JPH0678545A - Schenkel-type dc high-voltage generator - Google Patents
Schenkel-type dc high-voltage generatorInfo
- Publication number
- JPH0678545A JPH0678545A JP24886792A JP24886792A JPH0678545A JP H0678545 A JPH0678545 A JP H0678545A JP 24886792 A JP24886792 A JP 24886792A JP 24886792 A JP24886792 A JP 24886792A JP H0678545 A JPH0678545 A JP H0678545A
- Authority
- JP
- Japan
- Prior art keywords
- rectifier
- polarity
- lead wire
- output voltage
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000010586 diagram Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Landscapes
- Rectifiers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、出力電圧の極性を切り
換えることができるシェンケル型直流高電圧発生装置に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a Schenkel type DC high voltage generator capable of switching the polarity of output voltage.
【0002】[0002]
【従来の技術】図5は電子線照射装置、静電加速器にお
ける荷電粒子の加速電圧源等に用いられているバランス
(全波)方式のシェンケル型直流高電圧発生装置の回路
図である。数10kHzの高周波電源1に昇圧コイル部
2の1次コイル21が接続されており、中点が接地され
た2次コイル22は高周波(RF)電極3、4に接続す
る。これらRF電極は、円筒を二つ割した形状のもので
あり、RF電極の内側にこれら電極に対向して幅の狭い
シールド電極5、6がそれぞれ多数段設けられており、
RF電極とシールド電極間の静電容量は平滑用コンデン
サとして用いられる。最低圧側のシールド電極5、6は
接地され、最高圧側のシールド電極5、6は高電圧タ−
ミナル部7の高電圧出力端子8に接続する。各段のシー
ルド電極5とそれより高電圧側1段上のシールド電極6
間にそれぞれ整流器9を図示極性で接続し、同様に各段
のシールド電極6とそれより1段上のシールド電極5間
にそれぞれ整流器10を接続する。高周波電源1を除い
た部分は高圧SF6ガスが充填された圧力タンク内に配
置されている。各段のシールド電極5、6には、2次コ
イル22の電圧を順次整流逓倍した直流電圧が生じ、高
電圧出力端子8に正極性の直流出力電圧が得られる。2. Description of the Related Art FIG. 5 is a circuit diagram of a balance (full-wave) Schenkel type DC high voltage generator used for an electron beam irradiation device, an accelerating voltage source for charged particles in an electrostatic accelerator, and the like. Of the primary coil 2 1 booster coil unit 2 to the high-frequency power source 1 having 10kHz and is connected, a secondary coil 2 2 midpoint is grounded is connected to a radio frequency (RF) electrodes 3, 4. These RF electrodes have a shape obtained by dividing a cylinder into two, and a large number of narrow shield electrodes 5 and 6 are provided inside the RF electrode so as to face these electrodes, respectively.
The capacitance between the RF electrode and the shield electrode is used as a smoothing capacitor. The shield electrodes 5 and 6 on the lowest pressure side are grounded, and the shield electrodes 5 and 6 on the highest pressure side are high voltage terminals.
It is connected to the high voltage output terminal 8 of the minal section 7. Shield electrode 5 on each stage and shield electrode 6 on the one stage higher than that
The rectifiers 9 are connected between them in the illustrated polarity, and similarly, the rectifiers 10 are connected between the shield electrodes 6 in each stage and the shield electrode 5 one stage higher than that. The part excluding the high frequency power source 1 is arranged in a pressure tank filled with high-pressure SF 6 gas. A DC voltage obtained by sequentially rectifying and multiplying the voltage of the secondary coil 2 2 is generated at the shield electrodes 5 and 6 of each stage, and a positive DC output voltage is obtained at the high voltage output terminal 8.
