JPH0640823U - Irradiator for laser measuring instrument - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a laser irradiator capable of appropriately irradiating a laser light to a measuring object in a hidden position in a laser measuring instrument. A first hollow portion for introducing a laser beam and a second hollow portion for irradiating a hidden measuring object with a laser beam are provided, and a tip of the second hollow portion has a predetermined angle. There is a mirror arranged in.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a laser irradiator of a laser-based measuring instrument that irradiates a laser beam of a laser generating means on an object to be measured and uses the reflected light to measure the state or property of the object to be measured.

[0002]

[Prior art]

 As a conventional laser irradiator for this type of apparatus, a laser irradiator that irradiates a laser beam generated by a laser generating means onto an object to be measured through several mirrors is generally used, especially as an irradiator. There was nothing.

[0003]

[Problems to be solved by the device]

 For this reason, various measurements are difficult except for the object to be measured that appears on the surface. The present invention aims to improve this point.

[0004]

[Means for Solving the Problems]

 Therefore, in the present invention, the laser irradiator is formed in a small-diameter tubular shape that forms a large-diameter tubular first hollow portion and a continuous hollow portion connected to the first hollow portion. And a second hollow portion, and a mirror is arranged at a predetermined angle at the tip of the second hollow portion, and the first hollow portion is for observing the laser light passing through the hollow portion. Is provided so that the laser beam from the laser generating means is applied to the object to be measured through the first hollow portion and the second hollow portion.

[0005]

[Action]

 With this configuration, it is possible to install the laser irradiation tool at a predetermined position even when the measurement target is present inside.

[0006]

【Example】

 1 and 2 are respectively explanatory views showing one embodiment of the present invention, FIG. 1 shows an example of a usage state of the laser irradiation tool of the present invention, and FIG. 2 shows a case where this laser irradiation tool is used. It is a vibrometer as a laser measuring instrument.

First, the configuration of a vibrometer that can use the laser irradiation tool of the present invention will be described with reference to FIG.

The laser light generated by the laser generating means 11 is split into two via the first beam splitter BS1. One of the laser beams is input to the modulator 12, set to a predetermined frequency f1 and output as a reference beam. The other laser beam is applied to the object to be measured (vibrating surface) via the first and second mirrors M1 and M2 and the lens 13. Then, the interference means 14 for causing the reflected light from the measurement object to overlap and interfere with both the laser beams via the second beam splitter BS 2 and the third mirror and the above-mentioned reference light via the third beam splitter B S3. To be entered.

When the measurement object vibrates, that is, when the measurement object is displaced at a predetermined speed, the frequency of the laser light irradiated on and reflected by the measurement object shifts by a predetermined amount due to the Doppler effect. Therefore, in the interference means 14 to which both laser lights are input, a beat frequency corresponding to the frequency shift amount of the above reflected light with respect to the reference laser light is generated. Then, the beat frequency is further converted into an electric signal in the interference means 14, and a frequency shift signal corresponding to the vibration of the measurement object is obtained.

This frequency shift signal is input to the velocity demodulation circuit, that is, the frequency-velocity converter 15 to obtain the vibration velocity signal of the measurement object.

FIG. 1 shows an example in which an irradiation tool according to the present invention is used for laser irradiation of an object to be measured by such a laser-based measuring instrument.

The irradiation tool 2 is integrally connected so that a large-diameter first hollow portion 21 and a second hollow portion 22 having a smaller diameter than the first hollow portion 21 form a continuous hollow portion. . The second hollow portion is formed to be relatively slender and can enter even a small gap. Further, a mirror 23 is installed at a predetermined angle (for example, 45 degrees) at the tip of the second hollow portion so that the laser light 10 applied to the measuring object is reflected in almost the same path. Has been done.

A visual window 211 is formed in the first hollow portion 21, and it is possible to confirm whether or not the laser light 10 from a laser generating means (not shown) is properly introduced into the irradiation tool 2. It is configured to be able to.

The illuminator support means 4 is configured so that its height and support angle can be changed so that the support position of the illuminator 2 can be adjusted.

As shown in FIG. 2, a laser beam 10 is irradiated onto the object to be measured by using the irradiation tool 2 shown in FIG. 1, and the reflected light is extracted through the irradiation tool 2 and a predetermined process is performed. With, the vibration of the measurement object can be measured.

[0016]

[Effect of device]

 As described above, according to the present invention, it is possible to provide a laser irradiation tool that can easily perform measurement even when the measurement object does not appear on the surface.

[Brief description of drawings]

FIG. 1 is an explanatory view showing a usage state of a laser irradiation tool according to the present invention.

2 is a laser-based measuring instrument capable of using the laser irradiation tool shown in FIG.

[Explanation of symbols]

2: Laser irradiation tool 21: First hollow portion 22: Second
Hollow part

Claims (1)

[Scope of utility model registration request] 1. An illuminator of a laser-based measuring instrument for irradiating a laser beam to a measuring object for detecting a state of the measuring object, the first hollow part having a large-diameter tubular shape. A second hollow portion formed into a small-diameter tubular shape that is connected to the first hollow portion to form a continuous hollow portion, and a mirror is formed at a predetermined angle at the tip of the second hollow portion. The first hollow portion is provided with a visual window for visually observing the laser light passing through the hollow portion, and the laser light from the laser generating means is provided in the first hollow portion and the second hollow portion. An illuminator for a laser-based measuring instrument, which irradiates an object to be measured through a laser.