JPH0637352A - Optical coupling device and manufacturing method - Google Patents
Optical coupling device and manufacturing methodInfo
- Publication number
- JPH0637352A JPH0637352A JP18718392A JP18718392A JPH0637352A JP H0637352 A JPH0637352 A JP H0637352A JP 18718392 A JP18718392 A JP 18718392A JP 18718392 A JP18718392 A JP 18718392A JP H0637352 A JPH0637352 A JP H0637352A
- Authority
- JP
- Japan
- Prior art keywords
- light
- emitting element
- receiving element
- case
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Abstract
(57)【要約】
【目的】 性能に対する信頼性が高く、製造コストが安
価にできる光結合装置およびその製造方法を提供するこ
と。
【構成】 導体配線(1−1)、(1−2)を備えた絶
縁性凹形ケース20の凹部底面に発光素子13、受光素
子14を設け、上面に反射面9を有する遮光性キャップ
10を設けた光結合装置において、受光素子14、発光
素子13上部に透光性光ガイド板24aを設け、透光性
光ガイド板24a下面に設けられた導体配線(1−3)
と、受、発光素子14,13の上部電極をバンプ接続す
ること。
(57) [Summary] [Object] To provide an optical coupling device having high performance reliability and low manufacturing cost, and a manufacturing method thereof. A light-shielding cap 10 having a light-emitting element 13 and a light-receiving element 14 on a bottom surface of a concave portion of an insulating concave case 20 having conductor wirings (1-1) and (1-2), and a reflecting surface 9 on an upper surface thereof. In the optical coupling device provided with, the light-transmissive light guide plate 24a is provided on the light-receiving element 14 and the light-emitting element 13, and the conductor wiring (1-3) provided on the lower surface of the light-transmissive light guide plate 24a.
And bump-connect the upper electrodes of the light-receiving and light-emitting elements 14 and 13.
Description
【0001】[0001]
【産業上の利用分野】この発明は、光結合装置およびそ
の製造方法に関し、性能の安定性および信頼性が高く、
しかも、製造方法が容易で、製造に要する作業時間が短
かく、製造コストが低減できるチップ型光結合装置およ
びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical coupling device and a method of manufacturing the same, which has high performance stability and reliability,
Moreover, the present invention relates to a chip-type optical coupling device and a manufacturing method thereof, in which the manufacturing method is easy, the working time required for manufacturing is short, and the manufacturing cost can be reduced.
【0002】[0002]
【従来の技術】この種の光結合装置、殊にチップ型光結
合装置は、従来から、図13(a)ないし(c)に示す
構成になっていた。この図13(a)は従来のチップ型
光結合装置の斜視図を示し、図13(b)は図13
(a)のA−A断面図、図13(c)は図13(a)の
B−B断面図である。上述した従来のチップ型光結合装
置は、内面が凹状に形成されたケースの凹部内面に、発
光素子および受光素子に接続する導体配線(1−1)お
よび(1−2)を設けた絶縁性凹形ケース20と、この
絶縁性凹形ケース20の凹部底面に延設した導体配線
(1−1)および(1−2)と、凹部内に設置する発光
素子および受光素子の底部電極(3−1)、(4−1)
をそれぞれ図示しない導電性接着剤により隣接して接続
した対のチップ型発光素子3および受光素子4と、この
チップ型発光素子3および受光素子の上部電極(3−
2)および(4−2)にワイヤボンディングにより接続
した導電性ワイヤ5,6と、前記チップ型発光素子3お
よび受光素子4を絶縁性凹形ケース20の凹部内に埋設
した透光性封止層26と、絶縁性凹形ケース20の開口
部上部に設けた透光性封止層26側に反射面9を有する
遮光性キャップ10と、から成っている。2. Description of the Related Art An optical coupling device of this type, particularly a chip type optical coupling device, has conventionally been constructed as shown in FIGS. 13 (a) to 13 (c). 13A shows a perspective view of a conventional chip type optical coupling device, and FIG. 13B shows FIG.
13A is a sectional view taken along line AA, and FIG. 13C is a sectional view taken along line BB in FIG. 13A. The conventional chip-type optical coupling device described above has an insulating property in which conductor wirings (1-1) and (1-2) for connecting to a light emitting element and a light receiving element are provided on the inner surface of a recess of a case having an inner surface formed in a concave shape. The concave case 20, the conductor wirings (1-1) and (1-2) extending on the bottom surface of the concave portion of the insulating concave case 20, and the bottom electrodes (3) of the light emitting element and the light receiving element installed in the concave portion. -1), (4-1)
Of the chip type light emitting element 3 and the light receiving element 4 connected to each other by a conductive adhesive (not shown), and the upper electrodes (3-) of the chip type light emitting element 3 and the light receiving element.
2) and (4-2), the conductive wires 5 and 6 connected to each other by wire bonding, and the chip type light emitting element 3 and the light receiving element 4 are embedded in the recess of the insulating recessed case 20. It is composed of a layer 26 and a light-shielding cap 10 having a reflecting surface 9 on the side of the translucent sealing layer 26, which is provided above the opening of the insulating concave case 20.
