JPH0634830A - Fiber for ultraviolet ray transmission - Google Patents
Fiber for ultraviolet ray transmissionInfo
- Publication number
- JPH0634830A JPH0634830A JP4214713A JP21471392A JPH0634830A JP H0634830 A JPH0634830 A JP H0634830A JP 4214713 A JP4214713 A JP 4214713A JP 21471392 A JP21471392 A JP 21471392A JP H0634830 A JPH0634830 A JP H0634830A
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- hydrogen gas
- transmission
- ultraviolet ray
- gas atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Abstract
(57)【要約】
【目的】紫外線伝送用ファイバの構造を提供する。
【構成】ファイバとして、純粋石英コア−フッ素ドープ
石英クラッドのものを用いる。このファイバ１をステン
レスパイプ２内に収容し、このパイプ内を５〜１０ｋｇ
／ｃｍ2 の高圧の水素ガス雰囲気にしうるようにすると
ともに、ステンレスパイプ２の外側を発熱体４で覆っ
て、水素ス雰囲気を１００〜１５０℃の高温に維持でき
る構造とする。そして、ファイバへの紫外線伝送中また
は紫外線伝送後ファイバを上記高圧・高温の水素ガス雰
囲気に置く。これによって、ファイバは紫外線による伝
送損失増が阻止され、あるいは伝送損失増が生じても復
元される。
(57) [Summary] [Objective] To provide the structure of a fiber for ultraviolet transmission. [Structure] As the fiber, a fiber having a pure quartz core-fluorine-doped quartz clad is used. The fiber 1 is housed in a stainless steel pipe 2 and the inside of the pipe is 5 to 10 kg.
A high-pressure hydrogen gas atmosphere of / cm 2 is provided, and the stainless steel pipe 2 is covered with a heating element 4 so that the hydrogen atmosphere can be maintained at a high temperature of 100 to 150 ° C. Then, the fiber is placed in the hydrogen gas atmosphere of high pressure and high temperature during or after the ultraviolet ray transmission to the fiber. This prevents the fiber from increasing the transmission loss due to ultraviolet rays, or restores the fiber even if the transmission loss increases.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、エキシマレーザなど
の紫外線を伝送させるためのファイバ構造に関するもの
で、紫外線によるファイバの伝送損失の増加の抑制また
はその復元が可能な構造のものを提供する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fiber structure for transmitting ultraviolet rays such as excimer laser, and provides a structure capable of suppressing an increase in transmission loss of a fiber due to ultraviolet rays or restoring the same.
【０００２】[0002]
【従来の技術】エキシマレーザなどの紫外線を伝送させ
るファイバにおいては、コアとして純粋石英が採用され
ている。その理由は、Ｇｅドープ石英ではレーリ散乱に
よる損失量が紫外線領域で大きく、また、紫外線の透過
により損失増加が生じ透過率が減少してしまうからであ
る。この点、純粋石英は紫外線の透過による損失増加が
Ｇｅドープ石英よりも比較的小さいため、このような用
途に対して用いられる。さらに、純粋石英でもＯＨ基が
多量にドープされたものは効果的である。2. Description of the Related Art In a fiber for transmitting ultraviolet rays such as an excimer laser, pure quartz is used as a core. The reason is that in Ge-doped quartz, the amount of loss due to Rayleigh scattering is large in the ultraviolet region, and the loss increases due to the transmission of ultraviolet rays, resulting in a decrease in transmittance. In this respect, pure quartz has a relatively smaller increase in loss due to transmission of ultraviolet rays than Ge-doped quartz, and is therefore used for such applications. Furthermore, even pure quartz doped with a large amount of OH groups is effective.
【０００３】[0003]
【発明が解決しようとする課題】ところが、ファイバに
ＯＨ基をドープさせる手段としては、ＶＡＤ法などによ
って得られた多孔質の石英ガラスプリフォームを透明ガ
ラス化する際に、水素や水蒸気を流して行なうことが考
えられるが、このような方法によってもドープしうるＯ
Ｈ基量はせいぜい１０００ｐｐｍが限度である。このた
め、このような処理を施したファイバを用いても強い紫
外線を伝送させると伝送損失が増大することは否めなか
った。However, as a means for doping an OH group into a fiber, hydrogen or water vapor is caused to flow when a porous quartz glass preform obtained by the VAD method or the like is made into a transparent vitreous material. It is possible to do this, but it is possible to dope by such a method.
