JPH0634346A - Surface evaluation device - Google Patents
Surface evaluation deviceInfo
- Publication number
- JPH0634346A JPH0634346A JP19427892A JP19427892A JPH0634346A JP H0634346 A JPH0634346 A JP H0634346A JP 19427892 A JP19427892 A JP 19427892A JP 19427892 A JP19427892 A JP 19427892A JP H0634346 A JPH0634346 A JP H0634346A
- Authority
- JP
- Japan
- Prior art keywords
- color filter
- color
- light source
- point light
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
(57)【要約】 (修正有)
【構成】 点光源1と凸レンズ2とビームスプリッター
3と2色フィルター4と2色フィルターの移動手段8と
カラービデオカメラ7とコンピューターとを構成要素と
し、点光源光をビームスプリッターに入射し透過成分を
被測定面に反射させ、ビームスプリッターに戻った反射
光を、ビームスプリッター〜2色フィルター間の凸レン
ズが2色フィルター上に集光し、2色フィルターを通過
した光を、カラービデオカメラに被測定面像を結び、移
動手段が2色フィルター上の点光源像が色の境界線と垂
直な方向に動くように2色フィルターの位置を変えつつ
カラービデオカメラに写った被測定像の各画素の色の変
化を追跡し、色が変わったときの2色フィルターの移動
距離から、各画素に対応する被測定面の位置の傾斜を計
算して被測定面の傾斜を2次元的に求める表面評価装置
【効果】 表面に写り込んだ景色の歪みを表す傾斜情報
を、簡単な光学装置で得ることができる
(57) [Summary] (Modified) [Configuration] A point light source 1, a convex lens 2, a beam splitter 3, a two-color filter 4, a two-color filter moving means 8, a color video camera 7, and a computer are components, The source light is incident on the beam splitter, the transmitted component is reflected on the surface to be measured, and the reflected light returned to the beam splitter is condensed by the convex lens between the beam splitter and the two-color filter onto the two-color filter, The transmitted light is connected to the surface image of the color video camera, and the moving means changes the position of the two-color filter so that the point light source image on the two-color filter moves in the direction perpendicular to the color boundary line. The change in the color of each pixel of the measured image captured by the camera is tracked, and the inclination of the position of the measured surface corresponding to each pixel is calculated from the moving distance of the two-color filter when the color changes. A surface evaluation device that calculates two-dimensionally the inclination of the surface to be measured by calculating [Effect] The inclination information representing the distortion of the scene reflected on the surface can be obtained with a simple optical device.
Description
【0001】[0001]
【産業上の利用分野】本発明は、塗装面やプラスチック
成型物の表面の鏡面特性を評価する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for evaluating the mirror surface characteristics of a coated surface or the surface of a plastic molded product.
【0002】[0002]
【従来の技術】塗装面やプラスチック成型品の美しさ、
艶感、光沢などは、これらの表面に存在するわずかなう
ねり、微小なへこみや凸部、しわなどによって大きく左
右されている。[Prior Art] The beauty of painted surfaces and plastic molded products,
Glossiness and luster are greatly influenced by slight undulations, minute dents, convex portions, and wrinkles existing on these surfaces.
【0003】これら表面の非平滑によって表れる表面の
特性を評価することは、より美しい塗装や成型品を開発
する上で重要であり、実際に数々の評価法が従来より使
われている。例えば表面の外観を評価するものとしては
光沢計や写像性測定機などがある。また直接表面形状を
測定するものとしては接触・非接触表面荒さ計やレーザ
ー干渉計を使った平面度検査器などがある。[0003] It is important to evaluate the characteristics of the surface, which is caused by the non-smoothness of the surface, in order to develop more beautiful coatings and molded products, and various evaluation methods have been actually used. For example, a gloss meter and an image clarity measuring device are used to evaluate the appearance of the surface. In addition, there are contact and non-contact surface roughness meters and flatness inspectors using laser interferometers that directly measure the surface shape.
