JPH0647541Y2 - 圧力変動吸着方式による高純度窒素ガス分離装置 - Google Patents

圧力変動吸着方式による高純度窒素ガス分離装置

Info

Publication number
JPH0647541Y2
JPH0647541Y2 JP5958489U JP5958489U JPH0647541Y2 JP H0647541 Y2 JPH0647541 Y2 JP H0647541Y2 JP 5958489 U JP5958489 U JP 5958489U JP 5958489 U JP5958489 U JP 5958489U JP H0647541 Y2 JPH0647541 Y2 JP H0647541Y2
Authority
JP
Japan
Prior art keywords
product
nitrogen gas
tank
carbon dioxide
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5958489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02150020U (fr
Inventor
正誼 柳井
悦治 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP5958489U priority Critical patent/JPH0647541Y2/ja
Publication of JPH02150020U publication Critical patent/JPH02150020U/ja
Application granted granted Critical
Publication of JPH0647541Y2 publication Critical patent/JPH0647541Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP5958489U 1989-05-23 1989-05-23 圧力変動吸着方式による高純度窒素ガス分離装置 Expired - Lifetime JPH0647541Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5958489U JPH0647541Y2 (ja) 1989-05-23 1989-05-23 圧力変動吸着方式による高純度窒素ガス分離装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5958489U JPH0647541Y2 (ja) 1989-05-23 1989-05-23 圧力変動吸着方式による高純度窒素ガス分離装置

Publications (2)

Publication Number Publication Date
JPH02150020U JPH02150020U (fr) 1990-12-25
JPH0647541Y2 true JPH0647541Y2 (ja) 1994-12-07

Family

ID=31586208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5958489U Expired - Lifetime JPH0647541Y2 (ja) 1989-05-23 1989-05-23 圧力変動吸着方式による高純度窒素ガス分離装置

Country Status (1)

Country Link
JP (1) JPH0647541Y2 (fr)

Also Published As

Publication number Publication date
JPH02150020U (fr) 1990-12-25

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