JPH06344281A - Micro gripper - Google Patents
Micro gripperInfo
- Publication number
- JPH06344281A JPH06344281A JP15800793A JP15800793A JPH06344281A JP H06344281 A JPH06344281 A JP H06344281A JP 15800793 A JP15800793 A JP 15800793A JP 15800793 A JP15800793 A JP 15800793A JP H06344281 A JPH06344281 A JP H06344281A
- Authority
- JP
- Japan
- Prior art keywords
- finger
- fine
- micro gripper
- gripping surface
- gripping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Micromachines (AREA)
- Manipulator (AREA)
Abstract
(57)【要約】
【構成】 微細対象物を挟んで把持し得る2本のフィン
ガ1を備えたマイクログリッパにおいて、フィンガ1の
微細対象物に接する把持面11または把持面11の近傍
にヒータ部8を備えたものである。
【効果】 ミリグラムオーダ以下の軽量な微細対象物を
円滑に操作できる。
(57) [Summary] [Construction] In a micro gripper having two fingers 1 capable of sandwiching and gripping a fine target object, in a gripping surface 11 of the finger 1 in contact with the fine target object, or a heater part near the gripping surface 11. It is equipped with 8. [Effect] It is possible to smoothly operate a lightweight fine object of milligram order or less.
Description
【0001】[0001]
【産業上の利用分野】本発明は、微細な部品を組み立て
たり、微細な有機物をつかんだりする際に使用するマイ
クログリッパに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro gripper used for assembling fine parts and grasping fine organic substances.
【0002】[0002]
【従来の技術】従来、微細部品あるいは微細有機物など
微細対象物を挟んだり、吸引したりして保持する接触式
マイクログリッパは、図2に示すように、1対のフィン
ガ1、1と、フィンガ1の長手方向に対して直角方向の
変位を拡大するバネ関節21を用いた拡大機構2と、拡
大機構2を介してフィンガ1を開閉する積層形のピエゾ
アクチュエータ3と、1対の拡大機構2、2を固定した
基部4で構成し、ピエゾアクチュエータ3を伸ばすこと
によりフィンガ1、1を閉じて数10ミクロンオーダの
対象物である微細対象物5を把持するようにしたものが
開示されている(例えば、日刊工業新聞社発行、雑誌
「機械設計」vol.34,No.15,1990年、
66ページ、および日本機械学会(No920−7)第
2回バイオエンジニアリングシンポジウム講演論文集、
1992年1月30日、117〜118ページ)が開示
されている。なお、このマイクログリッパにより、数m
N前後の力を発生させることができ、微細な部品をつか
む力として十分な性能を持つことが知られている。2. Description of the Related Art Conventionally, as shown in FIG. 2, a contact-type micro gripper for holding or sucking a fine object such as a fine component or a fine organic substance is held by a pair of fingers 1 and 1. 1. An enlarging mechanism 2 using a spring joint 21 for enlarging the displacement in the direction perpendicular to the longitudinal direction of 1, a laminated piezo actuator 3 for opening and closing the fingers 1 via the enlarging mechanism 2, and a pair of enlarging mechanism 2 2 is constituted by a fixed base portion 4, and by extending the piezo actuator 3, the fingers 1 and 1 are closed to hold a fine object 5 which is an object of the order of several tens of microns. (For example, published by Nikkan Kogyo Shimbun, magazine "Machine Design", Vol. 34, No. 15, 1990,
66 pages, Proceedings of the 2nd Bioengineering Symposium, Japan Society of Mechanical Engineers (No920-7),
Pp. 117-118, Jan. 30, 1992). With this micro gripper, several meters
It is known that a force of about N can be generated, and that it has sufficient performance as a force for grasping a fine component.