【0003】[0003]
【発明が解決しようとする課題】ところが、上述した従
来のチップ型光結合装置には、次のような難点があっ
た。 (1) 絶縁性凹形ケース20の凹部内に設置したチッ
プ型発光素子3及び受光素子4の上部電極(3−2)、
(4−2)と絶縁性凹形ケース20に形成された電極
(3−1)、(4−1)とを導体性ワイヤ5,6でボン
デングするための作業に時間がかかるため製造コストが
嵩む。 (2) また、使用する導体性ワイヤはボンディング圧
着のため細線を用いる関係上、接続部分の面積は小さ
く、高密着強度が得難い。 (3) また、絶縁性凹形ケース20の凹部内において
ワイヤボンディングするため、ワイヤボンディングする
電極を形成しておかなければならないという難点があっ
た。このため、電極を形成するためのプロセスが制限を
受け、しかも、そのプロセスの管理は厳密に行わなけれ
ばならないという具合の悪い点があった。However, the conventional chip-type optical coupling device described above has the following drawbacks. (1) Upper electrodes (3-2) of the chip type light emitting device 3 and the light receiving device 4 installed in the recess of the insulating recessed case 20,
Since it takes time to bond (4-2) and the electrodes (3-1) and (4-1) formed on the insulating concave case 20 with the conductive wires 5 and 6, the manufacturing cost is reduced. Bulky. (2) Further, since the conductive wire used is a thin wire for bonding and crimping, the area of the connecting portion is small and it is difficult to obtain high adhesion strength. (3) Further, since wire bonding is performed in the concave portion of the insulating concave case 20, there is a drawback that an electrode for wire bonding must be formed. Therefore, the process for forming the electrode is limited, and the process must be strictly controlled.
【0004】以上のような具合の悪い点を除去するた
め、図14に示すように、絶縁性凹形ケース20の凹部
内に設置したチップ型発光素子3および受光素子4の周
囲を透光性封止層26で埋設し、透光性封止層26上
に、下面に配線導体(図示せず)を設けた非透光性樹脂
層11を設け、非透光性樹脂層11下面の配線導体と発
光素子3および受光素子4の上部電極とをバンプ接続す
る手法が考えられる。しかし、この手法によると、発光
素子3より放射された光の内、上方に放出された光は非
透光性樹脂層11で遮られるため、受光素子4に達する
光は極めて少なくなる。In order to eliminate the above-mentioned unsatisfactory point, as shown in FIG. 14, the surroundings of the chip type light emitting element 3 and the light receiving element 4 installed in the concave portion of the insulating concave case 20 are transparent. The non-translucent resin layer 11 which is embedded in the sealing layer 26 and has a wiring conductor (not shown) on the lower surface is provided on the translucent sealing layer 26, and the wiring on the lower surface of the non-translucent resin layer 11 is provided. A method of bump-connecting the conductor and the upper electrodes of the light emitting element 3 and the light receiving element 4 can be considered. However, according to this method, the light emitted upward from the light emitted from the light emitting element 3 is blocked by the non-translucent resin layer 11, so that the light reaching the light receiving element 4 becomes extremely small.
【0005】そこで、この発明では、上述した従来構造
の光結合装置の難点を除去し、絶縁性凹形ケースの凹部
底面に延設した発光素子および受光素子電極に接続する
導体配線と発光素子および受光素子の電極との接続が容
易、かつ、強固で、しかもその接続加工時間が短かく、
製造コストが低減でき、しかも、性能が安定し、信頼性
の高い光結合装置および製造方法を提供しようとするも
のである。Therefore, according to the present invention, the above-mentioned disadvantages of the optical coupling device having the conventional structure are eliminated, and the conductor wiring and the light emitting element connected to the light emitting element and the light receiving element electrode extending on the bottom surface of the concave portion of the insulating concave case, Easy and strong connection with the electrode of the light receiving element, and its connection processing time is short,
It is an object of the present invention to provide an optical coupling device and a manufacturing method that can reduce the manufacturing cost, have stable performance, and have high reliability.
【0006】[0006]
【課題を解決するための手段】以上の目的を達成するた
め、この発明にかかる請求項1の光結合装置は、内面が
凹状に形成されたケースの凹部底面に設けた発光素子お
よび受光素子電極と接続する導体配線を備えた絶縁性凹
形ケースと、この絶縁性凹形ケースの凹部底面に設けた
底部電極が前記導体配線と接続し互いに隣接配設された
対の発光素子および受光素子と、前記対の発光素子およ
び受光素子と絶縁性凹形ケースの凹部底面内を埋設する
ように配した透光性封止層と、前記絶縁性凹形ケースの
凹部底面内を埋設した透光性封止層上に、下部に前記絶
縁性凹形ケース内発光素子および受光素子の上部電極と
それぞれ接続する導体配線を備えた透光性光ガイド層
と、前記絶縁性凹形ケースの開口部上に、透光性光ガイ
ド層側に反射面を備えた遮光性キャップを設けた。In order to achieve the above object, an optical coupling device according to a first aspect of the present invention is a light emitting element and a light receiving element electrode provided on the bottom surface of a recess of a case having an inner surface formed in a concave shape. An insulative concave case provided with a conductor wiring to be connected to, and a pair of a light emitting element and a light receiving element in which a bottom electrode provided on the bottom surface of the concave portion of the insulative concave case is connected to the conductor wiring and arranged adjacent to each other. A pair of light-emitting element and light-receiving element and a translucent sealing layer arranged so as to fill the bottom of the concave portion of the insulating concave case; and a light-transmitting property of filling the bottom of the concave portion of the insulating concave case. On the sealing layer, a translucent light guide layer having conductor wirings which are respectively connected to the upper electrodes of the light emitting element and the light receiving element in the insulating concave case, and on the opening of the insulating concave case. In addition, a reflective surface is provided on the translucent light guide layer side. The light-shielding cap provided.