【0004】[0004]
【発明が解決しようとする課題】上記外観評価装置は反
射光の角度分布を測定したり、スリットや格子の像を写
したときの鮮明さを測定するものであるが、これらの外
観評価手法では表面の形状に関する直接的な情報が得ら
れないため、良否の判断はできてもその理由の解析には
あまり役立たないという欠点がある。The above-mentioned appearance evaluation device measures the angular distribution of reflected light and the sharpness when an image of a slit or a grating is imaged. Since no direct information about the surface shape can be obtained, it has a drawback that it can be judged whether it is good or bad, but it is not very useful for analyzing the reason.
【0005】また上記表面形状測定装置によって表面の
形状はかなりの精度で知ることができるが、実際にこれ
らの情報を外観特性に定量的に結び付けるのは意外に簡
単でない。これはこれらの測定器が面の高さを測定して
いるのに対し、外観は面の傾斜(高さの微分)によって
反射光の角度が変わることに起因しているためであると
考えられる。Further, although the surface profile can be known with a considerable degree of accuracy by the surface profile measuring device, it is surprisingly not easy to actually connect such information to the appearance characteristics quantitatively. It is considered that this is because these measuring instruments measure the height of the surface, while the appearance is due to the angle of the reflected light changing due to the inclination of the surface (differential height). .
【0006】塗装面を例にとって言えば、一般に面上に
はいくつかの異なる原因による異質な凹凸が存在し、数
ミリの波長の緩やかなうねりから、直径0.1ミリ以下
の小さなくぼみ、さらに小さなサイズの凹凸が共存して
いる。これらの凹凸の外観に与える影響度は、凹凸の大
きさではなく傾斜の大きさに依存するため、波長の短い
成分は僅かな振幅でも外観に影響を与え、波長0.1ミリ
の凹凸は波長1ミリの凹凸の1/10の振幅で同等の影響を
与える。このような事情で、形状測定の結果を外観に結
びつけるためには、測定にはかなり大きなダイナミック
レンジ(103〜104)が必要とされ、またある程度広
い範囲(数ミリ以上)での測定が必要とされるが、この
ような測定はいささか困難である。[0006] Taking a painted surface as an example, in general, there are different irregularities on the surface due to several different causes, from a slight undulation of a wavelength of several millimeters to a small depression of 0.1 mm or less in diameter, and Small size irregularities coexist. Since the degree of influence of these irregularities on the appearance depends on the size of the inclination, not the size of the irregularities, a component with a short wavelength affects the appearance even with a slight amplitude, and an irregularity with a wavelength of 0.1 mm has a wavelength of 1 mm. An amplitude of 1/10 of the unevenness of has the same effect. Under these circumstances, a fairly large dynamic range (10 3 to 10 4 ) is required for measurement in order to link the result of shape measurement to the appearance, and measurement in a somewhat wide range (several millimeters or more) is required. Although required, such measurements are somewhat difficult.
【0007】[0007]
【課題を解決するための手段】この発明の表面評価装置
は、点光源と、少なくとも一つの凸レンズと、ビームス
プリッターと、直線を境界に色が異なる2色フィルター
と、該点光源ないし該2色フィルターのいずれか一方を
移動させる手段とカラービデオカメラと画像入力機能を
有するコンピューターとを構成要素とし、該点光源が、
該点光源の光を該ビームスプリッターに入射し、透過成
分と反射成分のいずれかを、この入射光軸が被反射面に
垂直になるように、被測定面に反射させ、該ビームスプ
リッターに戻った反射光のうち該点光源と異なる方向に
取り出された光を、該点光源〜該ビームスプリッター間
ないしは該ビームスプリッター〜被測定面間ないしは該
ビームスプリッター〜該2色フィルター間のいずれかに
置かれた少なくとも一つの凸レンズが、該2色フィルタ
ー上に集光し、該2色フィルターを通過した光を、該カ
ラービデオカメラに被測定面の像を結ぶように必要に応
じて該2色フィルター〜該カラービデオカメラ間に設け
られたレンズが、導き、該点光源ないし該2色フィルタ
ーのいずれか一方に設けられた該移動手段が、該2色フ
ィルター上の点光源像が色の境界線と垂直な方向に動く
ように該点光源ないし該2色フィルターの位置を変えつ
つ該カラービデオカメラに写った被測定像の各画素の色
の変化を該コンピューターによって追跡し、色が変わっ
たときの該点光源ないし該2色フィルターの移動距離か
ら、各画素に対応する被測定面の位置の傾斜を計算して
被測定面の傾斜を2次元的に求めることを特徴とするも
のである。The surface evaluation apparatus of the present invention comprises a point light source, at least one convex lens, a beam splitter, a two-color filter having different colors with a straight line as a boundary, and the point light source or the two colors. The point light source is composed of a means for moving either one of the filters, a color video camera, and a computer having an image input function.
