JPH0650750A - 力検知手段を含む走査型顕微鏡 - Google Patents
力検知手段を含む走査型顕微鏡Info
- Publication number
- JPH0650750A JPH0650750A JP4294894A JP29489492A JPH0650750A JP H0650750 A JPH0650750 A JP H0650750A JP 4294894 A JP4294894 A JP 4294894A JP 29489492 A JP29489492 A JP 29489492A JP H0650750 A JPH0650750 A JP H0650750A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- output signal
- probe tip
- tip
- respect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims abstract description 234
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 230000010355 oscillation Effects 0.000 claims abstract description 8
- 239000000835 fiber Substances 0.000 claims description 40
- 238000003384 imaging method Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 19
- 239000013307 optical fiber Substances 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000005670 electromagnetic radiation Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000010008 shearing Methods 0.000 abstract description 5
- 238000013459 approach Methods 0.000 abstract description 4
- 230000003534 oscillatory effect Effects 0.000 abstract 2
- 238000004651 near-field scanning optical microscopy Methods 0.000 description 31
- 238000001514 detection method Methods 0.000 description 24
- 238000000576 coating method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 230000009286 beneficial effect Effects 0.000 description 7
- 238000005286 illumination Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229920006240 drawn fiber Polymers 0.000 description 1
- 230000008713 feedback mechanism Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 230000009022 nonlinear effect Effects 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/26—Friction force microscopy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/868—Scanning probe structure with optical means
Landscapes
- Physics & Mathematics (AREA)
- Radiology & Medical Imaging (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US787298 | 1991-11-04 | ||
| US07/787,298 US5254854A (en) | 1991-11-04 | 1991-11-04 | Scanning microscope comprising force-sensing means and position-sensitive photodetector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0650750A true JPH0650750A (ja) | 1994-02-25 |
Family
ID=25141035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4294894A Pending JPH0650750A (ja) | 1991-11-04 | 1992-11-04 | 力検知手段を含む走査型顕微鏡 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5254854A (fr) |
| EP (1) | EP0545538B1 (fr) |
| JP (1) | JPH0650750A (fr) |
| CA (1) | CA2075855C (fr) |
| DE (1) | DE69212576T2 (fr) |
| HK (1) | HK220396A (fr) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0701102A1 (fr) * | 1994-09-09 | 1996-03-13 | Seiko Instruments Inc. | Microscope en champ proche à balayage/force atomique avec observation dans un fluide |
| JPH08146019A (ja) * | 1994-11-15 | 1996-06-07 | Agency Of Ind Science & Technol | 原子間力顕微鏡および原子間力顕微鏡における摩擦の解析方法 |
| JP2002532733A (ja) * | 1998-12-06 | 2002-10-02 | アーロン・ルイス | 準波長域の開口が形成されてなりレンズを有する光ファイバ及び独特のマイクロピペット |
| JP2009258191A (ja) * | 2008-04-14 | 2009-11-05 | Olympus Corp | 走査型レーザ顕微鏡 |
| JP2010210636A (ja) * | 2002-07-04 | 2010-09-24 | Univ Of Bristol | 走査型プローブ顕微鏡 |
| KR20180025257A (ko) * | 2016-08-31 | 2018-03-08 | 에프이아이 컴파니 | 프로브 안착 탐지 |
| JP2018084582A (ja) * | 2016-11-22 | 2018-05-31 | アントン パール ゲーエムベーハーＡｎｔｏｎ Ｐａａｒ ＧｍｂＨ | 実質的に水平な側方視で、走査型プローブ顕微鏡の試料とプローブとの間のギャップを撮像する走査型プローブ顕微鏡及び方法 |
Families Citing this family (86)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL97362A0 (en) * | 1991-02-26 | 1992-08-18 | Aaron Lewis | Method for external excitation of subwavelength light sources that is integrated into feedback methodologies |
