JPH0675100A - Microscope specimen chamber - Google Patents
Microscope specimen chamberInfo
- Publication number
- JPH0675100A JPH0675100A JP22612292A JP22612292A JPH0675100A JP H0675100 A JPH0675100 A JP H0675100A JP 22612292 A JP22612292 A JP 22612292A JP 22612292 A JP22612292 A JP 22612292A JP H0675100 A JPH0675100 A JP H0675100A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- thin film
- specimen
- microscope
- sample chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 claims abstract description 49
- 238000002347 injection Methods 0.000 claims abstract description 23
- 239000007924 injection Substances 0.000 claims abstract description 23
- 239000000523 sample Substances 0.000 description 79
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 21
- 238000000034 method Methods 0.000 description 18
- 238000010521 absorption reaction Methods 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 11
- 239000004642 Polyimide Substances 0.000 description 9
- 229920001721 polyimide Polymers 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 239000011575 calcium Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 102000053602 DNA Human genes 0.000 description 1
- 108020004414 DNA Proteins 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、顕微鏡試料室、特に軟
Ｘ線顕微鏡による観察に好適な顕微鏡試料室に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope sample chamber, and more particularly to a microscope sample chamber suitable for observation with a soft X-ray microscope.
【０００２】[0002]
【従来の技術】従来、軟Ｘ線顕微鏡は、例えば図４に示
す如く、Ｘ線光源１とコンデンサーレンズ２とから成る
照明光学系と、対物レンズ３とＸ線検出器４とから成る
結像光学系とが、空気による軟Ｘ線の吸収を出来るだけ
避けるために夫々真空容器５，６中に置かれており、真
空容器５，６に設けられた窓5a,6a を介してＸ線が出入
りするようになっている。また、照明光学系側の真空容
器窓5aの外側（空気中）に試料容器７を配して試料の観
察を行うようになっている。2. Description of the Related Art Conventionally, a soft X-ray microscope, for example, as shown in FIG. 4, an illumination optical system including an X-ray light source 1 and a condenser lens 2, and an image formation including an objective lens 3 and an X-ray detector 4. The optical system and the optical system are respectively placed in the vacuum vessels 5 and 6 in order to avoid absorption of soft X-rays by air as much as possible, and the X-rays are transmitted through the windows 5a and 6a provided in the vacuum vessels 5 and 6, respectively. It comes and goes in and out. Further, the sample container 7 is arranged outside the vacuum container window 5a (in the air) on the illumination optical system side to observe the sample.
【０００３】そのため、軟Ｘ線顕微鏡は、生物試料を前
処理することなく生きた状態のまま高解像度で観察でき
る。従って、特に注目されているのは、所謂「水の窓」
と呼ばれる波長領域（酸素の吸収端23.32 Å〜炭素の吸
収端43.68 Åに相当する波長範囲）を用いる方法であ
る。この領域では、水によるＸ線の吸収は、厚さ１μm
でＸ線の波長λ＝40Åの場合に33％であるので、5 μm
程度の水の厚さであれば水中に在る物体の観察が可能で
ある。Therefore, the soft X-ray microscope can observe a biological sample in a living state at a high resolution without pretreatment. Therefore, what is particularly attracting attention is the so-called "water window".
This is a method using a wavelength region called (wavelength range corresponding to oxygen absorption edge 23.32 Å to carbon absorption edge 43.68 Å). In this region, the absorption of X-rays by water has a thickness of 1 μm.
Since it is 33% when the wavelength of X-ray λ = 40Å, it is 5 μm.
It is possible to observe an object in water if the water has a thickness of a certain degree.
【０００４】また、この領域では炭素によるＸ線の吸収
が大きく、生体の重要物質であるデオキシリボ核酸（DN
A), 蛋白質, 炭水化物及び肪質等が無染色で観察でき
る。更にカルシウムの吸収端が35Åにあるので、35Å以
下の波長を用いれば生物の機能に重要な役割を果してい
ると言われるカルシウムの分布が直接観察できる。In this region, carbon is highly absorbed by X-rays, and deoxyribonucleic acid (DN
A), protein, carbohydrate and fat can be observed without staining. Furthermore, since the absorption edge of calcium is at 35 Å, it is possible to directly observe the distribution of calcium, which is said to play an important role in the function of living organisms, by using a wavelength of 35 Å or less.