【0003】加速電圧源では被加速粒子の荷電極性に応
じて所定極性の直流出力電圧を必要とする。上述の高電
圧発生装置にあっては、原理的には、各シールド電極間
における整流器9、10の接続極性を逆にすることによ
り、高電圧出力端子8に負極性の直流出力電圧を得るこ
とができる。ところで、荷電粒子の加速電圧源の場合、
各整流器9、10には極めて高い逆電圧が作用するか
ら、各整流器は多数の単位整流器を直列に接続した整流
器スタックとして構成されており、かかるスタックによ
る多数の整流器がシールド電極5、6で包囲、シールド
される形で取付け部材に配列して固定されている。した
がって、整流器9、10の接続極性を変更するには、絶
縁ガスの回収を伴う圧力タンクの開放後、各整流器を取
付け部材から取外し、向きを逆にして再び取付けなけれ
ばならず、非常に手間が掛かる。The accelerating voltage source requires a DC output voltage having a predetermined polarity depending on the charged polarity of the particles to be accelerated. In the high voltage generator described above, in principle, the polarity of the rectifiers 9 and 10 between the shield electrodes is reversed to obtain a negative DC output voltage at the high voltage output terminal 8. You can By the way, in the case of an accelerating voltage source of charged particles,
Since an extremely high reverse voltage acts on each rectifier 9, 10, each rectifier is configured as a rectifier stack in which a large number of unit rectifiers are connected in series, and a large number of such rectifiers are surrounded by the shield electrodes 5, 6. , Are arranged and fixed to the mounting member in a shielded form. Therefore, in order to change the connection polarity of the rectifiers 9 and 10, it is necessary to remove each rectifier from the mounting member after opening the pressure tank accompanied by the recovery of the insulating gas, and then remount the rectifier in the opposite direction and remount it. It costs.
【0004】そこで、整流器の取付けはそのままにし
て、圧力タンクを開けずに直流出力電圧の極性を切り換
えることができる高電圧発生装置が提案されている。こ
れは図6に示す回路構成のものであり、シールド電極
5、6の各段間にはそれぞれ一組の整流器9、10に加
えて切り換え接触子11、12、13、14を設ける。
これら切り換え接触子を圧力タンクの外部から操作され
る4本の絶縁駆動軸によって連動して全段一斉に操作
し、各整流器9、10の各端子を上下段関係にあるシー
ルド電極5、6に選択的に切り換え接続することによ
り、各整流器の接続極性を切り換えることができる(例
えば、実願平1−4016号参照)。Therefore, there has been proposed a high voltage generator capable of switching the polarity of the DC output voltage without opening the pressure tank, with the rectifier attached. This has the circuit configuration shown in FIG. 6, and switching contacts 11, 12, 13, and 14 are provided between each stage of the shield electrodes 5 and 6 in addition to a pair of rectifiers 9 and 10.
These switching contacts are interlocked by four insulated drive shafts operated from the outside of the pressure tank to operate all the stages simultaneously, and the terminals of each rectifier 9, 10 are connected to the shield electrodes 5, 6 in the upper and lower stages. By selectively switching and connecting, the connection polarity of each rectifier can be switched (see, for example, Japanese Patent Application No. 1-4016).
【0005】[0005]
【発明が解決しようとする課題】かかる整流逓倍型の高
電圧発生装置では整流逓倍段数を増やすことにより高い
直流出力電圧を得ることができ、MV(メガボルト)級
の加速電圧源の場合にはシールド電極の段数は数10段
にも達する。このようになると、切り換え接触子機構に
おける接触圧力の合計値も大きくなり、各絶縁駆動軸に
は大きな操作力を必要とする。そして、この駆動軸に各
段間の切り換え接触子を密接して配置しなければならな
いから、切り換え接触子機構を円滑、確実に動作できる
ものとするには、十分な強度、精密な加工、組立てを要
することになり、同機構は、全体として高価なものとな
る。In such a rectifying and multiplying type high voltage generator, a high DC output voltage can be obtained by increasing the number of rectifying and multiplying stages, and in the case of an MV (megavolt) class accelerating voltage source, a shield is provided. The number of electrode steps reaches several tens. In this case, the total value of the contact pressure in the switching contact mechanism also becomes large, and a large operating force is required for each insulated drive shaft. Since the switching contact between each step must be closely arranged on this drive shaft, sufficient strength, precise processing, and assembly are required to ensure smooth and reliable operation of the switching contact mechanism. Therefore, the mechanism is expensive as a whole.