The amount of H group is 1000 ppm at most. Therefore, it is undeniable that transmission loss increases when strong ultraviolet rays are transmitted even with a fiber that has been subjected to such a treatment.
【０００４】[0004]
【課題を解決するための手段】この発明は、以上の観点
にたってなされたもので、その特徴とする請求項１記載
の発明は、コアが純粋石英、クラッドがフッ素ドープ石
英からなるファイバと、このファイバを収容する金属パ
イプと、この金属パイプ内に封入される高圧の水素ガス
と、この水素ガス雰囲気を高温に維持する発熱体とを具
備する紫外線伝送用ファイバにある。また、その特徴と
する請求項２記載の発明は、金属パイプ内に封入される
水素ガス圧が５〜１０ｋｇ／ｃｍ2 、水素ガス雰囲気温
度が１００〜１５０℃である紫外線伝送用ファイバにあ
る。なお、ファイバを高圧の水素ガス雰囲気下で高温に
加熱するのは、紫外線伝送中でもよく、また紫外線伝送
後でもよい。The present invention has been made in view of the above points, and the invention according to claim 1 is characterized in that a core is made of pure quartz and a clad is made of fluorine-doped quartz. An ultraviolet transmitting fiber includes a metal pipe that accommodates the fiber, a high-pressure hydrogen gas sealed in the metal pipe, and a heating element that maintains the hydrogen gas atmosphere at a high temperature. In addition, the invention according to claim 2 is an optical fiber for ultraviolet transmission in which the hydrogen gas pressure sealed in the metal pipe is 5 to 10 kg / cm 2 and the hydrogen gas atmosphere temperature is 100 to 150 ° C. The heating of the fiber to a high temperature under a high-pressure hydrogen gas atmosphere may be performed during the ultraviolet ray transmission or after the ultraviolet ray transmission.
【０００５】[0005]
【作用】紫外線伝送中にファイバを高圧の水素ガス雰囲
気下で高温に加熱することにより、ファイバの紫外線に
よる伝送損失増が抑制される。また、紫外線伝送によっ
て伝送損失増が生じたファイバを高圧の水素ガス雰囲気
下で高温に加熱することでその復元を図ることができ
る。By heating the fiber to a high temperature in a high-pressure hydrogen gas atmosphere during ultraviolet ray transmission, increase in transmission loss of the fiber due to ultraviolet ray is suppressed. Further, the fiber whose transmission loss has increased due to the ultraviolet ray transmission can be restored by heating it to a high temperature in a high-pressure hydrogen gas atmosphere.
【０００６】[0006]
【実施例】図１は、この発明の紫外線伝送用ファイバの
断面概略図である。図において、１は純粋石英コア−フ
ッ素ドープ石英クラッドからなるファイバで外側に紫外
線硬化型樹脂などの被覆が施されており、２はこの被覆
したファイバ１を収容するステンレスパイプ、３はこの
ステンレスパイプ２内の空隙部で、この空隙部３にはフ
ァイバ１への紫外線伝送中または紫外線伝送後に水素ガ
スが封入される。なお、このときの水素ガス圧は、５〜
１０ｋｇ／ｃｍ2 の高圧とされる。４はファイバ１を加
熱するための抵抗線からなる発熱体で、抵抗線はステン
レスパイプ２の周りに巻回されており、ファイバ１への
紫外線伝送中または紫外線伝送後のステンレスパイプ２
内の水素ガス雰囲気温度を約１００〜１５０℃の高温に
維持するためのものである。５は発熱体４の周りを覆う
断熱材で、例えばガラス繊維からなる。６は全体を覆う
保護層で、ステンレスのフレキシブル管からなる。かく
して、ファイバ１への紫外線伝送中、パイプ内空隙部３
に水素ガスを封入して上記ガス圧に維持するとともに、
この水素ガス雰囲気を上記温度に維持することによっ
て、ファイバ１の紫外線による劣化、すなわち伝送損失
増を抑制できる。また、ファイバ１への紫外線伝送後に
パイプ内空隙部３に水素ガスを封入して上記ガス圧に維
持するとともに、この水素ガス雰囲気を上記温度に維持
することにより、紫外線伝送により伝送損失増が生じた
ファイバ１の復元がなされる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic sectional view of the fiber for transmitting ultraviolet rays according to the present invention. In the figure, reference numeral 1 denotes a fiber made of pure quartz core-fluorine-doped quartz clad, which is coated with a UV-curable resin on the outside, 2 is a stainless pipe for housing the coated fiber 1, and 3 is this stainless pipe. Hydrogen gas is filled in the void portion 2 during or after the ultraviolet ray transmission to the fiber 1 in the void portion 3. The hydrogen gas pressure at this time is 5 to
A high pressure of 10 kg / cm 2 is applied. Reference numeral 4 denotes a heating element composed of a resistance wire for heating the fiber 1. The resistance wire is wound around the stainless pipe 2, and the stainless pipe 2 during or after ultraviolet transmission to the fiber 1 is transmitted.