【0003】[0003]
【発明が解決しようとする課題】ところが、従来技術で
は、操作しようとする微細対象物の重量が軽くなると、
微細対象物あるいは微細対象物を支持するフィンガの表
面に付着している湿気あるいは液体の表面張力や、分散
力のために微細対象物とフィンガの間に粘着力が生じ、
円滑な操作ができないという問題点があった。すなわ
ち、この粘着力は、重量に換算すると、2〜4mgで、
微細対象物の重さがこれ以上になると、粘着力で微細対
象物がフィンガに付着して離れなくなり、微細対象物を
円滑に操作できなくなるという欠点があった。本発明
は、フィンガの表面から微細対象物が離れ易くなるよう
にして、円滑な把持操作ができるマイクログリッパを提
供することを目的とするものである。However, in the prior art, when the weight of the fine object to be manipulated is reduced,
Due to the surface tension of the moisture or liquid adhering to the surface of the fine object or the finger supporting the fine object, or the adhesive force between the fine object and the finger due to the dispersion force,
There was a problem that smooth operation was not possible. That is, this adhesive force, when converted to weight, is 2 to 4 mg,
When the weight of the fine object is more than this, the fine object adheres to the fingers and cannot be separated due to the adhesive force, so that the fine object cannot be smoothly operated. It is an object of the present invention to provide a micro gripper that enables a fine object to be easily separated from the surface of a finger and that allows a smooth gripping operation.
【0004】[0004]
【課題を解決するための手段】上記問題を解決するた
め、本発明は、微細対象物を挟んで把持し得る2本のフ
ィンガを備えたマイクログリッパにおいて、前記フィン
ガの前記微細対象物に接する把持面または前記把持面の
近傍にヒータ部を備えたものである。また、前記把持面
が少なくとも炭素原子とフッ素原子を含有する高分子で
あるものである。In order to solve the above problems, the present invention relates to a micro gripper provided with two fingers capable of sandwiching and gripping a fine object, and a gripping of the finger in contact with the fine object. The heater is provided on the surface or in the vicinity of the grip surface. The gripping surface is a polymer containing at least carbon atoms and fluorine atoms.
【0005】[0005]
【作用】上記手段により、ヒータ部の抵抗線に通電する
と、抵抗線が発熱してフィンガの把持面が加熱され、把
持面に付着していた液体は蒸発して微細対象物とフィン
ガの間の粘着力が減少する。したがって、フィンガの表
面から微細対象物が離れ易くなり、微細対象物の操作が
容易となる。When the resistance wire of the heater is energized by the above means, the resistance wire generates heat to heat the gripping surface of the finger, the liquid adhering to the gripping surface evaporates, and the liquid between the fine target object and the finger is evaporated. Adhesion is reduced. Therefore, the fine object is easily separated from the surface of the finger, and the operation of the fine object is facilitated.
【0006】[0006]
【実施例】以下、本発明を図に示す実施例について説明
する。図1は本発明の実施例のフィンガを示す斜視図で
ある。なお、マイクログリッパを図2に示したように、
1対のフィンガ1と、フィンガ1の長手方向に対して直
角方向の変位を拡大するバネ関節21を用いた拡大機構
2と、拡大機構2を介してフィンガ1を開閉する積層形
のピエゾアクチュエータ3と、拡大機構2を固定した基
部4を備えた構成は基本的に従来と同じである。従来と
異なるのは次の点である。すなわち、第1の実施例は、
図1において点線で示すように、フィンガ1の微細対象
物5に接する把持面11にジグザグ状の白金箔の抵抗線
6を設け、抵抗線6は石英の絶縁薄膜7でサンドイッチ
状に包み、絶縁薄膜7が把持面11の表面となるように
固定してある。抵抗線6には直流または交流を通電する
ようにしてあり、抵抗線6によりヒータ部8を構成して
ある。抵抗線6に通電すると、抵抗線6が発熱してフィ
ンガ1の把持面11が加熱され、把持面11に付着して
いた液体は蒸発して微細対象物とフィンガの間の粘着力
が減少する。実際に、電気抵抗が約200オームの白金
箔の抵抗線6に10Vの直流電圧を印加すると、フィン
ガ1がおよそ85℃に加熱されていることを赤外線マイ
クロイメージ温度計で確認できた。この状態で微細対象
物5をフィンガ1で把持したとき、粘着力は重量換算で
約0.5〜0.8mgであった。上記実施例では、抵抗
線6を把持面11に固定したが、微細対象物に接する部
分に近ければ、抵抗線を設ける位置は把持面に限るもの
ではなく、同様の結果が得られる。第2の実施例は、抵
抗線を被覆する絶縁薄膜7にポリテトラフルオルエチレ
ン膜を使用した。この場合、ヒータ部8によりフィンガ
1が約85℃に加熱されているとき、微細対象物とフィ
ンガの間の粘着力は重量換算で約0.1〜0.4mgで
あった。すなわち、把持面11を覆っている絶縁薄膜7
は、粘着力を少なくする点においてポリテトラフルオル
