JPH0634444A - Polarization analyzer - Google Patents
Polarization analyzerInfo
- Publication number
- JPH0634444A JPH0634444A JP18555392A JP18555392A JPH0634444A JP H0634444 A JPH0634444 A JP H0634444A JP 18555392 A JP18555392 A JP 18555392A JP 18555392 A JP18555392 A JP 18555392A JP H0634444 A JPH0634444 A JP H0634444A
- Authority
- JP
- Japan
- Prior art keywords
- polarization
- branched
- optical path
- prism
- polarizer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Polarising Elements (AREA)
Abstract
(57)【要約】
【目的】 反射を利用する光学部品に起因する偏光特
性、位相の飛びが無い偏光解析器を提供することを目的
とする。また、本発明は、出射光が斜めに出ることを補
正し、且つ、偏光特性、位相の飛びのない偏光解析器を
提供することを目的とする。
【構成】偏光解析すべき平行光束に対して、４分岐す
る、各々９０°の中心角で分岐された４つの楔型プリズ
ムを一体化した複合組合わせプリズムを設け、該平行光
束を４つに分岐し、その複合プリズムで４つの分岐され
た４つの平行光束に対して、各々所定の光束に対して、
即ち、第１の分岐光束の光路には所定のλ／４波長板と
左回り偏光特性の偏光子を設け、第２の分岐光束の光路
には０°方向の透過方向軸の偏光子を設け、第３の分岐
光束の光路には、４５°方向の透過方向軸の偏光子を設
け、第４の分岐光束の光路には、何も設けずにしたこと
を特徴とする偏光解析器である。
(57) [Abstract] [Purpose] It is an object of the present invention to provide a polarization analyzer having no polarization characteristic or phase jump due to an optical component utilizing reflection. Another object of the present invention is to provide a polarization analyzer that corrects outgoing light that is obliquely emitted and that has no polarization characteristic or phase jump. [Structure] For a parallel light beam to be subjected to polarization analysis, a composite combination prism is provided that integrates four wedge-shaped prisms, each of which is branched at a central angle of 90 °, into four beams. With respect to the four parallel light fluxes that are split and divided into four by the compound prism, for each predetermined light flux,
That is, a predetermined λ / 4 wavelength plate and a polarizer having a counterclockwise polarization characteristic are provided in the optical path of the first branched light flux, and a polarizer having a transmission direction axis of 0 ° is provided in the optical path of the second branched light flux. A polarization analyzer characterized in that a polarizer having a transmission direction axis of 45 ° is provided in the optical path of the third branched light flux, and nothing is provided in the optical path of the fourth branched light flux. .
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光ファイバー通信、光
計測、光制御などの分野で用いられる偏光解析器に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polarization analyzer used in the fields of optical fiber communication, optical measurement, optical control and the like.
【０００２】[0002]
【従来の技術】例えば、図１に示すような従来の偏光解
析器では、光ファイバー５からの入射光束は、レンズ１
０を通って、ビームスプリッター１で透過光Ａと反射光
Ｂに分け、反射光Ｂは、λ／４波長板７、偏光子８を通
って、全反射ミラー４で左回り円偏光成分を得る、そし
て、透過光Ａはビームスプリッター２で透過光Ｃと反射
光Ｄに分け、反射光Ｄは偏光子９を通って、全反射ミラ
ー４で４５°偏光成分を得る。更に、透過光Ｃは偏光ビ
ームスプリッター３で透過光Ｅと反射光Ｆに分け、反射
光Ｆは、全反射ミラー４で９０°偏光成分を得る。透過
光Ｅは０°偏光成分を得る。そして、各々の光束Ｂ、
Ｄ、Ｆ、Ｅに対して各々の光検出器６で各偏光成分が検
出される。即ち、従来の光ファイバーによる通信等にお
いては、偏光の回転角、回転方向を観測するための偏光
解析器には、従来、多数の楔型プリズムを用いて光束を
分解していく光成分分解器を用いて、偏光光束を４つの
偏光成分に分けている。2. Description of the Related Art For example, in a conventional polarization analyzer as shown in FIG.
