JPH06335111A - Magnetic levitation actuator - Google Patents
Magnetic levitation actuatorInfo
- Publication number
- JPH06335111A JPH06335111A JP14573193A JP14573193A JPH06335111A JP H06335111 A JPH06335111 A JP H06335111A JP 14573193 A JP14573193 A JP 14573193A JP 14573193 A JP14573193 A JP 14573193A JP H06335111 A JPH06335111 A JP H06335111A
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- levitation
- permanent magnet
- force
- moving body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
(57)【要約】
【構成】 固定側と移動体の間に浮上力と推進力を作用
させる磁気浮上アクチュエータにおいて、固定側に設け
た移動方向に伸びる導電体１１と、移動体３に設け、か
つ導電体１１に磁極面が空隙を介して対向する永久磁石
２４および永久磁石２４を回転させる駆動モータ２１と
を設けた浮上体２とを備えたものである。
【効果】 浮上の手段として磁石の強力な起磁力を利用
しているので、装置の重量当たりの浮上力が大きく、移
動体を移動する搬送装置を小形に構成することができ
る。
(57) [Summary] [Structure] In a magnetic levitation actuator that applies a levitation force and a propulsion force between a fixed side and a moving body, a conductor 11 extending in the moving direction provided on the fixed side and a moving body 3 are provided, In addition, the floating body 2 is provided with a permanent magnet 24 whose magnetic pole surface faces the conductor 11 with a gap and a drive motor 21 for rotating the permanent magnet 24. [Effect] Since the strong magnetomotive force of the magnet is used as the levitation means, the levitation force per unit weight of the device is large, and the conveying device for moving the moving body can be made compact.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、半導体製造装置などの
クリーンな環境や真空環境中で動作する磁気浮上アクチ
ュエータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic levitation actuator which operates in a clean environment such as a semiconductor manufacturing apparatus or a vacuum environment.
【０００２】[0002]
【従来の技術】従来、磁気浮上搬送装置などに使用され
ている磁気浮上アクチュエータは、移動方向に伸びるレ
ールに沿って磁性体からなるリニアモータの２次側とを
設け、可動部にはリニアモータの２次側に対向させてリ
ニアモータの１次側を設けるとともに浮上用電磁石を設
け、レールの下面に対してギャップを介して対向させた
ものがある（例えば、特開昭６０−９８８０３号）。し
かし、このような方式では、浮上力は電磁石、推進力は
リニアモータといったように、別々の独立した機構を備
える必要があり、装置全体が大きくなると共に複雑にな
るという問題があった。この問題を解決するものとし
て、レールに沿ってリニアインダクションモータの２次
側を設け、リニアインダクションモータの２次側に対向
してリニアインダクションモータの１次側を設けて可動
部に固定したものが開示されている（例えば、特開平４
−１０１６０３号）。これにより、リニアインダクショ
ンモータの１次側を３相交流で励磁すると、リニアイン
ダクションモータの２次側に渦電流を生じ、レールに対
して垂直方向に磁気反発力が、移動磁界の進行方向に推
進力がそれぞれ発生して、一組のリニアインダクション
モータにより、可動部が浮上力と推進力を得ることがで
きる。2. Description of the Related Art Conventionally, a magnetic levitation actuator used in a magnetic levitation transfer device is provided with a secondary side of a linear motor made of a magnetic material along a rail extending in the moving direction, and a linear motor is provided in a movable part. The primary side of the linear motor is provided to face the secondary side of the rail and the levitation electromagnet is provided to face the lower surface of the rail via a gap (for example, JP-A-60-98803). . However, in such a system, it is necessary to provide separate independent mechanisms such as an electromagnet for the levitation force and a linear motor for the propulsion force, and there is a problem that the entire device becomes large and complicated. To solve this problem, a secondary side of the linear induction motor is provided along the rail, and a primary side of the linear induction motor is provided so as to face the secondary side of the linear induction motor and is fixed to the movable part. It is disclosed (for example, Japanese Patent Laid-Open No.
