Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co LtdfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP12890589UpriorityCriticalpatent/JPH065361Y2/ja
Publication of JPH0367001UpublicationCriticalpatent/JPH0367001U/ja
Application grantedgrantedCritical
Publication of JPH065361Y2publicationCriticalpatent/JPH065361Y2/ja