| USRE36488E (en) * | 1992-08-07 | 2000-01-11 | Veeco Instruments Inc. | Tapping atomic force microscope with phase or frequency detection |
| US5519212A (en) * | 1992-08-07 | 1996-05-21 | Digital Instruments, Incorporated | Tapping atomic force microscope with phase or frequency detection |
| US5461907A (en) * | 1993-03-23 | 1995-10-31 | Regents Of The University Of California | Imaging, cutting, and collecting instrument and method |
| JP2802571B2 (ja) * | 1993-03-23 | 1998-09-24 | 株式会社日立製作所 | 電子線測長装置 |
| JP2704601B2 (ja) * | 1993-04-12 | 1998-01-26 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法 |
| US5354985A (en) * | 1993-06-03 | 1994-10-11 | Stanford University | Near field scanning optical and force microscope including cantilever and optical waveguide |
| IL106613A0 (en) * | 1993-08-08 | 1993-12-08 | Klony S Lieberman | Device and method for probe microscopy |
| US5677978A (en) * | 1993-08-08 | 1997-10-14 | Lewis; Aaron | Bent probe microscopy |
| US5463897A (en) * | 1993-08-17 | 1995-11-07 | Digital Instruments, Inc. | Scanning stylus atomic force microscope with cantilever tracking and optical access |
| US5420796A (en) * | 1993-12-23 | 1995-05-30 | Vlsi Technology, Inc. | Method of inspecting planarity of wafer surface after etchback step in integrated circuit fabrication |
| US5548113A (en) * | 1994-03-24 | 1996-08-20 | Trustees Of Boston University | Co-axial detection and illumination with shear force dithering in a near-field scanning optical microscope |
| US5812723A (en) * | 1994-03-24 | 1998-09-22 | Kanagawa Academy Of Science And Technology | Optical fiber with tapered end of core protruding from clad |
| US5517280A (en) * | 1994-04-12 | 1996-05-14 | The Board Of Trustees Of The Leland Stanford, Jr. University | Photolithography system |
| US5742377A (en) * | 1994-04-12 | 1998-04-21 | The Board Of Trustees Of The Leland Stanford, Jr. University | Cantilever for scanning probe microscope including piezoelectric element and method of using the same |
| US6075585A (en) * | 1994-04-12 | 2000-06-13 | The Board Of Trustees Of The Leland Stanford, Jr. University | Vibrating probe for a scanning probe microscope |
| US5666190A (en) * | 1994-04-12 | 1997-09-09 | The Board Of Trustees Of The Leland Stanford, Jr. University | Method of performing lithography using cantilever array |
| US5618760A (en) * | 1994-04-12 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford, Jr. University | Method of etching a pattern on a substrate using a scanning probe microscope |
| US5883705A (en) * | 1994-04-12 | 1999-03-16 | The Board Of Trustees Of The Leland Stanford, Jr. University | Atomic force microscope for high speed imaging including integral actuator and sensor |
| US6000947A (en) * | 1994-04-12 | 1999-12-14 | The Board Of Trustees Of The Leland Stanford, Jr. | Method of fabricating transistor or other electronic device using scanning probe microscope |
| GB2289759B (en) * | 1994-05-11 | 1996-05-22 | Khaled Karrau | Coupled oscillator scanning imager |
| US6006594A (en) * | 1994-05-11 | 1999-12-28 | Dr. Khaled Und Dr. Miles Haines Gesellschaft Burgerlichen Rechts | Scanning probe microscope head with signal processing circuit |
| US5509300A (en) * | 1994-05-12 | 1996-04-23 | Arizona Board Of Regents Acting For Arizona State University | Non-contact force microscope having a coaxial cantilever-tip configuration |
| US6339217B1 (en) | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
| US6265711B1 (en) | 1994-07-28 | 2001-07-24 | General Nanotechnology L.L.C. | Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements |
| US6337479B1 (en) | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
| US5751683A (en) | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
| JPH10506457A (ja) | 1994-07-28 | 1998-06-23 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡装置 |
| US5664036A (en) * | 1994-10-13 | 1997-09-02 | Accuphotonics, Inc. | High resolution fiber optic probe for near field optical microscopy and method of making same |
| US5485536A (en) * | 1994-10-13 | 1996-01-16 | Accuphotonics, Inc. | Fiber optic probe for near field optical microscopy |
| TW280928B (fr) * | 1994-10-24 | 1996-07-11 | At & T Corp | |
| US5656182A (en) * | 1995-02-21 | 1997-08-12 | Lucent Technologies Inc. | Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials |
| DE19531465C2 (de) * | 1995-03-30 | 1997-12-18 | Zeiss Carl Jena Gmbh | Rastersonde für die optische Nahfeldmikroskopie |
| EP0763215A1 (fr) * | 1995-03-30 | 1997-03-19 | CARL ZEISS JENA GmbH | Sonde micro-optique pour microscope a balayage |
| US5574278A (en) * | 1995-05-23 | 1996-11-12 | The United States Of America As Represented By The Secretary Of Commerce | Atomic force microscope using piezoelectric detection |
| US5874668A (en) * | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
| US5796909A (en) * | 1996-02-14 | 1998-08-18 | Islam; Mohammed N. | All-fiber, high-sensitivity, near-field optical microscopy instrument employing guided wave light collector and specimen support |
| JP2934739B2 (ja) * | 1996-02-20 | 1999-08-16 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡 |
| JP2903211B2 (ja) * | 1996-04-09 | 1999-06-07 | セイコーインスツルメンツ株式会社 | プローブとプローブ製造方法及び走査型プローブ顕微鏡 |
| US5990474A (en) * | 1996-05-15 | 1999-11-23 | Atia; Walid A. | Near field optical probe for simultaneous phase and enhanced amplitude contrast in reflection mode using path matched differential interferometry and method of making it |
| US5811796A (en) * | 1996-06-03 | 1998-09-22 | Lucent Technologies Inc. | Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces |
| DE19631498A1 (de) * | 1996-08-03 | 1998-02-05 | Huels Chemische Werke Ag | Verfahren und Vorrichtung zur optischen Rasternahfeldmikroskopie an Probekörpern in Flüssigkeiten |
| IL119020A (en) * | 1996-08-06 | 2000-02-29 | Elop Electrooptics Ind Ltd | Photochromic supra-density optical memory |
| US6396966B1 (en) | 1997-02-09 | 2002-05-28 | Nanoptics, Inc. | Glass structures for nanodelivery and nanosensing |
| IL120181A0 (en) * | 1997-02-09 | 1997-07-13 | Fish Galina | Method of producing high throughput tapered straight and cantilevered glass structures for nanodelivery and nanosensing |
| JP3249419B2 (ja) * | 1997-03-12 | 2002-01-21 | セイコーインスツルメンツ株式会社 | 走査型近接場光学顕微鏡 |
| US6008489A (en) * | 1997-12-03 | 1999-12-28 | Digital Instruments | Method for improving the operation of oscillating mode atomic force microscopes |
| US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
| US6802646B1 (en) | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
| US7196328B1 (en) | 2001-03-08 | 2007-03-27 | General Nanotechnology Llc | Nanomachining method and apparatus |
| US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
| US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
| GB2339287B (en) * | 1998-07-09 | 2002-12-24 | Taylor Hobson Ltd | Transducer circuit |
| DE29814974U1 (de) * | 1998-08-21 | 1999-12-30 | Witec Wissenschaftliche Instr | Kombinationsmikroskop |
| DE29814972U1 (de) * | 1998-08-21 | 1999-12-30 | WITec Wissenschaftliche Instrumente und Technologie GmbH, 89081 Ulm | Nahfeldoptische Sonde und nahfeldoptisches Mikroskop |