After passing through 0, the beam splitter 1 separates the transmitted light A and the reflected light B, and the reflected light B passes through the λ / 4 wave plate 7 and the polarizer 8 and is obtained by the total reflection mirror 4 as a counterclockwise circular polarization component. Then, the transmitted light A is split into the transmitted light C and the reflected light D by the beam splitter 2, and the reflected light D passes through the polarizer 9 and the 45 ° polarized component is obtained by the total reflection mirror 4. Further, the transmitted light C is split into a transmitted light E and a reflected light F by the polarization beam splitter 3, and the reflected light F is obtained by the total reflection mirror 4 as a 90 ° polarized component. The transmitted light E obtains a 0 ° polarization component. And each luminous flux B,
Each polarization component is detected by each photodetector 6 for D, F, and E. That is, in the conventional optical fiber communication, etc., the polarization analyzer for observing the rotation angle and the rotation direction of the polarized light is conventionally an optical component decomposer that decomposes the light flux using a large number of wedge prisms. The polarized light flux is divided into four polarization components by using the above.
【０００３】このような従来技術のビームスプリッター
を用いた反射を利用した偏光解析器では、分岐するため
の各々のビームスプリッターに、偏光特性、位相の飛び
があり、入射光の位相情報を保持しない。更に、入力光
を４等分するために、第１のビームスプリッターと第２
のビームスプリッターの分岐比を変えなければならない
ために、偏光特性位相の飛びが各々異なることになる。
以上のようなことにより、光学的性能が上がらない。こ
れは、入力光の偏光解析の目的に不十分なものとなり、
偏光解析器としては、致命的な欠陥を有する。In such a polarization analyzer using reflection using a beam splitter of the prior art, each beam splitter for splitting has a polarization characteristic and phase jump, and does not hold phase information of incident light. . Furthermore, in order to divide the input light into four equal parts, the first beam splitter and the second beam splitter
Since the branching ratio of the beam splitter must be changed, the polarization characteristic phase jumps are different.
Due to the above, the optical performance is not improved. This becomes insufficient for the purpose of polarization analysis of the input light,
As a polarimeter, it has a fatal defect.
【０００４】[0004]
【発明が解決しようとする課題】従って、本発明は、上
記のような反射を利用する光学部品に起因する偏光特
性、位相の飛びが無い偏光解析器を提供することを目的
とする。更に、本発明は、光検出器１つで偏光解析する
ことができる偏光解析器を提供することを目的とする。
また、本発明は、出射光が斜めに出ることを補正し、且
つ、偏光特性、位相の飛びのない偏光解析器を提供する
ことを目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a polarization analyzer which does not have a polarization characteristic and a phase jump due to the above-mentioned optical component utilizing reflection. Another object of the present invention is to provide a polarization analyzer capable of polarization analysis with a single photodetector.
Another object of the present invention is to provide a polarization analyzer that corrects outgoing light that is obliquely emitted and that has no polarization characteristic or phase jump.
【０００５】[0005]
【課題を解決するための手段】本発明は、上記の技術的
な課題の解決のために、偏光解析すべき平行光束に対し
て、４分岐する、各々９０°の中心角で分岐された４つ
の楔型プリズムを一体化した複合組合わせプリズムを設
け、該平行光束を４つに分岐し、その複合プリズムで４
つの分岐された４つの平行光束に対して、各々所定の光
束に対して、即ち、第１の分岐光束の光路には所定のλ
／４波長板と左回り偏光特性の偏光子を設け、第２の分
岐光束の光路には０°方向の透過方向軸の偏光子を設
け、第３の分岐光束の光路には、４５°方向の透過方向
軸の偏光子を設け、第４の分岐光束の光路には、何も設
けずにしたことを特徴とする偏光解析器を提供する。更
に、本発明は、前記の複合組合わせ楔型プリズムの後
に、更に、逆形となる第２の複合組合わせ楔型プリズム
を設けて、分岐された４つの光束が、互いに平行な光束
にされてあることが好適である。In order to solve the above-mentioned technical problems, the present invention divides a parallel light beam to be polarization-analyzed into four beams, each of which is split at a central angle of 90 °. A composite combination prism that integrates two wedge prisms is provided, and the parallel light flux is split into four, and the composite prism
For each of the four branched parallel light beams, for each predetermined light beam, that is, in the optical path of the first branched light beam, a predetermined λ
/ 4 wavelength plate and a polarizer having a counterclockwise polarization characteristic are provided, a polarizer having a transmission direction axis of 0 ° direction is provided in the optical path of the second branched light flux, and a 45 ° direction is provided in the optical path of the third branched light flux. The polarization analyzer is characterized in that the polarizer of the transmission direction axis is provided, and nothing is provided in the optical path of the fourth branched light flux. Further, according to the present invention, after the above-mentioned composite combination wedge prism, a second composite combination wedge prism, which is an inverse shape, is further provided so that the four branched light beams are made parallel to each other. Is preferred.
