JPH065091U - Exhaust system - Google Patents

Abstract

(57) [Abstract] [Purpose] Regarding an exhaust device for exhausting the inside of a container to a vacuum, particularly when performing a heating degassing operation that requires the use of various heating means such as exhaust work in the production of electron tubes. A suitable exhaust device is provided. [Structure] Movable exhaust base 9 to which an exhaust target 13 is attached
And a furnace body 1a of an atmosphere furnace for heating the exhausted material 13.
And are configured so that they can be used in combination so as to be removable from each other. The furnace body 1a has a structure in which a cut portion 7 through which the exhaust pipe 12 of the exhausted material 13 can pass is provided in one part and the other part is insulated and shielded. The exhausted object 13 is put in and taken out by providing a door 4 on the side surface of the furnace body 1a. The door 4 is opened and closed with the upper part or the side surface as a fulcrum, and when opened, is held open by a support frame 16 of the door. [Effect] When using a heating means other than the means for heating using an atmospheric furnace for heating and degassing the exhausted object, remove the atmospheric furnace and arrange other heating equipment freely and optimally. Therefore, it is possible to improve workability and safety, and improve the facility operation rate.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to an exhaust device for evacuating the inside of a container to a vacuum, and more particularly to an exhaust device suitable for exhaust work in manufacturing electronic tubes requiring high vacuum.

[0002]

[Prior art]

 A conventional exhaust device in the manufacture of electron tubes is, for example, as described in "Materials and Processes of Electron Devices" (1959) by Max Knoll, to eliminate the gas adhering to the inner surface of a glass vacuum container and the stored gas inside the material. For this purpose, the material is heated to a high temperature of about 400 ° C. and evacuated to a high vacuum using a vacuum pump. As the structure of the exhaust system, a high-temperature atmosphere furnace part and an exhaust base part to which an exhausted object such as an electron tube is attached and which evacuates this are provided. There is a fixed exhaust system that simply combines the two without moving, and the former moves the exhaust table on which the exhausted object is placed on the orbit arranged in the atmosphere furnace installed in a circular shape or a straight line. In the process of passing through the tunnel-type atmosphere furnace, the heated object of the exhausted objects is heated and degassed. In the latter method, after the exhausted material is installed in the atmospheric furnace, the temperature in the furnace is raised to a high temperature for degassing.

[0003]

[Problems to be solved by the device]

 The above-mentioned conventional technique has a problem that the work is difficult to perform when performing the heat degassing work on the object to be heated by a method other than the heat degassing work in the atmosphere furnace. That is, in evacuation of electron tubes, in addition to heating and degassing the glass vacuum container, heating and degassing of the metal electrodes housed in the container must also be performed. As for heating metal electrodes, it is necessary to use other heating means such as high-frequency induction heating and electron impact heating because heating in an atmosphere furnace is not sufficient. When applying these other heating means, it is more convenient to have no atmosphere furnace because the equipment required for the work can be arranged freely. In this respect, the mobile exhaust system is more suitable than the fixed exhaust system. However, since the conventional mobile exhaust system uses a tunnel type atmospheric furnace, the heating atmosphere easily leaks to the outside and the thermal efficiency is low.Because it moves on an orbit, the atmospheric furnace heating and other heating are alternated. There was another problem that it was difficult to follow up when changing work conditions such as repeating or changing each time as needed.

The object of the present invention is to make up for the drawbacks of the conventional fixed type exhaust system and the mobile type exhaust system, and to provide an atmosphere furnace with a high thermal efficiency, and to easily implement a heating degassing work means other than the atmosphere furnace heating. Therefore, it is to provide maneuverability capable of freely setting various combinations of various heating and degassing operations, and to provide an exhaust device with good equipment operation efficiency.

[0005]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention is an atmosphere furnace equipped with a furnace body capable of heating an internal gas to a high temperature. A cutout is provided through which the exhaust pipe of the exhausted object attached to the stand can pass, and the heat insulating shield attached to the inside of the door covers the cutout portion other than the passage of the exhaust pipe. It is formed (Claim 1).

Further, in the atmosphere furnace, the openable and closable door is configured to be opened and closed by using one of an upper portion and a side surface of the furnace body as a fulcrum (claim 2).

Further, in the atmosphere furnace, when the openable / closable door is opened and closed with the upper part as a fulcrum, a door holding means for opening the door is provided on the upper part of the furnace body (claim 3).

Further, in the exhaust system of the present invention, the above-mentioned atmosphere furnace and an exhaust base movable without a track are detachably combined and used (claim 4).

[0009]

[Action]

 Since the non-tunnel type closed-type atmospheric furnace has an extremely small opening through which high-temperature gas in the furnace body leaks out of the furnace body, heat dissipation to the outside of the furnace body can be reduced and thermal efficiency can be improved. 1). By attaching the door of the furnace body to the side surface of the furnace body and further providing a means for holding the door, the atmosphere furnace and the exhaust base can be easily connected, and the safety when opening and closing the door is ensured. (Claims 2 and 3). When the above atmosphere furnace is combined with a trackless mobile exhaust table, it is possible to perform other heating degassing operations after the heating degassing in the atmosphere furnace without the atmosphere furnace. Since it is possible to freely move to a place where the required heating method can be performed according to the purpose, it is possible to perform the exhaust work by optimally setting the heating means and the working time without waste. As a result, the facility operation rate can be increased (claim 4).