| US6600856B1 (en) * | 1998-12-06 | 2003-07-29 | Nanoptics, Ltd. | Lensed optical fibers and unique micropipettes with subwavelength apertures |
| US6635311B1 (en) | 1999-01-07 | 2003-10-21 | Northwestern University | Methods utilizing scanning probe microscope tips and products therefor or products thereby |
| US6827979B2 (en) * | 1999-01-07 | 2004-12-07 | Northwestern University | Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| US20020158197A1 (en) * | 1999-01-12 | 2002-10-31 | Applied Materials, Inc | AFM-based lithography metrology tool |
| US6285811B1 (en) * | 1999-02-25 | 2001-09-04 | The United States Of America As Represented By The Secretary Of The Navy | Near-field optical microscope with infrared fiber probe |
| ATE308770T1 (de) * | 1999-04-19 | 2005-11-15 | Imp College Innovations Ltd | Optische mikroskopie und deren verwendung bei der untersuchung von zellen |
| JP4044241B2 (ja) * | 1999-05-24 | 2008-02-06 | 日本分光株式会社 | プローブ顕微鏡 |
| WO2001003157A1 (fr) | 1999-07-01 | 2001-01-11 | General Nanotechnology, Llc | Systeme et procede servant a inspecter et/ou modifier un objet |
| US6185992B1 (en) | 1999-07-15 | 2001-02-13 | Veeco Instruments Inc. | Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| AU1592201A (en) * | 1999-11-10 | 2001-06-06 | Georgetown University | Near-field crystal optical memory |
| JP4327993B2 (ja) | 2000-05-29 | 2009-09-09 | 日本分光株式会社 | プローブ開口作製装置、及びそれを用いた近接場光学顕微鏡 |
| US6931710B2 (en) | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
| US7498564B2 (en) * | 2001-02-06 | 2009-03-03 | University Of Bristol Of Senate House | Resonant scanning near-field optical microscope |
| EP1360538B1 (fr) * | 2001-02-06 | 2004-11-10 | The University of Bristol | Microscope optique de champ proche a balayage |
| US7253407B1 (en) | 2001-03-08 | 2007-08-07 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
| DE10125798B4 (de) * | 2001-05-26 | 2006-01-19 | Infineon Technologies Ag | Abbildungssystem zur Positionierung einer Messspitze auf einen Kontaktbereich eines Mikrochips und ein Verfahren zur Darstellung |
| JP4032689B2 (ja) * | 2001-10-04 | 2008-01-16 | 株式会社日立製作所 | 近接場光を用いた測定装置／記録再生装置 |
| US7053369B1 (en) | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
| US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
| DE10218913B4 (de) * | 2002-04-27 | 2005-05-04 | Bruker Daltonik Gmbh | Vorrichtung und Verfahren zur Bewegung einer Elektronenquelle in einem Magnetfeld |
| JP3817498B2 (ja) * | 2002-06-14 | 2006-09-06 | キヤノン株式会社 | 近接場光用の探針を有するプローブの製造方法 |
| EP1539637A4 (fr) | 2002-09-09 | 2010-07-28 | Gen Nanotechnology Llc | Delivrance de fluide pour la microscopie balayage par sonde |
| US7108992B2 (en) * | 2002-11-27 | 2006-09-19 | St. Jude Children's Research Hospital | ATM kinase compositions and methods |
| US7006741B1 (en) * | 2005-03-22 | 2006-02-28 | Bi Yu | Contact-field optical microscope |
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| KR101873936B1 (ko) * | 2008-11-13 | 2018-07-04 | 브루커 나노, 인코퍼레이션. | 탐침형 원자 현미경 |
| US8955161B2 (en) * | 2008-11-13 | 2015-02-10 | Bruker Nano, Inc. | Peakforce photothermal-based detection of IR nanoabsorption |
| FI20086109A0 (fi) * | 2008-11-21 | 2008-11-21 | Nanogalax Ltd Oy | Menetelmä ja laite adheesiovoimien mittaamiseksi |
| US9097737B2 (en) | 2013-11-25 | 2015-08-04 | Oxford Instruments Asylum Research, Inc. | Modular atomic force microscope with environmental controls |
| JP2016028228A (ja) * | 2014-07-09 | 2016-02-25 | キヤノン株式会社 | イオン化装置、およびこれを有する質量分析装置、画像生成システム、画像表示システム、イオン化方法 |
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| USRE33387E (en) * | 1985-11-26 | 1990-10-16 | International Business Machines Corporation | Atomic force microscope and method for imaging surfaces with atomic resolution |