エチレンの方が石英よりも優れていることがわかる。こ
れは、ポリテトラフルオルエチレンのほうが石英に比
べ、はっ水性が優れているため、残留吸着水が少なかっ
たことによるものであると考えられる。本実施例では、
ポリテトラフルオルエチレンを使用した例について説明
したが、少なくとも炭素原子とフッ素原子を含有するフ
ッ素系高分子であれば、石英に比べてはっ水性が優れて
いるので、同様の結果が得られる。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a finger according to an embodiment of the present invention. In addition, as shown in FIG.
A pair of fingers 1, a magnifying mechanism 2 using a spring joint 21 that magnifies the displacement of the finger 1 in the direction perpendicular to the longitudinal direction, and a laminated piezoelectric actuator 3 that opens and closes the finger 1 via the magnifying mechanism 2. The configuration including the base 4 to which the enlargement mechanism 2 is fixed is basically the same as the conventional one. It differs from the conventional one in the following points. That is, in the first embodiment,
As shown by the dotted line in FIG. 1, a zigzag-shaped platinum foil resistance wire 6 is provided on the gripping surface 11 of the finger 1 which is in contact with the fine object 5, and the resistance wire 6 is wrapped in a quartz insulating thin film 7 in a sandwich shape to provide insulation. The thin film 7 is fixed so as to be the surface of the grip surface 11. A direct current or an alternating current is applied to the resistance wire 6, and the resistance wire 6 constitutes a heater portion 8. When the resistance wire 6 is energized, the resistance wire 6 generates heat and the gripping surface 11 of the finger 1 is heated, the liquid adhering to the gripping surface 11 evaporates, and the adhesive force between the fine object and the finger decreases. . In fact, when a DC voltage of 10 V was applied to the resistance wire 6 of platinum foil having an electric resistance of about 200 ohms, it was confirmed by the infrared micro-image thermometer that the finger 1 was heated to about 85 ° C. When the fine object 5 was gripped by the finger 1 in this state, the adhesive force was about 0.5 to 0.8 mg in terms of weight. Although the resistance wire 6 is fixed to the gripping surface 11 in the above-described embodiment, the position where the resistance wire is provided is not limited to the gripping surface as long as it is close to the portion in contact with the minute object, and similar results can be obtained. In the second embodiment, a polytetrafluoroethylene film is used as the insulating thin film 7 that covers the resistance wire. In this case, when the finger 1 was heated to about 85 ° C. by the heater unit 8, the adhesive force between the fine object and the finger was about 0.1 to 0.4 mg in terms of weight. That is, the insulating thin film 7 covering the grip surface 11
Shows that polytetrafluoroethylene is superior to quartz in terms of reducing the adhesive strength. It is considered that this is because polytetrafluoroethylene is superior in water repellency to quartz, and thus the residual adsorbed water was small. In this embodiment,
An example using polytetrafluoroethylene was explained, but if it is a fluorine-based polymer containing at least carbon atoms and fluorine atoms, it is superior in water repellency as compared with quartz, so similar results can be obtained. .
