JPH0658434A - Ceramic sliding member - Google Patents
Ceramic sliding memberInfo
- Publication number
- JPH0658434A JPH0658434A JP4208748A JP20874892A JPH0658434A JP H0658434 A JPH0658434 A JP H0658434A JP 4208748 A JP4208748 A JP 4208748A JP 20874892 A JP20874892 A JP 20874892A JP H0658434 A JPH0658434 A JP H0658434A
- Authority
- JP
- Japan
- Prior art keywords
- sliding
- ceramic
- sliding member
- pores
- porosity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sliding Valves (AREA)
- Multiple-Way Valves (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
(57)【要約】
【構成】気孔率が3〜30体積%の閉塞した気孔が均一
分散するセラミック体の摺動面を平坦度3μm以下とし
てセラミック摺動部材を構成する。
【効果】完全なシール性を保ったまま、長期にわたって
リンキングもなくスムースな摺動を行うことができるた
め、各種バルブや、シールリング、スライダー部品等と
して好適に使用することができる。
(57) [Summary] [Construction] A ceramic sliding member is constructed with a flatness of 3 μm or less on the sliding surface of a ceramic body in which closed pores having a porosity of 3 to 30% by volume are uniformly dispersed. [Effect] Since smooth sliding can be performed for a long period of time without linking while maintaining a perfect sealing property, it can be suitably used as various valves, seal rings, slider parts and the like.
Description
【0001】[0001]
【産業上の利用分野】本発明はバルブ、スライダー、シ
ールなどに用いられるセラミック摺動部材に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic sliding member used for valves, sliders, seals and the like.
【0002】[0002]
【従来の技術】湯水混合栓に用いられるフォーセットバ
ルブは、2枚のディスク状弁体を互いに摺接した状態で
相対移動させることによって、各弁体に形成した流体通
路の開閉を行うようになっている。例えば図4(A)に
示されるように、固定弁体30と可動弁体20を互いの
摺接面21、31で接した状態としておいて、図4
(B)に示すようにレバー40の操作で可動弁体20を
動かすことによって、互いの弁体に形成した流体通路2
2、32の開閉を行い、供給流体の開閉、調整などの制
御をするようになっている。2. Description of the Related Art A Faucet valve used in a hot and cold water mixing valve is configured to open and close a fluid passage formed in each valve body by relatively moving two disc-shaped valve bodies in a state of sliding contact with each other. Has become. For example, as shown in FIG. 4 (A), the fixed valve body 30 and the movable valve body 20 are kept in contact with each other at their sliding contact surfaces 21 and 31.
By moving the movable valve body 20 by operating the lever 40 as shown in FIG.
By opening and closing 2, 32, the supply fluid is controlled to be opened and closed and adjusted.
【0003】上記可動弁体20、固定弁体30として用
いられる摺動部材は、摺動性やシール性を保つために高
い寸法精度が要求されるうえ、互いに絶えず摺り合わさ
れるため摩耗が激しく、常に流体にさらされるため腐食
も激しかった。そこで近年、高精度に加工することが可
能であり、耐摩耗性や耐食性にも優れたセラミックスが
摺動部材として使われるようになってきた。The sliding members used as the movable valve body 20 and the fixed valve body 30 are required to have high dimensional accuracy in order to maintain slidability and sealability, and they are constantly slid against each other, causing severe wear. Corrosion was severe because it was constantly exposed to fluid. Therefore, in recent years, ceramics, which can be processed with high precision and have excellent wear resistance and corrosion resistance, have come to be used as sliding members.
【0004】また、このフォーセットバルブ以外にも、
各種シール部品や軸受部品など、シール性の必要な摺動
部材にセラミックスが用いられるようになっている。In addition to this facet valve,
Ceramics have come to be used for sliding members such as various seal parts and bearing parts that require sealing properties.
【0005】ところで、摺動性とシール性は相反するも
のであり、シール性を高めようとすれば摺動面を極めて
平滑にしなければならないが、そうするとスムースな摺
動性が得られなくなることが知られている。この典型的
な例がリンキング(凝着)と呼ばれるもので、これは極
めて平滑な面を持った1対の部材同志を摺り合わせたと
きに発生する引っかかりや異音の発生、そしてついには
張り付いて動かなくなるような現象のことを示し、分子
レベルの分子間力や静電気力あるいは真空吸着などが複
雑に絡み合って生じるとされている。By the way, the slidability and the sealability are contradictory to each other, and in order to improve the sealability, the sliding surface must be made extremely smooth. However, if so, smooth slidability may not be obtained. Are known. A typical example of this is what is called linking, which is the occurrence of catching and abnormal noise that occurs when a pair of members with extremely smooth surfaces are rubbed together, and finally sticking together. It is said that it is a phenomenon that becomes immobile, and it is said that intermolecular force at the molecular level, electrostatic force, vacuum adsorption, etc. are complicatedly entangled.
