JPH0636480Y2 - O-ring overheat prevention structure for chamber viewing window - Google Patents
O-ring overheat prevention structure for chamber viewing windowInfo
- Publication number
- JPH0636480Y2 JPH0636480Y2 JP1134388U JP1134388U JPH0636480Y2 JP H0636480 Y2 JPH0636480 Y2 JP H0636480Y2 JP 1134388 U JP1134388 U JP 1134388U JP 1134388 U JP1134388 U JP 1134388U JP H0636480 Y2 JPH0636480 Y2 JP H0636480Y2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- chamber
- viewing window
- cooling water
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002265 prevention Effects 0.000 title claims 2
- 239000000498 cooling water Substances 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 239000011521 glass Substances 0.000 claims description 10
- 239000005357 flat glass Substances 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000013021 overheating Methods 0.000 description 3
- 244000144985 peep Species 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Furnace Details (AREA)
Description
【考案の詳細な説明】 〔産業上の利用分野〕 本考案は、真空チャンバの覗窓周部において、Ｏリング
へ伝わる熱を途中で奪い取り、Ｏリングの過熱を防止す
る構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a structure for removing heat transmitted to an O-ring in the periphery of a viewing window of a vacuum chamber on the way to prevent overheating of the O-ring.
従来は、図面を参照して説明するとチャンバ１の覗窓周
部にＯリング２を介在させて覗窓ガラス３の外周部を押
えフランジ４で押え，固定すると共にＯリング２の過熱
を防止するためＯリング２の近くに冷却水通路を設け、
この冷却水通路に冷却水を流す構成であった。Conventionally, with reference to the drawings, an O-ring 2 is interposed around the viewing window of the chamber 1 to press and fix the outer peripheral portion of the viewing glass 3 with a holding flange 4 and prevent the O-ring 2 from overheating. Therefore, a cooling water passage is provided near the O-ring 2.
The cooling water flowed through the cooling water passage.
しかし上記従来例にあっては、チャンバ１内部の熱源よ
り熱輻射により覗窓ガラス３が熱せられ、この覗窓ガラ
ス３の熱がＯリング２に熱伝導により伝えられ、この熱
せられたＯリング２をこの付近の冷却水通路に流されて
いる冷却水で冷却できるが、覗窓ガラス３の熱がＯリン
グ２に伝達する以前に当該覗窓ガラス３を冷却するもの
でないため、Ｏリング２を充分に冷却することができ
ず、覗窓ガラス３とＯリング２が溶着するおそれがあ
る。またこの問題を解決するため、耐熱性のＯリングを
使用すると、Ｏリングの価格が高いので安価に実施でき
ないという課題がある。However, in the above-mentioned conventional example, the viewing window glass 3 is heated by the heat radiation from the heat source inside the chamber 1, and the heat of the viewing window glass 3 is transferred to the O-ring 2 by heat conduction, and the heated O-ring. 2 can be cooled by the cooling water flowing in the cooling water passage in the vicinity thereof, but the O-ring 2 does not cool the viewing glass 3 before the heat of the viewing glass 3 is transferred to the O-ring 2. Cannot be sufficiently cooled, and the sight glass 3 and the O-ring 2 may be welded. Further, if a heat resistant O-ring is used to solve this problem, the cost of the O-ring is so high that it cannot be carried out inexpensively.
本考案構造は上記の課題を解決するため、図示のように
チャンバ１の覗窓周部にＯリング２を介在させて覗窓ガ
ラス３の外周部を押えフランジ４で押え，固定してなる
チャンバの覗窓部において、チャンバ１の覗窓周部に当
接するＯリング２より手前に、覗窓ガラス３の外周部に
当接する良好な熱伝導板５を介装せしめ、この良好な熱
伝導板５の付近に、冷却水通路６を設けて構成したもの
である。In order to solve the above-mentioned problems, the structure of the present invention is a chamber in which an O-ring 2 is interposed in the peripheral portion of a viewing window of a chamber 1 as shown in the drawing, and the outer peripheral portion of the viewing glass 3 is pressed by a holding flange 4 and fixed. In the peep window part, a good heat conduction plate 5 abutting on the outer peripheral part of the peep window glass 3 is interposed in front of the O-ring 2 abutting on the peripheral part of the peep window of the chamber 1. A cooling water passage 6 is provided in the vicinity of 5.