【0007】[0007]
【発明の効果】以上述べたように、本発明によれば、フ
ィンガにヒータ部を設けてフィンガと微細対象物の間の
液体を除去し、フィンガと微細対象物の間の粘着力を減
少するようにしてあるので、従来のマイクログリッパで
は円滑な操作ができなかったミリグラムオーダ以下の軽
量な微細対象物を円滑に操作できる効果がある。As described above, according to the present invention, the finger is provided with the heater portion to remove the liquid between the finger and the fine object to reduce the adhesive force between the finger and the fine object. As a result, there is an effect that it is possible to smoothly operate a light microscopic object of milligram order or less, which cannot be smoothly operated by the conventional micro gripper.
【図面の簡単な説明】[Brief description of drawings]
【図1】本発明の実施例のフィンガを示す斜視図であ
る。FIG. 1 is a perspective view showing a finger according to an embodiment of the present invention.
【図2】マイクログリッパの正面図である。FIG. 2 is a front view of a micro gripper.
1 フィンガ 11 把持面 5 微細対象物 6 抵抗線 7 絶縁薄膜 8 ヒータ部 1 Finger 11 Gripping Surface 5 Fine Object 6 Resistance Wire 7 Insulating Thin Film 8 Heater Part
Claims (2)
を備えたマイクログリッパにおいて、前記フィンガの前
記微細対象物に接する把持面または前記把持面の近傍に
ヒータ部を備えたことを特徴とするマイクログリッパ。1. A micro gripper provided with fingers capable of gripping and grasping a fine target object, wherein a heater portion is provided on a gripping surface of the finger which is in contact with the fine target object or in the vicinity of the gripping surface. Micro gripper.
素原子を含有する高分子である請求項1記載のマイクロ
グリッパ。2. The micro gripper according to claim 1, wherein the gripping surface is a polymer containing at least carbon atoms and fluorine atoms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15800793A JPH06344281A (en) | 1993-06-02 | 1993-06-02 | Micro gripper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15800793A JPH06344281A (en) | 1993-06-02 | 1993-06-02 | Micro gripper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06344281A true JPH06344281A (en) | 1994-12-20 |
Family
ID=15662223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15800793A Pending JPH06344281A (en) | 1993-06-02 | 1993-06-02 | Micro gripper |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06344281A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003019686A (en) * | 2001-07-03 | 2003-01-21 | Ckd Corp | Micro open / close hand and micro parallel chuck device |
| KR100659043B1 (en) * | 2005-03-31 | 2006-12-19 | 전자부품연구원 | How to Make Micro Grippers and Micro Gripper Jaws |
| JP2008110436A (en) * | 2006-10-31 | 2008-05-15 | Aoi Electronics Co Ltd | Nano tweezers and manufacturing method thereof |
| JP2009210330A (en) * | 2008-03-03 | 2009-09-17 | Hitachi High-Technologies Corp | Micro-sample handling device |
| CN101857187A (en) * | 2010-05-12 | 2010-10-13 | 大连理工大学 | A Flexible Electrothermal Micro Gripper with Parallel Opening and Closing Jaws |
| KR101328496B1 (en) * | 2012-10-11 | 2013-11-13 | 한국과학기술원 | Elastic revolute joint with cross-spring for high angular displacement using helical structure |
-
1993
- 1993-06-02 JP JP15800793A patent/JPH06344281A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003019686A (en) * | 2001-07-03 | 2003-01-21 | Ckd Corp | Micro open / close hand and micro parallel chuck device |
| KR100659043B1 (en) * | 2005-03-31 | 2006-12-19 | 전자부품연구원 | How to Make Micro Grippers and Micro Gripper Jaws |
| JP2008110436A (en) * | 2006-10-31 | 2008-05-15 | Aoi Electronics Co Ltd | Nano tweezers and manufacturing method thereof |
| JP2009210330A (en) * | 2008-03-03 | 2009-09-17 | Hitachi High-Technologies Corp | Micro-sample handling device |
| CN101857187A (en) * | 2010-05-12 | 2010-10-13 | 大连理工大学 | A Flexible Electrothermal Micro Gripper with Parallel Opening and Closing Jaws |
| KR101328496B1 (en) * | 2012-10-11 | 2013-11-13 | 한국과학기술원 | Elastic revolute joint with cross-spring for high angular displacement using helical structure |
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