JPH0648812U - Filter unit for ceiling system - Google Patents

Abstract

(57) [Summary] [Object] An object of the present invention is to provide a filter unit for a ceiling system capable of maintaining uniform surface wind velocity distribution of the filter even in a large unit. [Structure] Dust collecting filter 1, chamber 3 placed on dust collecting filter 1, blower 4 built in chamber 3, baffle plate arranged between dust collecting filter 1 and blower 4. 5, the sound absorbing material 9 disposed on the surface of the baffle plate 5 on the blower 4 side, and the ventilation bands 6 and 7 formed in the gaps between the baffle plate 5 and one inner side surface of the chamber 3 and the facing surface thereof. A filter unit for a ceiling system, comprising a baffle plate 5 having an opening 8 substantially at the center thereof.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a filter unit, and more particularly to a filter unit for a ceiling system installed on the ceiling of a clean room.

[0002]

[Prior art]

 As a conventional ceiling system filter unit, for example, as disclosed in Japanese Patent Laid-Open No. 4-110008, a dust collecting filter, a chamber mounted on the dust collecting filter, and a built-in chamber. A blower, a baffle plate arranged between the dust collecting filter and the blower, a sound absorbing material arranged on a surface of the baffle plate on the blower side, an inner side surface of the baffle plate and the chamber, and It is known that a ventilation band is formed in the gap between the opposing surfaces to make the air flow distribution uniform and reduce noise.

[0003]

[Problems to be solved by the device]

 However, since the filter and the filter unit for the ceiling system incorporating the filter have become larger as the system becomes larger, the surface wind velocity distribution of the filter becomes non-uniform and laminar flow is possible in the configuration of the above conventional example. It had the problem of not having it. Therefore, an object of the present invention is to provide a filter unit for an aerial system that can keep the surface wind velocity distribution of the filter uniform in response to an increase in size.

[0004]

[Means for Solving the Problems]

 In order to achieve the above-mentioned object, a filter system for a ceiling system of the present invention comprises a dust collecting filter, a chamber mounted on the dust collecting filter, a blower housed in the chamber, and the dust collecting filter. And a fan, a baffle plate disposed between the baffle plate and the blower, a sound absorbing material disposed on a surface of the baffle plate on the blower side, and a gap between the baffle plate and one inner surface of the chamber and an opposite surface thereof. In a filter unit for a ceiling system having a ventilation band formed respectively, an opening is provided at substantially the center of the baffle plate.

[0005]

[Action]

 According to the present invention, the air flows into the space between the baffle plate and the dust collecting filter from the opening as well as the ventilation zone, so that the wind speed on the ventilation zone side of the baffle plate becomes slower and the air from the filter surface is reduced. The blowing air velocity can be made uniform, and the phenomenon of wind noise generated in the ventilation zone is diminished and noise can be reduced.

[0006]

【Example】

 Hereinafter, a filter unit for a ceiling system according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a vertical sectional view of an embodiment of a ceiling system filter unit used in a clean room ceiling system and configured as a local return system. FIG. 2 is a sectional view taken along line II-II of FIG.

In the figure, a dust collecting filter 1 is arranged on the ceiling of a clean room, and a chamber 3 is airtightly installed on the dust collecting filter 1. A blower 4 made of a sirocco fan is fixed to the upper surface inside the chamber 3, and the blower 4 has a discharge port 4a for discharging the air sucked from the outside of the chamber 3 into the chamber 3. A baffle plate 5 is installed between the blower 4 and the dust collecting filter 1 so as to divide the chamber 3 into an upper space and a lower space. The baffle plate 5 is brought into contact with the inner surface of the chamber 3 in a direction orthogonal to the arrow A, which is the air discharge direction of the blower 4, and in the air discharge direction of the blower 4 and in the opposite direction, the baffle plate 5 of the chamber 3 moves. The inner surfaces are not in contact with each other, and the ventilation bands 6 and 7 are formed only in the gaps between the inner surfaces. Further, an opening 8 which is a feature of the present invention is formed in the center of the baffle plate 5. A sound absorbing material 9 is provided on the surface of the baffle plate 5 on the blower 4 side and the inner peripheral surface of the chamber 3.

FIG. 3 is a vertical cross-sectional view of another embodiment of a ceiling system filter unit used in a clean room ceiling system and configured as a local return system, and FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. Is. In the present embodiment, the blower 4 made of a mixed flow fan is used instead of the blower 4 made of the sirocco fan in the above-mentioned embodiment, and the air discharge direction is as shown by an arrow B. Since the position is lower, the attachment position of the blower 4 and the aperture ratio of the opening 8 provided in the baffle plate 5 are different from those in the above-mentioned embodiment. However, since other configurations are the same as those in the above-mentioned embodiment, The same reference numerals are given and the description thereof is omitted.