【0006】ところで、加速電圧源では、加速電圧の極
性切り換えが頻繁に行われることはまれであり、荷電粒
子の照射、注入に係る生産現場にあってはせいぜい半年
に1回程度の頻度で行われるに過ぎない。かかる場合に
あっては、上述の圧力タンクの外部から整流器の接続極
性の転換を行うことができる高コストの切り換え機構は
設置するまでもない。By the way, in the accelerating voltage source, it is rare that the polarity of the accelerating voltage is switched frequently, and at a production site relating to the irradiation and injection of charged particles, it is performed at a frequency of about once every six months. It's just being seen. In such a case, it is not necessary to install a high-cost switching mechanism that can switch the connection polarity of the rectifier from the outside of the pressure tank.
【0007】本発明は、圧力タンクを開けることにはな
るが、整流器を着脱することなく、整流器のリード線の
みの接続変更により簡易に直流出力電圧の極性切り換え
が行えるシェンケル型直流高電圧発生装置の提供を目的
とするものである。According to the present invention, the pressure tank is opened, but the Schenkel type DC high voltage generator capable of easily switching the polarity of the DC output voltage by changing the connection of only the lead wire of the rectifier without attaching or detaching the rectifier. The purpose is to provide.
【0008】[0008]
【課題を解決するための手段】本発明は、シールド電極
の各段間に整流器が設けられているシェンケル型直流高
電圧発生装置において、各整流器の端子にそれぞれ一端
が接続されているリード線と、このリード線とシールド
電極とをそれぞれ接続する着脱可能のコネクタ部材とを
備え、このコネクタ部材によって、前記各整流器に接続
されているリード線の他端が、隣接する二つのシールド
電極の何れか一つに接続変更できるように構成されてい
ることを特徴とするものである。DISCLOSURE OF THE INVENTION The present invention is a Schenkel type DC high voltage generator in which a rectifier is provided between each stage of a shield electrode, and a lead wire having one end connected to each terminal of each rectifier. And a detachable connector member that connects the lead wire and the shield electrode, respectively, and the other end of the lead wire connected to each of the rectifiers by the connector member is one of two adjacent shield electrodes. It is characterized in that it is configured so that connection can be changed to one.
【0009】[0009]
【作用】直流出力電圧の極性切り換えは、整流器は着脱
せずに、その取付けはそのままにして、整流器のリード
線を隣接するシールド電極の何れか一方に切り換え接続
することにより行われ、この切り換えについては、着脱
可能のコネクタ部材による接続変更によるから、容易に
実施することができる。The switching of the polarity of the DC output voltage is carried out by connecting and disconnecting the lead wire of the rectifier to either of the adjacent shield electrodes without attaching or removing the rectifier. Can be easily implemented because the connection is changed by the detachable connector member.
【0010】[0010]
【実施例】本発明の実施例について図面を参照して説明
する。図1は実施例の組立て構成図、図2は図1の部分
拡大図、図3は整流器の接続変更についての説明図であ
る。なお図5ないし図6と同一符号は同等部分を示す。
シールド電極5、6の各段間に位置する整流器9、10
の各端子15は端子台16に取り付けられており、同端
子台はボルトで絶縁台17に固定されている。二つの絶
縁台17は杆18で結合されている。整流器のリード線
19の一端は端子20によって整流器の端子15と共に
端子台16に固定されており、リード線の他端には着脱
可能のコネクタ部材21のプラグ部22が取り付けられ
ている。このプラグ部のピン23は導電部材24の端部
に形成されたコネクタ部材のジャック部25と弾性接触
し、電気的に接続される。導電部材24はシールド電極
5、6の導電取付け片26と共に絶縁台17にボルトで
固定されており、導電取付け片26の端部はシールド電
極5、6に固定されている取付け台27を介してシール
ド電極に結合されている。Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an assembly configuration diagram of an embodiment, FIG. 2 is a partially enlarged view of FIG. 1, and FIG. 3 is an explanatory diagram of connection change of a rectifier. The same reference numerals as those in FIGS. 5 to 6 denote the same parts.