【0006】このようなリンキングは平滑な面で無けれ
ば発生しないことから、さまざまな解決案が考えられて
いる。例えば、セラミック摺動部材の摺動面に微小な凹
凸を形成したり、あるいは適度な大きさの表面粗さとす
ることが考えられていた(例えば特開平1−11638
6号公報参照)。Since such linking does not occur unless the surface is smooth, various solutions have been considered. For example, it has been considered that minute irregularities are formed on the sliding surface of the ceramic sliding member or that the surface roughness is of an appropriate size (for example, JP-A-1-116638).
No. 6 publication).
【0007】また、セラミック摺動部材を三次元網目構
造の多孔質セラミックスとし、この開放気孔中に潤滑剤
として樹脂やオイル等を含浸させたものもあった(特開
昭61−206875号、61−244980号、62
−4949号、62−37517号公報等参照)。There is also a ceramic sliding member made of porous ceramics having a three-dimensional mesh structure, and the open pores are impregnated with a resin or oil as a lubricant (Japanese Patent Laid-Open Nos. 61-206875 and 61-206875). -244980, 62
-4949, 62-37517, etc.).
【0008】さらに、セラミック摺動部材の平滑な摺動
面の上に潤滑膜を形成することも行われてきた。潤滑膜
としては、オイルなどの塗布による油膜の形成の他に、
潤滑作用を有するカーボンの蒸着やSiCなどのコーテ
ィングを行うことが考えられている。Further, a lubricating film has been formed on the smooth sliding surface of the ceramic sliding member. As a lubricating film, in addition to forming an oil film by applying oil,
It has been considered to deposit carbon having a lubricating action or to coat SiC or the like.
【0009】[0009]
【発明が解決しようとする課題】ところが、摺動面に微
小な凹凸を形成したものでは、シール性が低下する恐れ
があり、しかも長期使用時の摺動摩耗によって摺動面が
滑らかになってしまうと、結局リンキングが発生すると
いう問題点があった。However, in the case where the sliding surface has minute irregularities, the sealing property may be deteriorated, and the sliding surface becomes smooth due to sliding wear during long-term use. If so, there was a problem that linking would eventually occur.
【0010】また、三次元網目状セラミックスの開放気
孔中に樹脂などを含浸させたものでは、異材質と組合せ
た複合材であるため、他の摺動部材との硬度差により摩
耗が進みやすく、初期の摺接面が維持されないことか
ら、結局リンキングが発生してしまうという問題点があ
った。また、樹脂などを含浸させるため、耐熱性が低く
なり、しかも製造が容易ではなかった。Further, the open pores of the three-dimensional reticulated ceramics impregnated with resin or the like are a composite material combined with a different material, so that the wear tends to proceed due to the hardness difference with other sliding members, Since the initial sliding contact surface is not maintained, there is a problem that linking eventually occurs. Further, since it is impregnated with a resin or the like, the heat resistance is low and the production is not easy.
【0011】さらに、摺動面へ潤滑膜を形成したもので
は、一時的には有効であるものの、長期的に使用すると
潤滑膜そのものが失われたり摩耗してしまいリンキング
の発生が避けられないという欠点があった。例えば、油
膜に頼る摺動部材の場合、油膜が切れるとたちまちリン
キングが発生してしまうだけでなく、流体中にオイルな
どの不純物が混入してしまうという不都合もあった。ま
た、摺動面にカーボンやSiCを蒸着させたものでも、
その効果は摺動面の表面近傍でしか作用しないため長期
間にわたる摺動で表面がわずかに摩耗しただけでリンキ
ングを生じるものであった。しかも、蒸着などのコーテ
ィングには膨大な手間とコストを要し、量産に適したも
のではなかった。Further, although the one having a lubricating film formed on the sliding surface is temporarily effective, it is inevitable that the lubricating film itself will be lost or worn and the occurrence of linking will be unavoidable after long-term use. There was a flaw. For example, in the case of a sliding member that relies on an oil film, when the oil film is cut off, linking occurs immediately, and in addition, impurities such as oil are mixed in the fluid. In addition, even if the sliding surface is vapor-deposited with carbon or SiC,
Since the effect acts only in the vicinity of the surface of the sliding surface, linking occurs even if the surface is slightly worn due to long-term sliding. Moreover, coating such as vapor deposition requires enormous labor and cost and is not suitable for mass production.