Next, the flow of air in each filter unit configured as described above will be described. The air sucked from the outside of the chamber 3 by the blower 4 is discharged in the chamber 3 in the direction indicated by the arrow A or the arrow B. At this time, the air becomes turbulent in the chamber 3 on the blower 4 side above the baffle plate 5, but the internal pressure rises. Therefore, the air flows into the space between the baffle plate 5 and the dust collecting filter 1 from the air blowing zones 6 and 7 and the opening 8 and spreads over the entire upper surface of the dust collecting filter 1. The air that has spread over the entire area of the dust collecting filter 1 is guided to the clean room through the inside of the dust collecting filter 1 due to the pressure difference between the air and the clean room.

In each of the above embodiments, when the width W of the chamber 3 is 610 mm, the depth L is 1450 mm, and the height H is 325 mm, the ventilation gap between the upper surface of the dust collecting filter 1 and the baffle plate 5 is 30 to 100 mm. The gap width between the ventilation zones 6 and 7 is preferably 25 to 70 mm.

Further, the opening ratio of the opening 8 (w × l × 100 / W × L: where w is the width of the opening 8 and l is the depth dimension of the opening 8) is the blower 4 with a sirocco fan. It is preferably 1 to 5% when used and 6 to 12% when a mixed flow fan is used.

The experimental results of each example under the above preferable conditions are shown below. In the measurement, the ventilation gap between the upper surface of the dust collection filter 1 and the baffle plate 5 was 40 mm, and the gap width between the ventilation bands 6 and 7 was 50 mm. The opening ratio of the opening 8 when the sirocco fan was used for the blower 4 was 3%, and the opening ratio of the opening 8 when the mixed flow fan was used was 7%. Then, in comparison with the case where the opening ratio is 0%, that is, the case where the opening 8 is not provided, the filter blowing air velocity, the air flow distribution (standard deviation value), and the filter side noise are measured. The filter outlet velocity and air flow distribution were measured at 40 points using a transistor anemometer at a position 100 mm from the filter surface, with a duct for measuring wind velocity distribution provided downstream of the filter under test. For the noise on the filter side, a microphone was installed at a position 1000 mm 2 from the filter surface, and the generated noise was measured. The above measurement results are shown in Table 1.

[0013]

[Table 1]

5 to 8 show wind velocity values at various portions of the baffle plate in each of the above Examples and each Comparative Example having no opening. 5 and 6 show the case where a sirocco fan is used as the blower, FIG. 5 shows the one without an opening, and FIG. 6 shows the present embodiment in which the opening ratio is 3%. 7 and 8 show the case where a mixed flow fan is used as the blower. FIG. 7 shows this example without an opening portion, and FIG. 8 shows this example with an aperture ratio of 7%. As the sound absorbing material, glass wool of 32 kg / m ³ having a thickness of 25 mm was used. Further, the noise of the blower itself was 63 dB for the sirocco fan and 60 to 63 dB for the mixed flow fan at the time of 50 Hz operation.

As is clear from the above results, the wind velocity distribution of the present embodiment having an opening can be made uniform as compared with the baffle plate having no opening. In addition, the wind speed at each part of the baffle plate is seen to be lower on the ventilation zone side of the baffle plate, which results in less wind noise and lower noise. Furthermore, the mixed-flow fan consumes less power than the sirocco fan and is therefore adopted as a power-saving type, but the wind speed distribution is worse than that of the sirocco fan, and it is also inferior in noise reduction, but the same performance as the sirocco fan can be obtained. It can be said that the effect is particularly great because power saving is achieved.

[0016]

[Effect of device]

 As is clear from the above description, according to the filter system for ceiling system of the present invention, even in a large-scale unit, the blowing air velocity from the dust collecting filter surface can be made uniform and the noise can be reduced.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a filter unit for a ceiling system according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a vertical sectional view of a filter unit for a ceiling system according to another embodiment of the present invention.

4 is a sectional view taken along line IV-IV of FIG.

FIG. 5 is an explanatory drawing of wind speed when a sirocco fan is used and there is no opening.

FIG. 6 is an explanatory view of wind speed in the case of using a sirocco fan and having an opening.

FIG. 7 is an explanatory view of wind speed when a mixed flow fan is used and there is no opening.

FIG. 8 is an explanatory view of wind speed when an oblique flow fan is used and an opening is provided.

[Explanation of symbols]

 1 Dust Collection Filter 3 Chamber 4 Blower 5 Baffle Plate 6 Ventilation Zone 7 Ventilation Zone 8 Opening 9 Sound Absorbing Material

Claims (1)

[Scope of utility model registration request] 1. A dust collecting filter, a chamber mounted on the dust collecting filter, a blower built in the chamber, and a baffle plate arranged between the dust collecting filter and the blower. For a ceiling system including a sound absorbing material arranged on a surface of the baffle plate on the blower side, and a ventilation band formed in a gap between the baffle plate and one inner side surface of the chamber and a facing surface thereof. A filter unit for a ceiling system, characterized in that an opening is provided at substantially the center of the baffle plate.