JPH06743Y2 - Fluid pressure confirmation sensor - Google Patents
Fluid pressure confirmation sensorInfo
- Publication number
- JPH06743Y2 JPH06743Y2 JP1988002293U JP229388U JPH06743Y2 JP H06743 Y2 JPH06743 Y2 JP H06743Y2 JP 1988002293 U JP1988002293 U JP 1988002293U JP 229388 U JP229388 U JP 229388U JP H06743 Y2 JPH06743 Y2 JP H06743Y2
- Authority
- JP
- Japan
- Prior art keywords
- fluid pressure
- conductive material
- indenter
- recess
- flexible sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Measuring Fluid Pressure (AREA)
Description
【考案の詳細な説明】 [産業上の利用分野] 本考案は、流体圧が正常か否かを確認するための流体圧
確認センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a fluid pressure confirmation sensor for confirming whether fluid pressure is normal.
[従来の技術] 流体圧アクチュエータ等の流体圧駆動機器は、該駆動機
器に供給される流体の流体圧に応じた駆動力が発生する
ので、駆動機器の出力に見合う流体圧を設定する必要が
ある。したがって、通常二次側の流体圧は、一次側の流
体圧に拘らず一定になるように、設定圧が調整可能な減
圧弁で設定している。[Prior Art] A fluid pressure drive device such as a fluid pressure actuator generates a driving force according to the fluid pressure of a fluid supplied to the drive device, and thus it is necessary to set a fluid pressure suitable for the output of the drive device. is there. Therefore, normally, the fluid pressure on the secondary side is set by the pressure reducing valve whose set pressure can be adjusted so as to be constant regardless of the fluid pressure on the primary side.
しかしながら、実際には、減圧弁と駆動機器の間の流路
を、流体作動のメカニカルバルブや電磁弁等の種々の方
向制御弁によって分岐あるいは遮断して、駆動機器に所
定の作業をさせる場合が多い。この場合、方向制御弁の
内部機構の動きは、通常駆動機器の作動によって判断で
きるが、何らかの原因によって駆動機器が作動しないと
きは、その原因が駆動機器または方向制御弁のいずれに
あるかを外部から判断することができない。However, in practice, the flow path between the pressure reducing valve and the drive device may be branched or blocked by various directional control valves such as a fluid-operated mechanical valve and a solenoid valve to cause the drive device to perform a predetermined work. Many. In this case, the movement of the internal mechanism of the directional control valve can be normally judged by the operation of the drive device, but when the drive device does not operate for some reason, it is determined whether the cause is the drive device or the directional control valve. Can not judge from.
従来、圧力の検出手段として、例えば半導体圧力センサ
が知られている。Conventionally, for example, a semiconductor pressure sensor is known as a pressure detecting means.
即ち、半導体圧力センサによって、流体流路に流体圧が
正常に作用していることを確認すれが駆動機器に異常の
あることが、また、流体流路に流体圧が正常に作用して
いないことを確認すれば方向制御弁に異常のあることが
判定できる。That is, it is confirmed by the semiconductor pressure sensor that the fluid pressure is normally acting on the fluid flow channel, and that there is an abnormality in the driving device, and that the fluid pressure is not normally acting on the fluid flow channel. By confirming, it is possible to determine that the directional control valve is abnormal.
しかしながら、半導体圧力センサは、小形かつ高精度で
あるという利点を有するが、センサの出力信号の処理に
複雑な電子回路を必要とするために、コストが非常に高
いという問題がある。However, although the semiconductor pressure sensor has an advantage of being small and highly accurate, it has a problem that the cost is very high because a complicated electronic circuit is required for processing the output signal of the sensor.
本考案の考案者は、上述の問題を解決した流体圧確認セ
ンサを、実開平1-75840号公報によって提案した。The inventor of the present invention has proposed a fluid pressure confirmation sensor, which solves the above-mentioned problems, in Japanese Utility Model Laid-Open No. 1-75840.
上記既提案の流体圧確認センサは、第2図に示すよう
に、流体圧作用部への取付ねじ2a、凹部3及び流体圧作
用部と凹部3と連通させる入口ポート4を備えた筐体1の
上記凹部3に、常時は電気絶縁性で圧縮により導電性に
変る導電性材料7と、その両側の可撓性シート6及び導電
性材料に当接する一対の電極9,9を有する基板8とを設置
したもので、可撓性シート6を介して導電性材料7に流体
圧を作用させ、該導電性材料7が導電性に変化して一対
の電極9,9が電気的に接続されることによって、流体圧
が正常か否かを確認するものである。As shown in FIG. 2, the previously proposed fluid pressure confirmation sensor has a housing 1 including a mounting screw 2a for a fluid pressure acting portion, a concave portion 3 and an inlet port 4 communicating with the fluid pressure acting portion and the concave portion 3. In the concave portion 3, a conductive material 7 which is always electrically insulating and changes to conductivity by compression, and a flexible sheet 6 on both sides thereof and a substrate 8 having a pair of electrodes 9 and 9 abutting the conductive material, Is installed, a fluid pressure is applied to the conductive material 7 through the flexible sheet 6, the conductive material 7 changes into conductivity, and the pair of electrodes 9, 9 are electrically connected. This confirms whether or not the fluid pressure is normal.