【0012】このように、優れたシール性を保ち、長期
にわたってリンキングを生じないようなセラミック摺動
部材は、いまだ得られていなかった。As described above, a ceramic sliding member which has excellent sealing property and does not cause linking for a long time has not been obtained yet.
【0013】[0013]
【課題を解決するための手段】上記に鑑みて本発明は、
気孔率3〜30体積%の閉塞した気孔が均一に分散し、
摺動面が平坦度3μm以下のセラミック摺動部材を構成
したものである。In view of the above, the present invention provides:
The closed pores having a porosity of 3 to 30% by volume are uniformly dispersed,
The sliding surface is a ceramic sliding member having a flatness of 3 μm or less.
【0014】なお、本発明において閉塞した気孔とは、
少なくとも各気孔が摺動面と他の面との間で連通してい
ないことを意味する。In the present invention, the closed pores are
It means that at least each pore is not in communication between the sliding surface and the other surface.
【0015】[0015]
【作用】本発明のセラミック摺動部材は、各気孔が閉塞
したものであり、摺動面の平坦度が3μm以下であるこ
とから、優れたシール性を得ることができる。そして、
摺動面に気孔が存在することから、接触面積が小さくな
り摺動抵抗を小さくできる。さらに、摺動部材全体に気
孔が存在するため、摺動面が摩耗しても次々と気孔が現
れ、初期状態と同様な面状態を維持できることから、長
期使用してもリンキングの発生を防止できる。In the ceramic sliding member of the present invention, each pore is closed, and the flatness of the sliding surface is 3 μm or less, so that excellent sealing properties can be obtained. And
Since there are pores on the sliding surface, the contact area is reduced and the sliding resistance can be reduced. Further, since pores are present in the entire sliding member, pores appear one after another even when the sliding surface is worn, and the surface state similar to the initial state can be maintained, so that the occurrence of linking can be prevented even after long-term use. .
【0016】[0016]
【実施例】以下本発明の実施例を図によって説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0017】図1に断面図を、図2に表面の拡大図をそ
れぞれ示すように本発明のセラミック摺動部材1は、互
いに独立した多数の気孔2を内部および表面に均一に備
えてており、全体として気孔率が3〜30体積%の多孔
質体となっている。また、摺動面3にも気孔2を有して
おり、この摺動面3の気孔2を除く部分は平坦度3μm
以下の極めて平坦な面となっている。As shown in the sectional view of FIG. 1 and the enlarged view of the surface of FIG. 2, the ceramic sliding member 1 of the present invention is provided with a large number of independent pores 2 uniformly inside and on the surface. The porous body has a porosity of 3 to 30% by volume as a whole. The sliding surface 3 also has pores 2, and the portion of the sliding surface 3 excluding the pores 2 has a flatness of 3 μm.
The following is a very flat surface.
【0018】いま、このセラミック摺動部材1同士を押
しつけて摺動させると、摺動面3に気孔2が存在するこ
とにより接触面積を低減してリンキングを防止すること
ができ、しかも流体が介在するときは摺動面3の気孔2
が流体だまりとして作用するため、自己潤滑作用をも合
わせて摺動トルクを小さくすることができる。Now, when the ceramic sliding members 1 are pressed against each other and slid, the contact surface area can be reduced and the linking can be prevented due to the existence of the pores 2 in the sliding surface 3, and the fluid is interposed. When doing, the pores 2 on the sliding surface 3
Acts as a fluid pool, so that the sliding torque can be reduced by combining the self-lubricating action.
【0019】さらに、本発明のセラミック摺動部材1に
はその表面だけでなく内部にも均一に気孔2を有してい
るため、使用中に摩耗が生じて摺動面3の表面層が失わ
れても、次から次へと同じ表面状態が出現することか
ら、長期間にわたる使用でもリンキングの発生はない。Further, since the ceramic sliding member 1 of the present invention has the pores 2 not only on the surface but also inside thereof, wear occurs during use and the surface layer of the sliding surface 3 is lost. However, since the same surface state appears one after another, no linking occurs even after long-term use.