【0007】また、この光結合装置の製造は請求項2に
示すように、予め凹部底面に発光素子および受光素子電
極に接続する導体配線を備えた絶縁性凹形ケースを準備
した後、この絶縁性凹形ケースの凹部底面に上部電極に
予めバンプを載置した発光素子および受光素子を隣接配
置する第1の工程と、第1の工程後、絶縁性凹形ケース
内凹部底面の発光素子および受光素子の上部電極に接続
する導体配線を設けた透光性光ガイド層として透光性光
ガイド板を配置する第2の工程と、第2の工程後、透光
性光ガイド板を通して発光素子および受光素子の上部電
極に赤外線を照射し上部電極に載置したバンプを加熱溶
融して透光性光ガイド板下面の導体配線と発光素子およ
び受光素子の上部電極とを接続する第3の工程と、第3
の工程後、絶縁性凹形ケースの凹部底面内に透光性樹脂
を注入し凹部内を充填し透光性封止層である透光性樹脂
層で設ける第4の工程と、第4の工程後、絶縁性凹形ケ
ース開口部上に設ける透光性光ガイド側に反射面を有す
る遮光性キャップとして遮光体を設置する第5の工程
と、から成るものである。In order to manufacture this optical coupling device, as described in claim 2, an insulating concave case having conductor wirings for connecting to the light emitting element and the light receiving element electrode is prepared in advance on the bottom surface of the concave section, and then this insulating case is prepared. First step of arranging a light emitting element and a light receiving element having bumps previously mounted on the upper electrode on the bottom surface of the concave portion of the concave concave case, and a light emitting element on the bottom surface of the concave portion inside the insulating concave case after the first step, and A second step of disposing a translucent light guide plate as a translucent light guide layer provided with conductor wiring connected to the upper electrode of the light receiving element, and a light emitting element through the translucent light guide plate after the second step And a third step of irradiating the upper electrode of the light receiving element with infrared rays to heat and melt the bumps mounted on the upper electrode to connect the conductor wiring on the lower surface of the translucent light guide plate to the upper electrodes of the light emitting element and the light receiving element. And the third
After the step of, a fourth step of injecting a transparent resin into the bottom surface of the concave portion of the insulating concave case to fill the concave portion with a transparent resin layer which is a transparent sealing layer, and After the step, a fifth step of installing a light-shielding body as a light-shielding cap having a reflecting surface on the side of the translucent light guide provided on the opening of the insulating concave case is included.
【0008】[0008]
【作用】以上のように構成され、請求項1の光結合装置
は、絶縁性凹形ケースの凹部底面に、底部電極が導体配
線と接続し互いに隣接配設された対の発光素子および受
光素子と、前記対の発光素子および受光素子と絶縁性凹
形ケースの凹部底面内を埋設するように配した透光性封
止層と、前記絶縁性凹形ケースの凹部底面内を埋設した
透光性封止層上に設けられ、下部に前記絶縁性凹形ケー
ス内の発光素子および受光素子の上部電極と接続する導
体配線を備えた透光性光ガイド層と、を有し、さらに、
前記絶縁性凹形ケースの開口部上に、透光性光ガイド側
に反射面を有する遮光体が設けられているから、発光素
子から放射された光は効率よく受光素子に入射させるこ
とができる。また、請求項2の製造方法によれば、絶縁
性凹形ケースの凹部底面において発光素子側導体配線お
よび受光素子側導体配線上にそれぞれ接続した対の発光
素子および受光素子は各々の上部電極上に載置したバン
プを介して、透光性封止層上に設けた透光性光ガイド層
下部の導体配線と受、発光素子及び絶縁性凹形ケースの
凹部底面の導体配線もバンプを介して電気的に接続す
る。したがって、このような対の発光素子および受光素
子を複数個、後述するように、絶縁性凹形ケースおよび
透光性光ガイド板を介して、同時に接続することができ
る。それ故、ワイヤボンディングにより1個ずつ絶縁性
凹形ケースの凹部底面上の電極と接続して構成される従
来の光結合装置に比べて製造コストおよび製造時間は大
幅に低下できる。またワイヤボンディングにより接続さ
れる光結合装置は電極とワイヤとの接続部分の面積が小
さいため、接続部分で大きな密着強度を得ることが難し
いが、本発明の光結合装置は、半田等のバンプを介して
透光性光ガイド層の導体配線と発光素子、受光素子の上
部電極とが接続されるため、接続導体の寸法は短くて済
み、かつ、接続面積は大きくなるため、従来の光結合装
置で必要であったケースの凹部内にワイヤボンディング
に必要であった導体層を設ける必要がなくなり、凹形ケ
ースを低コストで製造することができる。According to the optical coupling device of the present invention, the pair of the light emitting element and the light receiving element, in which the bottom electrode is connected to the conductor wiring and are disposed adjacent to each other, are provided on the bottom surface of the recess of the insulating concave case. A pair of the light emitting element and the light receiving element, and a translucent sealing layer arranged so as to embed the recessed bottom surface of the insulating concave case, and a translucent light embedded in the recessed bottom surface of the insulating concave case. A light-transmitting light guide layer, which is provided on a transparent sealing layer and has conductor wiring connected to the upper electrodes of the light-emitting element and the light-receiving element in the insulating concave case at the bottom, and,
Since the light shield having the reflecting surface on the translucent light guide side is provided on the opening of the insulating concave case, the light emitted from the light emitting element can be efficiently incident on the light receiving element. . According to the manufacturing method of claim 2, the pair of the light emitting element and the light receiving element connected to the light emitting element side conductor wiring and the light receiving element side conductor wiring on the bottom surface of the concave portion of the insulating concave case are provided on the respective upper electrodes. Via the bumps mounted on the light-transmitting encapsulating layer and the conductor wiring under the light-transmitting light guide layer, and the light-emitting element and the conductor wiring on the bottom of the recess of the insulating recessed case also pass through the bumps. Connect electrically. Therefore, a plurality of such pairs of light emitting element and light receiving element can be simultaneously connected through the insulating concave case and the translucent light guide plate as described later. Therefore, the manufacturing cost and the manufacturing time can be significantly reduced as compared with the conventional optical coupling device configured by connecting one by one to the electrode on the bottom surface of the concave portion of the insulating concave case by wire bonding. Further, in the optical coupling device connected by wire bonding, it is difficult to obtain a large adhesion strength at the connection portion because the area of the connection portion between the electrode and the wire is small, but the optical coupling device of the present invention has a bump such as solder. Since the conductor wiring of the translucent light guide layer is connected to the upper electrodes of the light emitting element and the light receiving element via the above, the dimension of the connection conductor can be short, and the connection area is large. Since it is no longer necessary to provide the conductor layer required for wire bonding in the recess of the case, which is necessary in the above case, the recessed case can be manufactured at low cost.