No. 101603). As a result, when the primary side of the linear induction motor is excited with a three-phase alternating current, an eddy current is generated on the secondary side of the linear induction motor, and magnetic repulsive force in the direction perpendicular to the rail propels it in the traveling direction of the moving magnetic field. Forces are generated respectively, and the movable portion can obtain the levitation force and the propulsion force by the pair of linear induction motors.
【０００３】[0003]
【発明が解決しようとする課題】ところが、従来技術の
特開昭６０−９８８０３号では、浮上・案内力としては
本来不安定な磁気吸引力を利用するため、複雑で繊細な
制御を必要とする。また、特開平４−１０１６０３号で
は、推進力を発生させるための有効電力と反発浮上力を
得る無効電力とを１次側の電機子巻線から供給する必要
があり、一般に力率が非常に低いモータとなって、所要
の推進力を得るのにモータ容量が大きくなると共に、電
源装置も大きくなるという問題があった。さらに、後者
の場合、可動部の速度が遅くなると一般に浮上力も低下
するため、低速時に作用する補助の支持装置を必要とす
るなどの問題があった。本発明は、推進力分と若干の損
失分の和の有効電力のみを供給する最小限の容量によっ
て、可動部の速度に影響を受けずに、推進力と本質的に
安定な誘導反発浮上力を複雑な制御を必要としないで得
る磁気浮上アクチュエータを提供することを目的とする
ものである。However, in Japanese Patent Application Laid-Open No. 60-98803, a magnetic attraction force that is originally unstable is used as the levitation / guide force, and therefore complicated and delicate control is required. . Further, in Japanese Patent Laid-Open No. 4-101603, it is necessary to supply active power for generating propulsive force and reactive power for obtaining repulsive levitation force from the armature winding on the primary side. There is a problem that the motor capacity becomes low and the motor capacity becomes large to obtain a required propulsive force, and the power supply device becomes large. Further, in the latter case, when the speed of the movable part becomes slow, the levitation force generally decreases, so that there is a problem that an auxiliary supporting device that operates at low speed is required. The present invention provides a propulsive force and an essentially stable induced repulsive levitation force without being affected by the speed of a moving part, with a minimum capacity that supplies only active power that is the sum of propulsive force and some loss. It is an object of the present invention to provide a magnetic levitation actuator that can obtain a magnetic field without requiring complicated control.
【０００４】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明は、固定側と移動体の間に浮上力と推進力を
作用させる磁気浮上アクチュエータにおいて、前記固定
側または移動体に設けた移動方向に伸びる導電体と、前
記移動体または固定側に設け、かつ前記導電体に磁極面
が空隙を介して対向する永久磁石および前記永久磁石を
回転させる回転駆動機構とを設けた浮上体とを備えたも
のである。In order to solve the above problems, the present invention provides a magnetic levitation actuator that applies a levitation force and a propulsive force between a fixed side and a moving body, and is provided on the fixed side or the moving body. A floating body provided with a conductor extending in the moving direction, a permanent magnet provided on the movable body or the fixed side, and having a magnetic pole surface facing the conductor via a gap and a rotary drive mechanism for rotating the permanent magnet. It is equipped with.