【0020】また、摺動面3は気孔2を除いて極めて平
坦度の高い面となっており、しかも各気孔2は互いに独
立したクローズドポアであるため、この気孔2を通じて
流体が外に漏れ出す恐れはない。The sliding surface 3 is a surface having a very high degree of flatness except for the pores 2. Moreover, since the pores 2 are closed pores independent of each other, the fluid leaks out through the pores 2. There is no fear.
【0021】このような本発明のセラミック摺動部材に
おいて、気孔率を3〜30体積%としたのは、気孔率が
3%以下では摺動トルクを小さくする効果に乏しいため
であり、30%以上では耐摩耗性や強度が低くなってし
まうためである。なお、気孔率3〜30体積%で各気孔
2が均一に存在していれば、摺動面3における気孔2の
面積占有率も3〜30%の範囲となる。In the ceramic sliding member of the present invention as described above, the porosity is set to 3 to 30% by volume because when the porosity is 3% or less, the effect of reducing the sliding torque is poor, and the porosity is 30%. This is because the wear resistance and the strength are reduced in the above. If the pores 2 are evenly present at a porosity of 3 to 30% by volume, the area occupancy of the pores 2 on the sliding surface 3 is also in the range of 3 to 30%.
【0022】また、各気孔2の大きさとしては、気孔径
100μm以下の小さなものが多数均一に存在している
ものが良いが、後述する製造上の点からは気孔径は10
μm以上が好ましい。さらに、気孔2の形状はどのよう
なものでも良いが、気孔2からクラックが生じにくいよ
うに丸い形状が好ましい。Regarding the size of each pore 2, it is preferable that a large number of small pores having a pore diameter of 100 μm or less are present uniformly, but the pore diameter is 10 from the viewpoint of manufacturing described later.
It is preferably at least μm. Further, the pores 2 may have any shape, but a round shape is preferable so that cracks are less likely to occur from the pores 2.
【0023】なお、上記実施例では、各気孔2が独立し
たものを示したが、本発明においては少なくとも各気孔
2が摺動面3と他の面との間で連通していなければ良
い。例えば、各気孔が連通したセラミック体の摺動面以
外の面をガラスなどで封止したものであってもよい。In the above embodiment, the pores 2 are independent of each other, but in the present invention, at least the pores 2 need not communicate with the sliding surface 3 and other surfaces. For example, the surface other than the sliding surface of the ceramic body in which the respective pores communicate with each other may be sealed with glass or the like.
【0024】さらに、摺動面3のシール性を保つために
は、平坦度は3μm以下、好ましくは1μm以下とすれ
ば良い。Further, in order to maintain the sealing property of the sliding surface 3, the flatness may be 3 μm or less, preferably 1 μm or less.
【0025】次に本発明のセラミック摺動部材1の製造
方法を説明する。Next, a method of manufacturing the ceramic sliding member 1 of the present invention will be described.
【0026】まず、本発明のセラミック摺動部材1の材
質は、アルミナ、ジルコニア、炭化珪素、窒化珪素など
を主成分としてなる焼結体であって、所望により公知の
焼結助剤を添加することができる。例えば、アルミナに
対してはSiO2 、MgOなど、炭化珪素に対しては
C、B、Al2 O3 、Y2 O3 等、窒化珪素に対しては
周期律表2a、3a族元素の酸化物、窒化物等、ジルコ
ニアに対してはY2 O3、CaO、MgO、CeO2 等
をそれぞれ添加することができる。First, the material of the ceramic sliding member 1 of the present invention is a sintered body containing alumina, zirconia, silicon carbide, silicon nitride or the like as a main component, and a known sintering aid is added if desired. be able to. For example, for alumina, SiO 2 , MgO, etc .; for silicon carbide, C, B, Al 2 O 3 , Y 2 O 3, etc .; and for silicon nitride, oxidation of elements of Groups 2a and 3a of the Periodic Table. It is possible to add Y 2 O 3 , CaO, MgO, CeO 2 or the like to zirconia such as a substance or a nitride.