【０００５】即ち、「水の窓」は、その名の通り、酸素
の吸収端より少し波長の長い領域であって、或る程度水
が透明体として作用し、且つ炭素やカルシウム等の重要
物質の吸収端を含んでいる領域である。That is, the "water window" is, as its name implies, a region having a wavelength slightly longer than the absorption edge of oxygen, in which water acts as a transparent body to some extent, and important substances such as carbon and calcium. Is an area including the absorption edge of.
【０００６】しかしながら、この波長域で空気中或は水
中の状態で試料を観察する場合に幾つか考慮しなければ
ならない問題がある。例えば、 (1) 空気による吸収（空気の透過率は、厚さ10mmでＸ線
の波長40Åの場合0.8 ％）があり、軟Ｘ線の光路は真空
にする必要がある。 (2) 「水の窓」と云われていても、水の透過率は、厚さ
5 μm で波長 40Åの場合に13.5％もあり、水による吸
収が大きく、水中観察する場合は、水の層の厚さを10μ
m 以下、出来れば5 μm 程度に限定するのが望ましい。 (3) 真空と空気を隔てる窓材の吸収が大きく、厚くて丈
夫な窓を作るのが難しい等の制約がある。因みに、ベリ
リウム(Be)の透過率は厚さ１μm でＸ線の波長 36.3 Å
の場合15.8％、Si3N4 の透過率は厚さ0.12μm でＸ線の
波長 40 Åの場合46％、そしてポリイミドの透過率は厚
さ0.3 μm でＸ線の波長 45 Åの場合85％である。However, there are some problems that must be taken into consideration when observing a sample in the air or water in this wavelength range. For example, (1) There is absorption by air (the transmittance of air is 0.8% when the thickness is 10 mm and the wavelength of X-rays is 40 Å), and the optical path of soft X-rays must be vacuum. (2) Even if it is called a “water window”, the water permeability is
At 5 μm and a wavelength of 40 Å, it is 13.5%, which is highly absorbed by water. When observing in water, the thickness of the water layer should be 10 μm.
It is desirable to limit it to m or less, if possible, to about 5 μm. (3) There is a constraint that the window material that separates the vacuum from the air has large absorption, and it is difficult to make a thick and durable window. By the way, the transmittance of beryllium (Be) is 1 μm and the wavelength of X-ray is 36.3 Å
15.8%, the transmittance of Si 3 N 4 is 0.12 μm and the wavelength of X-ray is 40 Å 46%, and the transmittance of polyimide is 0.3 μm and the wavelength of X-ray is 45 Å 85%. Is.
【０００７】この種従来の試料容器の断面構造を図５に
示す。結像光学系側の真空容器６の窓6aと試料容器７と
の間には300m barの空気層A1が存在している。また、試
料容器７の試料室８は試料容器本体９に形成した穴9aを
パロディオンホイル10とポリイミド薄膜11を上下から挟
むことにより構成されており、その中に水と試料12が入
っている。FIG. 5 shows a sectional structure of a conventional sample container of this type. An air layer A 1 of 300 mbar exists between the window 6a of the vacuum container 6 on the side of the imaging optical system and the sample container 7. The sample chamber 8 of the sample container 7 is formed by sandwiching a hole 9a formed in the sample container main body 9 from above and below with a parodyon foil 10 and a polyimide thin film 11, and water and sample 12 are contained therein. .
【０００８】試料室８の下には、試料容器基板13に穴13
a を形成することにより構成された300m barの空気層A2
が照明光学系側の真空容器５の窓5aと直接接触してい
る。なお、窓5a,6a と薄膜11は何れも0.3 μm 厚のポリ
イミド薄膜で出来ている。試料容器本体９は厚さ5 μm
のアルミニウム薄膜によって囲われている。Below the sample chamber 8, a hole 13 is formed in the sample container substrate 13.