この流体圧確認センサは、小形で精度が高くかつ安価
で、しかも可撓性シート6が導電性材料7をカバーしてい
るために、導電性材料7の劣化やセンサの誤動作を防止
できるという利点を有するが、流体圧が導電性材料7の
略全面に均一に作用するので、センサの感度を高くする
ことが難しいという問題がある。This fluid pressure confirmation sensor is small, highly accurate and inexpensive, and because the flexible sheet 6 covers the conductive material 7, it is possible to prevent deterioration of the conductive material 7 and malfunction of the sensor. However, there is a problem that it is difficult to increase the sensitivity of the sensor because the fluid pressure uniformly acts on the substantially entire surface of the conductive material 7.
[考案が解決しようとする課題] 本考案が解決しようとする課題は、小形で精度及び感度
が良く、出力信号の処理が容易でしかも安価な流体圧確
認センサを提供することにある。[Problems to be Solved by the Invention] An object to be solved by the present invention is to provide a fluid pressure confirmation sensor which is small in size, has high accuracy and sensitivity, can easily process an output signal, and is inexpensive.
[課題を解決するための手段] 上記課題を解決するため、本考案の流体圧確認センサ
は、流体圧作用部への取付部、先端に係止部を有する凹
部、及び上記流体圧作用部と凹部を連通させる入口ポー
トを備えた筐体と、上記凹部に入口ポート側から順次挿
入した可撓性シート、軸方向の貫通孔を有する圧子ガイ
ド、常時に電気絶縁性で圧縮により導電性に変る導電性
材料、及び一対の電極を有し導電性材料を支持する基
板、並びに上記貫通孔に摺動可能に装着した上記導電性
材料の局部を押圧するための圧子とを備え、上記基板の
周縁と係止部との係止によって、上記圧子を可撓性シー
トと導電性材料とに当接させるとともに、可撓性シート
が凹部の入口ポート側を気密にシールすることを特徴と
している。[Means for Solving the Problems] In order to solve the above problems, a fluid pressure confirmation sensor according to the present invention comprises a mounting portion for a fluid pressure acting portion, a recess having a locking portion at the tip, and the fluid pressure acting portion. A housing having an inlet port for communicating the recess, a flexible sheet sequentially inserted into the recess from the inlet port side, an indenter guide having a through hole in the axial direction, which is always electrically insulating and becomes conductive by compression. A peripheral edge of the substrate, comprising a conductive material, a substrate having a pair of electrodes and supporting the conductive material, and an indenter slidably mounted in the through hole for pressing a local portion of the conductive material. The indenter is brought into contact with the flexible sheet and the conductive material by the engagement of the locking portion with the locking portion, and the flexible sheet hermetically seals the inlet port side of the recess.
[作用] 筐体の凹部に、可撓性シート、圧子ガイド及び圧子、導
電性材料、並びに基板を順次を順次挿入し、該基板の周
縁と凹部先端の係止部とを係止すると、圧子が可撓性シ
ートと導電性材料とに当接するとともに、可撓性シート
が凹部の入口ポート側を気密にシールする。[Operation] When the flexible sheet, the indenter guide and the indenter, the conductive material, and the substrate are sequentially inserted into the recess of the housing and the peripheral edge of the substrate and the locking portion at the tip of the recess are locked, the indenter is pressed. Contacts the flexible sheet and the conductive material, and the flexible sheet hermetically seals the inlet port side of the recess.
この場合、基板の周縁と係止部との係止力は導電性材料
の受圧部に作用しないので、圧力の検出精度が低下する
ことはない。In this case, since the locking force between the peripheral edge of the substrate and the locking portion does not act on the pressure receiving portion of the conductive material, the pressure detection accuracy does not deteriorate.