【0027】そして、これらのセラミック原料に樹脂や
発泡剤を添加混合して、所定の形状に成形し焼成すれ
ば、これらの樹脂や発泡剤が焼成中に焼失して気孔2を
形成することができる。このとき、これらの樹脂や発泡
剤の添加量、粒子径などを変化させることで、気孔率や
気孔径を自由に調整することができる。また、必ずしも
樹脂や発泡剤を混入させる必要はなく、通常のセラミッ
ク原料を用いて、焼成条件を調整して、完全に焼結しな
い状態とすることで気孔2を形成することもできる。If a resin and a foaming agent are added to and mixed with these ceramic raw materials, and the mixture is molded into a predetermined shape and fired, the resin and the foaming agent are burnt off during firing to form the pores 2. it can. At this time, the porosity and the pore diameter can be freely adjusted by changing the addition amount of these resins and the foaming agent and the particle diameter. Further, it is not always necessary to mix the resin and the foaming agent, and the pores 2 can be formed by using a normal ceramic raw material and adjusting the firing conditions so as not to completely sinter.
【0028】最後に、得られた焼結体の摺動面を研摩し
て平坦度3μm以下、好ましくは1μm以下とすればよ
い。Finally, the sliding surface of the obtained sintered body may be polished to a flatness of 3 μm or less, preferably 1 μm or less.
【0029】例えば本発明のセラミック摺動部材1をア
ルミナセラミックスで形成する場合は、80重量%以上
のAl2 O3 を主成分とし、SiO2 やMgOなどの焼
結助剤とともに気孔を形成する樹脂や発泡剤を添加し、
プレス成形によって所定形状に成形したのち、酸化雰囲
気中、所定の温度で焼成した後、摺動面を平坦度3μm
以下の極めて平滑な面に研磨して仕上げればよい。For example, when the ceramic sliding member 1 of the present invention is made of alumina ceramics, 80% by weight or more of Al 2 O 3 is the main component, and pores are formed together with a sintering aid such as SiO 2 or MgO. Add resin and foaming agent,
After forming into a predetermined shape by press molding, after baking at a predetermined temperature in an oxidizing atmosphere, the sliding surface has a flatness of 3 μm.
The following extremely smooth surface may be polished and finished.
【0030】なお、図1には本発明のセラミック摺動部
材1同士を摺動させる例を示したが、一方のみを本発明
のセラミック摺動部材1とし、他方は緻密質セラミック
体からなるものとしてもよく、例えばフォーセットバル
ブを構成する場合、2つの弁体のうち少なくとも一方を
本発明のセラミック摺動部材1で構成すればよい。ま
た、本発明のセラミック摺動部材はセラミックス同士の
摺動に限らず、金属や樹脂などの他材質との摺動にも好
適に用いることができる。Although FIG. 1 shows an example in which the ceramic sliding members 1 of the present invention are slid together, only one of them is the ceramic sliding member 1 of the present invention, and the other is a dense ceramic body. For example, in the case of configuring a facet valve, at least one of the two valve bodies may be configured by the ceramic sliding member 1 of the present invention. Further, the ceramic sliding member of the present invention is not limited to sliding between ceramics, but can be suitably used for sliding with other materials such as metal and resin.
【0031】さらに、上記実施例では平面同士を摺動さ
せる例を示したが、この他に摺動面が円筒状や球面状等
となったものでも本発明のセラミック摺動部材を適用す
ることができる。なお、このように摺動面が曲面形状で
ある場合に、その平坦度が3μm以下であるとは、本来
の曲面形状を補正した時の平坦度が3μm以下の滑らか
な面であることを意味する。Further, in the above embodiment, an example in which flat surfaces are slid on each other has been shown, but in addition to this, the ceramic sliding member of the present invention can be applied even if the sliding surface is cylindrical or spherical. You can When the sliding surface has a curved shape, the flatness of 3 μm or less means that the flatness is 3 μm or less when the original curved shape is corrected. To do.
【0032】したがって、本発明のセラミック摺動部材
は、フォーセットバルブに限らず、ボールバルブ等の各
種バルブやシール材、軸受などさまざまな用途に用いる
ことができる。Therefore, the ceramic sliding member of the present invention can be used not only in the facet valve but also in various applications such as various valves such as ball valves, sealing materials and bearings.
【0033】実験例 ここで、本発明のセラミック摺動部材1において気孔2
の大きさや量などの最適範囲を求めるための実験を行っ
た。 Experimental Example Here, the pores 2 in the ceramic sliding member 1 of the present invention
Experiments were carried out to find the optimum range such as the size and amount.