The light from the point light source is incident on the beam splitter, and either the transmitted component or the reflected component is reflected on the surface to be measured so that the incident optical axis is perpendicular to the surface to be reflected, and then returned to the beam splitter. The reflected light extracted in a direction different from that of the point light source is placed anywhere between the point light source and the beam splitter or between the beam splitter and the surface to be measured or between the beam splitter and the two-color filter. If necessary, the at least one convex lens converges on the two-color filter, and the light passing through the two-color filter is combined with the color video camera to form an image of the surface to be measured. ~ A lens provided between the color video cameras guides the light, and the moving means provided on either one of the point light source or the two-color filter causes a point light on the two-color filter. By changing the position of the point light source or the two-color filter so that the image moves in a direction perpendicular to the color boundary line, the color change of each pixel of the measured image captured by the color video camera is tracked by the computer. The inclination of the measured surface is calculated two-dimensionally by calculating the inclination of the position of the measured surface corresponding to each pixel from the moving distance of the point light source or the two-color filter when the color changes. It is what
【0008】[0008]
【作用】本発明の表面特性評価装置はカラーシュリーレ
ン法を応用した光学的な方法によって表面形状を評価す
るもので、このため前記したように外観と直接結びつく
情報を得ることができる。The surface characteristic evaluation device of the present invention evaluates the surface shape by an optical method applying the color schlieren method, and therefore, as described above, information directly related to the appearance can be obtained.
【0009】図1は、本発明の一つの実施例のコンピュ
ーター部を除いた部分の平面図、図4が同装置の斜視図
である。本装置の作用を図7〜10を使って説明する。
本実施例では点光源1にハロゲンランプを使用してい
る。図7は図1の部分拡大図であり被測定面が平面の場
合を示している。点光源の光は凸レンズ2aによって平
行光に変えられて被測定面6に照射され、反射光の一部
がビームスプリッター3に反射し凸レンズ2bで2色フ
ィルター4上に集束される。このとき被測定面の異なる
位置A,B,Cで反射した光は全て4上の同じ位置に集
束し、図8の様に点光源の明瞭な像(ここではフィラメ
ントの像)を作る。FIG. 1 is a plan view of a portion excluding a computer section according to one embodiment of the present invention, and FIG. 4 is a perspective view of the apparatus. The operation of this device will be described with reference to FIGS.
In this embodiment, a halogen lamp is used as the point light source 1. FIG. 7 is a partially enlarged view of FIG. 1 and shows a case where the surface to be measured is a flat surface. The light from the point light source is converted into parallel light by the convex lens 2a and irradiated on the surface 6 to be measured, and a part of the reflected light is reflected by the beam splitter 3 and focused on the two-color filter 4 by the convex lens 2b. At this time, all the lights reflected at different positions A, B, and C on the surface to be measured are focused on the same position on 4 to form a clear image of the point light source (here, an image of the filament) as shown in FIG.