取付部によって筐体を流体圧作用部に取付けると、入口
ポートから可撓性シートを介して圧子に作用する流体圧
が正常な場合には、可撓性シートを介して圧子が押圧さ
れ、これによって導電性材料の局部が圧縮されて導電性
に変化するので、一対の電極間が電気的に接続される。When the housing is attached to the fluid pressure acting portion by the attaching portion, if the fluid pressure acting on the indenter from the inlet port through the flexible sheet is normal, the indenter is pressed through the flexible sheet, As a result, the local part of the conductive material is compressed and becomes conductive, so that the pair of electrodes is electrically connected.
この場合、圧子が導電性材料の局部を圧縮するので、導
電性材料の略全面に流体圧を作用させる場合に比べて、
センサの感度を高くすることかできる。In this case, since the indenter compresses a local portion of the conductive material, compared to the case where a fluid pressure is applied to substantially the entire surface of the conductive material,
It is possible to increase the sensitivity of the sensor.
また、入口ポートに作用する流体は、可撓性シートによ
って気密にシールされるので、流体による導電性材料の
劣化やセンサの誤動作を確実に防止することができる。Further, since the fluid acting on the inlet port is hermetically sealed by the flexible sheet, it is possible to reliably prevent the deterioration of the conductive material and the malfunction of the sensor due to the fluid.
流体圧作用部に流体圧が作用していないか、または流体
圧が正常に作用していない場合には、導電性材料が導電
性に変化しないため、一対の電極間は電気的に絶縁して
いる。If the fluid pressure is not acting on the fluid pressure acting part, or if the fluid pressure is not acting normally, the conductive material does not change to conductivity, so there is electrical insulation between the pair of electrodes. There is.
したがって、駆動機器が作動しない原因を、外部から判
断することができる。Therefore, the reason why the drive device does not operate can be determined from the outside.
[実施例] 第1図は本考案の実施例を示し、この流体圧確認センサ
の筐体21は、一端に流体の配管や方向切換弁等の流体圧
作用部に取付けるためのねじ22aを、他端に後記するカ
バー取付用のねじ22bをそれぞれ備え、中間はスパナ等
をかけるための六角形に形成されている。[Embodiment] FIG. 1 shows an embodiment of the present invention. A housing 21 of this fluid pressure confirmation sensor is provided with a screw 22a at one end for attaching to a fluid pressure acting portion such as a fluid pipe or a directional control valve. Each of the other ends is provided with a cover mounting screw 22b, which will be described later, and the middle portion is formed into a hexagonal shape for applying a spanner or the like.
上記筐体21は、ねじ22b側が開口する凹部23を有し、該
凹部23の底面とねじ22a側の端面との間に圧力流体の入
口ポート24が開設されており、凹部23の底面側から、可
撓性シート25、圧子ガイド26、導電性材料27、基板28が
順次挿入され、基板28の周縁は、凹部先端の係止部23a
に係止している。The housing 21 has a recess 23 that opens on the screw 22b side, and a pressure fluid inlet port 24 is opened between the bottom surface of the recess 23 and the end surface on the screw 22a side. The flexible sheet 25, the indenter guide 26, the conductive material 27, and the substrate 28 are sequentially inserted, and the peripheral edge of the substrate 28 has a locking portion 23a at the tip of the recess.
Is locked to.
上記可 性シート25は、柔軟でかつ電気絶縁性の素材で
形成されて、凹部23の周壁を気密にシールし、入口ポー
ト24に流体圧が作用すると圧子ガイド26側に変位するも
ので、該圧子ガイド26は、流体圧によって変形しない素
材で形成されて、凹部23に配設され、中心に後述する圧
子の摺動を案内する軸方向の貫通孔26aが開設されてい
る。The flexible sheet 25 is made of a flexible and electrically insulating material, hermetically seals the peripheral wall of the recess 23, and is displaced toward the indenter guide 26 side when fluid pressure acts on the inlet port 24. The indenter guide 26 is made of a material that is not deformed by fluid pressure, is disposed in the recess 23, and has an axial through hole 26a at the center for guiding the sliding of the indenter, which will be described later.
導電性材料27は、多数の金属粒子を含有し、通常は電気
絶縁性で圧縮力を受けると導電性に変わるものであり、
基板28は、電気絶縁性でかつ流体圧によって変形しない
比較的強度の大きい素材で形成され、一対の電極29,29
が軸方向に設けられており、電極29,29の先端は導電性
材料27の端面に当接している。The conductive material 27 contains a large number of metal particles, and is usually electrically insulating and changes to conductive when subjected to a compressive force,
The substrate 28 is made of a material having a relatively high strength that is electrically insulating and does not deform due to fluid pressure, and has a pair of electrodes 29, 29.
Are provided in the axial direction, and the tips of the electrodes 29, 29 are in contact with the end surface of the conductive material 27.
