output peak value changes as the relative distance changes. This is because the fluctuation of Δ causes an error of Δt in the measurement of the ultrasonic propagation delay time.

【0004】[0004]

【考案が解決しようとする課題】[Problems to be solved by the device]

しかし、従来のこのような構成では、台座2の段付部3と頂面5の平行度と平 面度、各部の位置関係、寸法誤差、ガイド板4とガイド9の挾持部分のガタなど の影響を受けることから磁歪線1と検出ヘッド8の相対距離を一定にすることは 困難であり、安定で高精度の位置信号を得ることはできなかった。 However, in such a conventional configuration, the parallelism and flatness of the stepped portion 3 and the top surface 5 of the pedestal 2, the positional relationship of each portion, the dimensional error, the play of the sandwiched portion of the guide plate 4 and the guide 9, etc. Since it is affected, it is difficult to keep the relative distance between the magnetostrictive wire 1 and the detection head 8 constant, and a stable and highly accurate position signal cannot be obtained.

【0005】 本考案は、このような問題点に着目したものであり、その目的は、比較的簡単 な構成で磁歪線と検出ヘッドの間隔を一定に保つことができる超音波ポテンショ メ―タを提供することにある。The present invention focuses on such a problem, and an object thereof is to provide an ultrasonic potentiometer capable of keeping a constant gap between a magnetostrictive wire and a detection head with a relatively simple structure. To provide.

【0006】[0006]

【課題を解決するための手段】[Means for Solving the Problems]

このような目的を達成する本考案は、 シ―ト状に形成された磁歪線と、 磁歪線の長手方向に沿って磁歪線の両側に磁歪線と同一面になるように形成さ れたスライドシ―ト部材と、 磁歪線を伝搬する超音波信号を検出する検出ヘッドと、 平面の垂直方向および平面に軸を持つ回転方向の剛性は小さく、平面の水平方 向の剛性は大きく形成され、中央部分に磁歪線と対向するよう検出ヘッドが取り 付けられる板バネと、 この板バネを取り付けるためのロ字形のフレ―ムを有するキャリッジと、 板バネの各スライドシ―ト部材との対向部分に取り付けられるスライダと、 板バネを介してスライダをスライドシ―ト部材に押圧するようにキャリッジの フレ―ムを付勢する位置関係で磁歪線およびスライドシ―ト部材の長手方向に沿 って平行に配置され、キャリッジが移動可能に係合されるシャフトと、 板バネを介してスライダをスライドシ―ト部材に押圧するようにキャリッジの フレ―ムを付勢する位置関係で磁歪線およびスライドシ―ト部材の長手方向に沿 って平行に配置され、キャリッジが移動可能に係合されるガイド、 とで構成されたことを特徴とする。 The present invention which achieves such an object is a sheet-shaped magnetostrictive wire and slides formed on both sides of the magnetostrictive wire along the longitudinal direction of the magnetostrictive wire so as to be flush with the magnetostrictive wire. The sheet member, the detection head that detects the ultrasonic signal propagating through the magnetostrictive line, the rigidity in the vertical direction of the plane and the rotation direction having the axis in the plane are small, and the rigidity in the horizontal direction of the plane is large, A leaf spring to which the detection head is attached so as to face the magnetostrictive wire in the central portion, a carriage having a square frame for attaching the leaf spring, and the facing portion of each slide sheet member of the leaf spring. Along the longitudinal direction of the slider and the slider attached to the slide seat member so that the frame of the carriage is urged to press the slider against the slide seat member via the leaf spring. In parallel The shaft is placed so that the carriage is movably engaged with it, and the magnetostrictive line and the slide seat are in a positional relationship that biases the frame of the carriage so as to press the slider against the slide seat member via the leaf spring. A guide that is arranged in parallel along the longitudinal direction of the supporting member and that is movably engaged with the carriage.

【0007】[0007]

【作用】[Action]

キャリッジのフレ―ムに取り付けられた板バネはシャフトおよびガイドのフレ ―ムに対する位置関係とスライダの厚みによってたわみ、スライダをスライドシ ―ト部材に押圧する。 そして、検出ヘッドが取り付けられる板バネは、平面の垂直方向および平面に 軸を持つ回転方向の剛性は小さく、平面の水平方向の剛性は大きく形成されてい るので、キャリッジの移動方向に沿ってスライド面に凹凸があっても磁歪線と検 出ヘッドの相対的な位置関係は常に一定に保たれ、摩擦に伴うキャリッジと検出 ヘッドの相対位置のズレも極めて小さくなる。 The leaf spring attached to the frame of the carriage bends due to the positional relationship between the shaft and the guide with respect to the frame and the thickness of the slider, and presses the slider against the slide sheet member. The leaf spring to which the detection head is attached has low rigidity in the vertical direction of the plane and in the rotational direction having an axis in the plane, and high rigidity in the horizontal direction of the plane, so it slides along the carriage movement direction. Even if the surface has irregularities, the relative positional relationship between the magnetostrictive line and the detection head is always kept constant, and the displacement between the relative position of the carriage and the detection head due to friction is extremely small.