【０００６】[0006]
【作用】本発明の偏光解析器によると、楔型プリズムを
利用し、４つの楔型プリズムで１度に４つの光束に分岐
するものである。図２は、本発明の偏光解析器の基本的
な構成を説明する。即ち、図２（ａ）は、本発明の偏光
解析器の光分岐装置の側面断面図であり、分岐すべき光
束は、光ファイバー５からレンズ１０を通して、複合
（組合わせ）楔型プリズムに平行光束として入射する。
そして、図２（ｂ）は、その組合わせ楔型プリズムの入
射側から見た正面図である。即ち、図２（ｂ）のＢ−
Ｂ’線に沿う断面を示すものが、図２（ａ）の断面図で
ある。そして、Ａ−Ａ’線に沿う断面を見たものが、図
２（ｃ）である。即ち，偏光解析すべき平行光束に対し
て、４分岐する、各々９０°の中心角で分岐された４つ
の楔型プリズム１１，１２，１３，１４を一体化した複
合組合わせプリズムを設け、該平行光束を４つに分岐
し、その複合プリズムで４つの分岐された４つの平行光
束に対して、各々所定の光束に対して、即ち、第１の分
岐光束の光路には所定のλ／４波長板１５と左回り偏光
特性の偏光子１６を設け、第２の分岐光束の光路には０
°方向の透過方向軸の偏光子１７を設け、第３の分岐光
束の光路には、４５°方向の透過方向軸の偏光子１７を
設け、第４の分岐光束の光路には、何も設けない。According to the ellipsometer of the present invention, a wedge prism is used, and four wedge prisms are used to split into four light beams at one time. FIG. 2 illustrates the basic configuration of the ellipsometer of the present invention. That is, FIG. 2A is a side cross-sectional view of the optical branching device of the polarization analyzer of the present invention, in which the light flux to be branched is transmitted from the optical fiber 5 through the lens 10 to a parallel (combined) wedge prism. Incident as.
And FIG.2 (b) is the front view seen from the incident side of the combination wedge type prism. That is, B- in FIG.
FIG. 2A is a sectional view showing a section taken along the line B ′. Then, FIG. 2C shows a cross section taken along the line AA '. That is, for a parallel light beam to be subjected to polarization analysis, a composite combination prism in which four wedge-shaped prisms 11, 12, 13, 14 which are branched at a central angle of 90 ° are integrated is provided. The parallel light flux is split into four, and the four parallel light fluxes branched by the compound prism are divided into predetermined light fluxes, that is, in the optical path of the first split light flux, a predetermined λ / 4 A wavelength plate 15 and a polarizer 16 having a left-handed polarization characteristic are provided, and 0 is provided in the optical path of the second branched light flux.
A polarizer 17 with a transmission direction axis in the ° direction is provided, a polarizer 17 with a transmission direction axis in the 45 ° direction is provided in the optical path of the third branched light beam, and nothing is provided in the optical path of the fourth branched light beam. Absent.