【0009】[0009]
【実施例】以下、図面に基づいてこの発明の光結合装置
および製造方法について説明する。本実施例の光結合装
置30は、図1ないし図2に示す構成となっている。た
だし、図1は本実施例の光結合装置の斜視図であり、図
2(a)は図1のA−A断面図、図2(b)は図1のB
−B断面図である。本実施例の光結合装置30は、内面
が凹状に形成され、その凹部底面に後述する発光素子1
3および受光素子14の底部電極に接続する導体配線
(1−1)、(1−2)を設けた絶縁性凹形ケース20
と、この絶縁性凹形ケース20の凹部底面に、底部電極
がそれぞれ、前記導体配線(1−1)および(1−2)
に接続し隣接配置された対の発光素子13および受光素
子14と、この対の発光素子13および受光素子14と
前記絶縁性凹形ケース20の凹部内を埋設するように充
填した透光性エポキシ樹脂層26からなる透光性封止層
と、前記絶縁性凹形ケース20の凹部内に充填した透光
性エポキシ樹脂層26上に設けられ、下部に前記絶縁性
凹形ケース20内の対の発光素子13および受光素子1
4の上部電極にそれぞれ接続する導体配線(1−3)を
備えた透光性光ガイド層としての透光性ガイド板24
と、前記絶縁性凹形ケース20の開口部上部に、透光性
ガイド板24側に反射面9を有する遮光性キャップとし
て遮光体10と、を備えている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An optical coupling device and a manufacturing method of the present invention will be described below with reference to the drawings. The optical coupling device 30 of the present embodiment has the configuration shown in FIGS. However, FIG. 1 is a perspective view of the optical coupling device of the present embodiment, FIG. 2A is a sectional view taken along the line AA of FIG. 1, and FIG.
It is a -B sectional view. The optical coupling device 30 of the present embodiment has a concave inner surface, and the light emitting element 1 described later is formed on the bottom surface of the concave portion.
3 and insulating concave case 20 provided with conductor wirings (1-1) and (1-2) connected to the bottom electrode of the light receiving element 14.
And the bottom electrodes on the bottom surface of the concave portion of the insulating concave case 20 are the conductor wirings (1-1) and (1-2), respectively.
A pair of the light emitting element 13 and the light receiving element 14 that are adjacently connected to each other, the light emitting element 13 and the light receiving element 14 of this pair, and the translucent epoxy filled so as to fill the recess of the insulating concave case 20. A translucent sealing layer made of a resin layer 26 and a translucent epoxy resin layer 26 filled in the concave portion of the insulating concave case 20 are provided on the lower portion of the insulating concave case 20. Light-emitting element 13 and light-receiving element 1 of
Translucent guide plate 24 as a translucent light guide layer including conductor wirings (1-3) respectively connected to the upper electrodes of No. 4 of FIG.
And a light-shielding body 10 as a light-shielding cap having a reflecting surface 9 on the light-transmitting guide plate 24 side, which is provided above the opening of the insulating concave case 20.
【0010】本実施例の光結合装置は、以上のように構
成されて、受、発光素子の上部電極と導体配線とがバン
プ接続されているため、接続部が断線することがなく、
信頼性の高い光結合装置になっている。また、本実施例
の光結合装置は、ワイヤボンディングしていない絶縁性
凹形ケースを基板としているため製造コストが安価で済
む。また、多数の対の受、発光素子の電極を一度に導体
配線に接続できる。また、絶縁性凹形ケース上面の透光
性光ガイド板が透明のため、発光素子から放射された光
が何等妨げられることなく受光素子に受光される。The optical coupling device of the present embodiment is constructed as described above, and since the upper electrodes of the light receiving and light emitting elements and the conductor wiring are bump-connected, the connecting portion does not break.
It is a highly reliable optical coupling device. Further, the optical coupling device of the present embodiment uses the insulating concave case which is not wire-bonded as the substrate, so that the manufacturing cost is low. Further, the electrodes of a large number of pairs of receiving and emitting elements can be connected to the conductor wiring at once. Further, since the translucent light guide plate on the upper surface of the insulating concave case is transparent, the light emitted from the light emitting element is received by the light receiving element without any interference.