【0008】[0008]

【実施例】【Example】

以下、図面を用いて本考案の実施例を詳細に説明する。 図1は本考案の一実施例を示す斜視図、図2は図1の動作状態を示す断面図で ある。これら図において、10はシ―ト状に形成された磁歪線、11,12は磁 歪線10の長手方向に沿って磁歪線10の両側に磁歪線10と同一面になるよう に形成されたスライドシ―ト部材であり、これらは例えば電鋳材よりなる磁歪特 性の優れたNiシ―トを所定の形状にエッチングすることにより形成できる。こ の場合、磁歪線10とスライドシ―ト部材11,12は離散的に設けられた幅の 狭い複数の連結部13で結合されている。磁歪線10の一端はT字形に形成され ていて、この部分には励振用の圧電素子や励磁コイルなどが取り付けられるが図 示しない。14はスライドシ―ト部材11,12が取り付けられる台座であり、 磁歪線10と対向する中央部分には磁歪線10と台座14を空間的に離間させる ための溝15が設けられている。16は磁歪線を伝搬する超音波信号を検出する 検出ヘッドである。17は板バネであり、平面の垂直方向および平面に軸を持つ 回転方向の剛性は小さく、平面の水平方向の剛性は大きく形成されていて、中央 部分には磁歪線10と対向するよう検出ヘッド16が取り付けられる。18はキ ャリッジであり、板バネ17を取り付けるためのロ字形のフレ―ム19が一体化 されている。20,21はスライダであり、板バネ17の各スライドシ―ト部材 11,12との対向部分に取り付けられている。22はシャフト、23はガイド であり、これらは板バネ17を介してスライダ20,21をスライドシ―ト部材 11,12に押圧するようにキャリッジ18のフレ―ム19を付勢する位置関係 で磁歪線10およびスライドシ―ト部材11,12の長手方向に沿って平行に配 置されていて、シャフト22はキャリッジ18にが移動可能に挿入され、ガイド 23はフレ―ム19の上面に係合されている。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 1 is a perspective view showing an embodiment of the present invention, and FIG. 2 is a sectional view showing an operating state of FIG. In these figures, 10 is a sheet-shaped magnetostrictive line, and 11 and 12 are formed so as to be flush with the magnetostrictive line 10 on both sides of the magnetostrictive line 10 along the longitudinal direction of the magnetostrictive line 10. These are slide sheet members, which can be formed, for example, by etching a Ni sheet, which is made of an electroformed material and has excellent magnetostrictive characteristics, into a predetermined shape. In this case, the magnetostrictive wire 10 and the slide sheet members 11 and 12 are connected by a plurality of discretely provided narrow connecting portions 13. One end of the magnetostrictive wire 10 is formed in a T shape, and a piezoelectric element for excitation or an exciting coil is attached to this portion, but it is not shown. Reference numeral 14 denotes a pedestal to which the slide sheet members 11 and 12 are attached, and a groove 15 for spatially separating the magnetostrictive wire 10 and the pedestal 14 is provided in a central portion facing the magnetostrictive wire 10. Reference numeral 16 is a detection head that detects an ultrasonic signal propagating through the magnetostrictive line. Reference numeral 17 is a leaf spring, which has vertical rigidity in the plane and an axis in the plane, has low rigidity in the rotational direction, and has large rigidity in the horizontal direction, and the detection head is arranged so as to face the magnetostrictive line 10 in the central portion. 16 is attached. Reference numeral 18 is a carriage, which is integrated with a square frame 19 for mounting the leaf spring 17. Reference numerals 20 and 21 denote sliders, which are attached to the portions of the leaf spring 17 facing the slide sheet members 11 and 12, respectively. Reference numeral 22 is a shaft, and 23 is a guide. The magnetostrictive wire 10 and the slide sheet members 11 and 12 are arranged in parallel along the longitudinal direction, the shaft 22 is movably inserted into the carriage 18, and the guide 23 is attached to the upper surface of the frame 19. Have been combined.