上記圧子ガイド26の貫通孔26aに摺動可能に装着した圧
子31は、入口ポート24から可撓性シート25を介して作用
する流体圧により変位して導電性材料27の局部を集中的
に圧縮するもので、図示の例は球体で形成されている
が、円柱或は導電性材料27側を縮径させた段付円柱等の
導電性材料27の局部を集中的に圧縮させるものであれ
ば、他の任意の形状にすることができる。The indenter 31 slidably mounted in the through hole 26a of the indenter guide 26 is displaced by the fluid pressure acting from the inlet port 24 through the flexible sheet 25, and the conductive material 27 is locally compressed. Although the example shown in the figure is formed of a sphere, it is possible to intensively compress a local portion of the conductive material 27 such as a column or a stepped column with the diameter of the conductive material 27 reduced. , Can be any other shape.
第1図中の符号32は、ねじ22bに螺着させた、電極29,29
のカバーである。Reference numeral 32 in FIG. 1 indicates electrodes 29, 29 screwed to the screw 22b.
Is the cover of.
なお、図示を省略しているが、電極29,29の他端は、適
宜の電源を介して、ランプ、ブザー等の、導電性材料27
が導電性に変化したことが確認できる機器に接続され
る。Although not shown, the other ends of the electrodes 29, 29 are connected to a conductive material 27 such as a lamp or a buzzer through an appropriate power source.
Is connected to a device that can be confirmed to have changed to conductivity.
上記流体圧確認サンサは、ねじ22aにより所定の流体流
路または方向制御弁等の流体圧作用部に螺着すると、入
口ポート24から可撓性シート25を介して圧子31に流体圧
が作用し、流体圧が正常な場合には、圧子31によって導
電性材料27が圧縮されて電極29,29が電気的に接続し、
流体圧が作用しないかまたは正常より低い場合には、導
電性材料27が導電性に変化しないので、電極29,29間が
電気的に絶縁している。したがって、これらの状態を適
宜の手段によって検知して、流体圧が正常か否かを極め
て容易に確認することができる。When the fluid pressure confirmation sensor is screwed to a predetermined fluid passage or a fluid pressure acting portion such as a directional control valve with a screw 22a, fluid pressure acts on the indenter 31 from the inlet port 24 through the flexible sheet 25. , When the fluid pressure is normal, the conductive material 27 is compressed by the indenter 31 to electrically connect the electrodes 29, 29,
When the fluid pressure does not act or is lower than normal, the conductive material 27 does not change to conductivity, so that the electrodes 29, 29 are electrically insulated. Therefore, it is possible to very easily confirm whether or not the fluid pressure is normal by detecting these states by an appropriate means.
上記流体圧確認センサは、小形でかつ安価にすることが
でい、導電性材料27に含有させる金属粒子の量等を変え
ることにより導電性材料が導電性に変える圧縮力を調整
できるので、圧力ゲージに比べて圧力の精度を高めるこ
とができる。The fluid pressure confirmation sensor can be made small and inexpensive, and the compression force for changing the conductive material to conductive can be adjusted by changing the amount of metal particles contained in the conductive material 27. The accuracy of pressure can be improved compared to a gauge.
また、圧子31の変位による圧縮力が導電性材料27の局部
に集中的に作用するので、導電性材料27の略全面に圧縮
力が作用する場合に比べて、センサの感度を向上させる
ことができる。Further, since the compressive force due to the displacement of the indenter 31 acts locally on the conductive material 27, it is possible to improve the sensitivity of the sensor as compared with the case where the compressive force acts on substantially the entire surface of the conductive material 27. it can.
さらに、導電性材料27に圧力流体が接触すると、導電性
材料が劣化したりセンサが誤動作したりする恐れがある
が、これを可撓性シート25によって気密にシールしたの
で、圧力流体中の水分等による劣化や誤動作を防止する
ことができる。Further, when the pressure fluid contacts the conductive material 27, the conductive material may be deteriorated or the sensor may malfunction, but since this is hermetically sealed by the flexible sheet 25, the moisture in the pressure fluid is It is possible to prevent deterioration and malfunction due to the above.
[考案の効果] 本考案の流体圧確認センサは、常時は電気的に絶縁し圧
縮により導電性に変る導電性材料によって、流体圧が正
常に作用しているか否かを確認するので、センサの出力
信号の処理が極めて容易となり、流体圧確認センサを小
形で安価にすることができ、しかも圧力計に比べて精度
を高めることができる。[Effects of the Invention] The fluid pressure confirmation sensor of the present invention confirms whether or not the fluid pressure is normally operating by the electrically conductive material that is electrically insulated and becomes electrically conductive by compression. The processing of the output signal becomes extremely easy, the fluid pressure confirmation sensor can be made small and inexpensive, and the accuracy can be improved as compared with the pressure gauge.