【0011】上述した光結合装置は、以下に述べる工程
により製造することができる。図4ないし図12は、光
結合装置30の製造工程図である。本実施例の光結合装
置は、先ず、平面図4に示すように、絶縁性樹脂材料製
のであって、同一方向に互いに平行かつ等間隔で、複数
本のスリット21、21、21、…が形成され、隣接す
るスリット21、21間に凹部22、…が設けられてお
り、凹部22の左右両側面に段付壁面22−1、22−
1を形成した絶縁性凹形ケース20を用意しておく。次
いで、この絶縁性凹形ケース20の凹部22の左右壁面
に、一定の間隔を置いて、隣接する対の導体配線(1−
1)、(1−2)を複数対設け、左右両壁面に設けられ
た導体配線(1−1)、(1−2)はC−C断面図5
(a)に示すように凹部底面において所定の間隔を置い
て離隔され、左右の導体配線は連続しないように配置す
る。また、D−D断面図5(b)に示すように、凹部端
部の導体配線(1−1)、(1−2)を設けない箇所
(凹部の走行方向)には段付部がなく上面開放形の逆コ
字形になっている。The above-described optical coupling device can be manufactured by the steps described below. 4 to 12 are manufacturing process diagrams of the optical coupling device 30. In the optical coupling device of this embodiment, first, as shown in plan view 4, a plurality of slits 21, 21, 21, ... Are made of an insulating resin material and are parallel to each other in the same direction at equal intervals. Recesses 22 are formed between the adjacent slits 21 and 21. Stepped wall surfaces 22-1, 22- are provided on both left and right side surfaces of the recess 22.
An insulating concave case 20 having No. 1 formed therein is prepared. Then, on the left and right wall surfaces of the concave portion 22 of the insulating concave case 20, a pair of adjacent conductor wirings (1-
1), a plurality of pairs of (1-2) are provided, and conductor wirings (1-1) and (1-2) provided on both left and right wall surfaces are taken along the line CC.
As shown in (a), the bottom surface of the recess is separated by a predetermined distance, and the conductor wirings on the left and right are arranged so as not to be continuous. Further, as shown in the D-D cross-sectional view 5 (b), there is no stepped portion at the end of the recess where the conductor wirings (1-1) and (1-2) are not provided (the traveling direction of the recess). It is an inverted U shape with an open top.
【0012】次いで、図6に示すように、前記絶縁性凹
形ケース20の凹部22、22、…の底面の各々の対の
導体配線(1−1)、(1−2)上にチップ型発光素子
13および14の底部電極を導電性の接着剤15(図7
(a)を参照のこと)を用いて接着する。このチップ型
発光素子13および受光素子14の上部電極上にはあら
かじめ半田等のバンプ17(図7(a)参照)を載置し
ておく。また、絶縁性凹形ケース20の凹部22の段付
壁面にもあらかじめバンプ18を載置しておく。上記作
業工程の終了後、図8およびそのC−C断面図9に示す
ように、下面に導体配線(1−3)を備えた、厚みが
0.5mm程度の透光性光ガイド板24aを透光性光ガイ
ド層として凹部22内のチップ型発光素子13および受
光素子14上部に設置する。その後、この透光性光ガイ
ド板24a上部から赤外光を照射し、加熱すると、(半
田)パンプ17,18は熔融し導体配線(1−3)、
(1−3)とチップ型発光素子13、受光素子14の上
部電極は接続する。前記透光性光ガイド板24aにはガ
ラス基板又は透明エポキシ樹脂製のものが使われる。こ
の透光性光ガイド板24aの形状は各受、発光素子位置
に、平板のほか図3に示すように上面が球形又は焦点位
置が発光素子および受光素子上に位置する回転楕円体形
状のもの、あるいはそれらの一部形状を有するものを使
用してもよい。このような球形又は楕円体状をもつ透光
性光ガイド板24aを用いると、平板状の透光性光ガイ
ド板24aを用いる場合に比べ、受、発光素子間の光結
合率が向上する。Then, as shown in FIG. 6, a chip type is formed on each pair of conductor wirings (1-1) and (1-2) on the bottom surface of the recesses 22, 22, ... Of the insulating recessed case 20. The bottom electrodes of the light emitting devices 13 and 14 are connected to the conductive adhesive 15 (see FIG.
(See (a)). Bumps 17 (see FIG. 7A) such as solder are previously placed on the upper electrodes of the chip type light emitting element 13 and the light receiving element 14. In addition, the bumps 18 are placed in advance on the stepped wall surface of the concave portion 22 of the insulating concave case 20. After the above working steps are finished, as shown in FIG. 8 and CC sectional view thereof, a translucent light guide plate 24a having a conductor wiring (1-3) on the lower surface and having a thickness of about 0.5 mm is provided. As a translucent light guide layer, it is installed in the recess 22 above the chip type light emitting element 13 and the light receiving element 14. After that, when infrared light is radiated from above the translucent light guide plate 24a and heated, the (solder) pumps 17 and 18 are melted and the conductor wiring (1-3),
(1-3) is connected to the upper electrodes of the chip type light emitting element 13 and the light receiving element 14. The translucent light guide plate 24a is made of a glass substrate or a transparent epoxy resin. The shape of the translucent light guide plate 24a is a spheroidal shape in which the upper surface is spherical or the focal point is located on the light emitting element and the light receiving element as shown in FIG. Alternatively, those having a partial shape thereof may be used. When the translucent light guide plate 24a having such a spherical or ellipsoidal shape is used, the optical coupling ratio between the light receiving element and the light emitting element is improved as compared with the case where the flat plate-shaped translucent light guide plate 24a is used.
