JPH0653087U - Gloves for gas cylinders and boxes - Google Patents

Abstract

(57) [Summary] [Purpose] A gas cylinder containing a gas cylinder
The front door of the box has a hole for inserting a hand, and the fingers are inserted into the glove hanging in the box to operate the valve of the cinder. Conventionally, there was a pair of gloves on the left and right, but the working range was narrow because the gloves for the right hand and the left hand were different. Solve this. [Structure] Among the two pairs of gloves, at least the gloves near the center can be inserted into both left and right hands. Both hands can be put in, so work in the center is easier.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 This invention is an improvement on the groove of the gas cylinder box that houses the gas cylinder. For example, in a semiconductor manufacturing apparatus, various gases are used for CVD, etching, PVD and the like. The gas for etching is often a gas containing halogen. In the case of MOCVD source gas, an organometallic compound gas is used. In addition, a hydride gas of As or P may be used.

In addition, hydrogen, nitrogen, argon gas, etc. are often used. These gases are stored under high pressure in a gas cylinder suitable for the physical properties. Various types of high-pressure gas are widely used not only in the semiconductor industry but also in various industries, hospitals, etc.

For safety, a highly toxic gas, a gas cylinder having a risk of ignition, and the like are housed in a gas cylinder box. The present invention provides improvements over these gloves.

[0004]

[Prior art]

 A gas cylinder box that houses a gas cylinder houses one or more gas cylinders vertically. It is a space that can be sealed, and the inside can be evacuated. It is also possible to fill the box with a desired gas. Since it is shielded from the outside, even if a part of gas is highly toxic gas and leaks, it does not impair the external working environment. On the other hand, even if there is a flame or spark outside, the gas does not ignite, so it is safe.

Gas cylinder boxes have become popular for the safe handling of gas cylinders. The space is long vertically and narrow in depth, but the front is a double door for inserting and removing the gas cylinder. There is a glass window above the double doors.

The gas cylinder is opened and closed by an automatic valve, and there is only a keyboard and a console outside the box. The automatic valve can be opened and closed simply by pressing a key or a switch. Some have done so. However, there is a gas cylinder box where the operator manually opens and closes the valve. In this case, a glove is used to shut off the atmosphere inside and outside. The present invention is directed to such a manual type.

FIG. 1 shows a front view of a conventional gas cylinder box. Gas cylinders 1, 2, and 3 of highly toxic gas or gas with a risk of ignition are set up inside the gas cylinder box 4. At the upper part of the gas cylinder is a cylinder-main valve 5, and the pipe following it is provided with a manual valve 6. It is designed to be opened and closed by hand. The cylinder-main valve 5 is often opened when it is installed and then left open. The gas can be supplied and shut off mainly by opening and closing the manual valve 6.

A left hand groove 8 and a right hand groove 9 are provided on the front surfaces of the double doors 10 and 11 in order to open and close the manual valve 6 and the cylinder main valve 5. These gloves are suspended in the box. Although both valves are opened and closed, the manual valve 6 is more frequent, so the manual valve 6 will be described below.

A pair is provided on each of the double doors. This is a part of the door panel where holes A, B, C and D are perforated, and a long groove made of synthetic resin is passed through to close the door. Is fixed around the hole. The left hand glove is installed in holes A and C, and the right hand glove is installed in holes B and D.

FIG. 2 shows this state. Counting from the left, the left-hand holes are attached to the first and third holes A and C, and the right-hand holes are attached to the second and fourth holes B and D. There is a distinction between the left hand and the right hand because the thumb is thick and short and the root is at the back, and the glove is made accordingly, and the left and right are not the same.

Above the doors 10 and 11, there are glass globe box windows 12 and 13. The operator inserts the left hand into the left-hand globe and the right hand into the right-hand globe, and twists the manual valves 6 of the gas cylinders 1-3 to open and close them. Since the inside and outside spaces are blocked by the groove, it is safe to prevent gas leakage and ignition.