【０００５】[0005]
【作用】上記手段により、導電体に対して永久磁石を移
動すると、永久磁石が対向する導電体板に磁石磁界の時
間的変化に応じた誘導起電力が発生する。永久磁石の回
転速度が小さい時は、誘導起電力が小さいために、それ
によって生じる渦電流も小さい。また、誘導起電力とこ
れによって生じる渦電流の時間的な位相遅れは小さいた
めに、渦電流と永久磁石の磁極の位置は、空間的に９０
度近くまでずれたものとなり、作用力としては、推進力
成分が大きく、浮上力分は小さい。永久磁石の回転速度
が大きくなると、誘導起電力の大きさと周波数が増加す
る。周波数の増加と共に導電体のインピーダンスが増加
し、リアクタンス成分が支配的になると、誘導起電力に
対する渦電流の増加現象は飽和する。この状態では、誘
導起電力と渦電流の時間的な位相差がほぼ９０度とな
り、渦電流と永久磁石の磁極との空間的な位相差はほと
んどなくなる。すなわち、両者間に大きな反発浮上力を
発生させることができる。一方、導電体とはいえども抵
抗は零ではないために、全永久磁石磁極面が導電体面に
平行かつ均一に対向していると、浮上力のほかに永久磁
石の回転方向に沿った回転力が発生する。したがって、
永久磁石の回転面積の約半分以下を導電体と対向させ
る、または永久磁石回転面を導電体面に傾斜をつけて設
置し、空隙差を設けることによって、一方向に移動する
推進力を得るものである。When the permanent magnet is moved with respect to the conductor by the above means, an induced electromotive force is generated in the conductor plate facing the permanent magnet according to the temporal change of the magnetic field of the magnet. When the rotating speed of the permanent magnet is low, the induced electromotive force is small, and the eddy current generated thereby is also small. In addition, since the temporal phase delay of the induced electromotive force and the eddy current generated thereby is small, the positions of the eddy current and the magnetic poles of the permanent magnet are 90 degrees spatially.
The propulsive force component is large and the levitation force component is small as the acting force. As the rotation speed of the permanent magnet increases, the magnitude and frequency of the induced electromotive force increase. When the impedance of the conductor increases with the increase of the frequency and the reactance component becomes dominant, the increase phenomenon of the eddy current with respect to the induced electromotive force is saturated. In this state, the temporal phase difference between the induced electromotive force and the eddy current becomes approximately 90 degrees, and the spatial phase difference between the eddy current and the magnetic pole of the permanent magnet becomes almost zero. That is, a large repulsive levitation force can be generated between them. On the other hand, even though it is a conductor, its resistance is not zero, so if all the permanent magnet pole faces are parallel and evenly opposed to the conductor face, in addition to the levitation force, the rotational force along the direction of rotation of the permanent magnet Occurs. Therefore,
A propulsive force that moves in one direction can be obtained by facing about half or less of the rotating area of the permanent magnet with the conductor, or by installing the rotating surface of the permanent magnet with an inclination on the conductor surface and providing a gap difference. is there.
【０００６】[0006]
【実施例】以下、本発明を図に示す実施例について説明
する。図１（ａ）は本発明の浮上構造を示す第１の実施
例の側断面図、（ｂ）は下面図である。図において、１
は平板状の上面を有し移動方向に伸びるレールで、上面
に導電体１１を設けてある。２は浮上体で、駆動モータ
２１によって回転される回転軸２２に固定した磁性体か
らなる支持プレート２３と、支持プレート２３に固定し
た２個の永久磁石２４とから構成されている。永久磁石
２４は支持プレート２３に垂直な方向に磁化され、磁極
面が導電体１１と空隙を介して対向するようにしてあ
る。永久磁石２４を回転すると、前記作用の項で説明し
た原理によって、永久磁石２４と導電体１１との間に反
発力が発生し、浮上体２が浮上する。このとき、駆動モ
ータ２１を固定したフレーム２５は、浮上方向（図中、
Ｙ方向）には自由に移動できるようにし、回転反力によ
って回転されないように回転方向には拘束しておく必要
がある。浮上力と推進力の大きさは、永久磁石２４と導
電体１１との間の位置関係、導電体１１の導電率と厚
み、およびモータ回転速度を適当に選択することによっ
て調整できる。なお、上記実施例は、永久磁石２４を支
持プレート２３に２個設けたものについて説明したが、
永久磁石２４の個数や磁極配列法に制限はなく、永久磁
石２４による磁束が空間的に回転方向に変化を持つ配置
であればよい。また、永久磁石磁極面と導電体１１の面