【0013】次に、図8に示すように、前記透光性光ガ
イド板24a端にある樹脂注入口23(凹部22端位置
より透光性光ガイド板24aの端部位置をずらして配置
しておく。)より透光性エポキシ樹脂を注入する。そし
て、凹部22および透光性光ガイド板24a間を透光性
エポキシ樹脂層26aで埋設封止した後、加熱オーブン
(図示せず)中で、100〜180℃に加熱硬化する。
その後、図10(a)に示すダイシング個所27を厚さ
が0.9mmの厚いブレードによりハーフダイジングし、
図10(b)に示すように絶縁性凹形ケース20の表面
を切断する。さらにその後、図11に示すように、下面
に反射面9が形成された樹脂製の遮光体28を透明エポ
キシ樹脂により接着する。この遮光体28は、下部の透
光性光ガイド板24aとの間の隙間が小さくなるよう透
光性光ガイド板24aと雌雄形状になっており、例えば
透光性光ガイド板24aの上面が凸形になっている場合
は、遮光体28の下面は凹型のものを使用する。また、
遮光体28下面の反射面は、メッキ又は光反射率の高い
樹脂の印刷等により形成しておく。次に、図11に示す
ハーフダイジングを行った個所27を厚さが0.3mmの
薄いブレードを使って切断し、図12および図1に示す
ごとき構造の光結合装置30を得る。以上の製造方法に
より得られるチップ型光結合装置は、一個の絶縁性凹形
ケース20から、多数のチップ型光結合装置を作製する
例について示したが、このような方法によらず、1個の
絶縁性凹形ケース2を用い、上述したと同様の工程にし
たがって同じ構造の光結合装置を作製することができ
る。本実施例による光結合装置の製造方法では、絶縁性
凹形ケースの凹部底面に隣接配置した対の発光素子およ
び受光素子の上部電極に予めバンプを載置しておき(第
1の工程)、絶縁性凹形ケース上に前記発光素子および
受光素子の上部電極に接続する導体配線を設けた透光性
光ガイド板を設け(第2の工程)た後、この透光性光ガ
イド板を通して赤外線を照射し、発光素子および受光素
子の上部電極に予め載置しておいたバンプを加熱溶融し
て導体配線とこれらの受、発光素子の上部電極とを接続
させた後(第3の工程)、前記絶縁性凹形ケースの凹部
内に透光性エポキシ樹脂を注入充填するから、注入され
た透光性エポキシ樹脂は、透光性光ガイド板と凹部底面
間を自然に埋設封止し、硬化する。本実施例の光結合装
置の製造方法によれば、絶縁性凹形ケースを用い、基板
にワイヤボンディング性の無いものを使用することがで
きるため、コストを安く製造することができる。また多
数の受、発光チップの電極を一度に絶縁性凹形ケース上
の配線導体に接続できるため、製造時間が短縮され、製
造コストが低減できる。Next, as shown in FIG. 8, the resin injection port 23 at the end of the transparent light guide plate 24a (the end position of the transparent light guide plate 24a is displaced from the end position of the recess 22 is arranged. The transparent epoxy resin is injected. Then, the space between the recess 22 and the translucent light guide plate 24a is embedded and sealed by the translucent epoxy resin layer 26a, and then heated and cured at 100 to 180 ° C. in a heating oven (not shown).
Then, the dicing point 27 shown in FIG. 10 (a) is half-diced with a thick blade having a thickness of 0.9 mm,
As shown in FIG. 10B, the surface of the insulating concave case 20 is cut. After that, as shown in FIG. 11, a resin light-shielding body 28 having a reflecting surface 9 formed on the lower surface is bonded by a transparent epoxy resin. The light shield 28 is formed in a male and female shape with the translucent light guide plate 24a so that the gap between the light shield 28 and the lower translucent light guide plate 24a is small. For example, the upper surface of the translucent light guide plate 24a is When it is convex, the lower surface of the light shield 28 is concave. Also,
The reflection surface on the lower surface of the light shield 28 is formed by plating or printing a resin having a high light reflectance. Next, the half-diced portion 27 shown in FIG. 11 is cut with a thin blade having a thickness of 0.3 mm to obtain an optical coupling device 30 having the structure shown in FIGS. 12 and 1. The chip-type optical coupling device obtained by the above manufacturing method has been described as an example in which a large number of chip-type optical coupling devices are manufactured from one insulating concave case 20. An optical coupling device having the same structure can be manufactured by using the insulating concave case 2 of 1. In the method of manufacturing the optical coupling device according to the present embodiment, the bumps are previously mounted on the upper electrodes of the light emitting element and the light receiving element of the pair which are arranged adjacent to the bottom surface of the concave portion of the insulating concave case (first step), After providing a light-transmitting light guide plate having conductive wirings connected to the upper electrodes of the light-emitting element and the light-receiving element on the insulating concave case (second step), infrared rays are passed through the light-transmitting light guide plate. After heating, the bumps previously placed on the upper electrodes of the light-emitting element and the light-receiving element are heated and melted to connect the conductor wiring with these and the upper electrode of the light-emitting element (third step) Since the translucent epoxy resin is injected and filled in the recess of the insulating concave case, the translucent epoxy resin injected naturally fills and seals between the translucent light guide plate and the bottom surface of the recess, Harden. According to the method of manufacturing the optical coupling device of the present embodiment, since the insulating concave case can be used and the substrate having no wire bonding property can be used, the manufacturing cost can be reduced. Further, since a large number of electrodes of the receiving and light emitting chips can be connected to the wiring conductors on the insulating concave case at a time, the manufacturing time can be shortened and the manufacturing cost can be reduced.