【0010】ここで2色フィルター4をu軸の正あるい
は負の方向に動かすと、カラービデオカメラ7に写る被
測定面の像は、図8のように光源像が色の境界にくる位
置を境にして、全体が同時に緑から赤、あるいは赤から
緑に変わる。実際の被測定面には図9の様にうねりがあ
るため、被測定面の異なる位置A,B,Cで反射した光
はそれぞれ異なる角度で反射し、4上の異なる位置に達
し、図10のようにそれぞれ異なった位置に光源像a,
b,cを結ぶ。実際の光源像は4に達する全ての反射光
の和となるため、全体にぼやけたものになる。さきほど
と同様に4を動かすと、今度はa,b,cの位置が異な
るため、カラービデオカメラにとらえられるA,B,C
の色が変わるのは同時ではなく、4のそれぞれ異なった
位置を境にして変化する。When the two-color filter 4 is moved in the positive or negative direction of the u-axis, the image of the surface to be measured captured by the color video camera 7 is located at the position where the light source image comes to the color boundary as shown in FIG. At the boundary, the whole changes from green to red or red to green at the same time. Since the actual surface to be measured has undulations as shown in FIG. 9, the light reflected at different positions A, B, and C on the surface to be measured are reflected at different angles, and reach different positions on 4 and as shown in FIG. The light source images a,
Connect b and c. The actual light source image is the sum of all the reflected lights that reach 4, so that it becomes totally blurred. If you move 4 in the same way as before, the positions of a, b, and c will be different this time, so A, B, and C captured by the color video camera.
The color of does not change at the same time, but changes at each of the four different positions.
【0011】いまカラービデオカメラの画像をコンピュ
ーターに取り込み、色の変化を各画素ごとに追跡し、色
が変わった時の2色フィルター4の移動距離を適当な位
置(具体的には被測定面の半分が赤、残りの半分が緑と
なる4の位置を選ぶのがよい)を基準にして求めたもの
をDとすれば、画素に対応する位置の被測定面のx軸に
沿った傾斜∂z/∂xは ∂z/∂x=D/f2b (f2b:レンズ2bの焦点距離) ・・・(イ) で得られる。Now, the image of the color video camera is loaded into a computer, the change in color is tracked for each pixel, and the moving distance of the two-color filter 4 when the color changes is adjusted to an appropriate position (specifically, the surface to be measured). It is better to choose a position of 4 where half of the color is red and the other half is green), and let D be the inclination of the measured surface at the position corresponding to the pixel along the x-axis. ∂z / ∂x can be obtained by ∂z / ∂x = D / f2b (f2b: focal length of lens 2b) (b).
【0012】[0012]
【実施例】以下実施例を使って本発明を更に詳しく説明
する。図2は、ただ一つの凸レンズを使った本発明の最
も簡単な実施例である。本実施例では2色フィルター4
を動かす代わりに点光源1を移動ステージ8に乗せて動
かし、同様の測定を行っている。もちろん図1の実施例
と同様に点光源1を固定して2色フィルター4を移動ス
テージにセットする構成でもよいし、また図1の実施例
において2色フィルター4を固定し点光源1を可動とし
たものもまた本発明の実施例の一つである。The present invention will be described in more detail with reference to the following examples. FIG. 2 is the simplest embodiment of the invention using only one convex lens. In this embodiment, the two-color filter 4
Instead of moving, the point light source 1 is placed on the moving stage 8 and moved, and the same measurement is performed. Of course, similarly to the embodiment of FIG. 1, the point light source 1 may be fixed and the two-color filter 4 may be set on the moving stage. Alternatively, in the embodiment of FIG. 1, the two-color filter 4 may be fixed and the point light source 1 may be moved. The above is also one of the embodiments of the present invention.