とは平行でない方がよい場合がある。以上は、永久磁石
２４の回転力を駆動モータ２１によって得ているが、エ
ンジン、空気圧等の他の回転手段によっても、もちろん
実現できる。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1A is a side sectional view of a first embodiment showing a floating structure of the present invention, and FIG. 1B is a bottom view. In the figure, 1
Is a rail having a flat plate-shaped upper surface and extending in the moving direction, and a conductor 11 is provided on the upper surface. Reference numeral 2 denotes a levitation body, which is composed of a support plate 23 made of a magnetic material fixed to a rotating shaft 22 rotated by a drive motor 21, and two permanent magnets 24 fixed to the support plate 23. The permanent magnet 24 is magnetized in a direction perpendicular to the support plate 23 so that the magnetic pole surface faces the conductor 11 with a gap. When the permanent magnet 24 is rotated, a repulsive force is generated between the permanent magnet 24 and the conductor 11 according to the principle described in the above-mentioned action, and the levitation body 2 floats. At this time, the frame 25 to which the drive motor 21 is fixed is moved in the floating direction (in the figure,
It is necessary to allow free movement in the (Y direction) and restrain in the rotation direction so as not to rotate by the reaction force. The magnitudes of the levitation force and the propulsion force can be adjusted by appropriately selecting the positional relationship between the permanent magnet 24 and the conductor 11, the conductivity and thickness of the conductor 11, and the motor rotation speed. In addition, in the above-described embodiment, the description has been made on the case where the two permanent magnets 24 are provided on the support plate 23.
There is no limitation on the number of permanent magnets 24 or the magnetic pole arrangement method, and any arrangement may be used as long as the magnetic flux generated by the permanent magnets 24 changes spatially in the rotational direction. In some cases, it is preferable that the magnetic pole surface of the permanent magnet and the surface of the conductor 11 are not parallel. In the above, the rotational force of the permanent magnet 24 is obtained by the drive motor 21, but it can of course be realized by other rotating means such as an engine and air pressure.
【０００７】図２は、浮上体２の第２の実施例を示す側
断面図で、図１に示した永久磁石２４を回転する駆動モ
ータ２１を回転軸２２に直結する代わりに、永久磁石２
４の磁路内に電機子巻線を配置して、永久磁石形同期電
動機動作をも行わせる方式である。すなわち、永久磁石
２４と導電体１１との間の空隙に、絶縁円板２６をフレ
ーム２５に固定し、回転軸２２に軸受２７を介して支持
し、絶縁円板２６には永久磁石２４に対向させて３相の
電機子巻線２８を円環状に配置し、電機子巻線２８を励
磁することにより回転磁界を生じさせて、永久磁石２４
が回転軸２２とともに回転するようにしたものである。
２９は回転軸２２に直結した回転位置検出器で、永久磁
石２４の回転位置を検出して、電機子巻線２８の電機子
電流を制御し、永久磁石２４の回転速度を制御するもの
である。図３は第３の実施例を示す側断面図で、永久磁
石２４を側面で支持プレート２３に固定し、永久磁石２
４の上面磁極に対向するフレーム２５の下面に設けた磁
性体からなる電機子鉄心３３の溝の中に多相の電機子巻
線２８を円環状に配置し、永久磁石２４を回転するよう
にしたものである。この場合、電機子巻線２８に直接作
用する力を小さくできる。なお、永久磁石２４の回転速
度と永久磁石２４が回転することによって生じる推進力
と浮上力との関係は、図９に示すように、浮上力はある
回転速度以上になるとほぼ一定となり、推進力は低回転
速度で大きくなるが、次第に低減することが分かってい
る。このことから電機子電流を制御することにより、永
久磁石２４の回転速度を制御し、浮上体２の浮上状態と
移動速度を決めることができる。図４（ａ）は浮上体２
のフレーム２５と一体の移動体３に複数個の浮上体２を
設けた第４の実施例を示す正面図、（ｂ），（ｃ）はそ
の平面図で、４組の浮上体２（２Ａ，２Ｂ，２Ｃ，２
Ｄ）をレール１の上方に設け、移動方向および移動方向
に対して垂直方向に並列させて各浮上体２の永久磁石２
４が回転する円の約半分以下の面積が導電体１１に対向
するように配置し、移動体３に固定してある。いま、浮
上体２Ａ，２Ｂの永久磁石２４の導電体１１に対向する
部分が同じ方向に移動するように回転し、浮上体２Ｃ，
２Ｄの永久磁石２４の導電体１１に対向する部分が浮上