【0034】セラミック摺動部材1として、アルミナセ
ラミックスからなり、表1に示すようにAl2 O3 純
度、気孔率、気孔径を様々に変化させたものを用意し
た。それぞれ図3に示すような外形30mm、厚さ10
mmで、直径5mmの流体通路12を設けた円盤状体1
0とし、各摺動面11の平坦度を1μm以下に鏡面仕上
げしたものを試作し、摺動性やリンキングの発生の有無
などを調べる実験を行った。A ceramic sliding member 1 made of alumina ceramics and having various Al 2 O 3 purity, porosity and pore diameter as shown in Table 1 was prepared. Each has an outer diameter of 30 mm and a thickness of 10 as shown in FIG.
A disc-shaped body 1 having a diameter of 5 mm and a fluid passage 12 having a diameter of 5 mm.
0 was set as 0, and a mirror-finished flatness of each sliding surface 11 was set to 1 μm or less. As a prototype, an experiment was conducted to check slidability and occurrence of linking.
【0035】なお、気孔率はアルキメデス法により測定
し、また気孔径は摺動面11の拡大写真をもとにして測
定したものであり、各気孔の最大径の平均値である。The porosity was measured by the Archimedes method, and the pore diameter was measured on the basis of an enlarged photograph of the sliding surface 11, and is an average value of the maximum diameter of each pore.
【0036】[0036]
【表1】 [Table 1]
【0037】まず、図3に示すように1対のセラミック
摺動部材1、1を10Kgf・cmの力で上下から押さ
えつけながら、一方のセラミック摺動部材1のみを回転
させ、摺動トルクの初期値とセラミック部材1の気孔率
との関係を調べたところ、図5に示す通りであった。こ
の結果より明らかに、気孔率が低いほど摺動トルクの初
期値が高く、気孔率が2.5体積%ではリンキングが生
じてしまった。これに対し、気孔率を3体積%以上とす
れば使用可能なレベルとなり、特に5体積%以上とすれ
ば摺動トルクが10kgf・cm以下と特に優れてい
た。First, as shown in FIG. 3, while pressing a pair of ceramic sliding members 1 and 1 from above and below with a force of 10 Kgf · cm, only one ceramic sliding member 1 is rotated to make the initial sliding torque. When the relationship between the value and the porosity of the ceramic member 1 was examined, it was as shown in FIG. From this result, it is clear that the lower the porosity, the higher the initial value of the sliding torque, and that the linking occurred when the porosity was 2.5% by volume. On the other hand, when the porosity was 3% by volume or more, it was at a usable level, and when it was 5% by volume or more, the sliding torque was particularly excellent at 10 kgf · cm or less.
【0038】次に、本発明実施例として気孔率を10体
積%としたものを用い、比較例として摺動面に油膜を形
成したもの、およびカーボンを蒸着したものを用い、そ
れぞれ上記と同様にして摺動回転させ、摺動回数と摺動
トルク値との関係を調べた。結果は図6に示すように、
油膜やカーボン膜を形成した比較例では、実験中に膜が
剥がれてしまうため、次第に摺動トルクが大きくなり、
最終的にリンキングが生じてしまった。これに対し、本
発明実施例では、上記したように摺動面が摩耗しても面
の状態は変化しないため、長時間使用しても低い摺動ト
ルクを保ったままであり、長期間良好に利用できること
が確認できた。Next, as an example of the present invention, one having a porosity of 10% by volume was used, and as a comparative example, one having an oil film formed on the sliding surface and one having carbon vapor-deposited were used, respectively, in the same manner as described above. The slide rotation was performed, and the relationship between the number of slides and the sliding torque value was investigated. The result is as shown in FIG.
In the comparative example in which the oil film or the carbon film is formed, the film peels off during the experiment, so the sliding torque gradually increases,
Eventually linking occurred. On the other hand, in the examples of the present invention, since the state of the surface does not change even when the sliding surface is worn as described above, the low sliding torque is maintained even when used for a long time, and the long-term good condition is maintained. It was confirmed that it can be used.
【0039】次に、上記と同様にして、1000回摺動
後のセラミック摺動部材1の摩耗量と、アルミナ純度、
気孔径、気孔率との関係をそれぞれ調べた。結果は図7
〜図9に示す通りである。まず、Al2 O3 純度と摩耗
量の関係を図7に示すように、Al2 O3 純度を80%
以上とすれば摩耗量を極めて小さくできることがわか
る。Then, in the same manner as above, the wear amount of the ceramic sliding member 1 after sliding 1000 times, the alumina purity, and the
The relationship between the pore diameter and the porosity was investigated. The result is Figure 7.