【0013】図5は、図1の実施例のレンズ2bの位置
を変え、さらにレンズ2cを加えた実施例である。図1
のレンズ2bが反射光を2色フィルター4上に集束する
作用に加え、被測定面の像を撮像素子5上に投影する作
用を兼ねているのに対し、図5では後者の作用を2cに
分担し、2b,2cをタンデムで使っているため2cを
異なる焦点距離のレンズに交換して投影倍率を容易に変
えることができる。2cにズームレンズを使うことも可
能である。図1で投影倍率を変えるためには、2bの交
換に伴って2色フィルター4あるいはカラービデオカメ
ラ7の位置を変えなければならない。FIG. 5 shows an embodiment in which the position of the lens 2b of the embodiment of FIG. 1 is changed and a lens 2c is further added. Figure 1
Lens 2b has a function of converging the reflected light on the dichroic filter 4 and a function of projecting the image of the surface to be measured onto the image sensor 5, whereas in FIG. 5, the latter function is changed to 2c. Since 2b and 2c are shared and used in tandem, the projection magnification can be easily changed by replacing 2c with a lens having a different focal length. It is also possible to use a zoom lens for 2c. In order to change the projection magnification in FIG. 1, it is necessary to change the position of the two-color filter 4 or the color video camera 7 with the replacement of 2b.
【0014】図3は、図5の実施例のレンズ2aと2b
の作用を一つのレンズ2abで兼ねることによって部品
点数を減らした実施例である。この場合には2abの表
面で反射した光がカラービデオカメラに入って測定の妨
げにならないように、2abには反射防止膜をコートし
たものを使うのが好ましい。あるいは図6の実施例のよ
うに、点光源1とビームスプリッター3の間と3からカ
ラービデオカメラまでの間のどこかに互いに直行する偏
光軸を持つ偏光フィルター10,11をおき、レンズ2
abと被測定面6の間に1/4波長版9をおいて、6から
の反射光のみ偏光面を90゜回転させ、レンズ表面の反
射光を除く方法でも良い。FIG. 3 shows lenses 2a and 2b of the embodiment of FIG.
This is an embodiment in which the number of parts is reduced by having one lens 2ab also perform the function of. In this case, it is preferable to use an antireflection film coated on 2ab so that the light reflected on the surface of 2ab does not interfere with the measurement when entering the color video camera. Alternatively, as in the embodiment of FIG. 6, polarization filters 10 and 11 having polarization axes orthogonal to each other are placed between the point light source 1 and the beam splitter 3 and between 3 and the color video camera, and the lens 2
It is also possible to place a quarter-wave plate 9 between ab and the surface 6 to be measured, and rotate the polarization plane by 90 ° only for the reflected light from 6 to remove the reflected light from the lens surface.
【0015】図11の実施例は図3のビームスプリッタ
ー3を偏光ビームスプリッター12に置き換え、1/4波
長版9との組み合わせで2ab表面の反射光の影響を除
いたものである。図6の場合も同様であるが1/4波長版
9の被測定面側の面の反射光は偏光ビームスプリッター
9によって取り除かれないため、9は被測定面と平行に
ならないようにやや傾けて設置し、該反射光がカラービ
デオカメラ7に入らないようにするのがよい。In the embodiment shown in FIG. 11, the beam splitter 3 shown in FIG. 3 is replaced with a polarizing beam splitter 12, and the influence of reflected light on the surface of 2ab is eliminated by combining with the 1/4 wavelength plate 9. The same applies to the case of FIG. 6, but since the reflected light on the surface of the 1/4 wavelength plate 9 on the measured surface side is not removed by the polarization beam splitter 9, 9 is slightly inclined so as not to be parallel to the measured surface. It is preferable to install it so that the reflected light does not enter the color video camera 7.
【0016】図12は微小肌と呼ばれるうねりがある塗
装板を図6の装置を使って測定した例であり、図13は
平滑性が良好な塗装板を同装置で測定した例である。な
お点光源1は20Wのハロゲン球、レンズ2abと2c
の焦点距離はそれぞれ100mm,75mmである。FIG. 12 shows an example in which a coated plate having waviness called fine skin is measured by using the apparatus shown in FIG. 6, and FIG. 13 shows an example in which a coated sheet having good smoothness is measured by the apparatus. The point light source 1 is a 20 W halogen bulb and lenses 2ab and 2c.