【0009】 このような構成において、キャリッジ18に取り付けられた板バネ17はシャ フト22およびガイド23によってスライダ20,21をスライドシ―ト部材1 1,12に押圧するように付勢される。そして、板バネ17は、平面の垂直方向 および平面に軸を持つ回転方向の剛性は小さく、平面の水平方向の剛性は大きく 形成されている。In such a configuration, the leaf spring 17 attached to the carriage 18 is biased by the shaft 22 and the guide 23 so as to press the sliders 20 and 21 against the slide sheet members 11 and 12. The leaf spring 17 is formed to have low rigidity in the vertical direction of the plane and in the rotation direction having an axis in the plane, and high rigidity in the horizontal direction of the plane.

【0010】 これにより、台座14のスライドシ―ト部材11,12の取り付け面の長手方 向に沿って高低差がある場合、磁歪線10はスライドシ―ト部材11,12と連 結部13で連結されているのでスライドシ―ト部材11,12の取り付け面と同 様に高低変化し、検出ヘッド16も板バネ17の垂直方向の剛性が小さいことに よってによってスライドシ―ト部材11,12の取り付け面の高低変化に追従し て変化することになり、磁歪線10と検出ヘッド16の間隔はスライダ20,2 1の厚みに従ってキャリッジ18の移動位置に拘らず常に一定に保たれる。 また、位置バネ17は垂直方向に対しては剛性が小さく水平方向に対しては剛 性が大きいことから摺動面で発生する摩擦力は小さくなり、摩擦に伴うキャリッ ジ18と検出ヘッド16の相対的な位置ズレもほとんど生じることはなく、従来 に比べて組立てが容易になるとともに高精度の位置検出信号が得られる。As a result, when there is a height difference along the longitudinal direction of the mounting surface of the slide sheet members 11 and 12 of the pedestal 14, the magnetostrictive wire 10 is connected to the slide sheet members 11 and 12 and the connecting portion 13 thereof. Since they are connected with each other, the height changes similarly to the mounting surfaces of the slide sheet members 11 and 12, and the detection head 16 also has a small rigidity in the vertical direction of the leaf springs 17, so that The distance between the magnetostrictive line 10 and the detection head 16 is always kept constant regardless of the movement position of the carriage 18 according to the thickness of the sliders 20 and 21. Further, since the position spring 17 has a small rigidity in the vertical direction and a large rigidity in the horizontal direction, the frictional force generated on the sliding surface becomes small, and the carriage 18 and the detection head 16 associated with the friction are reduced. Relative positional displacement does not occur, assembly is easier than before, and highly accurate position detection signals can be obtained.

【0011】[0011]

【考案の効果】[Effect of device]

以上説明したように、本考案によれば、比較的簡単な構成で磁歪線と検出ヘッ ドの間隔を一定に保つことができる超音波ポテンショメ―タを実現することがで きる。 As described above, according to the present invention, it is possible to realize an ultrasonic potentiometer capable of maintaining a constant gap between the magnetostrictive line and the detection head with a relatively simple structure.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.

【図2】図2は図1の動作状態を示す断面図である。FIG. 2 is a cross-sectional view showing an operating state of FIG.

【図3】従来の超音波ポテンショメ―タの一例を示す構
成説明図である。
FIG. 3 is a structural explanatory view showing an example of a conventional ultrasonic potentiometer.

【図4】図3の動作説明図である。FIG. 4 is an operation explanatory diagram of FIG. 3;

【符号の説明】[Explanation of symbols]

10 磁歪線 11,12 スライドシ―ト部材 13 連結部 14 台座 15 溝 16 検出ヘッド 17 板バネ 18 キャリッジ 19 フレ―ム 20,21 スライダ 22 シャフト 23 ガイド 10 Magnetostrictive wire 11, 12 Slide sheet member 13 Connection part 14 Pedestal 15 Groove 16 Detection head 17 Leaf spring 18 Carriage 19 Frame 20, 21 Slider 22 Shaft 23 Guide