Air layer A 2 of 300 mbar constructed by forming a
Is in direct contact with the window 5a of the vacuum container 5 on the illumination optical system side. The windows 5a and 6a and the thin film 11 are both made of a polyimide thin film having a thickness of 0.3 μm. Sample container body 9 has a thickness of 5 μm
Surrounded by a thin aluminum film.
【０００９】この様に試料容器７は、試料容器本体９に
設けた穴9aをパロディオンホイル10とポリイミド薄膜11
とで上下から挟んで形成された試料室８と、試料容器基
板13とから成っており、その構造も製作過程も極めて複
雑であり、所謂実験室的要素が多く、実用的で無いと云
う問題がある。As described above, the sample container 7 has the hole 9a provided in the sample container main body 9 and the parody foil 10 and the polyimide thin film 11.
It is composed of a sample chamber 8 formed by sandwiching it from above and below, and a sample container substrate 13. The structure and the manufacturing process are extremely complicated, and there are many so-called laboratory elements, which is not practical. There is.
【００１０】[0010]
【発明が解決しようとする課題】従来の試料室は、容器
の壁が薄膜で形成されており、水の厚さを10μm 程度に
抑えて、試料室を閉じる必要があり、薄膜の取扱いが非
常に難しく実用に適さないと云う不便があった。また、
試料が例えば細胞である場合には、細胞を僅か10μm の
空間に閉じ込めなければならず、その技術には豊富な経
験が要求されていた。In the conventional sample chamber, the wall of the container is formed of a thin film, and it is necessary to keep the thickness of water to about 10 μm and close the sample chamber, which makes handling the thin film extremely difficult. It was difficult and not suitable for practical use. Also,
When the sample is a cell, for example, the cell must be confined in a space of only 10 μm, and the technique requires abundant experience.
【００１１】本発明は、上記問題点に鑑み、軟Ｘ線顕微
鏡において、簡単に使用出来る試料室を提供することを
目的とする。In view of the above problems, it is an object of the present invention to provide a sample chamber that can be easily used in a soft X-ray microscope.
【００１２】[0012]
【課題を解決するための手段】本発明による試料室は、
観察する試料を封じ込める顕微鏡試料室を、観察波長の
透過する薄膜から構成し、微細管を有する観察試料注入
部材（注射器）を用いて上記薄膜の内部に上記試料を注
入して封じ込めるように構成したことを特徴とする。The sample chamber according to the present invention comprises:
The microscope sample chamber for containing the sample to be observed is composed of a thin film that transmits the observation wavelength, and is configured to inject and contain the sample inside the thin film using an observation sample injection member (syringe) having a microtube. It is characterized by
【００１３】[0013]
【作用】本発明によれば、微細管構造の注射器を用いて
試料を含む溶液を薄膜に注入するだけで10μm 程度の空
間に水と試料を封じ込めた試料室を簡単に製作すること
が出来る。尚、薄膜に生じた注入口の跡穴は接着材で塞
ぐが、柔軟な薄膜を用いれば塞ぐ必要がない。According to the present invention, a sample chamber in which water and a sample are enclosed in a space of about 10 μm can be easily manufactured by injecting a solution containing the sample into a thin film using a syringe having a fine tube structure. Incidentally, the trace hole of the injection port formed in the thin film is closed with an adhesive, but it is not necessary to close it if a flexible thin film is used.
【００１４】[0014]
【実施例】本発明による第１実施例を図１，図２
（ａ），（ｂ）に基づき説明する。図１は、所謂「水の
窓」と呼ばれる波長領域（酸素の吸収端23.32 Å〜炭素
の吸収端43.68 Åに相当する波長範囲）で観察を行う生
物用軟Ｘ線顕微鏡に用いるための試料室８であって、薄
膜14とこれに閉じ込められた試料12とからなる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment according to the present invention is shown in FIGS.
A description will be given based on (a) and (b). Fig. 1 shows a sample chamber for use in a biological soft X-ray microscope for observation in the so-called "water window" wavelength range (wavelength range corresponding to oxygen absorption edge 23.32 Å to carbon absorption edge 43.68 Å). 8 is composed of a thin film 14 and a sample 12 confined therein.