【0014】[0014]
【発明の効果】以上の説明から明らかなように、本発明
によれば、光結合装置は受、発光素子上面に透明な透光
性光ガイド層が設けられているから、発光素子から放射
された光を高効率で受光素子に入射させることができ
る。また本発明の光結合装置の製造方法によれば、多数
の発光素子、受光素子上の電極が一の絶縁性凹形ケース
内に同時に接続できるため、製造時間が短縮され、製造
コストも低減できる。また、用いる絶縁性凹形ケースは
ワイヤボンディング性のないものを使用できるため、基
板コストが低減できる。また、チップ上の上部電極と透
光性光ガイド層下部の導体配線がバンプ接続されるた
め、接続部分が断線することなく信頼性の高い光結合装
置にすることができる。As is apparent from the above description, according to the present invention, since the optical coupling device is provided with the transparent translucent light guide layer on the upper surface of the light receiving element, the light is emitted from the light emitting element. The emitted light can be incident on the light receiving element with high efficiency. Further, according to the method of manufacturing the optical coupling device of the present invention, since a large number of light emitting elements and electrodes on the light receiving elements can be simultaneously connected in one insulating concave case, the manufacturing time can be shortened and the manufacturing cost can be reduced. . Further, since the insulating concave case used can have no wire bonding property, the substrate cost can be reduced. Further, since the upper electrode on the chip and the conductor wiring under the translucent light guide layer are bump-connected, a highly reliable optical coupling device can be obtained without disconnection at the connection portion.
【図1】本発明の一実施例にかかる光結合装置の斜視図
である。FIG. 1 is a perspective view of an optical coupling device according to an embodiment of the present invention.
【図2】(a)、(b)はそれぞれ図1に示す光結合装
置のA−A断面図およびB−B断面図である。2A and 2B are respectively an AA sectional view and a BB sectional view of the optical coupling device shown in FIG.
【図3】本発明の他の実施例の光結合装置の構造を示す
縦断面図である。FIG. 3 is a vertical sectional view showing the structure of an optical coupling device according to another embodiment of the present invention.
【図4】本発明の実施例に使用する絶縁性凹形ケースの
構造を示す平面図である。FIG. 4 is a plan view showing the structure of an insulating concave case used in an embodiment of the present invention.
【図5】(a)、(b)はそれぞれ図4に示す絶縁性凹
形ケースのC−C断面図およびD−D断面図である。5 (a) and 5 (b) are respectively a C-C sectional view and a DD sectional view of the insulating concave case shown in FIG.
【図6】図4に示す絶縁性凹形ケースの各凹部内のチッ
プ型発光素子および受光素子の取り付けた状態を示す平
面図である。FIG. 6 is a plan view showing a state in which a chip-type light emitting element and a light receiving element are mounted in each concave portion of the insulating concave case shown in FIG.
【図7】(a)、(b)はそれぞれ図6のC−C断面図
およびD−D断面図である。7A and 7B are respectively a C-C sectional view and a DD sectional view of FIG. 6.
【図8】絶縁性凹形ケース上に透光性光ガイド板を設置
し、凹部内の導体配線と発光素子および受光素子のバン
プ接続を行ったときの状態を示す平面図である。FIG. 8 is a plan view showing a state in which a translucent light guide plate is installed on an insulating concave case, and the conductor wiring in the concave portion and the light emitting element and the light receiving element are bump-connected.
【図9】図8の工程により得られる光結合装置のC−C
断面構造図である。FIG. 9 is a CC of the optical coupling device obtained by the process of FIG.
FIG.
【図10】(a)、(b)はそれぞれ図8の工程に続い
て、絶縁性凹形ケースおよび透光性光ガイド板のダイシ
ング位置およびダイシング後の状態を示すD−D断面図
である。10A and 10B are cross-sectional views taken along the line D-D showing the dicing position of the insulating concave case and the translucent light guide plate and the state after dicing, following the step of FIG. 8 respectively. .
【図11】(a)、(b)、(c)はそれぞれ図10の
工程後、さらに遮光性光ガイド板を設置した状態を示す
平面図、(a)のC−C断面図およびD−D断面図を示
す。11 (a), (b), and (c) are plan views showing a state in which a light-shielding light guide plate is further installed after the step of FIG. 10, a sectional view taken along line CC of FIG. A D sectional view is shown.
【図12】各チップ型光結合装置のダイシング分離後の
状態を示す断面図である。FIG. 12 is a cross-sectional view showing a state after dicing separation of each chip type optical coupling device.
【図13】(a)、(b)、(c)はそれぞれ従来の光
結合装置の構造を示す斜視図、A−A断面図、B−B断
面図である。13 (a), (b), and (c) are a perspective view, an AA sectional view, and a BB sectional view showing the structure of a conventional optical coupling device, respectively.
【図14】従来の光結合装置から予想される改良構造の
縦断面図である。FIG. 14 is a vertical sectional view of an improved structure expected from a conventional optical coupling device.