覗窓ガラス３を伝わってくる熱は、Ｏリング２の手前に
設けられた良好な熱伝導板５に伝達され、この熱伝導板
５の熱は、この付近の冷却水通路６を流れる冷却水によ
り冷却されることになり、Ｏリング２へ伝わる熱が少な
くなる。The heat transmitted through the window glass 3 is transmitted to a good heat conducting plate 5 provided in front of the O-ring 2, and the heat of the heat conducting plate 5 is the cooling water flowing through the cooling water passage 6 in the vicinity thereof. As a result, the heat transmitted to the O-ring 2 is reduced.
図面は本考案構造の一実施例の要部を示す断面図であ
る。The drawing is a cross-sectional view showing an essential part of an embodiment of the structure of the present invention.
チャンバ１の覗窓周部には、Ｏリング２を介在させて覗
窓ガラス３の外周部が押えフランジ４で押さえられ、図
示しないネジ類等で固定されている。チャンバ１の覗窓
周部に当接するＯリング２より手前には覗窓ガラス３の
外周部に当接する良好な熱伝導板，例えば銅板５が介装
されており、この良好な熱伝導銅板５の付近のチャンバ
１内には、冷却水通路６が設けられている。The outer periphery of the viewing window glass 3 is pressed to the peripheral portion of the viewing window of the chamber 1 with an O-ring 2 by a holding flange 4, and is fixed with screws or the like not shown. A good heat conducting plate, for example, a copper plate 5 that comes into contact with the outer peripheral portion of the viewing window glass 3 is interposed in front of the O-ring 2 that comes into contact with the peripheral portion of the viewing window of the chamber 1. A cooling water passage 6 is provided in the chamber 1 in the vicinity of.
また、チャンバ１の覗窓周部のＯリング２とは反対側に
はジョイントシート，例えばポリテトラフルオロエチレ
ンシート８が介挿され、このシート８の付近の押えフラ
ンジ４内には冷却水通路７が設けられている。Further, a joint sheet, for example, a polytetrafluoroethylene sheet 8 is inserted on the side opposite to the O-ring 2 in the peripheral portion of the viewing window of the chamber 1, and a cooling water passage 7 is provided in the holding flange 4 near the sheet 8. Is provided.
この実施例において覗窓ガラス３を伝わってくる熱は、
Ｏリング２の手前に設けられた良好な熱伝導銅板５に伝
達され、この熱伝導銅板５の熱は、この付近の冷却水通
路６を流れる冷却水により冷却されることになり、Ｏタ
ング２へ伝わる熱が少なくなる。In this embodiment, the heat transmitted through the window glass 3 is
The heat of the heat conducting copper plate 5 is transferred to a good heat conducting copper plate 5 provided in front of the O-ring 2, and the heat of the heat conducting copper plate 5 is cooled by the cooling water flowing through the cooling water passage 6 in the vicinity thereof. Less heat is transferred to.
また、石英ガラス３のＯリング２側とは反対側に設けら
れた保護用のシート８に伝達された熱は、この付近の冷
却水通路７を流れる冷却水により冷却されることにな
る。Further, the heat transferred to the protective sheet 8 provided on the side of the quartz glass 3 opposite to the O-ring 2 side is cooled by the cooling water flowing in the cooling water passage 7 in the vicinity thereof.