| US4747034A (en) * | 1987-03-05 | 1988-05-24 | David V. Dickey | High efficiency battery adapter |
| EP0283256A3 (fr) * | 1987-03-18 | 1990-02-07 | Tektronix Inc. | Microscope à balayage optique |
| EP0290647B1 (fr) * | 1987-05-12 | 1991-07-24 | International Business Machines Corporation | Microscope de forces atomiques à quartz oscillant |
| DE3772563D1 (de) * | 1987-06-22 | 1991-10-02 | Ibm | Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens. |
| US4889988A (en) * | 1988-07-06 | 1989-12-26 | Digital Instruments, Inc. | Feedback control for scanning tunnel microscopes |
| US4894537A (en) * | 1988-07-21 | 1990-01-16 | Canadian Patents & Development Ltd. | High stability bimorph scanning tunneling microscope |
| US4935634A (en) * | 1989-03-13 | 1990-06-19 | The Regents Of The University Of California | Atomic force microscope with optional replaceable fluid cell |
| US4947034A (en) * | 1989-04-28 | 1990-08-07 | International Business Machines Corporation | Apertureless near field optical microscope |
| US4992659A (en) * | 1989-07-27 | 1991-02-12 | International Business Machines Corporation | Near-field lorentz force microscopy |
| US5004321A (en) * | 1989-07-28 | 1991-04-02 | At&T Bell Laboratories | Resolution confocal microscope, and device fabrication method using same |
| US5003815A (en) * | 1989-10-20 | 1991-04-02 | International Business Machines Corporation | Atomic photo-absorption force microscope |
| US5103174A (en) * | 1990-02-26 | 1992-04-07 | The United States Of America As Represented By The Secretary Of The Navy | Magnetic field sensor and device for determining the magnetostriction of a material based on a tunneling tip detector and methods of using same |
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- 1991-11-04 US US07/787,298 patent/US5254854A/en not_active Expired - Lifetime
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- 1992-08-12 CA CA002075855A patent/CA2075855C/fr not_active Expired - Fee Related
- 1992-10-26 DE DE69212576T patent/DE69212576T2/de not_active Expired - Fee Related
- 1992-10-26 EP EP92309780A patent/EP0545538B1/fr not_active Expired - Lifetime
- 1992-11-04 JP JP4294894A patent/JPH0650750A/ja active Pending
-
1996
- 1996-12-24 HK HK220396A patent/HK220396A/en not_active IP Right Cessation
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0701102A1 (fr) * | 1994-09-09 | 1996-03-13 | Seiko Instruments Inc. | Microscope en champ proche à balayage/force atomique avec observation dans un fluide |
| JPH08146019A (ja) * | 1994-11-15 | 1996-06-07 | Agency Of Ind Science & Technol | 原子間力顕微鏡および原子間力顕微鏡における摩擦の解析方法 |
| JP2002532733A (ja) * | 1998-12-06 | 2002-10-02 | アーロン・ルイス | 準波長域の開口が形成されてなりレンズを有する光ファイバ及び独特のマイクロピペット |
| JP4778616B2 (ja) * | 1998-12-06 | 2011-09-21 | アーロン・ルイス | 準波長域の開口を備えたレンズを有する光ファイバ及び独特のマイクロピペット |
| JP2010210636A (ja) * | 2002-07-04 | 2010-09-24 | Univ Of Bristol | 走査型プローブ顕微鏡 |
| JP2009258191A (ja) * | 2008-04-14 | 2009-11-05 | Olympus Corp | 走査型レーザ顕微鏡 |
| KR20180025257A (ko) * | 2016-08-31 | 2018-03-08 | 에프이아이 컴파니 | 프로브 안착 탐지 |
| JP2018084582A (ja) * | 2016-11-22 | 2018-05-31 | アントン パール ゲーエムベーハーＡｎｔｏｎ Ｐａａｒ ＧｍｂＨ | 実質的に水平な側方視で、走査型プローブ顕微鏡の試料とプローブとの間のギャップを撮像する走査型プローブ顕微鏡及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2075855A1 (fr) | 1993-05-05 |
| HK220396A (en) | 1997-01-03 |
| EP0545538B1 (fr) | 1996-07-31 |
| DE69212576D1 (de) | 1996-09-05 |
| EP0545538A1 (fr) | 1993-06-09 |
| DE69212576T2 (de) | 1997-02-27 |
| CA2075855C (fr) | 2000-01-18 |
| US5254854A (en) | 1993-10-19 |
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