[0012]

[Problems to be solved by the device]

 Often there are two gas cylinders housed in the gas cylinder box. In this case, there is no problem in operating the manual valve 6 using either of the two pairs of grooves provided on the doors on both sides.

However, as shown in FIG. 1, there is also one that accommodates three gas cylinders. In this case, there is no problem in opening / closing the manual valves 6 of the left and right gas cylinders-1 and 3. There is a problem with opening and closing the manual valve 6 of the gas cylinder-2 with the central roller. Since the manual valve 6 of this is located in the center of the box, it is opened and closed using a pair of right-side gloves (holes C and D) or a pair of left-side gloves (holes A and B). ) Is used. However, in both cases, there is a distance from the groove hole to the central manual valve 6, and the manual valve 6 is outside the area surrounded by both hands (AB, CD), so it is difficult to operate. There are drawbacks.

In a gas cylinder box in which three gas cylinders are housed in this way and two pairs of grooves are provided on the left and right, the operation of the manual valve 6 of the central gas cylinder is facilitated. That is the purpose of the present invention.

[0015]

[Means for Solving the Problems]

 According to the present invention, of the two pairs of gloves, the one closer to the center (holes B and C) can be used for both left and right. For this purpose, a two-handed glove in which the left and right-handed glove is joined is used. Alternatively, a left / right globe with six fingers is used.

[0016]

[Action]

 Of the two pairs of gloves, the two near the center (holes B and C) can be used for both hands with the left and right hands, so when operating the central gas cylinder, the two central gloves should be used. The left and right arms can be inserted into the holes B and C to open and close the manual valve 6. In other words, insert the left arm into the right hole B on the left side and the right arm into the right hole C on the right side. This is possible because the gloves are dual-purpose.

In this case, since the manual valve 6 of the central gas cylinder comes within the range (B-C) between the arms, the operation becomes easy and easy. Operation must be safe and reliable as it is a toxic and dangerous gas. The present invention ensures the safe operation of the central gas cylinder by improving the usability of the globe.

[0018]

【Example】

 FIG. 3 shows a two-handed globe 14 used in the present invention. This is a groove that branches to the left and right, but the right side is the left-hand groove and the left side is the right-hand groove, and there is a branch point in the middle, and at the root part, it is integrated. Has become. Insert your hand from the original part and at the branch point either right or left. Each has five fingers.

As shown in FIG. 4, such a two-handed globe 14 is attached to the B and C holes near the center among the four holes of the gas cylinder box 4. The hole A at the left end attaches the left hand glove. Attach the right hand glove to the hole D at the right end. This is the same as before.

When opening and closing the central manual valve 6, the left hand is inserted into the right part of the groove of the hole B and the right hand is inserted into the left part of the groove of the hole C. Arms are placed in holes B and C, so both hands can reach the central area. Therefore, the operation of the central manual valve 6 is facilitated, and the opening / closing operation can be reliably performed.

Other points are the same as the conventional ones. When operating the left hand valve 6, insert your left hand into hole A and your right hand into hole B. When operating the right hand valve 6, put the left hand in hole C and the right hand in hole D. In any case, the shape of the hand and the shape of the globe match, so you can put your hand in the globe. The central groove is in a state where one of the branched parts is unused. This will hang around, but it will hardly interfere with the valve opening / closing operation.

FIG. 5 shows another embodiment of the present invention. This is a left and right globe with six fingers. It is a glove with fingers 21, 22, 23, 24, 25, 26. The left and right fingers 21 and 26 are for the thumb. This is where the ingenuity lies. The other four fingers are not as special as the thumb, so let's share them with the left and right fingers. That is, 22 is the index finger of the right hand and the little finger of the left hand. Similarly, 25 holds the little finger of the right hand and the index finger of the left hand.

Since the index finger is longer, the size may be determined according to this. The middle 23 and 24 have a middle finger or a ring finger, but since they are similar in height to each other, it is reasonable to share them. Contrary to these, the thumb cannot be used in common because the position of the base is completely different from the other fingers.