~ As shown in Fig. 9. First, as shown in FIG. 7, which shows the relationship between the Al 2 O 3 purity and the wear amount, the Al 2 O 3 purity is 80%.
It can be seen that the amount of wear can be made extremely small by the above.
【0040】また、気孔径と摩耗量の関係を図8に示す
ように、気孔径を100μm以下とすれば摩耗量を小さ
くできることがわかる。これは、気孔径が大きいと気孔
中に微粒子が入り込みやすく、この微粒子を噛み込んで
チッピングが生じやすくなるためであると考えられる。Further, as shown in FIG. 8 showing the relationship between the pore diameter and the wear amount, it can be seen that the wear amount can be reduced by setting the pore diameter to 100 μm or less. It is considered that this is because when the pore diameter is large, the fine particles easily enter the pores, and the fine particles are easily caught and chipping easily occurs.
【0041】さらに、気孔率と摩耗量の関係を図9に示
すように気孔率を30μm以下とすれば摩耗量を小さく
できることがわかる。Further, as shown in the relationship between the porosity and the wear amount, as shown in FIG. 9, the wear amount can be reduced by setting the porosity to 30 μm or less.
【0042】これらの結果より、本発明のセラミック摺
動部材1において、気孔率を3〜30体積%、好ましく
は5〜20体積%の範囲とし、気孔径は10〜100μ
mで、Al2 O3 純度80重量%以上とすれば、摺動ト
ルクが小さく、かつ摩耗量も小さいことから、長期間好
適に使用できることがわかる。From these results, in the ceramic sliding member 1 of the present invention, the porosity is set in the range of 3 to 30% by volume, preferably 5 to 20% by volume, and the pore size is 10 to 100 μm.
If the Al 2 O 3 purity is 80 wt% or more in m, the sliding torque is small and the amount of wear is small, so that it can be seen that it can be suitably used for a long period of time.
【0043】なお、以上の実験例ではアルミナセラミッ
クスを用いたが、他のセラミックスを用いてもほぼ同様
の結果であった。Although alumina ceramics was used in the above experimental examples, the same results were obtained when other ceramics were used.
【0044】[0044]
【発明の効果】叙上のように本発明によれば、気孔率が
3〜30体積%の閉塞した気孔が均一分散するセラミッ
ク体の摺動面を平坦度3μm以下としてセラミック摺動
部材を構成したことによって、完全なシール性を保った
まま、長期にわたってリンキングもなくスムースな摺動
を行うことができるため、各種バルブや、シールリン
グ、スライダー部品等として好適に使用することができ
る。As described above, according to the present invention, the sliding surface of the ceramic body, in which the closed pores having the porosity of 3 to 30% by volume are uniformly dispersed, has the flatness of 3 μm or less and the ceramic sliding member is constructed. By doing so, it is possible to perform smooth sliding without linking for a long period of time while maintaining the perfect sealing property, so that it can be suitably used as various valves, seal rings, slider parts and the like.
【図1】本発明によるセラミック摺動部材の模式断面図
である。FIG. 1 is a schematic sectional view of a ceramic sliding member according to the present invention.
【図2】本発明によるセラミック摺動部材の表面の部分
拡大図である。FIG. 2 is a partially enlarged view of the surface of the ceramic sliding member according to the present invention.
【図3】本発明のセラミック摺動部材を用いた実験例を
説明するための図である。FIG. 3 is a diagram for explaining an experimental example using the ceramic sliding member of the present invention.
【図4】摺動部材の一例である、従来のフォーセットバ
ルブを示す斜視図である。FIG. 4 is a perspective view showing a conventional facet valve, which is an example of a sliding member.
【図5】気孔率と摺動トルクの初期値との関係を示すグ
ラフである。FIG. 5 is a graph showing the relationship between porosity and initial value of sliding torque.
【図6】本発明および比較例における摺動回数と摺動ト
ルクとの関係を示すグラフである。FIG. 6 is a graph showing the relationship between the number of times of sliding and the sliding torque in the present invention and the comparative example.
【図7】セラミック摺動部材におけるAl2 O3 純度と
摩耗量の関係を示すグラフである。FIG. 7 is a graph showing the relationship between Al 2 O 3 purity and wear amount in a ceramic sliding member.
【図8】セラミック摺動部材における気孔径と摩耗量の
関係を示すグラフである。FIG. 8 is a graph showing the relationship between the pore diameter and the amount of wear in the ceramic sliding member.
