JPH0670241U - Wafer cassette jig - Google Patents

Abstract

(57) [Summary] [Object] To provide a jig capable of easily inserting a sample wafer into a groove at a designated number position of a wafer cassette. [Structure] On a top surface 3 of a wafer cassette 2, a frame-shaped body 1 that can be aligned by a combined structure of pins 4 and pin holes 5 is placed. A mark 6 such as a symbol for identifying the wafer insertion groove 7 or a color scheme is clearly attached to the frame-shaped body 1.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a wafer cassette jig for easily inserting a wafer into a cassette.

[0002]

[Prior art]

 Normally, the wafer cassette is configured so that 25 wafers are vertically arranged and stored in a vertical groove. When inserting, for example, one sample wafer into such a cassette, inserting the wafer at the designated position means that the insertion groove of the cassette is located at two positions, the front side and the front side. Since it is behind the hand of the person holding it, it is not easy to check the position of the specified groove.If the grooves are inserted in the front and the front at different angles, the mirror surface of the wafer will be flawed. There was a problem such as putting on, and a solution was desired. In addition, there are cases where a similar technology is used to mark a cassette (Jpn. Pat. Appln. KOKAI No. 62-68234, etc.), but if a cassette is marked, all existing cassettes will be marked Need to be changed, and it is very expensive. Further, in this case, if the cleaning process is performed, the mark may be difficult to recognize due to wear of the mark, and there is a possibility of misrecognition.

[0003]

[Problems to be solved by the device]

 The present invention aims to solve the above problems at low cost by introducing only the necessary number of jigs without changing the existing cassette. The present invention develops and provides a wafer cassette jig that solves the above problems.

[0004]

[Means for Solving the Problems]

 The present invention is a frame-shaped jig that is placed around the upper surface of a wafer cassette, has positioning means such as pins and pin holes, and has a mark for visually confirming the wafer insertion groove of the cassette. This is a wafer cassette jig composed of a frame-shaped body provided on the upper surface of the frame-shaped jig so that it can be seen easily.

[0005]

[Action]

 Since the wafer cassette jig of the present invention has a positioning mechanism composed of, for example, a combination of pins and pin holes on the upper surface of the cassette, it can be accurately positioned only by placing it on the cassette. This jig is provided with a mark which is easy to visually confirm the insertion groove of the wafer of the cassette and can be clearly distinguished from the adjacent groove.

[0006]

【Example】

 FIG. 1 shows a wafer cassette jig 1 of the present invention. The jig 1 is placed on the periphery 3 of the upper surface of the cassette 2. The pin 4 provided on the jig 1 can be fitted into the pin hole 5 on the upper surface of the cassette and easily and accurately positioned and placed. The jig 1 has a frame shape (frame shape), and a mark 6 is attached to its upper surface. The mark 6 corresponds to the position of the groove 7 into which the wafer of the cassette 2 is inserted, and clearly shows the facing groove in the cassette 2. For example, groove numbers such as a groove number sequentially assigned to each groove in one direction or an odd number or an even number every other groove may be used at opposite positions, and spots of five different colors are sequentially arranged. It may be one. Further, marks having the same shape at different positions and different shapes or colors may be sequentially arranged for each groove. The size and shape are not critical, but the person who inserts the sample wafer into the specified groove can immediately recognize the specified groove position, and can more clearly and correctly position the groove on the front side and the groove on the front side. It should be recognizable.

By using the above jig, any person can insert the wafer into the cassette straight at a precise groove position once at a time without making a mistake in the position of the cassette groove, and work efficiency can be improved. Goes up. Therefore, the working time is shortened and the flaws due to the groove of the wafer cassette are eliminated.

[0008]

According to the wafer cassette jig of the present invention, it is easy to insert a sample wafer into a designated groove position, and the present invention is extremely useful in wafer handling work. Further, according to the present invention, since it is not necessary to display each cassette that undergoes various wet processing steps, the marking material can be made unquestionable, and one cassette of the present invention can be used for all cassettes. It is applicable and economically useful.

[Brief description of drawings]

FIG. 1 is a perspective view showing a wafer cassette jig according to an embodiment of the present invention. 1 jig 2 cassette 3 upper surface 4 pin 5 pin hole 6 mark 7 groove

Claims (1)

[Scope of utility model registration request] 1. A wafer cassette jig comprising a frame-shaped body having a positioning means to be mounted around the upper surface of the wafer cassette and having a mark for visually confirming the wafer insertion groove of the cassette.