FIG. 6 is a front view of a gas cylinder box in which such left and right-use gloves are attached to holes B and C in the central portion. When opening and closing the manual valve 6 of the left gas cylinder-1, put the left hand in hole A and the right hand in hole B. In the hole B, the six-fingered glove of FIG. 5 is attached, but the thumb is put in 21 and the index finger is put in 22. 26 does not receive a finger and remains hollow. This doesn't get in the way though. To handle the right gas cylinder-3, insert the right hand into hole D and the left hand into hole C. In this case, the globe of Figure 5 would be used for the left hand.

When operating the manual valve 6 of the central gas cylinder-2, put the left hand in the hole B and the right hand in the hole C. The groove of hole B has a thumb in 26 and an index finger in 25. 22 will be the little finger. 21 remains hollow. The groove of the hole C has a thumb at 21, a forefinger at 22, an middle finger at 23, and a hollow at 26. Since the manual valve 6 of the gas cylinder-2 is located exactly in the middle of the left and right hands, it can be easily opened and closed by the left and right hands.

Although the manual gas valve 6 is often hard and difficult to turn, a sufficient force is applied in such a posture so that the valve can be easily operated. In the present invention, it is essential that the holes B and C in the central portion are provided with a left / right-use groove or a left / right-use groove. However, the other holes A and D can be provided with such a groove.

Next, the two-handed gloves shown in FIG. 3 are actually attached to the four holes, and when the valve opening / closing operation is actually performed, the cylinder-main valve 5 is opened, the manual valve 6 is opened / closed, The time to replace the gas cylinder and the working range were measured.

[0028]

[Table 1]

According to this, it can be seen that the present invention improves the working time and working range by about 20%. Also, safety is improved because the operation is reliable.

[0030]

[Effects of the Invention] This invention is equipped with a dual-purpose or dual-purpose globe that can be used with both left and right hands in the gas cylinder box, so it can be used to open and close valves in the gas cylinder box. The operation can be performed smoothly and safely. It greatly contributes to the improvement of work efficiency and safety.

[Brief description of drawings]

FIG. 1 is a front view of a gas cylinder box according to a conventional example.

FIG. 2 is a plan view showing a groove portion in a gas cylinder box according to a conventional example.

FIG. 3 is a plan view showing a two-handed globe according to an embodiment of the present invention.

FIG. 4 is a front view of a gas cylinder box in which two-handed gloves are provided in two central holes.

FIG. 5 is a plan view of a left / right combined globe according to an embodiment of the present invention.

FIG. 6 is a front view of a gas cylinder box equipped with a left / right combined globe according to an embodiment of the present invention.

[Explanation of symbols]

 1 Gas Cylinder-2 Gas Cylinder-3 Gas Cylinder-4 Gas Cylinder Box 5 Cylinder-Main Valve 6 Manual Valve 8 Left Hand Globe 9 Right Hand Globe 10 Double Door 11 Double Door 12 12 Globe Box Window 13 Groove box window 14 Globe for both hands 15 Globe for both left and right

Claims (2)

[Scope of utility model registration request] 1. A gas containing a gas cylinder therein.
It is a globe that is attached to the hole in the front door of the cylinder box so as to hang down inside the box, and allows you to insert your hand from the outside to operate the valve inside the box. -A cylinder for a gas cylinder box, characterized in that it has a shape in which the groove and the groove for the right hand are integrated at hand, so that either the left or right hand can be inserted. 2. A gas containing a gas cylinder therein.
It is a glove that is attached to the hole in the front door of the cylinder box so as to hang down inside the box, and allows the operator to operate the valve inside the box by inserting a hand from the outside. There is a book, the fingers corresponding to the thumb are formed on both sides, and the middle four fingers are shared by the left and right fingers, so that either the left or right hand can be inserted. A glove for a gas cylinder box characterized by the above.