【０００７】シングルモード光ファイバー５からの光束
は、レンズ１０により平行光にされる。楔型プリズムの
角度のついた面に入射した光は屈折し、楔型プリズムの
他の面に進み、更に屈折し出射する。図示のように、光
束Ｂ、Ｃ、Ａ、Ｄとなる。このように光学膜を使用しな
い光分岐方式により、偏光特性、位相の飛びの無い分岐
が可能となる。また、入出射面に反射防止膜（ＡＲコ−
ト）をしても、偏光特性、位相の飛びの無い偏光光束
は、十分可能である。その楔の角度は、複合組合わせプ
リズムを設計するときに任意に決定すれば良い。The light flux from the single mode optical fiber 5 is collimated by the lens 10. Light incident on the angled surface of the wedge prism is refracted, travels to the other surface of the wedge prism, and is further refracted and emitted. As shown, the light beams B, C, A, and D are obtained. In this way, the optical branching method that does not use an optical film enables branching without polarization characteristics and phase jumps. In addition, an antireflection film (AR coat
However, a polarized light beam having no polarization characteristic and phase jump is sufficiently possible. The angle of the wedge may be arbitrarily determined when designing the composite combination prism.
【０００８】更に、本発明の偏光解析器では、もう１つ
の組合わせ楔型プリズムを、第１の組合わせ楔型プリズ
ムの後に設けられ、光路を補正して、平行な光束が４つ
得られるようにする。即ち、楔型の分岐プリズムを利用
して透過させて即ち楔型の光路補正プリズムを用いて、
平行な４つの光束に分岐できるものである。Further, in the ellipsometer of the present invention, another combination wedge prism is provided after the first combination wedge prism, and the optical path is corrected to obtain four parallel light beams. To do so. That is, the light is transmitted using the wedge-shaped branch prism, that is, the wedge-shaped optical path correction prism is used,
It can be split into four parallel light beams.
【０００９】図３は、その第１及び第２の組合わせ楔型
プリズムと光路を断面図で示すものである。即ち、光フ
ァイバー５から光は、レンズ１０で平行光束にされ、第
１の複合組合わせ楔型プリズム１１、１２に入射し、更
に、第２の複合組合わせ楔型プリズム２１、２２に入射
し、互いに平行な光束にされる。即ち光路を補正するた
めの第２の複合組合わせ楔型プリズムが用いられる。以
上の分岐した４つの光束から、各々、偏光子、λ／４波
長板などにより、偏光成分Ｉｔ、偏光成分Ｉｘ、偏光成
分Ｉ45そして、４分の１波長板１５と偏光子１６を通過
する偏光成分をＩQ45とする。本発明の偏光解析器にお
いて、この４つの偏光成分Ｉｔ、Ｉｘ、Ｉ45、ＩQ45を
出力し、計算を行ない、偏光状態を観測することができ
る。FIG. 3 is a sectional view showing the first and second combination wedge prisms and the optical path. That is, the light from the optical fiber 5 is collimated by the lens 10, enters the first composite combination wedge prisms 11 and 12, and further enters the second composite combination wedge prisms 21 and 22. The light beams are made parallel to each other. That is, a second composite combination wedge prism for correcting the optical path is used. From the four branched light fluxes described above, a polarization component It, a polarization component Ix, a polarization component I 45, and a quarter wavelength plate 15 and a polarizer 16 are passed through a polarizer and a λ / 4 wavelength plate, respectively. The polarization component is I Q45 . In ellipsometer of the present invention, the four polarization components It, Ix, outputs I 45, I Q45, performs calculations, it is possible to observe a polarized state.
【００１０】次に、本発明を具体的に実施例により説明
するが、本発明はそれらによって限定されるものではな
い。Next, the present invention will be specifically described with reference to examples, but the present invention is not limited thereto.
【００１１】[0011]
【実施例１】図２は、本発明の偏光解析器を、組合わせ
楔型プリズムと光路で説明するものである。１１〜１４
は楔型プリズムであり、入射光は光ファイバー５からレ
ンズ１０を通って平行光束となって入射する。図２の
Ａ、Ｂ、Ｃ、Ｄは、組合わせプリズムにより分岐された
出射光である。光束Ｂは、プリズム１２で分岐された光
束で、光束Ｃは、プリズム１３で分岐された光束で、光
束Ａはプリズム１１で分岐された光束で、光束Ｄは、プ
リズム１４で分岐された光束である。[Embodiment 1] FIG. 2 illustrates a polarization analyzer of the present invention by using a combination wedge prism and an optical path. 11-14
Is a wedge-shaped prism, and the incident light enters the optical fiber 5 through the lens 10 as a parallel light flux. 2A, 2B, 2C, and 2D are emitted lights branched by the combination prism. The light flux B is the light flux branched by the prism 12, the light flux C is the light flux branched by the prism 13, the light flux A is the light flux branched by the prism 11, and the light flux D is the light flux branched by the prism 14. is there.