The focal lengths are 100 mm and 75 mm, respectively.
【0017】色の変化の検出は入力した画像のR成分と
G成分の大きさを比較することによって行うが、色フィ
ルターの透過特性や光源の色温度、カラービデオカメラ
の波長感度特性などを補正した式、 G−aR (aは正の実数) の正負によって判断した。The color change is detected by comparing the sizes of the R and G components of the input image, but the transmission characteristics of the color filter, the color temperature of the light source, the wavelength sensitivity characteristics of the color video camera, etc. are corrected. Was determined by the sign of G-aR (a is a positive real number).
【0018】(1)まず被測定面の画像の測定する画素全
体が緑(G−aR>0)になる位置まで2色フィルター
4をu軸の負の方向に移動し、(2)次に一定速度でu軸
の正方向に4を動かしつつ一定時間間隔で画像を入力
し、各画素の色が赤(G−aR<0)に変わった時点の
経過時間から4の移動距離を求め、(3)全ての測定画素
が赤になったら測定をやめ、平均の移動距離をD=0
(基準)として各画素のDを求め、(イ)式によって傾
斜∂z/∂xを求める。(1) First, the two-color filter 4 is moved in the negative direction of the u-axis to a position where all the pixels to be measured in the image on the surface to be measured are green (G-aR> 0), and (2) then An image is input at a constant time interval while moving 4 in the positive direction of the u axis at a constant speed, and the moving distance of 4 is obtained from the elapsed time when the color of each pixel changes to red (G-aR <0). (3) When all the measurement pixels turn red, stop the measurement and set the average movement distance to D = 0.
As a (reference), D of each pixel is obtained, and the inclination ∂z / ∂x is obtained by the equation (a).
【0019】以上の一連の作業はコンピューターによっ
て自動的に行われた。なお使用したコンピューターは市
販の安価な16ビットパーソナルコンピューターであ
る。塗装表面の傾斜のグラフ図12,13は塗装板に景
色を映してみたときの像のゆがむ様子を表しているが、
このことは目視による印象と良く一致しており、本評価
法が塗装外観の評価に適していることがわかった。本発
明に使われる点光源にはフィラメントサイズが小さいタ
ングステンランプ、ハロゲンランプやクセノンランプな
どの発光面積が小さい高輝度白色光源が適しており、特
に試料面を高倍率で観測したい場合には輝度の高い光源
が必要である。The above series of operations was automatically performed by a computer. The computer used is a commercially available inexpensive 16-bit personal computer. Graph of the inclination of the painting surface Figures 12 and 13 show how the image is distorted when the landscape is projected on the painting board.
This is in good agreement with the visual impression, and it was found that this evaluation method is suitable for evaluation of the coating appearance. For the point light source used in the present invention, a high brightness white light source such as a tungsten lamp having a small filament size, a halogen lamp or a xenon lamp having a small light emitting area is suitable, and particularly when it is desired to observe the sample surface at high magnification, A high light source is needed.
【0020】また本発明に使われるカラービデオカメラ
には色信号の解像度が高いことが必要である。この点か
らRGBの独立出力が備わっている高解像度カメラが適
している。高価ではあるが三板式ないし三管式のものが
最も好ましい。本発明の実施例では図8,10に示した
緑と赤の2色フィルターを使用したが、これは使用した
カラービデオカメラの感度が緑から赤にかけて高く、青
い光に対して低かったため、少しでも感度の高い部分を
使用しようとしたためであるThe color video camera used in the present invention must have a high color signal resolution. From this point, a high-resolution camera equipped with RGB independent output is suitable. Although expensive, the three-plate or three-tube type is most preferable. In the embodiment of the present invention, the two-color filters of green and red shown in FIGS. 8 and 10 were used. However, the sensitivity of the color video camera used was high from green to red and low with respect to blue light. But it was because I tried to use the highly sensitive part.