[0010]

【Example】

 An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a vertical cross-sectional view showing a combination state of an atmospheric furnace and an exhaust stand according to one embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view of a main part of FIG. 1 viewed from a side direction. The furnace body 1a of the atmosphere furnace 1 is composed of a fixed furnace frame 2, a side opening / closing door 4, and a heater 6 for heating the gas in the furnace. Inside the furnace frame 2 and the door frame 5 of the door 4, a heat insulating material 3 is attached. The furnace body 1a is configured so that the internal gas can be heated to a high temperature by closing the door 4 and operating the heater 6. In addition, the entire atmosphere furnace 1 is placed on a support base 8, and a cut portion 7 opened toward the door 4 is provided on the lower surface of the furnace body 1a. The support base 8 has a shape in which the side with the door 4 is open, and when the door 4 is opened, a movable exhaust base 9 can be fed from the side of the door 4 and mounted. The exhaust base 9 has an exhaust unit 11 supported by wheels 10, and the exhaust unit 11 is equipped with an exhaust pump (not shown). An exhaust target 13 is attached to the exhaust pump via an exhaust pipe 12. The cut width of the cut portion 7 is set to the minimum necessary for the exhaust pipe 12 to pass therethrough, and when the door 4 is closed, the cut portion 7 is covered with the heat insulating and shielding portion 14 provided in the door 4, and Be able to block hot air leaks. With the above-described structure, the exhausted substance 13 is charged into the furnace body 1a, and the gas inside the furnace is heated and degassed by heating.

When the heating degassing by the atmosphere furnace 1 is completed and then the heating degassing by other means is performed, the door 4 is opened. FIG. 3 is a longitudinal sectional view of an essential part showing a state in which the atmosphere furnace 1 and the exhaust table 9 are separated. The door 4 is opened centering on the support roller 15, and after opening, the support roller 15 is moved along the support frame 16 which also serves as a door moving frame, and is pushed until the door 4 is placed on the support frame 16 as shown in FIG. . A pulley 17 is provided on the support frame 16 so that the door 4 can be moved smoothly. Furthermore, by installing the support frame 16 so that it is high on the side of the door 4 where the heat-insulating shield 14 is present and low on the side of the support roller 15, when the door 4 is placed on the support frame 16 and pushed in fully. , The door 4 will not return. In this way, with the door 4 open, the exhaust base 9 can be moved to take out the exhausted material 13 from the atmosphere furnace 1 and move the exhaust base 9 to another place where thermal degassing is performed. it can.

According to the present embodiment, the atmosphere furnace 1 and the exhaust base 8 can be freely attached and detached, and even when the atmosphere furnace 1 used in combination is heated to a high temperature, the gas in the furnace is prevented from leaking to the outside. You can

By configuring the exhaust table 9 to be movable in a trackless manner, it can be arbitrarily moved to a place where a heating degassing means other than atmospheric furnace heating degassing can be implemented. Since the exhaust pump mounted on the exhaust base 9 must be supplied with the power necessary for its operation, it is advisable to mount a battery so that the exhaust pump can operate even while moving. After the exhaust base 9 is moved to the place where the next thermal degassing means is carried out, the power supply may be switched to reduce the consumption of the battery. By doing so, the operation of the exhaust pump can be continued even when the exhaust base 9 is moved in a trackless manner, so that heating degassing by means other than the atmospheric furnace can be performed in an arbitrary combination.

In FIG. 1, the opening / closing of the door 4 is supported by the upper part and the lower part is opened, but one side of the side part may be used as a fulcrum and the other side part may be opened left or right. In that case, the door 4 is fixed when it is opened at the side surface with the fulcrum. As for the opening and closing fulcrum of the door 4, the one that is more convenient may be adopted depending on the surroundings of the atmosphere furnace.

[0015]

[Effect of device]

 According to the present invention, in the heating and degassing work in the atmospheric furnace, the thermal efficiency of the furnace can be maintained at the same level as that of the fixed exhaust device, and in the heating and degassing work by means other than the atmospheric furnace, there is no atmospheric furnace. It can be performed by using an exhaust table in the state. Therefore, the heating equipment can be arranged freely and the work can be performed most optimally for the work, so that workability and safety can be improved. In addition, various heating and degassing means can be used in any combination depending on the objects to be exhausted, so it is possible to deal with various objects to be exhausted without preparing various kinds of exhaust equipment, and the equipment operating rate Can be higher and the economic efficiency can be improved.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing a combined state of an atmospheric furnace and an exhaust table according to an embodiment of the present invention.

FIG. 2 is a longitudinal cross-sectional view of a main part when FIG. 1 is viewed from a side surface direction.

FIG. 3 is a longitudinal sectional view of an essential part showing a state in which an atmosphere furnace and an exhaust table are separated.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Atmosphere furnace 1a Furnace body 2 Furnace frame 3 Insulating material 4 Door 7 Notch section 8 Support stand 9 Exhaust stand 12 Exhaust pipe 13 Exhaust object 14 Insulating shield section 15 Support roller 16 Support frame

Claims (4)

[Scope of utility model registration request] 1. An atmosphere furnace having a furnace body capable of heating an internal gas to a high temperature, wherein an exhaustable door is attached to an exhaust base used in combination with a door which can be opened and closed on a side surface of the furnace body. A cutout portion through which an exhaust pipe of an object can pass is provided, and a heat insulating shield attached to the inside of the door is formed so as to cover a portion of the cutout portion other than a passage portion of the exhaust pipe. Atmosphere furnace. 2. The atmospheric furnace according to claim 1, wherein the openable and closable door is configured to be opened and closed with one of the upper portion and the side surface of the furnace body as a fulcrum. 3. The atmospheric furnace according to claim 1, wherein the openable and closable door is an atmospheric furnace that opens and closes with an upper part as a fulcrum, and door holding means for opening the door is provided on an upper part of the furnace body. . 4. An exhaust system, wherein the atmosphere furnace according to claim 1 and an exhaust base movable without a track are detachably combined and used.