【００１２】即ち、４枚の全面高精度研磨された（角度
精度５”以内、面精度λ／２０以内）楔型プリズム１
１、１２、１３、１４から構成されている。各々のプリ
ズムは、オ−トコリメータ及び万能投影器で精密で各々
の角度位置の調整が行なわれており、光学接着剤で極力
薄く、即ち、１μｍ以下の薄さで、貼り合わせている。
例えば、プリズム１１は、中心角９０°で各面はλ／４
の精度で研磨されており、そしてプリズム１１の縁部の
２等角は、４５°であり、精度は±５”にされている。
その断面の楔形の角度は１５°で±５”の精度である。That is, the four wedge-shaped prisms 1 which have been polished all over the surface with high precision (angle accuracy within 5 ″, surface accuracy within λ / 20)
It is composed of 1, 12, 13, and 14. Each prism is precisely adjusted in its angular position by an autocollimator and a universal projector, and is bonded with an optical adhesive as thin as possible, that is, with a thickness of 1 μm or less.
For example, the prism 11 has a central angle of 90 ° and each surface has λ / 4.
The surface of the prism 11 is ground with an accuracy of .phi.
The wedge angle of its cross section is 15 ° with an accuracy of ± 5 ″.
【００１３】図２において、Ｚ軸方向から４ｍｍ径の平
行光ビームを入射し、一体式楔型プリズム１１、１２、
１３、１４をＸＹ方向に調整し、光分岐比を均等となる
ようにした。その結果、光出力で０．０１ｄＢ以下の均
等分岐が可能であった。In FIG. 2, a parallel light beam having a diameter of 4 mm is made incident from the Z-axis direction, and integrated wedge prisms 11 and 12,
13 and 14 were adjusted in the XY directions so that the optical branching ratios were equalized. As a result, even branching of 0.01 dB or less in optical output was possible.
【００１４】[0014]
【実施例２】図４は、本発明の偏光解析器を、複合組合
わせ楔型プリズムと光路で説明するものである。実施例
１と同様に、１１〜１４は楔型プリズムであり、入射光
は光ファイバー５からレンズ１０を通って入射する。図
示のように、更に、第１の複合組合わせ楔型プリズム１
１、１２、１３、１４の後に、第２の複合組合わせ楔型
プリズム２１、２２、２３、２４を設けたものである。
その分岐され互いに平行な４つの光束を、４分の１波長
板１５と偏光子１６で、左回り円偏光成分を得る、そし
て、偏光子１７により４５°偏光成分を得る。更に、偏
光子１８により、０°偏光成分を得る。そして、何ら偏
光子を介さないで、入射光の１／４出力を得る。[Embodiment 2] FIG. 4 illustrates a polarization analyzer of the present invention with a composite combination wedge prism and an optical path. Similar to the first embodiment, 11 to 14 are wedge prisms, and the incident light enters from the optical fiber 5 through the lens 10. As shown, a first composite combination wedge prism 1 is also provided.
The second composite combination wedge prisms 21, 22, 23, and 24 are provided after 1, 12, 13, and 14.
The quadrature plate 15 and the polarizer 16 obtain counterclockwise circularly polarized light components of the four branched and parallel light beams, and the polarizer 17 obtains a 45 ° polarization component. Further, the polarizer 18 obtains a 0 ° polarization component. Then, ¼ output of the incident light is obtained without passing through any polarizer.