【0021】[0021]
【発明の効果】本発明の表面特性評価装置によって、表
面に写り込んだ景色の歪みを表す傾斜情報を、簡単な光
学装置とカラービデオカメラ、およびコンピューターの
組み合わせで得ることが可能になった。According to the surface characteristic evaluation apparatus of the present invention, it becomes possible to obtain the tilt information representing the distortion of the scene reflected on the surface by a combination of a simple optical device, a color video camera and a computer.
【図1】本発明の実施例の光学装置部分の平面図であ
る。FIG. 1 is a plan view of an optical device portion of an embodiment of the present invention.
【図2】本発明の実施例の光学装置部分の平面図であ
る。FIG. 2 is a plan view of an optical device portion of an embodiment of the present invention.
【図3】本発明の実施例の光学装置部分の平面図であ
る。FIG. 3 is a plan view of an optical device portion according to an embodiment of the present invention.
【図4】本発明の実施例の光学装置部分の斜視図であ
る。FIG. 4 is a perspective view of an optical device portion according to an embodiment of the present invention.
【図5】本発明の実施例の光学装置部分の平面図であ
る。FIG. 5 is a plan view of an optical device portion according to an embodiment of the present invention.
【図6】本発明の実施例の光学装置部分の平面図であ
る。FIG. 6 is a plan view of an optical device portion according to an embodiment of the present invention.
【図7】本発明の原理を説明する説明図であって、図1
あるいは図5の平面図の部分拡大図である。7 is an explanatory diagram explaining the principle of the present invention, and FIG.
Alternatively, it is a partially enlarged view of the plan view of FIG. 5.
【図8】本発明の原理を説明する説明図であって、2色
フィルターと点光源の像を示した図である。FIG. 8 is an explanatory diagram illustrating the principle of the present invention, and is a diagram showing images of a two-color filter and a point light source.
【図9】本発明の原理を説明する説明図であって、図1
あるいは図5の平面図の部分拡大図である。9 is an explanatory diagram for explaining the principle of the present invention, and FIG.
Alternatively, it is a partially enlarged view of the plan view of FIG. 5.
【図10】本発明の原理を説明する説明図であって、2
色フィルターと点光源の像を示した図である。FIG. 10 is an explanatory diagram illustrating the principle of the present invention,
It is the figure which showed the image of a color filter and a point light source.
【図11】本発明の実施例の光学装置部分の平面図であ
る。FIG. 11 is a plan view of the optical device portion of the embodiment of the present invention.
【図12】本発明の表面評価装置を使った測定例を示す
グラフ図である。FIG. 12 is a graph showing a measurement example using the surface evaluation device of the present invention.
【図13】本発明の表面評価装置を使った測定例を示す
グラフ図である。FIG. 13 is a graph showing a measurement example using the surface evaluation device of the present invention.
1 点光源(電球) 2a 凸レンズ 2b 凸レンズ 2c 凸レンズ 2ab 凸レンズ 3 ビームスプリッター 4 2色フィルター 5 撮像素子 6 被測定面(試料) 7 カラービデオカメラ 8 移動ステージ 9 1/4波長板 10 偏光フィルター 11 偏光フィルター 12 偏光ビームスプリッター 1 Point light source (light bulb) 2a Convex lens 2b Convex lens 2c Convex lens 2ab Convex lens 3 Beam splitter 4 Two-color filter 5 Image sensor 6 Measurement surface (Sample) 7 Color video camera 8 Moving stage 9 1/4 Wave plate 10 Polarization filter 11 Polarization filter 12 Polarizing beam splitter
Claims (1)
と、ビームスプリッターと、直線を境界に色が異なる2
色フィルターと、該点光源ないし該2色フィルターのい
ずれか一方を移動させる手段とカラービデオカメラと画
像入力機能を有するコンピューターとを構成要素とし、 該点光源が、該点光源の光を該ビームスプリッターに入
射し、透過成分と反射成分のいずれかを、この入射光軸
が被反射面に垂直になるように、被測定面に反射させ、 該ビームスプリッターに戻った反射光のうち該点光源と
異なる方向に取り出された光を、該点光源〜該ビームス
プリッター間ないしは該ビームスプリッター〜被測定面
間ないしは該ビームスプリッター〜該2色フィルター間
のいずれかに置かれた少なくとも一つの凸レンズが、該
2色フィルター上に集光し、 該2色フィルターを通過した光を、該カラービデオカメ
ラに被測定面の像を結ぶように必要に応じて該2色フィ
ルター〜該カラービデオカメラ間に設けられたレンズ
が、導き、 該点光源ないし該2色フィルターのいずれか一方に設け
られた該移動手段が、該2色フィルター上の点光源像が
色の境界線と垂直な方向に動くように該点光源ないし該
2色フィルターの位置を変えつつ該カラービデオカメラ
に写った被測定像の各画素の色の変化を該コンピュータ
ーによって追跡し、 色が変わったときの該点光源ないし該2色フィルターの
移動距離から、各画素に対応する被測定面の位置の傾斜
を計算して被測定面の傾斜を2次元的に求めることを特
徴とする表面評価装置。1. A point light source, at least one convex lens, a beam splitter, and two different colors with a straight line as a boundary.