【００１５】薄膜14には、透過率が大きく且つ厚くて可
撓性がある丈夫な材料、例えばポリイミドなどが使用さ
れる。試料12は溶液に含まれたものである。15は観察試
料注入部材( 以下単に注射器という) 、16は注射器15の
注射針であって、注射針16の基部から徐々に先細状とな
り、その先端16a は直径５μm 程度の微細管に形成され
ている（図２(a) ）。この注射針16は、直径１mm、厚さ
20μm のガラス細管の一端を熱しながら徐々に引き伸ば
すことにより容易に成形することができる。The thin film 14 is made of a strong material having a large transmittance, a large thickness, and flexibility, such as polyimide. Sample 12 was included in the solution. Reference numeral 15 is an observation sample injection member (hereinafter simply referred to as an injector), 16 is an injection needle of the injection device 15, which gradually tapers from the base of the injection needle 16, and its tip 16a is formed into a microtube with a diameter of about 5 μm. (Fig. 2 (a)). This injection needle 16 has a diameter of 1 mm and a thickness.
It can be easily molded by gradually stretching one end of a 20 μm glass capillary while heating it.
【００１６】試料室８を作るには、先ず、観察したい試
料12を溶液に含ませておく。注射器15で試料12を吸い込
み、注射針先端16a を薄膜14に突き刺してその内部へ試
料12を注入し、薄膜14内部に試料12を閉じ込める。試料
12の注入に際しては、図２（ｂ）に示す様に、試料12が
溢れないように薄膜14の内部に閉じ込めることができる
ように確認しながら行うが、確認は図示しない光学顕微
鏡を用いる。To make the sample chamber 8, first, the sample 12 to be observed is included in the solution. The sample 12 is sucked by the syringe 15, the tip 16a of the injection needle is pierced into the thin film 14, the sample 12 is injected into the thin film 14, and the sample 12 is confined inside the thin film 14. sample
As shown in FIG. 2B, the injection of 12 is performed while confirming that the sample 12 can be confined inside the thin film 14 so as not to overflow, but the confirmation is performed using an optical microscope (not shown).
【００１７】また試料12の注入が完了したら注射器15を
抜き取り、薄膜14の表面に生じた注射針16の抜き跡の穴
を接着剤で閉じる。薄膜14に柔軟な材質の材料を使用し
た場合には、注射針16の抜き跡は直ぐ閉まって復元され
るので穴閉じ作業を省略してもよい。When the injection of the sample 12 is completed, the syringe 15 is withdrawn, and the hole on the surface of the thin film 14 where the injection needle 16 is removed is closed with an adhesive. When a flexible material is used for the thin film 14, the withdrawal mark of the injection needle 16 is immediately closed and restored, so the hole closing operation may be omitted.
【００１８】この第１実施例においては、図１に示す如
く、１枚の薄膜14に複数の試料12を封じ込めることが出
来る利点がある。The first embodiment has the advantage that a plurality of samples 12 can be enclosed in one thin film 14 as shown in FIG.
【００１９】第２実施例を図３に示す。この実施例は、
２枚の薄膜を利用した例である。図において、17,18 は
共に厚さ0.1 〜0.3 μm 程度の可撓性を有する材料、例
えばポリイミド或いは窒化シリコン薄膜等であって、お
互いに重合して一体的に使用されるが、接着されてはい
ない。The second embodiment is shown in FIG. This example
This is an example of using two thin films. In the figure, 17 and 18 are both flexible materials having a thickness of about 0.1 to 0.3 μm, for example, polyimide or silicon nitride thin film, which are polymerized with each other and used integrally, but are not bonded. There isn't.
【００２０】試料12は、第１実施例で使用した注射器15
を用いて、薄膜17,18 の間に試料12を注入し、注射完了
後は針跡の穴を図示しない接着材にて塞ぐ。Sample 12 is the syringe 15 used in the first embodiment.
The sample 12 is injected between the thin films 17 and 18 by using, and after the injection is completed, the hole of the needle trace is closed with an adhesive material (not shown).