【００１５】即ち、４枚の全面高精度研磨された（角度
精度５”以内、面精度λ／２０以内）の楔型プリズム１
１、１２、１３、１４から第１の組合わせプリズムは、
構成されている。各々のプリズムは、オ−トコリメータ
及び万能投影器で精密で各々の角度位置の調整が行なわ
れており、光学接着剤で極力薄く、即ち、１μｍ以下の
薄さで、貼り合わせている。そして、第２の組合わせプ
リズムも同様の精度と接着剤で薄く接着されたプリズム
２１、２２、２３、２４から構成されている。That is, the four wedge-shaped prisms 1 of which the entire surface is highly accurately polished (angle accuracy within 5 ″, surface accuracy within λ / 20)
The first combined prism from 1, 12, 13, 14 is
It is configured. Each prism is precisely adjusted in its angular position by an autocollimator and a universal projector, and is bonded with an optical adhesive as thin as possible, that is, with a thickness of 1 μm or less. The second combination prism is also composed of prisms 21, 22, 23 and 24 which are thinly adhered with the same precision and adhesive.
【００１６】図４において、Ｚ軸方向から４ｍｍ径の平
行光ビームを入射し、一体式楔型プリズム１１、１２、
１３、１４をＸＹ方向に調整し、光分岐比を均等となる
ようにした。そして、第２の組合わせプリズム２１、２
２、２３、２４もＸＹ方向に調整し、光分岐比が均等に
なるように調整設置されている。その結果、光出力で
０．０１ｄＢ以下の均等分岐が可能であった。In FIG. 4, a parallel light beam having a diameter of 4 mm is made incident from the Z-axis direction, and integrated wedge-shaped prisms 11 and 12,
13 and 14 were adjusted in the XY directions so that the optical branching ratios were equalized. Then, the second combined prisms 21, 2
2, 23, and 24 are also adjusted in the XY directions, and are adjusted and installed so that the optical branching ratios are uniform. As a result, even branching of 0.01 dB or less in optical output was possible.
【００１７】[0017]
【発明の効果】以上説明したように、本発明の偏光解析
器により、次のような顕著な技術的効果が得られた。第
１に、偏光特性がない偏光解析器を可能にした。第２
に、位相の飛びがない偏光解析器ができる。第３に、従
って、光分岐比が、０．０１ｄＢ以下の差で調整するこ
とができる偏光解析器が提供された。第４に、透過損失
はフレネル損失分のみの偏光解析器が得られた。第５
に、分岐した光束同士の相対角度が±０．０５°以内に
した互いに平行な分岐光束がえられ、光学部品及び光検
出器の組み立てが簡単な偏光解析器が得られた。従っ
て、光アイソレ−タ、光アッテネ−タ、光偏光制御、光
センサなどの幅広い範囲に応用することができる偏光解
析器を得られた。As described above, the polarization analyzer of the present invention has the following remarkable technical effects. First, it made possible a polarization analyzer without polarization characteristics. Second
In addition, a polarization analyzer with no phase jump can be created. Thirdly, therefore, an ellipsometer was provided in which the optical splitting ratio could be adjusted with a difference of 0.01 dB or less. Fourth, an ellipsometer having only Fresnel loss in transmission loss was obtained. Fifth
In addition, the parallel branched light beams in which the relative angles of the branched light beams were within ± 0.05 ° were obtained, and the polarization analyzer in which the optical parts and the photodetector were easily assembled was obtained. Therefore, a polarization analyzer that can be applied to a wide range of optical isolator, optical attenuator, optical polarization control, optical sensor, etc. was obtained.
【図面の簡単な説明】[Brief description of drawings]
【図１】従来の偏光解析器で用いる光分岐の方法を示す
説明図である。FIG. 1 is an explanatory diagram showing an optical branching method used in a conventional ellipsometer.
【図２】本発明の偏光解析器の光分岐方式を説明する説
明図である。FIG. 2 is an explanatory diagram illustrating an optical branching method of the polarization analyzer of the present invention.
【図３】本発明の偏光解析器の他の例の構造を示す断面
図である。FIG. 3 is a sectional view showing the structure of another example of the ellipsometer of the present invention.
【図４】本発明の偏光解析器の図４の構成の偏光解析器
を具体的に説明する説明図である。FIG. 4 is an explanatory diagram for specifically explaining the polarization analyzer of the configuration of FIG. 4 of the polarization analyzer of the present invention.
