JPH0663103U - Vacuum deaerator - Google Patents

Vacuum deaerator

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Publication number
JPH0663103U
JPH0663103U JP896593U JP896593U JPH0663103U JP H0663103 U JPH0663103 U JP H0663103U JP 896593 U JP896593 U JP 896593U JP 896593 U JP896593 U JP 896593U JP H0663103 U JPH0663103 U JP H0663103U
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JP
Japan
Prior art keywords
vacuum degassing
raw water
main body
tower
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP896593U
Other languages
Japanese (ja)
Inventor
俊之 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
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Filing date
Publication date
Application filed by Organo Corp filed Critical Organo Corp
Priority to JP896593U priority Critical patent/JPH0663103U/en
Publication of JPH0663103U publication Critical patent/JPH0663103U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 塔内を流下する原水のLVが下方に行くに従
い漸減するようになして平衡溶存ガス濃度に到達し易く
すると共に、原水が側胴部の内壁を伝わって落下するシ
ョートパスの問題を解決した真空脱気装置を提供する。 【構成】 充填材3を充填する真空脱気塔本体1の形状
を、上部横断面積より下部横断面積の方が大きくなるよ
う塔本体1の側胴部9に末拡がり状の傾斜を設けた。
(57) [Summary] [Purpose] The LV of the raw water flowing down in the tower gradually decreases as it goes downward, making it easier to reach the equilibrium dissolved gas concentration, and at the same time, the raw water falls along the inner wall of the side trunk. Provided is a vacuum degassing device which solves the problem of short pass. [Structure] The shape of the vacuum degassing tower main body 1 filled with the packing material 3 is such that the side trunk portion 9 of the tower main body 1 is provided with a flared slope so that the lower cross-sectional area is larger than the upper cross-sectional area.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

本考案は原水中に溶存している酸素や炭酸ガスのような気体を効率良く除去す る真空脱気装置に関するものである。 The present invention relates to a vacuum degassing device that efficiently removes gases such as oxygen and carbon dioxide dissolved in raw water.

【0002】[0002]

【従来の技術】[Prior art]

半導体ウエハーの洗浄水や製薬用水等には、溶存電解質、微粒子、コロイダル 物質、高分子有機物、発熱物質等を実質的に含まないことはもちろんのこと、微 生物の増殖を促すおそれのある溶存気体、特に溶存酸素を可能な限り除去した純 水が必要とされている。また、火力発電所におけるボイラー用水等では用水中に 酸素が溶け込んでいるとボイラー本体や復水管等に対して点食を起こし、且つ炭 酸ガスが同時に作用すると二つの気体が別々に作用する場合よりも大きな害を与 えることが知られており、用水中の溶存気体を可能な限り除去した脱気水が不可 欠とされている。 原水中の溶存ガスを除去する装置としてこれまでにいくつかのものが開発され ているが、その中の一つに圧力容器内を真空状態にして、原水の流下中に溶存ガ スを真空中に吸い出すようにした真空脱気装置がある。 Water for cleaning semiconductor wafers, pharmaceutical water, etc. does not substantially contain dissolved electrolytes, fine particles, colloidal substances, high molecular weight organic substances, exothermic substances, etc., but also dissolved gas that may promote the growth of microbes. , Especially pure water with as much dissolved oxygen as possible is needed. In the case of boiler water in a thermal power plant, if oxygen is dissolved in the water, pitting corrosion may occur on the boiler body or condensate pipe, and if carbon dioxide gas acts simultaneously, the two gases act separately. It is known to cause more harm than ever, and degassed water that removes dissolved gas in water as much as possible is essential. Several devices have been developed so far to remove dissolved gas in raw water.One of them has been to create a vacuum inside the pressure vessel, and to dissolve the dissolved gas in vacuum while the raw water is flowing. There is a vacuum deaeration device that sucks it out.

【0003】 図2は従来の真空脱気装置の一例を示す概略図であり、図中20は圧力容器か らなる真空脱気塔、21は当該真空脱気塔20内の上部に配設した原水のディス トリビューター、22はディストリビューター21から供給される原水を細かく 分散するラシヒリングのような充填材、23は真空ポンプのような真空発生手段 、24は真空脱気塔20内を流下してきた脱気処理水を塔外に流出させる排出管 、25は当該排出管24を介して脱気処理水を貯溜する貯槽をそれぞれ示すもの である。FIG. 2 is a schematic view showing an example of a conventional vacuum degassing apparatus, in which 20 is a vacuum degassing tower consisting of a pressure vessel, and 21 is an upper part in the vacuum degassing tower 20. Distributor of raw water, 22 is a packing material such as Raschig ring for finely dispersing the raw water supplied from the distributor 21, 23 is a vacuum generating means such as a vacuum pump, and 24 is flowing down in the vacuum degassing tower 20. A discharge pipe for letting out the degassed water to the outside of the tower, and 25 are storage tanks for storing the degassed water through the discharge pipe 24.

【0004】 この従来例において、ディストリビューター21から供給される溶存ガスを含 んだ原水は、充填材22の層を流下中に細かく分散され、表面積が大となり気液 接触効果が高められる。このとき、予め真空脱気塔20内は真空発生手段23に よって真空状態となっているため、原水中の溶存ガスは原水と分離され真空脱気 塔20の頂部に付設してあるガス吸引管26を通じて塔外に排出される。 真空脱気塔20内を脱気されながら流下してきた脱気処理水は排出管24を介し て下部の貯槽25内に貯溜され、ここから図示しないポンプ等の駆動により各用 途先に送られる。 このような真空脱気装置において、従来の真空脱気塔20の側胴部は直胴状を なし、上部横断面積と下部横断面積とがほぼ等しい構造となっていた。In this conventional example, the raw water containing the dissolved gas supplied from the distributor 21 is finely dispersed in the flowing down layer of the filler 22 and has a large surface area to enhance the gas-liquid contact effect. At this time, since the inside of the vacuum degassing tower 20 has been evacuated by the vacuum generating means 23, the dissolved gas in the raw water is separated from the raw water and is attached to the top of the vacuum degassing tower 20. It is discharged to the outside of the tower through 26. The degassed water that has flowed down while being degassed in the vacuum degassing tower 20 is stored in a lower storage tank 25 through a discharge pipe 24, and is sent from here to each destination by driving a pump or the like (not shown). . In such a vacuum degassing apparatus, the side body of the conventional vacuum degassing tower 20 has a straight body shape, and the upper cross-sectional area and the lower cross-sectional area are substantially equal.

【0005】[0005]

【考案が解決しようとする課題】[Problems to be solved by the device]

前記したように、従来の真空脱気塔の側胴部は直胴状をなしていた。 そのため、塔内における原水の流下する線流速(以下LVという)は始めから終 わりまで常に一定なものとなり、溶存ガス濃度が低くなったところで気液接触時 間を長くとって液体側から気体側へのガスの移行を促進するということができな いという欠点があった。すなわち、真空脱気塔内を流下する溶存ガスを含んだ原 水は下部に落ちるほど溶存ガス濃度は低くなるので、下部に至るほど気液接触時 間を長くとるようにしないと、平衡溶存ガス濃度に容易には到達しないのである が、前記したように、従来の真空脱気塔は直胴状をなしていたため原水のLVは 常に一定のものとなり、塔内下方部の真空度に対応した平衡溶存ガス濃度に到達 しないままに下部の貯槽に送られるという問題点があったのである。 As described above, the side body portion of the conventional vacuum degassing tower has a straight body shape. Therefore, the linear flow velocity of the raw water in the tower (hereinafter referred to as LV) is always constant from the beginning to the end, and when the dissolved gas concentration becomes low, the gas-liquid contact time is extended and the liquid side is changed to the gas side. There was a drawback that it was not possible to promote the transfer of gas to the. That is, the raw water containing dissolved gas flowing down in the vacuum degassing tower has a lower concentration of dissolved gas as it falls to the lower part.Therefore, unless the gas-liquid contact time is extended to the lower part, the equilibrium dissolved gas Although the concentration cannot be reached easily, as described above, since the conventional vacuum degassing tower has a straight body shape, the LV of the raw water is always constant, which corresponds to the degree of vacuum in the lower part of the tower. The problem is that the equilibrium dissolved gas concentration is sent to the lower storage tank without reaching it.

【0006】 また、ディストリビューターを介して真空脱気塔内に供給された原水の大部分 は充填材層によって分散されながら流下するとしても、その一部は側胴部の内壁 を伝わって落下する。この内壁を伝わって落下する原水は所望通り脱気されない ため所謂ショートパスの問題を生じることとなる。従って、真空脱気装置として は、側胴部の内壁を伝わって落下する水量の少ない構造のものが好ましいわけで あるが、従来の真空脱気塔の側胴部は前記したとおり直胴状をなしていたため、 一旦内壁を伝わった原水はそのまま下まで流下してしまいショートパスの問題が より多く発生し、溶存ガス除去の阻害要因となっていたのである。Further, even if most of the raw water supplied through the distributor into the vacuum degassing tower flows down while being dispersed by the packing material layer, a part of the raw water falls along the inner wall of the side trunk part. . The raw water falling along the inner wall is not degassed as desired, which causes a so-called short path problem. Therefore, it is preferable that the vacuum degassing device has a structure in which the amount of water that falls along the inner wall of the side body part is small, but the side body part of the conventional vacuum degassing tower has a straight body shape as described above. As a result, the raw water that had propagated through the inner wall once flowed down to the bottom as it was, causing more short-pass problems, which was an obstacle to the removal of dissolved gas.

【0007】 そこで本考案は、真空脱気塔内を流下する原水のLVが下方に行くに従い緩慢 になるようにして平衡溶存ガス濃度に到達し易くすると共に、側胴部を伝わって 落下する原水量が少なくなるようにして所謂ショートパスの問題をなくするよう になした真空脱気装置を提供することを目的とするものである。In view of this, the present invention makes the LV of the raw water flowing down in the vacuum degassing tower slower as it goes downward so that the equilibrium dissolved gas concentration can be easily reached, and at the same time, the raw water that falls down along the side body is dropped. It is an object of the present invention to provide a vacuum degassing device which reduces the amount of water and eliminates the problem of so-called short pass.

【0008】[0008]

【課題を解決するための手段】[Means for Solving the Problems]

前記目的を達成するための本考案の構成を詳述すれば、充填材を充填してなる 圧力容器からなる真空脱気塔本体の上部から原水を供給し、当該原水が真空脱気 塔本体内を流下中に真空発生手段によって原水中の溶存気体を除去し、脱気処理 水を下部の排出管を介して塔本体外に流出させるようになした真空脱気装置にお いて、前記真空脱気塔本体の形状を、上部横断面積より下部横断面積の方が大き くなるよう塔本体の側胴部に末拡がり状の傾斜を設けてなることを特徴とする真 空脱気装置である。 The structure of the present invention for achieving the above-mentioned object will be described in detail. Raw water is supplied from the upper part of a vacuum degassing tower body composed of a pressure vessel filled with a packing material, and the raw water is supplied to the inside of the vacuum degassing tower body. The dissolved gas in the raw water is removed by the vacuum generating means while the water is flowing, and the degassing treatment is carried out in the vacuum degassing device that allows the water to flow out of the tower main body through the lower discharge pipe. The air degassing apparatus is characterized in that the air column main body is formed such that the lateral cross section of the tower main body is provided with a diverging slope so that the lower cross sectional area is larger than the upper cross sectional area.

【0009】 本考案装置はこのように、真空脱気塔本体の側胴部に末拡がり状の傾斜を設け てあるので、塔本体内を流下する原水のLVは下方に行くほど緩慢なものとなっ て平衡溶存ガス濃度に到達し易くなると共に、側胴部の内壁を伝わって流下する 原水は側胴部が末拡がり状に傾斜しているために充填材の方へ伝わり易くなり、 所謂ショートパスの問題を解決することが可能となるものである。In this way, the device of the present invention is provided with a flared slope on the side body of the vacuum degassing tower body, so that the LV of the raw water flowing down in the tower body becomes slower as it goes downward. In addition to reaching the equilibrium dissolved gas concentration, the raw water flowing down the inner wall of the side body is easily transferred to the packing material because the side body is inclined toward the end, which is a so-called short circuit. It is possible to solve the path problem.

【0010】[0010]

【実施例】【Example】

以下、本考案真空脱気装置の具体的構成を図示の実施例に基づき詳細に説明す る。 図1は本考案に係る真空脱気装置の一例を示す概略断面図であり、図中1は圧 力容器からなる真空脱気塔本体を示す。2はこの真空脱気塔本体1内の上部に配 設したディストリビューターであり、溶存ガスを含んだ原水はこのディストリビ ューター2を介して真空脱気塔本体1内に供給される。 3は前記真空脱気塔本体1内に充填したラシヒリングのような充填材であり、原 水は当該充填材3によって細かく分散されながら塔本体1内を流下する。 4は真空ポンプのような真空発生手段であり、当該真空発生手段4によって真空 脱気塔本体1内のガスはガス吸引管5を通じて塔本体1外に排気される。6は真 空脱気塔本体1の底部に接続した脱気処理水の排出管であり、当該排出管6を通 じて脱気処理水は図示しない貯槽に貯溜される。 その他、図中の7は真空脱気塔本体1の上部に設けた真空計、8はラシヒリング のような充填材3が排出管6を介して外部に排出されるのを防止するため真空脱 気塔本体1内の底部に付設した目皿である。 Hereinafter, a specific configuration of the vacuum degassing apparatus of the present invention will be described in detail with reference to the illustrated embodiment. FIG. 1 is a schematic cross-sectional view showing an example of a vacuum degassing apparatus according to the present invention, in which 1 denotes a vacuum degassing tower main body composed of a pressure vessel. Reference numeral 2 denotes a distributor arranged in the upper part of the vacuum degassing tower main body 1, and raw water containing dissolved gas is supplied into the vacuum degassing tower main body 1 via the distributor 2. 3 is a packing material such as Raschig ring filled in the vacuum degassing tower body 1, and the raw water flows down in the tower body 1 while being finely dispersed by the packing material 3. Reference numeral 4 denotes a vacuum generating means such as a vacuum pump, and the gas in the vacuum degassing tower body 1 is exhausted to the outside of the tower body 1 through the gas suction pipe 5 by the vacuum generating means 4. Reference numeral 6 denotes a discharge pipe for the degassed water that is connected to the bottom of the vacuum degassing tower main body 1. Through the discharge pipe 6, the degassed water is stored in a storage tank (not shown). In addition, in the figure, 7 is a vacuum gauge provided on the upper part of the vacuum degassing tower main body, and 8 is vacuum degassing in order to prevent the filler 3 such as Raschig ring from being discharged to the outside through the discharge pipe 6. It is a plate attached to the bottom of the tower body 1.

【0011】 本考案はこのような真空脱気装置において、真空脱気塔本体1の形状を、上部 横断面積より下部横断面積の方が大きくなるよう側胴部9に末拡がり状の傾斜を 設けたことを特徴とするものであり、側胴部9全体に末拡がり状の傾斜が設けら れることにより、当然ながら上部鏡板10の径は下部鏡板11の径より小さいも のとなる。 このように真空脱気塔本体1の側胴部9が末拡がり状となっているので、ディ ストリビューター2から真空脱気塔本体1内に供給された溶存ガスを含む原水は 充填材3によって細かく分散されながら下方に流下するに従いLVが漸減するこ ととなる。その結果、溶存ガス濃度が低くなったところで気液接触時間を長くと ることが可能となり、その真空度、温度における平衡溶存ガス濃度により一層到 達し易くなるものである。また、側胴部9を伝わって流れ落ちる原水も内壁面が 末拡がり状に傾斜しているので、ラシヒリングのような充填材3の方へ伝わり易 くなり、直胴状の側胴部の場合より原水のショートパスを防ぐことができるもの である。According to the present invention, in such a vacuum degassing apparatus, the shape of the vacuum degassing tower main body 1 is provided with a flared slope on the side body 9 so that the lower cross-sectional area is larger than the upper cross-sectional area. The diameter of the upper end plate 10 is naturally smaller than that of the lower end plate 11 due to the fact that the entire side trunk 9 is provided with a splayed slope. In this way, since the side body portion 9 of the vacuum degassing tower main body 1 has a divergent shape, the raw water containing the dissolved gas supplied from the distributor 2 into the vacuum degassing tower main body 1 is filled by the filler 3. The LV will gradually decrease as it flows downward while being finely dispersed. As a result, the gas-liquid contact time can be extended when the dissolved gas concentration becomes low, and it becomes easier to reach the equilibrium dissolved gas concentration at the vacuum degree and temperature. In addition, since the inner wall surface of the raw water flowing down along the side body 9 is inclined like a divergent shape, it becomes easier to reach the filling material 3 such as the Raschig ring, compared to the case of the straight body side body. It can prevent the short pass of raw water.

【0012】 真空脱気塔本体1の側胴部9の傾斜角は本考案者による実験の結果、垂直線に 対し5°〜45°の範囲内であれば所期する効果を得ることができることが判明 したが、より好ましくは10°〜35°の範囲内である。なお、傾斜角が5°以 下であるとより直胴状に近づき従来構造の真空脱気塔の場合と同様の不具合が生 ずる。また、45°以上の傾斜角とすると脱気効果に大差ない割りには塔本体の 製作に多額の費用が掛かるという欠点がある。As a result of an experiment conducted by the present inventors, the inclination angle of the side body portion 9 of the vacuum degassing tower body 1 is within the range of 5 ° to 45 ° with respect to the vertical line, and the desired effect can be obtained. However, it is more preferably within the range of 10 ° to 35 °. If the inclination angle is 5 ° or less, the shape becomes closer to a straight body, and the same problem as in the conventional vacuum degassing tower occurs. In addition, if the inclination angle is 45 ° or more, there is a disadvantage that a large amount of cost is required to manufacture the tower body, although the deaeration effect is not so different.

【0013】 次に、真空脱気塔本体1の側胴部9に15°の傾斜角を設けた本実施例と、側 胴部を直胴状となした従来例について、溶存酸素濃度が同一の原水を用いて処理 効果を比較したときの結果を示す。Next, the dissolved oxygen concentration is the same in the present embodiment in which the side body portion 9 of the vacuum degassing tower main body 1 is provided with an inclination angle of 15 ° and in the conventional example in which the side body portion has a straight body shape. The results are shown when the treatment effects were compared using the above raw water.

【表1】 [Table 1]

【0014】 表1により明らかなとおり、本考案に係る真空脱気塔により処理した脱気処理 水の溶存酸素濃度は従来例より原水1リットル当たり、0.05mgO低減して いた。As is clear from Table 1, the concentration of dissolved oxygen in the degassed water treated by the vacuum degassing tower according to the present invention was reduced by 0.05 mgO per liter of raw water as compared with the conventional example.

【0015】[0015]

【考案の効果】[Effect of device]

本考案装置は以上のように、真空脱気塔本体の側胴部に末拡がり状の傾斜を設 けたことを特徴とするもので、塔本体内を流下する原水のLVは下方に行くにし たがい漸減するのでその分気液接触時間が長くなり、塔内下方部の真空度及び温 度に対応した平衡溶存ガス濃度に到達し易くなると共に、側胴部の内壁を伝わっ て流下する原水は側胴部が末拡がり状に傾斜しているので充填材の方へ伝わり易 くなり、直胴状の側胴部の場合より所謂原水のショートパスを少なくすることが できるものである。 As described above, the device of the present invention is characterized in that the side trunk of the vacuum degassing tower main body is provided with a divergent slope, and the LV of the raw water flowing down in the tower main body goes downward. Since it gradually decreases, the gas-liquid contact time becomes longer, making it easier to reach the equilibrium dissolved gas concentration corresponding to the vacuum degree and temperature in the lower part of the tower, and the raw water flowing down the inner wall of the side body part Since the body part is inclined in a divergent shape, it is more easily transmitted to the filler, and the so-called short path of raw water can be reduced compared to the case of a side body part with a straight body shape.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案真空脱気装置の一実施例を示す概略断面
図である。
FIG. 1 is a schematic sectional view showing an embodiment of a vacuum degassing apparatus of the present invention.

【図2】従来の真空脱気装置の一例を示す概略図であ
る。
FIG. 2 is a schematic view showing an example of a conventional vacuum degassing apparatus.

【符号の説明】[Explanation of symbols]

1:真空脱気塔本体 2:ディストリビ
ューター 3:充填材 4:真空発生手段 5:ガス吸引管 6:排出管 7:真空計 8:目皿 9:側胴部 10:上部鏡板 11:下部鏡板
1: Vacuum degassing tower main body 2: Distributor 3: Packing material 4: Vacuum generating means 5: Gas suction pipe 6: Discharge pipe 7: Vacuum gauge 8: Eye plate 9: Side body part 10: Upper end plate 11: Lower end plate

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 充填材を充填してなる圧力容器からなる
真空脱気塔本体の上部から原水を供給し、当該原水が真
空脱気塔本体内を流下中に真空発生手段によって原水中
の溶存ガスを除去し、脱気処理水を下部の排出管を介し
て塔本体外に流出させるようになした真空脱気装置にお
いて、前記真空脱気塔本体の形状を、上部横断面積より
下部横断面積の方が大きくなるよう塔本体の側胴部に末
拡がり状の傾斜を設けてなることを特徴とする真空脱気
装置。
1. Raw water is supplied from the upper part of a vacuum degassing tower main body composed of a pressure vessel filled with a filler, and the raw water is dissolved in the raw water by a vacuum generating means while flowing down in the vacuum degassing tower main body. In a vacuum degassing apparatus that removes gas and causes degassed water to flow out of the tower main body through a lower discharge pipe, the vacuum degassing tower main body is shaped such that the cross sectional area is lower than the upper cross sectional area. The vacuum degassing apparatus is characterized in that the side trunk of the tower body is provided with a splayed slope so that it becomes larger.
JP896593U 1993-02-10 1993-02-10 Vacuum deaerator Pending JPH0663103U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP896593U JPH0663103U (en) 1993-02-10 1993-02-10 Vacuum deaerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP896593U JPH0663103U (en) 1993-02-10 1993-02-10 Vacuum deaerator

Publications (1)

Publication Number Publication Date
JPH0663103U true JPH0663103U (en) 1994-09-06

Family

ID=11707397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP896593U Pending JPH0663103U (en) 1993-02-10 1993-02-10 Vacuum deaerator

Country Status (1)

Country Link
JP (1) JPH0663103U (en)

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