This is for maintaining the hydrogen gas atmosphere temperature in the interior at a high temperature of about 100 to 150 ° C. Reference numeral 5 is a heat insulating material that covers the periphery of the heating element 4, and is made of, for example, glass fiber. Reference numeral 6 is a protective layer that covers the entire surface and is made of a stainless flexible tube. Thus, during transmission of ultraviolet light to the fiber 1, the void 3 in the pipe
Enclose hydrogen gas in and maintain the above gas pressure,
By maintaining the hydrogen gas atmosphere at the above temperature, deterioration of the fiber 1 due to ultraviolet rays, that is, increase in transmission loss can be suppressed. Further, after the ultraviolet ray is transmitted to the fiber 1, the hydrogen gas is sealed in the space 3 inside the pipe to maintain the above gas pressure, and the hydrogen gas atmosphere is maintained at the above temperature, thereby increasing the transmission loss due to the ultraviolet ray transmission. The restored fiber 1 is restored.
【０００７】（具体例１）コア径５０μｍ、ファイバ径
１２５μｍ、コアが純粋石英、クラッドがフッ素ドープ
石英、そしてコアとクラッドの比屈折率差が１％のファ
イバを用意した。このファイバの初期の伝送損失は、波
長３０８ｎｍで１００ｄＢ／ｋｍであった。このファイ
バを図１のようにステンレスパイプ２内に収容し、この
パイプ内に１０ｋｇ／ｃｍ2 の水素ガスを封入するとと
もに、この水素ガス雰囲気温度を１５０℃に維持した。
この状態でファイバ１にエキシマレーザ（ＸｅＣｌ）を
２０ｍＪ、１０００時間伝送した。エキシマレーザ伝送
中、ファイバの伝送損失は上記初期の伝送損失を維持し
増加することはなかった。(Specific Example 1) A fiber having a core diameter of 50 μm, a fiber diameter of 125 μm, a core of pure quartz, a clad of fluorine-doped quartz, and a relative refractive index difference of 1% between the core and the clad was prepared. The initial transmission loss of this fiber was 100 dB / km at a wavelength of 308 nm. This fiber was housed in a stainless steel pipe 2 as shown in FIG. 1, 10 kg / cm 2 of hydrogen gas was enclosed in this pipe, and the hydrogen gas atmosphere temperature was maintained at 150 ° C.
In this state, an excimer laser (XeCl) was transmitted to the fiber 1 at 20 mJ for 1000 hours. During the excimer laser transmission, the transmission loss of the fiber maintained the initial transmission loss and did not increase.
【０００８】（具体例２）具体例１のファイバを用い
て、まずエキシマレーザを２０ｍＪ、１０００時間伝送
した。その結果、伝送損失は１５０ｄＢ／ｋｍに増加し
た。このファイバを１５０℃、１０ｋｇ／ｃｍ2 の水素
ガス雰囲気に１２時間放置した。この処理によりファイ
バの伝送損失は初期と同じ１００ｄＢ／ｋｍに回復し
た。(Specific Example 2) Using the fiber of Specific Example 1, first, an excimer laser was transmitted at 20 mJ for 1000 hours. As a result, the transmission loss increased to 150 dB / km. This fiber was left in a hydrogen gas atmosphere at 150 ° C. and 10 kg / cm 2 for 12 hours. By this treatment, the transmission loss of the fiber was restored to 100 dB / km, which is the same as the initial value.