体２Ａ，２Ｂと反対方向に回転すると、図４（ｂ）に示
すように、浮上体２Ａ，２Ｂと浮上体２Ｃ，２Ｄの回転
反力が互いに打ち消しあって移動せず、その位置で浮上
する。浮上体２Ａ，２Ｂ，２Ｃ，２Ｄの永久磁石２４の
導電体１１に対向する部分が同じ方向に移動するように
回転すると、図４（ｃ）に示すように、回転反力による
推力が一定の方向に揃うので、移動体３が一方向に移動
する。なお、図５に第５の実施例として示すように、２
組の浮上体２Ａ，２Ｂを使用しても同じ効果が得られ
る。FIG. 2 is a side sectional view showing a second embodiment of the levitation body 2. Instead of directly connecting the drive motor 21 for rotating the permanent magnet 24 shown in FIG.
4 is a system in which an armature winding is arranged in the magnetic path of No. 4 so that the permanent magnet type synchronous motor also operates. That is, the insulating disc 26 is fixed to the frame 25 in the gap between the permanent magnet 24 and the conductor 11, and is supported by the rotating shaft 22 via the bearing 27. The insulating disc 26 faces the permanent magnet 24. Then, the three-phase armature windings 28 are arranged in an annular shape, and a rotating magnetic field is generated by exciting the armature windings 28 to generate the permanent magnet 24.
Is adapted to rotate together with the rotary shaft 22.
Reference numeral 29 is a rotational position detector directly connected to the rotary shaft 22, which detects the rotational position of the permanent magnet 24, controls the armature current of the armature winding 28, and controls the rotational speed of the permanent magnet 24. . FIG. 3 is a side sectional view showing a third embodiment, in which the permanent magnet 24 is fixed to the support plate 23 at the side surface thereof.
The multi-phase armature winding 28 is annularly arranged in the groove of the armature iron core 33 made of a magnetic material provided on the lower surface of the frame 25 facing the upper surface magnetic pole of No. 4, and the permanent magnet 24 is rotated. It was done. In this case, the force directly acting on the armature winding 28 can be reduced. As shown in FIG. 9, the relationship between the rotational speed of the permanent magnet 24 and the propulsive force generated by the rotation of the permanent magnet 24 and the levitation force becomes almost constant when the levitation force exceeds a certain rotational speed. Has been found to increase at low rotation speeds, but gradually decreases. From this, by controlling the armature current, the rotation speed of the permanent magnet 24 can be controlled, and the floating state and the moving speed of the levitation body 2 can be determined. FIG. 4A shows the floating body 2.
A front view showing a fourth embodiment in which a plurality of levitation bodies 2 are provided on a moving body 3 which is integrated with a frame 25 of FIG. 4, and (b) and (c) are plan views thereof showing four sets of levitation bodies 2 (2A). , 2B, 2C, 2
D) is provided above the rail 1 and is arranged in parallel in the direction of movement and in the direction perpendicular to the direction of movement, and the permanent magnets 2 of each levitation body 2 are provided.
It is arranged so that an area of about half or less of a circle in which 4 rotates is opposed to the conductor 11 and is fixed to the moving body 3. Now, the portions of the levitation bodies 2A and 2B facing the conductor 11 of the permanent magnets 24 are rotated so as to move in the same direction, and the levitation bodies 2C and 2C are rotated.