A color filter, a means for moving one of the point light source and the two-color filter, a color video camera, and a computer having an image input function are components, and the point light source emits light from the point light source into the beam. The point light source of the reflected light that is incident on the splitter and is reflected by the surface to be measured so that either the transmitted component or the reflected component is perpendicular to the surface to be reflected and returned to the beam splitter. Light extracted in a different direction from the point light source to the beam splitter or the beam splitter to the surface to be measured or the beam splitter to at least one convex lens placed between the two-color filter, If necessary, the light condensed on the two-color filter and the light passing through the two-color filter may be formed on the color video camera to form an image of the surface to be measured. A lens provided between the two-color filter and the color video camera guides, and the moving means provided on either one of the point light source and the two-color filter causes a point light source image on the two-color filter to be formed. While changing the position of the point light source or the two-color filter so as to move in a direction perpendicular to the color boundary line, the computer monitors the color change of each pixel of the measured image captured by the color video camera, It is characterized in that the inclination of the position of the measured surface corresponding to each pixel is calculated from the moving distance of the point light source or the two-color filter when the Surface evaluation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19427892A JPH0634346A (en) | 1992-07-21 | 1992-07-21 | Surface evaluation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19427892A JPH0634346A (en) | 1992-07-21 | 1992-07-21 | Surface evaluation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0634346A true JPH0634346A (en) | 1994-02-08 |
Family
ID=16321955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19427892A Pending JPH0634346A (en) | 1992-07-21 | 1992-07-21 | Surface evaluation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634346A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180137326A (en) * | 2017-06-16 | 2018-12-27 | 라온피플 주식회사 | Image acquisition apparatus and method for vision test |
| US20220035258A1 (en) * | 2018-09-14 | 2022-02-03 | Auros Technology, Inc. | Device for measuring overlay |
| JP2024043335A (en) * | 2022-09-16 | 2024-03-29 | 株式会社東芝 | Method for calculating three-dimensional shape information on an object surface, optical system, program for calculating three-dimensional shape information on an object surface, and processing device for the optical system |
-
1992
- 1992-07-21 JP JP19427892A patent/JPH0634346A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180137326A (en) * | 2017-06-16 | 2018-12-27 | 라온피플 주식회사 | Image acquisition apparatus and method for vision test |
| US20220035258A1 (en) * | 2018-09-14 | 2022-02-03 | Auros Technology, Inc. | Device for measuring overlay |
| US12001146B2 (en) * | 2018-09-14 | 2024-06-04 | Auros Technology, Inc. | Overlay measurment device |
| JP2024043335A (en) * | 2022-09-16 | 2024-03-29 | 株式会社東芝 | Method for calculating three-dimensional shape information on an object surface, optical system, program for calculating three-dimensional shape information on an object surface, and processing device for the optical system |
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