1−1,1−2,1−3 導体配線 9 反射面 10 遮光性キャップ 13 発光素子(本発明) 14 受光素子(本発明) 17,18 バンプ 20 絶縁性凹形ケース 21 スリット 22 凹部 24 透光性光ガイド層(本発明) 24a 透光性光ガイド板(実施例) 26 透光性封止層(本発明) 26a 透光性エポキシ樹脂層(実施例) 27 ダイシング個所 28 遮光体 30 光結合装置(本発明) 1-1, 1-2, 1-3 Conductor wiring 9 Reflecting surface 10 Light-shielding cap 13 Light emitting element (present invention) 14 Light receiving element (present invention) 17, 18 Bump 20 Insulating concave case 21 Slit 22 Recess 24 Transparent Light-transmitting light guide layer (present invention) 24a Light-transmitting light guide plate (example) 26 Light-transmitting sealing layer (present invention) 26a Light-transmitting epoxy resin layer (working example) 27 Dicing point 28 Light shield 30 Light Coupling device (present invention)
Claims (2)
面に発光素子および受光素子電極と接続する導体配線を
備えた絶縁性凹形ケースと、 この絶縁性凹形ケースの凹部底面に、底部電極が前記導
体配線と接続し互いに隣接配設された対の発光素子およ
び受光素子と、 前記対の発光素子および受光素子と絶縁性凹形ケースの
凹部底面内を埋設するように配した透光性封止層と、 前記絶縁性凹形ケースの凹部底面内を埋設した透光性封
止層上に設けられ、下部に前記絶縁性凹形ケース内の発
光素子および受光素子の上部電極と接続する導体配線を
備えた透光性光ガイド層と、 前記絶縁性凹形ケースの開口部上に、透光性光ガイド層
側に反射面を備えた遮光性キャップと、を設けたことを
特徴とする光結合装置。1. An insulative recessed case having conductor wiring for connecting to a light-emitting element and a light-receiving element electrode on a bottom surface of a recessed portion of an inner surface formed in a recess, and a bottom portion of the recessed bottom surface of the insulative recessed case. A pair of light emitting element and light receiving element whose electrodes are connected to the conductor wiring and are arranged adjacent to each other, and a pair of light emitting element and light receiving element and the translucent light arranged so as to be embedded in the bottom surface of the concave portion of the insulating concave case. Insulating encapsulation layer and a translucent encapsulating layer that fills the bottom of the recess of the insulating concave case, and is connected to the upper electrodes of the light emitting element and the light receiving element in the insulating concave case at the bottom. And a light-shielding cap having a reflective surface on the light-transmissive light guide layer side, which is provided on the opening of the insulating concave case. Optical coupling device.
電極に接続する導体配線を備えた絶縁性凹形ケースを準
備した後、この絶縁性凹形ケースの凹部底面に上部電極
に予めバンプを載置した発光素子および受光素子を隣接
配置する第1の工程と、 第1の工程後、絶縁性凹形ケース内凹部底面の発光素子
および受光素子の上部電極に接続する導体配線を設けた
透光性光ガイド層として透光性光ガイド板を配置する第
2の工程と、 第2の工程後、透光性光ガイド板を通して発光素子およ
び受光素子の上部電極に赤外線を照射し上部電極に載置
したバンプを加熱溶融し透光性光ガイド板下面の導体配
線と発光素子および受光素子の上部電極を接続する第3
の工程と、 第3の工程後、絶縁性凹形ケースの凹部底面内に透光性
樹脂を注入し凹部内を透光性樹脂で充填し透光性封止層
を形成する第4の工程と、 第4の工程後、絶縁性凹形ケース開口部上に、透光性光
ガイド層側に反射面を有する遮光体を設置する第5の工
程と、から成ることを特徴とする請求項1記載の光結合
装置の製造方法。2. An insulative concave case having conductor wirings connected to a light emitting element and a light receiving element electrode is prepared in advance on the bottom surface of the recess, and a bump is previously mounted on the upper electrode on the bottom surface of the recess of the insulative recess case. The first step of arranging the placed light emitting element and the light receiving element adjacent to each other, and after the first step, the light transmission in which the conductor wiring connecting to the upper electrodes of the light emitting element and the light receiving element on the bottom surface of the recess in the insulating concave case is provided. The second step of disposing the translucent light guide plate as the transmissive light guide layer, and after the second step, the upper electrodes of the light emitting element and the light receiving element are irradiated with infrared rays through the translucent light guide plate and mounted on the upper electrode. A third method for heating and melting the placed bump to connect the conductor wiring on the lower surface of the translucent light guide plate to the upper electrodes of the light emitting element and the light receiving element
And the third step, the fourth step of injecting a transparent resin into the bottom surface of the concave portion of the insulating concave case and filling the concave portion with the transparent resin to form a transparent sealing layer. And a fifth step of, after the fourth step, installing a light shield having a reflecting surface on the side of the translucent light guide layer on the opening of the insulating concave case. 1. The method for manufacturing the optical coupling device according to 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18718392A JPH0637352A (en) | 1992-07-15 | 1992-07-15 | Optical coupling device and manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18718392A JPH0637352A (en) | 1992-07-15 | 1992-07-15 | Optical coupling device and manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0637352A true JPH0637352A (en) | 1994-02-10 |
Family
ID=16201565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18718392A Pending JPH0637352A (en) | 1992-07-15 | 1992-07-15 | Optical coupling device and manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0637352A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08264823A (en) * | 1995-01-27 | 1996-10-11 | Sharp Corp | Optical coupling element |
| US8143637B2 (en) | 2009-01-08 | 2012-03-27 | Renesas Electronics Corporation | Optically coupled device with an optical waveguide |
| KR102364313B1 (en) * | 2020-09-02 | 2022-02-17 | 주식회사 에스에프에이반도체 | Semiconductor package for receiving and emitting light and method for manufacturing the same |
| KR102364314B1 (en) * | 2020-09-02 | 2022-02-18 | 주식회사 에스에프에이반도체 | method for manufacturing semiconductor package for receiving and emitting light |
-
1992
- 1992-07-15 JP JP18718392A patent/JPH0637352A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08264823A (en) * | 1995-01-27 | 1996-10-11 | Sharp Corp | Optical coupling element |
| US8143637B2 (en) | 2009-01-08 | 2012-03-27 | Renesas Electronics Corporation | Optically coupled device with an optical waveguide |
| US8288183B2 (en) | 2009-01-08 | 2012-10-16 | Renesas Electronics Corporation | Method of manufacturing an optically coupled device |
| KR102364313B1 (en) * | 2020-09-02 | 2022-02-17 | 주식회사 에스에프에이반도체 | Semiconductor package for receiving and emitting light and method for manufacturing the same |
| KR102364314B1 (en) * | 2020-09-02 | 2022-02-18 | 주식회사 에스에프에이반도체 | method for manufacturing semiconductor package for receiving and emitting light |
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