【００２１】19,20 は夫々複数の打ち抜かれた部屋21を
有する格子状のメッシュである。薄膜17,18 は単に試料
12を挟んでいるだけの状態で互いに接着はされていない
ので、このメッシュ19,20 で更にその両側から押さえ付
ける。このメッシュ19,20 はニッケル等の金属製のもの
を使用し、これにより軟Ｘ線の不要光と錯乱光の入射を
防止して確実な観察を可能にすると共に、隣接試料室へ
の影響を絶つことができる。この実施例の場合、各格子
部屋21がそれぞれの試料室を形成することになる。Reference numerals 19 and 20 are lattice meshes each having a plurality of punched chambers 21. Thin films 17 and 18 are simply samples
Since the 12 are only sandwiched and not bonded to each other, the meshes 19 and 20 are used to further press them from both sides. These meshes 19 and 20 are made of metal such as nickel, which prevents unwanted X-rays of soft X-rays and confusion light from entering and enables reliable observation, and also has an effect on the adjacent sample chamber. Can be cut off. In the case of this embodiment, each lattice chamber 21 forms each sample chamber.
【００２２】第１実施例では、約５μm 程度の薄膜14の
内部に試料12を注入するので、薄膜14が部分的に伸びて
膨らむことで試料室８が形成される。これに反し、第２
実施例においては、接着されずに単に重合された薄膜1
7,18 の間に割り込むように試料12が注入されるので、
薄膜17,18 自体を破損することがなく、試料の注入が安
易になると云う新たな利点が生じる。In the first embodiment, since the sample 12 is injected into the thin film 14 having a thickness of about 5 μm, the thin film 14 partially expands and swells to form the sample chamber 8. Contrary to this, the second
In the examples, the thin film 1 was not polymerized and was simply polymerized.
Since sample 12 is injected so as to interrupt between 7,18,
There is a new advantage that the sample injection becomes easy without damaging the thin films 17 and 18 themselves.
【００２３】尚、薄膜の材料は、１枚のポリイミド或い
は窒化シリコン薄膜に代えて単分子膜をつくるラングミ
ュア・プロジェット薄膜（Langumuir Blodgett, 略して
LB薄膜と云う）を何枚も重ねて構成された薄膜を使用し
てもよい。The material of the thin film is Langumuir Blodgett (abbreviated as "Langumuir Blodgett") for forming a monomolecular film in place of a single polyimide or silicon nitride thin film.
A thin film formed by stacking a number of LB thin films) may be used.
【００２４】[0024]
【発明の効果】上述のように本発明によれば、観察試料
を注入するための試料室を極めて簡単に作ることがで
き、しかも試料室への試料の閉じ込めも極めて容易に行
うことが出来るという利点がある。As described above, according to the present invention, a sample chamber for injecting an observation sample can be made very easily, and the sample can be confined in the sample chamber very easily. There are advantages.
【図１】本発明による試料室の第１実施例を示す断面図
である。FIG. 1 is a sectional view showing a first embodiment of a sample chamber according to the present invention.
【図２】（ａ）は試料室注入用微細管の拡大断面図であ
る。（ｂ）試料室への試料の注入方法を示す説明図であ
る。FIG. 2A is an enlarged sectional view of a microtube for injecting into a sample chamber. (B) It is explanatory drawing which shows the injection method of the sample to a sample chamber.
【図３】本発明による試料室の第２実施例を示す斜視図
である。FIG. 3 is a perspective view showing a second embodiment of the sample chamber according to the present invention.
【図４】従来の軟Ｘ線顕微鏡の概略構成図である。FIG. 4 is a schematic configuration diagram of a conventional soft X-ray microscope.
【図５】従来の試料容器の要部断面図である。FIG. 5 is a sectional view of a main part of a conventional sample container.