【符号の説明】 ５ シングルモード光フ
ァイバー １０ レンズ １１、１２、１３、１４ 楔型プリズム ２１、２２、２３、２４ 光路補正のための楔
型プリズム １５ ４分の１波長板 １６、１７、１８ 偏光子 ３１、３２、３３、３４ 光検出器[Explanation of Codes] 5 Single Mode Optical Fiber 10 Lens 11, 12, 13, 14 Wedge Prism 21, 22, 23, 24 Wedge Prism for Optical Path Correction 15 Quarter Wave Plate 16, 17, 18 Polarizer 31, 32, 33, 34 Photodetector
フロントページの続き (72)発明者 波平宣敬 埼玉県上福岡市大原２丁目１番15号国際電 信電話株式会社上福岡研究所内Front Page Continuation (72) Inventor Nobutaka Namihira, 2-15-15 Ohara, Kami-Fukuoka City, Saitama International Telegraph and Telephone Corporation, Kami-Fukuoka Research Center
Claims (2)
岐する、各々９０°の中心角で分岐された４つの楔型プ
リズムを一体化した複合組合わせプリズムを設け、該平
行光束を４つに分岐し、その複合プリズムで４つの分岐
された４つの平行光束に対して、各々所定の光束に対し
て、即ち、第１の分岐光束の光路には所定のλ／４波長
板と左回り偏光特性の偏光子を設け、第２の分岐光束の
光路には０°方向の透過方向軸の偏光子を設け、第３の
分岐光束の光路には、４５°方向の透過方向軸の偏光子
を設け、第４の分岐光束の光路には、何も設けずにした
ことを特徴とする偏光解析器。1. A composite combination prism in which four wedge-shaped prisms, each of which is branched at a central angle of 90 °, are integrated into four for a parallel light beam to be subjected to polarization analysis, is provided. Of the four parallel light beams split into four by the compound prism, and for each predetermined light beam, that is, in the optical path of the first split light beam, a predetermined λ / 4 wave plate and a left A polarizer having a circular polarization characteristic is provided, a polarizer having a transmission direction axis of 0 ° is provided in the optical path of the second branched light beam, and a polarization of a transmission direction axis of 45 ° is provided in the optical path of the third branched light beam. An ellipsometer characterized in that a child is provided and nothing is provided in the optical path of the fourth branched light flux.
更に、逆形となる第２の複合組合わせ楔型プリズムを設
けて、分岐された４つの光束が、互いに平行な光束にし
てあることを特徴とする請求項１に記載の偏光解析器。2. After the composite combined wedge prism,
2. The ellipsometer according to claim 1, further comprising a second composite combination wedge prism which is an inverted type, and the four branched light beams are parallel light beams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04185553A JP3103954B2 (en) | 1992-07-13 | 1992-07-13 | Ellipsometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04185553A JP3103954B2 (en) | 1992-07-13 | 1992-07-13 | Ellipsometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0634444A true JPH0634444A (en) | 1994-02-08 |
| JP3103954B2 JP3103954B2 (en) | 2000-10-30 |
Family
ID=16172826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04185553A Expired - Fee Related JP3103954B2 (en) | 1992-07-13 | 1992-07-13 | Ellipsometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3103954B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005283585A (en) * | 2004-03-29 | 2005-10-13 | Lucent Technol Inc | Optical analysis device for polarization characteristic |
| US7443503B2 (en) | 2003-11-05 | 2008-10-28 | Fujitsu Limited | Polarization measuring apparatus |
| JP2018124203A (en) * | 2017-02-02 | 2018-08-09 | アンリツ株式会社 | Polarized light analysis device and optical spectrum analyzer |
-
1992
- 1992-07-13 JP JP04185553A patent/JP3103954B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7443503B2 (en) | 2003-11-05 | 2008-10-28 | Fujitsu Limited | Polarization measuring apparatus |
| JP2005283585A (en) * | 2004-03-29 | 2005-10-13 | Lucent Technol Inc | Optical analysis device for polarization characteristic |
| JP2018124203A (en) * | 2017-02-02 | 2018-08-09 | アンリツ株式会社 | Polarized light analysis device and optical spectrum analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3103954B2 (en) | 2000-10-30 |
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