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 シ―ト状に形成された磁歪線と、 磁歪線の長手方向に沿って磁歪線の両側に磁歪線と同一
面になるように形成されたスライドシ―ト部材と、 磁歪線を伝搬する超音波信号を検出する検出ヘッドと、 平面の垂直方向および平面に軸を持つ回転方向の剛性は
小さく、平面の水平方向の剛性は大きく形成され、中央
部分に磁歪線と対向するよう検出ヘッドが取り付けられ
る板バネと、 この板バネを取り付けるためのロ字形のフレ―ムを有す
るキャリッジと、 板バネの各スライドシ―ト部材との対向部分に取り付け
られるスライダと、 板バネを介してスライダをスライドシ―ト部材に押圧す
るようにキャリッジのフレ―ムを付勢する位置関係で磁
歪線およびスライドシ―ト部材の長手方向に沿って平行
に配置され、キャリッジが移動可能に係合されるシャフ
トと、 板バネを介してスライダをスライドシ―ト部材に押圧す
るようにキャリッジのフレ―ムを付勢する位置関係で磁
歪線およびスライドシ―ト部材の長手方向に沿って平行
に配置され、キャリッジが移動可能に係合されるガイ
ド、 とで構成されたことを特徴とする超音波ポテンショメ―
タ。
1. A magnetostrictive wire formed in a sheet shape, and a slide sheet member formed on both sides of the magnetostrictive wire along the longitudinal direction of the magnetostrictive wire so as to be flush with the magnetostrictive wire, The detection head that detects the ultrasonic signal propagating through the wire and the rigidity in the direction perpendicular to the plane and in the rotation direction having an axis in the plane are small, and the rigidity in the horizontal direction of the plane is large, and the magnetostrictive wire faces the central portion. A leaf spring to which the detection head is attached, a carriage having a square frame for attaching the leaf spring, a slider attached to a portion of the leaf spring facing each slide sheet member, and a leaf spring. The slider is placed in parallel with the magnetostrictive line and the longitudinal direction of the slide sheet member in a positional relationship of energizing the frame of the carriage so as to press the slider against the slide sheet member, and the carriage moves. The shaft that can be engaged with the magnetostrictive wire and the longitudinal direction of the slide sheet member in a positional relationship that urges the frame of the carriage so as to press the slider against the slide sheet member via the leaf spring. Ultrasonic potentiometer, characterized in that the guides are arranged parallel to each other, and the guides are movably engaged with the carriage.
Ta.
JP1991007113U 1991-02-19 1991-02-19 Ultrasonic potentiometer Expired - Fee Related JP2556380Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991007113U JP2556380Y2 (en) 1991-02-19 1991-02-19 Ultrasonic potentiometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991007113U JP2556380Y2 (en) 1991-02-19 1991-02-19 Ultrasonic potentiometer

Publications (2)

Publication Number Publication Date
JPH0633009U true JPH0633009U (en) 1994-04-28
JP2556380Y2 JP2556380Y2 (en) 1997-12-03

Family

ID=11657038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991007113U Expired - Fee Related JP2556380Y2 (en) 1991-02-19 1991-02-19 Ultrasonic potentiometer

Country Status (1)

Country Link
JP (1) JP2556380Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023012628A (en) * 2021-07-14 2023-01-26 学校法人同志社 Non-contact sensor device and non-contact sensing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62160321U (en) * 1986-03-31 1987-10-12
JPH01179217U (en) * 1988-06-09 1989-12-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62160321U (en) * 1986-03-31 1987-10-12
JPH01179217U (en) * 1988-06-09 1989-12-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023012628A (en) * 2021-07-14 2023-01-26 学校法人同志社 Non-contact sensor device and non-contact sensing method

Also Published As

Publication number Publication date
JP2556380Y2 (en) 1997-12-03

Similar Documents

Publication Publication Date Title
JP4434452B2 (en) Measuring device
US5675454A (en) Floating type magnetic head apparatus
JP2009069154A (en) Measuring device
JPH0633009U (en) Ultrasonic potentiometer
JPH0212564Y2 (en)
JPS6156901A (en) Slide gage
WO2016104483A1 (en) Seating detection device
JP5053039B2 (en) Position detection device
JPH04258711A (en) Scale device
JP3609271B2 (en) Displacement measuring device
JP4381583B2 (en) Scale device holding device
KR910006573B1 (en) Magnetic recording and playback device
JPH0641121Y2 (en) Measuring probe
JP2855039B2 (en) Metal sheet bending method and apparatus
JPH07253335A (en) Optical displacement sensor
JPH08145609A (en) Position detection device
CN222924799U (en) Rigid-flexible composite guiding device
CN121323488A (en) Closed-loop force control size measurement device and measurement method
JPH0421073Y2 (en)
JP2018078760A (en) Vibration wave motor and lens device having vibration wave motor
JP2007183129A (en) Hardness meter
JPH07107759A (en) Vibration wave linear motor
US4463395A (en) Support mechanism for a head lever of a cassette tape recorder
JP2673964B2 (en) Carriage device and disk device
JPH0894384A (en) Position detection head and manufacturing method thereof

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees