JPH066445Y2 - Sample movement mechanism of surface analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a sample moving mechanism in a surface analyzer.

(B) Prior art and its problems In general, in a surface analyzer such as EPMA or ESCA, the larger the size of the sample that can be analyzed, the wider the surface of the sample can be analyzed at one time, which is convenient. A sample moving mechanism that can move the entire surface of the sample to a predetermined analysis position is required.

A conventional sample moving mechanism is configured to linearly move a sample stage on which a sample is placed in two directions orthogonal to the X axis and the Y axis. However, in such a mechanism, if the analysis sample becomes large, the distance required for linear movement correspondingly increases, and the analysis chamber inevitably has a large volume. For example, conventionally, a chamber space of at least 12 inches × 12 inches in plane is required to be able to move the entire area of a sample having a diameter of 6 inches to a predetermined analysis position.
Since a surface analyzer usually requires an ultra-vacuum, such an increase in the volume of the analysis chamber leads to an increase in the size of the entire apparatus, and it takes time to evacuate when exchanging a sample. It causes trouble.

The present invention has been made in view of such circumstances, and an object thereof is to make it possible to move the entire surface of the sample to a fixed analysis position with a small movement distance.

(C) Means for Solving the Problems The present invention adopts the following configuration in order to achieve the above object.

That is, in the sample moving mechanism of the surface analyzer of the present invention, the screw shaft and the guide shaft are horizontally arranged in parallel on a holding table that is vertically movable in the vacuum chamber, and both shafts are rotatable. The slide base is supported, and a slide base is screwed onto the screw shaft, and the slide base is provided with a slide rotation means that is slidable in the axial direction of the guide shaft and that rotates integrally with the guide shaft in the circumferential direction. A turntable on which the sample is placed, and a transmission system for transmitting the rotation of the sliding / rotating means to the rotary shaft of the turntable are respectively provided.

(D) Operation The operation of the sample moving mechanism of the present invention is as follows.

When the sample is moved to the analysis position, when the screw shaft is independently rotated, the slide base screwed to the screw shaft linearly moves along the screw shaft and the guide shaft. Along with this, the sample placed on the turntable also moves linearly. Further, when the guide shaft is independently rotated, the sliding rotation means is also rotated together with the guide shaft, and the rotational force is transmitted to the rotation shaft of the turntable, so that the sample arranged on the turntable is rotated. . As a result, if there is a linear movement distance corresponding to the radius of gyration, the entire surface of the sample can be moved to a predetermined analysis position.

(E) Example FIG. 1 is a sectional view showing the overall arrangement including the sample moving mechanism of the surface analyzer. In the surface analyzer 1 of this example,
An X-ray gun 4, a lens system 6, an ion gun 8 and an electron gun 10 are arranged inside a partition wall 2 which constitutes a vacuum chamber, and a sample moving mechanism 12 of the present invention is provided. Further, outside the partition wall 2, the sample is independently moved up and down (moved in the Z direction in the figure), horizontally moved (moved in the r direction in the figure), and rotated (moved in the θ direction in the figure). Each pulse motor 14, 16,
18 are provided respectively. In addition, 19 is a mounting plate of the sample moving mechanism 12, 20 is a holding table which is vertically moved by the pulse motor 14, 22 is a turntable for rotating the sample, 24 is a sample pallet installed on the turntable 22, and 26 is a gated valve. Is.

FIG. 2 is a plan view showing details of the sample moving mechanism, and FIG. 3 is a sectional view of the mechanism. In this sample moving mechanism 12, a screw shaft 30 and a guide shaft 32 are horizontally arranged in parallel on the holding table 20, and both shafts 30 and 32 are rotatable by a bearing 34 provided on the holding table 20. Supported by. The screw shaft 30 and the guide shaft 32 are attached to the holding table 2
0 and the mounting plate 19 are sequentially penetrated, and each shaft end is driven by the external pulse motors 16 and 18.
It is connected to 6.

A nut member 38 is screwed onto the screw shaft 30, the nut member 38 is integrally fixed to a slide base 40 with bolts 41, and both sides of the slide base 40 are in sliding contact with the side wall of the holding table 20. A bearing 42 is attached. As a result, the nut member 38 advances and retracts due to the rotation of the screw shaft 30, and the slide base 40 horizontally moves in the uniaxial direction (moves in the direction r in FIG. 2) accordingly. Further, the guide shaft 32 has a middle portion formed in a flat plate shape to form a sliding portion 32a.
Sliding and rotating means 44, which will be described later, moves on a.