また、圧子ガイドの貫通孔に挿入した圧子によって導電
性材料の局部を圧縮することにより、小さい流体圧によ
って導電性材料を導電性に変えることができので、セン
サの感度を向上させることができる。Further, by compressing the local part of the conductive material by the indenter inserted in the through hole of the indenter guide, the conductive material can be made conductive by a small fluid pressure, so that the sensitivity of the sensor can be improved.
さらに、導電性材料を可撓性シートで気密にシールした
ことにより、導電性材料が圧力流体に接触しないので、
導電性材料の劣化やセンサの誤動作を防止することがで
きる。Furthermore, since the conductive material is hermetically sealed with a flexible sheet, the conductive material does not come into contact with the pressure fluid.
It is possible to prevent deterioration of the conductive material and malfunction of the sensor.
第1図は本考案の実施例の縦断正面図、第2図は既提案
の流体圧確認センサの縦断正面図である。 21・・筐体、 22a・・ねじ、 23・・凹部、 24・・入口ポート、 25・・可撓性シート、26・・圧子ガイド、 26a・・貫通孔、 27・・導電性材料、 28・・基板、 29・・電極、 31・・圧子。FIG. 1 is a vertical sectional front view of an embodiment of the present invention, and FIG. 2 is a vertical sectional front view of a proposed fluid pressure confirmation sensor. 21 ・ ・ Enclosure, 22a ・ ・ Screw, 23 ・ ・ Concave, 24 ・ ・ Inlet port, 25 ・ ・ Flexible sheet, 26 ・ ・ Indenter guide, 26a ・ ・ Through hole, 27 ・ ・ Conductive material, 28 ..Substrate, 29 .., electrode, 31 ..
フロントページの続き (56)参考文献 特開 昭58−28635(JP,A) 特開 昭61−207939(JP,A) 実開 昭49−33760(JP,U)Continuation of the front page (56) References JP-A-58-28635 (JP, A) JP-A-61-207939 (JP, A) Practical application Sho-49-33760 (JP, U)
Claims (1)
有する凹部、及び上記流体圧作用部と凹部を連通させる
入口ポートを備えた筐体と、上記凹部に入口ポート側か
ら順次挿入した可撓性シート、軸方向の貫通孔を有する
圧子ガイド、常時は電気絶縁性で圧縮により導電性に変
る導電性材料、及び一対の電極を有し導電性材料を支持
する基板、並びに上記貫通孔に摺動可能に装着した上記
導電性材料の局部を押圧するための圧子とを備え、 上記基板の周縁と係止部との係止によって上記圧子を可
撓性シートと導電性材料とに当接させるとともに、可撓
性シートが凹部の入口ポート側を気密にシールする、 ことを特徴とする流体圧確認センサ。1. A housing provided with a mounting portion for a fluid pressure acting portion, a recess having a locking portion at a tip thereof, and an inlet port for communicating the fluid pressure acting portion with the recess, and the recess from the inlet port side. A sequentially inserted flexible sheet, an indenter guide having a through hole in the axial direction, a conductive material that is normally electrically insulating and changes to conductivity by compression, and a substrate having a pair of electrodes and supporting the conductive material, and An indenter slidably mounted in the through hole for pressing a local portion of the conductive material, and the indenter is locked to a flexible sheet and a conductive material by locking the peripheral edge of the substrate and the locking portion. A fluid pressure confirmation sensor, characterized in that the flexible sheet hermetically seals the inlet port side of the recess while being brought into contact with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988002293U JPH06743Y2 (en) | 1988-01-12 | 1988-01-12 | Fluid pressure confirmation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988002293U JPH06743Y2 (en) | 1988-01-12 | 1988-01-12 | Fluid pressure confirmation sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01107946U JPH01107946U (en) | 1989-07-20 |
| JPH06743Y2 true JPH06743Y2 (en) | 1994-01-05 |
Family
ID=31202934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988002293U Expired - Lifetime JPH06743Y2 (en) | 1988-01-12 | 1988-01-12 | Fluid pressure confirmation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06743Y2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327506Y2 (en) * | 1972-06-24 | 1978-07-12 | ||
| JPS5828635A (en) * | 1981-08-12 | 1983-02-19 | Sharp Corp | Pressure sensor |
| JPS61207939A (en) * | 1985-03-13 | 1986-09-16 | Yokohama Rubber Co Ltd:The | Pressure sensor |
-
1988
- 1988-01-12 JP JP1988002293U patent/JPH06743Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01107946U (en) | 1989-07-20 |
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