【０００９】[0009]
【発明の効果】この発明によると、純粋石英コア−フッ
素ドープ石英クラッドファイバは紫外線伝送中または紫
外線伝送後に、高温、高圧の水素ガス雰囲気に置かれる
ので、紫外線による伝送損失増の抑制を図ることがで
き、また、伝送損失増が生じたファイバを元の伝送損失
のレベルまで復元させることができる。According to the present invention, since the pure quartz core-fluorine-doped quartz clad fiber is placed in a hydrogen gas atmosphere of high temperature and high pressure during or after the transmission of ultraviolet rays, it is possible to suppress the increase of transmission loss due to ultraviolet rays. In addition, the fiber with the increased transmission loss can be restored to the original transmission loss level.
【図面の簡単な説明】[Brief description of drawings]
【図１】この発明の実施例を示す紫外線伝送ファイバの
断面図である。FIG. 1 is a sectional view of an ultraviolet transmission fiber showing an embodiment of the present invention.
１ 純粋石英コア−フッ素ドープ石英クラッドファイバ ２ ステンレスパイプ ３ 水素ガスが封入される空隙部 ４ 発熱体 ５ 断熱材 ６ 保護層 1 Pure Quartz Core-Fluorine-Doped Quartz Clad Fiber 2 Stainless Steel Pipe 3 Voids Filled with Hydrogen Gas 4 Heating Element 5 Thermal Insulation Material 6 Protective Layer
───────────────────────────────────────────────────── フロントページの続き (72)発明者 真田 和夫 千葉県佐倉市六崎1440番地 藤倉電線株式 会社佐倉工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuo Sanada 1440 Rokuzaki, Sakura City, Chiba Prefecture Fujikura Electric Wire Co., Ltd. Sakura Factory
Claims (2)
プ石英からなるファイバと、このファイバを収容する金
属パイプと、この金属パイプ内に封入される高圧の水素
ガスと、この水素ガス雰囲気を高温に維持する発熱体と
を具備することを特徴とする紫外線伝送用ファイバ。1. A fiber having a core made of pure quartz and a clad made of fluorine-doped quartz, a metal pipe accommodating the fiber, a high-pressure hydrogen gas sealed in the metal pipe, and the hydrogen gas atmosphere heated to a high temperature. A fiber for ultraviolet ray transmission, comprising a heating element for maintaining.
５〜１０ｋｇ／ｃｍ2 、水素ガス雰囲気温度が１００〜
１５０℃であることを特徴とする請求項１記載の紫外線
伝送用ファイバ。2. The hydrogen gas pressure sealed in the metal pipe is 5 to 10 kg / cm 2 , and the hydrogen gas atmosphere temperature is 100 to.
It is 150 degreeC, The fiber for ultraviolet ray transmission of Claim 1 characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4214713A JPH0634830A (en) | 1992-07-21 | 1992-07-21 | Fiber for ultraviolet ray transmission |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4214713A JPH0634830A (en) | 1992-07-21 | 1992-07-21 | Fiber for ultraviolet ray transmission |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0634830A true JPH0634830A (en) | 1994-02-10 |
Family
ID=16660389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4214713A Pending JPH0634830A (en) | 1992-07-21 | 1992-07-21 | Fiber for ultraviolet ray transmission |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634830A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1258754A3 (en) * | 2001-05-18 | 2004-07-14 | Fujikura Ltd. | Optical fiber bundle unit for transmitting ultraviolet light |
| US7277616B2 (en) | 2002-05-17 | 2007-10-02 | Sumitomo Electric Industries, Ltd. | Optical fiber bundle and method of manufacturing the same |
-
1992
- 1992-07-21 JP JP4214713A patent/JPH0634830A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1258754A3 (en) * | 2001-05-18 | 2004-07-14 | Fujikura Ltd. | Optical fiber bundle unit for transmitting ultraviolet light |
| US6892012B2 (en) | 2001-05-18 | 2005-05-10 | Fujikura, Ltd. | Optical fiber bundle unit for transmitting ultraviolet light |
| US7813607B2 (en) | 2001-05-18 | 2010-10-12 | Fujikura Ltd. | Optical fiber bundle unit for transmitting ultraviolet light |
| US7277616B2 (en) | 2002-05-17 | 2007-10-02 | Sumitomo Electric Industries, Ltd. | Optical fiber bundle and method of manufacturing the same |
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