上述のように本考案によれば、チャンバ１の覗窓周部に
当接するＯリング２より手前に、覗窓ガラス３の外周部
に当接する良好な熱伝導板５を介装せしめ、この良好な
熱伝導板５の付近に、冷却水通路６を設けて構成したも
のであるから、覗窓ガラス３を伝わってくる熱は、Ｏリ
ング２の手前に設けられた良好な熱伝導板５に伝達さ
れ、この熱伝導板５の熱は、この付近の冷却水通路６を
流れる冷却水により冷却されることになり、Ｏリング２
へ伝わる熱が少なくなるので、Ｏリング２の過熱を防止
できると共に、高価な耐熱性のＯリングを使用する必要
がないため、安価に実施することができる。As described above, according to the present invention, a good heat conduction plate 5 that contacts the outer peripheral portion of the sight glass 3 is interposed in front of the O-ring 2 that contacts the peripheral portion of the sight glass of the chamber 1. Since the cooling water passage 6 is provided in the vicinity of the heat conduction plate 5, the heat transmitted through the sight glass 3 is transmitted to the good heat conduction plate 5 provided in front of the O-ring 2. The heat transmitted to the heat conduction plate 5 is cooled by the cooling water flowing through the cooling water passage 6 in the vicinity thereof, and the O ring 2
Since the heat transmitted to the O-ring 2 is reduced, overheating of the O-ring 2 can be prevented, and since it is not necessary to use an expensive heat-resistant O-ring, the O-ring 2 can be implemented at low cost.
図面は本考案構造の一実施例の要部を示す断面図であ
る。 １……チャンバ、２……Ｏリング、３……覗窓（石英）
ガラス、４……押えフランジ、５……良好な熱伝導
（銅）板、6,7……冷却水通路、８……ジョイントシー
ト（ポリテトラフルオロエチレン）。The drawing is a cross-sectional view showing an essential part of an embodiment of the structure of the present invention. 1 ... Chamber, 2 ... O-ring, 3 ... Viewing window (quartz)
Glass, 4 ... Holding flange, 5 ... Good heat conduction (copper) plate, 6, 7 ... Cooling water passage, 8 ... Joint sheet (polytetrafluoroethylene).
Claims (2)
させて覗窓ガラス３の外周部を押えフランジ４で押え，
固定してなるチャンバの覗窓部において、チャンバ１の
覗窓周部に当接するＯリング２より手前に、覗窓ガラス
３の外周部に当接する良好な熱伝導板５を介装せしめ、
この良好な熱伝導板５の付近に、冷却水通路６を設けて
構成したチャンバ覗窓用Ｏリングの過熱防止構造。1. An O-ring 2 is interposed in the peripheral portion of the viewing window of the chamber 1 to hold the outer peripheral portion of the viewing window glass 3 with a holding flange 4.
In the fixed view port of the chamber, a good heat conduction plate 5 that contacts the outer peripheral part of the view glass 3 is inserted in front of the O-ring 2 that contacts the peripheral part of the view window of the chamber 1.
An overheat preventing structure for an O-ring for a chamber viewing window, which is configured by providing a cooling water passage 6 in the vicinity of the good heat conduction plate 5.
対側の押えフランジ４部分に冷却水通路７を設けてなる
実用新案登録請求の範囲第１項記載のチャンバ覗窓用Ｏ
リングの過熱防止構造。2. A chamber viewing window O according to claim 1, wherein a cooling water passage 7 is provided in a holding flange 4 portion of the chamber 1 at the periphery of the viewing window opposite to the O-ring 2.
Ring overheat prevention structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1134388U JPH0636480Y2 (en) | 1988-01-29 | 1988-01-29 | O-ring overheat prevention structure for chamber viewing window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1134388U JPH0636480Y2 (en) | 1988-01-29 | 1988-01-29 | O-ring overheat prevention structure for chamber viewing window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01116400U JPH01116400U (en) | 1989-08-04 |
| JPH0636480Y2 true JPH0636480Y2 (en) | 1994-09-21 |
Family
ID=31219815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1134388U Expired - Lifetime JPH0636480Y2 (en) | 1988-01-29 | 1988-01-29 | O-ring overheat prevention structure for chamber viewing window |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636480Y2 (en) |
-
1988
- 1988-01-29 JP JP1134388U patent/JPH0636480Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01116400U (en) | 1989-08-04 |
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