When the portion of the 2D permanent magnet 24 facing the conductor 11 rotates in the opposite direction to the levitation bodies 2A and 2B, as shown in FIG. 4 (b), the rotation deviates between the levitation bodies 2A and 2B and the levitation bodies 2C and 2D. The forces counteract each other and do not move, but rise at that position. When the portions of the permanent magnets 24 of the levitation bodies 2A, 2B, 2C, and 2D facing the conductor 11 rotate so as to move in the same direction, as shown in FIG. 4C, the thrust due to the rotational reaction force is constant. Since they are aligned in the same direction, the moving body 3 moves in one direction. In addition, as shown as a fifth embodiment in FIG.
The same effect can be obtained by using a pair of floating bodies 2A and 2B.
【０００８】図６（ａ）は、導電体１１を移動体３の両
側に２本設けた第６の実施例を示す平面図で、（ｂ）は
その正面図である。図６（ｃ）は導電体１１につば部１
２を設けた場合の正面図で、横方向の案内力を強めて浮
上体２が導電体１１から外れるのを防ぐようにしたもの
である。図６（ｄ）は２本の導電体１１の間にリニア形
の電機子巻線１３を設けて、浮上体２の電機子巻線２８
をなくしたものである。図７（ａ）は、導電体１１の平
面に対向する各浮上体２に傾き調整機構４を設けて、各
浮上体を独立して傾けるようにした第７の実施例の平面
図で、（ｂ）はその正面図である。この場合、浮上体２
の傾きと永久磁石２４の回転速度とをそれぞれ独立して
制御することによって、移動体３を浮上させながら前
後、左右の任意の方向に移動させることができる。図８
（ａ）は、以上に述べた導電体１１を固定側に設けたも
のと反対に、導電体３１を移動体３に設け、浮上体２を
固定側に設けた場合の第８の実施例を示す平面図、
（ｂ）はその正面図である。この場合、複数個の浮上体
２を移動方向に配列し、移動体３には浮上体２に対向す
る導電体３１を設けて、移動体３を浮上させながら浮上
体２の配列方向に移動体３を移動させるものである。図
８（ｃ）は、移動体３につば部３２を設けて、横方向の
案内力を強め、移動体３が浮上体２から外れるのを防ぐ
ようにした場合の第９の実施例を示す正面図である。図
８（ｄ）は、浮上体２を傾斜して設置した場合の第１０
の実施例を示す正面図で、空隙の広い部分では推進力が
弱く、空隙の小さい部分は推進力が強くなることを利用
し、浮上体２と導電体３１との間の空隙長を変化させ、
移動方向を特定するようにしたものである。FIG. 6A is a plan view showing a sixth embodiment in which two conductors 11 are provided on both sides of the moving body 3, and FIG. 6B is a front view thereof. FIG. 6C shows the conductor 11 and the collar portion 1.
2 is a front view in the case where 2 is provided, in which a lateral guiding force is strengthened to prevent the floating body 2 from coming off the conductor 11. In FIG. 6D, the linear armature winding 13 is provided between the two conductors 11, and the armature winding 28 of the levitation body 2 is provided.
Is lost. FIG. 7A is a plan view of a seventh embodiment in which each levitation body 2 facing the plane of the conductor 11 is provided with an inclination adjusting mechanism 4 so that each levitation body is independently inclined. b) is a front view thereof. In this case, the floating body 2
By independently controlling the tilt of the moving body 3 and the rotation speed of the permanent magnet 24, it is possible to move the moving body 3 in an arbitrary direction in the front-rear direction and the left-right direction while levitating. Figure 8
(A) shows an eighth embodiment in which the conductor 31 is provided on the movable body 3 and the levitation body 2 is provided on the fixed side, contrary to the above-described conductor 11 provided on the fixed side. The plan view,
(B) is the front view. In this case, a plurality of levitation bodies 2 are arranged in the moving direction, a conductor 31 facing the levitation body 2 is provided on the movement body 3, and the movement bodies are arranged in the arranging direction of the levitation bodies 2 while levitating the movement body 3. 3 is to be moved. FIG. 8C shows a ninth embodiment in which the movable body 3 is provided with the flange portion 32 to strengthen the lateral guiding force and prevent the movable body 3 from coming off the floating body 2. It is a front view. FIG. 8D shows the tenth case when the levitation body 2 is installed at an inclination.