【図9】セラミック摺動部材における気孔率と摩耗量の
関係を示すグラフである。FIG. 9 is a graph showing the relationship between the porosity and the wear amount of a ceramic sliding member.
Claims (1)
均一分散し、摺動面の平坦度が3μm以下であることを
特徴とするセラミック摺動部材。1. A ceramic sliding member characterized in that closed pores having a porosity of 3 to 30% by volume are uniformly dispersed, and a flatness of a sliding surface is 3 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4208748A JPH0658434A (en) | 1992-08-05 | 1992-08-05 | Ceramic sliding member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4208748A JPH0658434A (en) | 1992-08-05 | 1992-08-05 | Ceramic sliding member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0658434A true JPH0658434A (en) | 1994-03-01 |
Family
ID=16561432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4208748A Pending JPH0658434A (en) | 1992-08-05 | 1992-08-05 | Ceramic sliding member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0658434A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0712821A1 (en) | 1994-11-16 | 1996-05-22 | NGK Spark Plug Co. Ltd. | Porous ceramic material and producing method of same, and valve unit |
| JPH09310765A (en) * | 1996-05-22 | 1997-12-02 | Kyocera Corp | Ceramic sliding device |
| EP2216571A4 (en) * | 2007-11-29 | 2013-01-02 | Kyocera Corp | SLIDING ELEMENT, MECHANICAL SEAL RING, MECHANICAL SEAL AND VALVE VALVE |
| JP2017106585A (en) * | 2015-12-11 | 2017-06-15 | Toto株式会社 | Ceramic structure for faucet device, slide valve for faucet device and cartridge for faucet device |
| CN112889135A (en) * | 2018-10-30 | 2021-06-01 | 京瓷株式会社 | Porous ceramic, member for semiconductor manufacturing apparatus, shower plate, and plug |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134671A (en) * | 1980-03-21 | 1981-10-21 | Kyocera Corp | Faucet valve |
| JPS6237517A (en) * | 1985-08-12 | 1987-02-18 | Ibiden Co Ltd | Sliding member |
| JPS639781A (en) * | 1986-06-30 | 1988-01-16 | Ibiden Co Ltd | Valve body for valve |
| JPH0469468A (en) * | 1990-07-05 | 1992-03-04 | Ntn Eng Plast Corp | Multiple hole disk of combination tap |
-
1992
- 1992-08-05 JP JP4208748A patent/JPH0658434A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56134671A (en) * | 1980-03-21 | 1981-10-21 | Kyocera Corp | Faucet valve |
| JPS6237517A (en) * | 1985-08-12 | 1987-02-18 | Ibiden Co Ltd | Sliding member |
| JPS639781A (en) * | 1986-06-30 | 1988-01-16 | Ibiden Co Ltd | Valve body for valve |
| JPH0469468A (en) * | 1990-07-05 | 1992-03-04 | Ntn Eng Plast Corp | Multiple hole disk of combination tap |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0712821A1 (en) | 1994-11-16 | 1996-05-22 | NGK Spark Plug Co. Ltd. | Porous ceramic material and producing method of same, and valve unit |
| US5688728A (en) * | 1994-11-16 | 1997-11-18 | Ngk Spark Plug Co., Ltd. | Porous ceramic material |
| US5887620A (en) * | 1994-11-16 | 1999-03-30 | Ngk Spark Plug Co., Ltd. | Porous ceramic material and producing method of same, and valve unit |
| JPH09310765A (en) * | 1996-05-22 | 1997-12-02 | Kyocera Corp | Ceramic sliding device |
| EP2216571A4 (en) * | 2007-11-29 | 2013-01-02 | Kyocera Corp | SLIDING ELEMENT, MECHANICAL SEAL RING, MECHANICAL SEAL AND VALVE VALVE |
| JP2017106585A (en) * | 2015-12-11 | 2017-06-15 | Toto株式会社 | Ceramic structure for faucet device, slide valve for faucet device and cartridge for faucet device |
| CN112889135A (en) * | 2018-10-30 | 2021-06-01 | 京瓷株式会社 | Porous ceramic, member for semiconductor manufacturing apparatus, shower plate, and plug |
| US12006264B2 (en) | 2018-10-30 | 2024-06-11 | Kyocera Corporation | Porous ceramic, member for semiconductor manufacturing apparatus, shower plate and plug |
| CN112889135B (en) * | 2018-10-30 | 2024-06-21 | 京瓷株式会社 | Porous ceramic, semiconductor manufacturing device component, shower plate and plug |
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