８ 試料室 12 試料 14,17,18 薄膜 15 観察試料注入部材（注射器） 16 注射針 19,20 メッシュ 21 部屋 8 sample chamber 12 sample 14,17,18 thin film 15 observation sample injection member (syringe) 16 injection needle 19,20 mesh 21 room
【手続補正書】[Procedure amendment]
【提出日】平成５年２月９日[Submission date] February 9, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【特許請求の範囲】[Claims]
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００６[Correction target item name] 0006
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００６】しかしながら、真空容器が２つに分かれ、
試料容器７付近が非常に煩雑になるので、図６に示すよ
うな構成の軟Ｘ線顕微鏡が提案されている。以上の様に
軟Ｘ線顕微鏡の光学系は真空中で構成しなければならな
いが、試料は空気中、或いは水中に保存する必要があ
る。しかしながら、この波長域で空気中或は水中の状態
で試料を観察する場合に幾つか考慮しなければならない
問題がある。例えば、 (1) 空気による吸収（空気の透過率は、厚さ10mmでＸ線
の波長40Åの場合0.8 ％）があり、軟Ｘ線の光路は真空
にする必要がある。 (2) 「水の窓」と云われていても、水の透過率は、厚さ
5 μm で波長 40Åの場合に13.5％しかなく、水による
吸収が大きく、水中観察する場合は、水の層の厚さを10
μm 以下、出来れば5 μm 程度に限定するのが望まし
い。 (3) 真空と空気を隔てる窓材の吸収が大きく、厚くて丈
夫な窓を作るのが難しい等の制約がある。因みに、ベリ
リウム(Be)の透過率は厚さ１μm でＸ線の波長 36.3 Å
の場合15.8％、Si3N4 の透過率は厚さ0.12μm でＸ線の
波長 40 Åの場合46％、そしてポリイミドの透過率は厚
さ0.3 μm でＸ線の波長 45 Åの場合85％である。However, the vacuum container is divided into two,
Since the vicinity of the sample container 7 becomes very complicated, a soft X-ray microscope having a configuration as shown in FIG. 6 has been proposed. As described above, the optical system of the soft X-ray microscope must be constructed in vacuum, but the sample must be stored in air or water. However, there are some problems that must be taken into consideration when observing a sample in this wavelength range in air or in water. For example, (1) There is absorption by air (the transmittance of air is 0.8% when the thickness is 10 mm and the wavelength of X-rays is 40 Å), and the optical path of soft X-rays must be vacuum. (2) Even if it is called a “water window”, the water permeability is
At 5 μm and a wavelength of 40 Å, it is only 13.5%, and it is highly absorbed by water.
It is desirable to limit to less than μm, and if possible, to about 5 μm. (3) There is a constraint that the window material that separates the vacuum from the air has large absorption, and it is difficult to make a thick and durable window. By the way, the transmittance of beryllium (Be) is 1 μm and the wavelength of X-ray is 36.3 Å
15.8%, the transmittance of Si 3 N 4 is 0.12 μm and the wavelength of X-ray is 40 Å 46%, and the transmittance of polyimide is 0.3 μm and the wavelength of X-ray is 45 Å 85%. Is.
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１９[Correction target item name] 0019
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１９】第２実施例を図３に示す。この実施例は、
２枚の薄膜を利用した例である。図において、17,18 は
共に厚さ0.1 〜0.3 μm 程度の可撓性を有する材料、例
えばポリイミド或いは窒化シリコン薄膜等であって、お
互いに重ね合わせて一体的に使用されるが、接着されて
はいない。The second embodiment is shown in FIG. This example
This is an example of using two thin films. In the figure, 17 and 18 are both flexible materials having a thickness of about 0.1 to 0.3 μm, such as polyimide or silicon nitride thin film, which are used by being superposed on each other and integrally bonded. There isn't.
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２２[Name of item to be corrected] 0022
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００２２】第１実施例では、約５μm 程度の薄膜14の
内部に試料12を注入するので、薄膜14が部分的に伸びて
膨らむことで試料室８が形成される。これに反し、第２
実施例においては、接着されずに単に重ね合わされた薄
膜17,18 の間に割り込むように試料12が注入されるの
で、薄膜17,18 自体を破損することがなく、試料の注入
が安易になると云う新たな利点が生じる。In the first embodiment, since the sample 12 is injected into the thin film 14 having a thickness of about 5 μm, the thin film 14 partially expands and swells to form the sample chamber 8. Contrary to this, the second
In the embodiment, since the sample 12 is injected so as to be interrupted between the thin films 17 and 18 which are simply laminated without being adhered, the thin films 17 and 18 themselves are not damaged, and the injection of the sample becomes easy. There are new advantages to say.