In the front view showing the embodiment of the above, by utilizing the fact that the propulsive force is weak in the wide gap part and the propulsive force is strong in the small gap part, the gap length between the levitation body 2 and the conductor 31 is changed. ,
The movement direction is specified.
【０００９】[0009]
【発明の効果】以上述べたように、本発明によれば、誘
導電動機の電機子巻線による回転磁界の代替として、強
力な起磁力を有する永久磁石を回転させているので、装
置の重量当たりの浮上力が大きく、移動体を移動する搬
送装置を小形に構成することができる。また、軌道精度
を要しない比較的大きなギャップでの浮上が容易であ
り、これに伴う力率低下をもたらさないので、アクチュ
エータ自身の容量や駆動電源容量を必要最小限に抑える
ことができる。さらに、浮上・推進用の永久磁石の磁界
を永久磁石自身の回転用の磁界としても利用すると、多
相電機子巻線だけを付加することにより、同期モータが
構成でき、より一層の装置の小形軽量化が図れる。ま
た、停止を含む移動速度に影響されることがなく、移動
体を浮上させることができ、本質的に安定な誘導反発力
による浮上なので、軌道に対して移動体を上面に配置す
るだけの構成の単純化と共に、浮上体の組み合わせや導
電体形状によって移動体の動きの自由度が大きい搬送シ
ステムを構成できる効果がある。As described above, according to the present invention, the permanent magnet having a strong magnetomotive force is rotated as a substitute for the rotating magnetic field by the armature winding of the induction motor. The floating device has a large levitation force, and the transfer device for moving the moving body can be configured in a small size. Further, since it is easy to levitate in a relatively large gap that does not require orbital accuracy and the power factor is not lowered accordingly, the capacity of the actuator itself and the drive power supply capacity can be minimized. Furthermore, if the magnetic field of the levitation / propulsion permanent magnet is also used as the magnetic field for the rotation of the permanent magnet itself, a synchronous motor can be constructed by adding only the multiphase armature windings, and a more compact device Weight reduction can be achieved. In addition, the moving body can be levitated without being affected by the moving speed including the stop, and since it is levitated by an essentially stable induced repulsive force, the moving body is simply placed on the upper surface with respect to the track. In addition to the simplification, there is an effect that a transport system having a large degree of freedom of movement of a moving body can be configured by a combination of floating bodies and a shape of a conductor.
【図１】本発明の第１の実施例を示す（ａ）側断面図、
（ｂ）平面図。FIG. 1A is a side sectional view showing a first embodiment of the present invention,
(B) A plan view.
【図２】本発明の第２の実施例を示す側断面図。FIG. 2 is a side sectional view showing a second embodiment of the present invention.
【図３】本発明の第３の実施例を示す側断面図。FIG. 3 is a side sectional view showing a third embodiment of the present invention.
【図４】本発明の第４の実施例を示す（ａ）正断面図
（ｂ），（ｃ）平面図。FIG. 4 (a) is a front sectional view (b), (c) a plan view showing a fourth embodiment of the present invention.
【図５】本発明の第５の実施例を示す平面図。FIG. 5 is a plan view showing a fifth embodiment of the present invention.
【図６】本発明の第６の実施例を示す（ａ）平面図，
（ｂ），（ｃ），（ｄ）正面図。FIG. 6 (a) is a plan view showing a sixth embodiment of the present invention,
(B), (c), (d) front view.
【図７】本発明の第７の実施例を示す（ａ）平面図，
（ｂ）正面図。FIG. 7A is a plan view showing a seventh embodiment of the present invention,
(B) A front view.
