JPH0641605Y2 - 薄膜蒸発装置 - Google Patents

薄膜蒸発装置

Info

Publication number
JPH0641605Y2
JPH0641605Y2 JP1988121991U JP12199188U JPH0641605Y2 JP H0641605 Y2 JPH0641605 Y2 JP H0641605Y2 JP 1988121991 U JP1988121991 U JP 1988121991U JP 12199188 U JP12199188 U JP 12199188U JP H0641605 Y2 JPH0641605 Y2 JP H0641605Y2
Authority
JP
Japan
Prior art keywords
unit
thin film
thinning
dispersion unit
liquid material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988121991U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0257935U (cs
Inventor
忠成 山崎
裕利 半田
Original Assignee
神鋼パンテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼パンテック株式会社 filed Critical 神鋼パンテック株式会社
Priority to JP1988121991U priority Critical patent/JPH0641605Y2/ja
Publication of JPH0257935U publication Critical patent/JPH0257935U/ja
Application granted granted Critical
Publication of JPH0641605Y2 publication Critical patent/JPH0641605Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP1988121991U 1988-09-16 1988-09-16 薄膜蒸発装置 Expired - Lifetime JPH0641605Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988121991U JPH0641605Y2 (ja) 1988-09-16 1988-09-16 薄膜蒸発装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988121991U JPH0641605Y2 (ja) 1988-09-16 1988-09-16 薄膜蒸発装置

Publications (2)

Publication Number Publication Date
JPH0257935U JPH0257935U (cs) 1990-04-26
JPH0641605Y2 true JPH0641605Y2 (ja) 1994-11-02

Family

ID=31369509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988121991U Expired - Lifetime JPH0641605Y2 (ja) 1988-09-16 1988-09-16 薄膜蒸発装置

Country Status (1)

Country Link
JP (1) JPH0641605Y2 (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113694548B (zh) * 2021-08-26 2022-08-30 上海精日新材料科技有限公司 一种节能型薄膜蒸发装置
CN116410352A (zh) * 2021-12-30 2023-07-11 中国石油天然气股份有限公司 深度脱除聚丁烯-1溶液中丁烯-1单体的方法及装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928832A (cs) * 1972-07-14 1974-03-14
JPS566520A (en) * 1979-06-28 1981-01-23 Nec Corp Oscillating device

Also Published As

Publication number Publication date
JPH0257935U (cs) 1990-04-26

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