On the other hand, on the lower part of the slide base 40, there is attached a sliding rotation means 44 which is slidable in the axial direction of the guide shaft 32 and rotates integrally with the guide shaft 32 in the circumferential direction. In this sliding / rotating means 44, a hollow body 46 through which the guide shaft 32 penetrates is supported by a bearing 48 provided between the slide bases 40, and the hollow body 46 rolls on the sliding portion 32a of the guide shaft 32. A moving wheel 50 is attached,
Further, a gear portion 52 is provided at the end of the hollow body 46.

A driven gear 54 meshes with the gear portion 52. The driven gear 54 is fixed to a horizontal shaft 60 supported by a bearing base 56 provided on the upper portion of the slide base 40 via a bearing 58, and a first bevel gear 62 is provided at the shaft end of the horizontal shaft 60. It is installed. Further, the second bevel gear 64 meshes with the first bevel gear 64. The second bevel gear 64 is attached to an upper portion of a rotating shaft 68 supported by a bearing 66, and the turntable 22 is fixed to the upper end of the rotating shaft 68. And
Driven gear 54, horizontal shaft 60, first and second bevel gears 62, 6
4 constitutes a transmission system 70 for transmitting the rotation of the sliding rotation means 44 to the rotation shaft 68 of the turntable 22.

Next, the operation of the sample moving mechanism 12 will be described.

If you want to move the sample to the analysis position, use the pulse motor 16
When the screw shaft 30 is independently rotated by this, the nut member 38 screwed onto the screw shaft 38 moves, and accordingly, the slide base 40 moves along the screw shaft 30 along with the turntable 22 and the sample arranged thereon. And moves linearly (moves in the r direction in FIG. 2). In this case, the sliding rotation means 44 also slides on the guide shaft 32 together with the slide base 40.

On the other hand, when the guide shaft 32 is independently rotated by the pulse motor 18, the sliding rotation means 44 is rotated along with the rotation of the guide shaft 32.
The hollow body 46 and the gear portion 52 integrally rotate. The rotational force of the gear portion 52 is transmitted to the rotary shaft 68 of the turntable 22 via the transmission system 70, that is, the driven gear 54, the horizontal shaft 60, and the first and second bevel gears 62 and 64.
Therefore, the sample placed on the turntable 22 rotates.

Therefore, when the size D of the sample is 6 inches at the maximum, the turntable 22 moves in the linear direction (r direction) by 3 inches.
With a travel distance of inches (D / 2), the entire 6-inch sample surface can be moved to a predetermined analysis position. The required space in the analysis chamber in this case may be 6 inches × 9 inches.

The sliding / rotating means 44 is not limited to the embodiment of the present invention, but other known spline fitting mechanism or a sliding key mechanism may be adopted.

(F) Effect According to the present invention, since the turntable is configured to rotate within the uniaxial movement range, the entire surface of the sample can be moved to the analysis position with a small movement distance. Therefore, for a sample having the same area, the volume of the analysis chamber may be smaller than in the conventional case, so that an ultravacuum can be easily obtained.
Further, in the analysis chamber having the same volume, excellent effects such as the ability to analyze the sample surface over a wider range than in the past are exhibited.

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention. FIG. 1 is a sectional view showing the entire arrangement including a sample moving mechanism of a surface analyzer, and FIG.
Fig. 3 is a plan view of the sample moving mechanism, Fig. 3 is a sectional view of the mechanism,
FIG. 4 is an explanatory diagram of the analyzable region of the sample moving mechanism. DESCRIPTION OF SYMBOLS 1 ... Surface analysis device, 12 ... Sample moving mechanism, 20 ... Holding table, 22 ... Turntable, 30 ... Screw shaft, 32 ... Guide shaft, 40 ... Slide base, 44 ... Sliding rotation means, 7
0 ... Transmission system.

Claims (1)

[Scope of utility model registration request] Claims: 1. A screw base and a guide shaft are horizontally arranged in parallel on a holding table that is vertically movable in a vacuum chamber, and both shafts are rotatably supported, and a slide base is mounted on the screw shaft. The slide base is attached to the slide base, which is slidable in the axial direction of the guide shaft and rotates integrally with the guide shaft in the circumferential direction. And a transmission system for transmitting the rotation of the sliding rotation means to the rotation shaft of the turntable, respectively.