【図８】本発明の第８の実施例を示す（ａ）平面図、
（ｂ）正面図，（ｃ）第９の実施例を示す正面図，
（ｄ）第１０の実施例を示す正面図FIG. 8A is a plan view showing an eighth embodiment of the present invention,
(B) front view, (c) front view showing a ninth embodiment,
(D) Front view showing the tenth embodiment
【図９】永久磁石の回転速度と浮上力および推進力との
関係を示す説明図。FIG. 9 is an explanatory diagram showing the relationship between the rotation speed of a permanent magnet and the levitation force and propulsion force.
１ レール、１１ 導電体、１２ つば部、１３、２８
電機子巻線、２ 浮上体、２１ 駆動モータ、２２
回転軸、２３ 支持プレート、２４ 永久磁石、２５
フレーム、２６ 絶縁円板、２７ 軸受、２９ 回転位
置検出器、３移動体、３１ 導電体、３２ つば部、３
３ 電機子鉄心、４ 傾き調整機構1 rail, 11 conductor, 12 collar part, 13, 28
Armature winding, 2 levitating body, 21 drive motor, 22
Rotating shaft, 23 support plate, 24 permanent magnet, 25
Frame, 26 insulating disk, 27 bearing, 29 rotational position detector, 3 moving body, 31 conductor, 32 flange part, 3
3 Armature iron core, 4 Tilt adjustment mechanism
フロントページの続き (72)発明者 中尾 隆義 福岡県北九州市八幡西区黒崎城石２番１号 株式会社安川電機内Front page continued (72) Inventor Takayoshi Nakao 2-1, Kurosaki Shiroishi, Hachiman Nishi-ku, Kitakyushu, Fukuoka Prefecture Yasukawa Electric Co., Ltd.
Claims (5)
作用させる磁気浮上アクチュエータにおいて、前記固定
側または移動体に設けた移動方向に伸びる導電体と、前
記移動体または固定側に設け、かつ前記導電体に磁極面
が空隙を介して対向する永久磁石および前記永久磁石を
回転させる回転駆動機構を備えたことを特徴とする磁気
浮上アクチュエータ。1. A magnetic levitation actuator for applying a levitation force and a propulsive force between a fixed side and a moving body, wherein a conductor extending in the moving direction, which is provided on the fixed side or the moving body, and the moving body or the fixed side. A magnetic levitation actuator, comprising: a permanent magnet having a magnetic pole surface opposed to the conductor via a gap, and a rotary drive mechanism for rotating the permanent magnet.
く円の面積のほぼ半分以下が対向するようにした請求項
１記載の磁気浮上アクチュエータ。2. The magnetic levitation actuator according to claim 1, wherein substantially half or less of an area of a circle drawn by rotating the permanent magnet faces the conductor.
前記導電体を固定側に設けた請求項１または２記載の磁
気浮上アクチュエータ3. The moving body is provided with a plurality of the floating bodies,
The magnetic levitation actuator according to claim 1, wherein the conductor is provided on the fixed side.
導電体を前記移動体に設けた請求項１から３までのいず
れか１項に記載の磁気浮上アクチュエータ。4. The magnetic levitation actuator according to claim 1, wherein the levitation body is arranged on the fixed side, and the conductor is provided on the moving body.
して傾動し得るようにした請求項１から４までのいずれ
か１項に記載の磁気浮上アクチュエータ。5. The magnetic levitation actuator according to claim 1, wherein the rotation shaft of the permanent magnet can be tilted with respect to the conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14573193A JP3271372B2 (en) | 1993-05-24 | 1993-05-24 | Magnetic levitation actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14573193A JP3271372B2 (en) | 1993-05-24 | 1993-05-24 | Magnetic levitation actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06335111A true JPH06335111A (en) | 1994-12-02 |
| JP3271372B2 JP3271372B2 (en) | 2002-04-02 |
Family
ID=15391844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14573193A Expired - Fee Related JP3271372B2 (en) | 1993-05-24 | 1993-05-24 | Magnetic levitation actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3271372B2 (en) |
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