【手続補正５】[Procedure Amendment 5]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明による試料室の第１実施例を示す断面図
である。FIG. 1 is a sectional view showing a first embodiment of a sample chamber according to the present invention.
【図２】（ａ）は試料室注入用微細管の拡大断面図であ
る。（ｂ）試料室への試料の注入方法を示す説明図であ
る。FIG. 2A is an enlarged sectional view of a microtube for injecting into a sample chamber. (B) It is explanatory drawing which shows the injection method of the sample to a sample chamber.
【図３】本発明による試料室の第２実施例を示す斜視図
である。FIG. 3 is a perspective view showing a second embodiment of the sample chamber according to the present invention.
【図４】従来の軟Ｘ線顕微鏡の概略構成図である。FIG. 4 is a schematic configuration diagram of a conventional soft X-ray microscope.
【図５】従来の試料容器の要部断面図である。FIG. 5 is a sectional view of a main part of a conventional sample container.
【図６】従来の別の軟Ｘ線顕微鏡の概略構成図である。FIG. 6 is a schematic configuration diagram of another conventional soft X-ray microscope.
【符号の説明】 ８ 試料室 12 試料 14,17,18 薄膜 15 観察試料注入部材（注射器） 16 注射針 19,20 メッシュ 21 部屋[Explanation of symbols] 8 sample chamber 12 sample 14,17,18 thin film 15 observation sample injection member (syringe) 16 injection needle 19,20 mesh 21 room
【手続補正書】[Procedure amendment]
【提出日】平成５年２月９日[Submission date] February 9, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図６[Name of item to be corrected] Figure 6
【補正方法】追加[Correction method] Added
【補正内容】[Correction content]
【図６】 [Figure 6]
───────────────────────────────────────────────────── フロントページの続き (72)発明者 持丸 象一郎 東京都渋谷区幡ヶ谷２丁目43番２号 オリ ンパス光学工業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shoichiro Mochimaru 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd.
Claims (2)
を、観察波長の透過する薄膜から構成し、観察試料注入
部材を用いて上記薄膜の内部に上記試料を注入して封じ
込めた構成としたことを特徴とする顕微鏡試料室。1. A microscope sample chamber for containing a sample to be observed is constituted by a thin film that transmits an observation wavelength, and the sample is injected into the inside of the thin film using an observation sample injection member to contain the sample. Characteristic microscope sample room.
薄膜からなり、上記試料を上記薄膜重合部に注入し封じ
込めた構成としたことを特徴とする請求項１に記載の顕
微鏡試料室。2. The microscope sample chamber according to claim 1, wherein the thin film is composed of at least two superposed thin films, and the sample is injected into the thin film superposition section and enclosed therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22612292A JPH0675100A (en) | 1992-08-25 | 1992-08-25 | Microscope specimen chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22612292A JPH0675100A (en) | 1992-08-25 | 1992-08-25 | Microscope specimen chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0675100A true JPH0675100A (en) | 1994-03-18 |
Family
ID=16840190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22612292A Withdrawn JPH0675100A (en) | 1992-08-25 | 1992-08-25 | Microscope specimen chamber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0675100A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687605A (en) * | 2020-12-28 | 2021-04-20 | 华东师范大学 | Method for reducing chip electron radiation damage and chip with less electron radiation damage |
-
1992
- 1992-08-25 JP JP22612292A patent/JPH0675100A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687605A (en) * | 2020-12-28 | 2021-04-20 | 华东师范大学 | Method for reducing chip electron radiation damage and chip with less electron radiation damage |
| CN112687605B (en) * | 2020-12-28 | 2022-07-29 | 华东师范大学 | Method and chip for reducing electron radiation damage |
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| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
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