Rectifiers 9 and 10 located between the shield electrodes 5 and 6
Each terminal 15 is attached to a terminal block 16, and the terminal block is fixed to an insulating table 17 with bolts. The two insulating bases 17 are connected by a rod 18. One end of the lead wire 19 of the rectifier is fixed to the terminal block 16 together with the terminal 15 of the rectifier by the terminal 20, and the plug portion 22 of the detachable connector member 21 is attached to the other end of the lead wire. The pin 23 of the plug portion elastically contacts the jack portion 25 of the connector member formed at the end of the conductive member 24 to be electrically connected. The conductive member 24 is fixed to the insulating base 17 by bolts together with the conductive mounting pieces 26 of the shield electrodes 5 and 6, and the end of the conductive mounting piece 26 is mounted via the mounting base 27 fixed to the shield electrodes 5 and 6. It is coupled to the shield electrode.
【0011】図5ないし図6に示す高電圧出力端子8に
正極性の直流出力電圧を得るときには、図3に示すよう
に、整流器9の各リード線19は、着脱可能のコネクタ
部材21によって符号+で示す隣接するシールド電極の
一方に対する実線接続位置を取るようにシールド電極5
と同6間に接続する。負極性の直流出力電圧を得る場
合、リード線19のプラグ部22をジャック部25から
外し、符号−で示す隣接するシールド電極の他方に対す
る一点鎖線接続位置となるようにプラグ部22をジャッ
ク部25に挿入変更する。なお整流器10のシールド電
極5、6に対する接続関係も同様であり、その図示を省
略する。When a positive DC output voltage is obtained at the high voltage output terminal 8 shown in FIGS. 5 to 6, each lead wire 19 of the rectifier 9 is coded by a removable connector member 21 as shown in FIG. The shield electrode 5 is set so that the solid line connection position for one of the adjacent shield electrodes indicated by + is taken.
And between 6 and 6. When obtaining a negative DC output voltage, the plug portion 22 of the lead wire 19 is removed from the jack portion 25, and the plug portion 22 is connected to the other of the adjacent shield electrodes indicated by the symbol − so that the plug portion 22 is connected to the jack portion 25. Insert and change to. The connection relationship between the rectifier 10 and the shield electrodes 5 and 6 is the same, and the illustration thereof is omitted.
【0012】図4はリード線19と導電部材24とを接
続する着脱可能のコネクタ部材についての他の実施例を
示す。リード線19の他端には端子28が取り付けられ
ており、この端子は導電部材24にネジ29によって固
定、接続されている。直流出力電圧の極性変更は、この
ネジ29を外してリード線19の端子28を隣接するシ
ールド電極の他方に係る導電部材24に接続変更するこ
とにより行われる。FIG. 4 shows another embodiment of a detachable connector member for connecting the lead wire 19 and the conductive member 24. A terminal 28 is attached to the other end of the lead wire 19, and this terminal is fixed and connected to the conductive member 24 with a screw 29. The polarity of the DC output voltage is changed by removing the screw 29 and connecting the terminal 28 of the lead wire 19 to the conductive member 24 of the other adjacent shield electrode.
【0013】[0013]
【発明の効果】本発明は、以上説明したように、着脱可
能のコネクタ部材を用い、リード線のつなぎ換えを行う
ように構成したので、直流出力電圧の極性切り換えが容
易に行え、整流器着脱の手間を省くことができるもので
あり、構造が簡易であるから極性切り換えを行うことが
できる直流高電圧発生装置を低コストで構成することが
できる。また、コネクタ部材としてプラグ、ジャック形
式のルーズコンタクト・コネクタを使用することにより
リード線のつなぎ換えの手間が省くことができ、ネジ止
め端子形式の場合にあっても整流器の各リード線毎にそ
の端末の一つのつなぎ換えで済むから整流器の着脱に比
べて接続変更作業を容易に実施することができる。As described above, the present invention uses the detachable connector member to connect the lead wires. Therefore, the polarity of the DC output voltage can be easily switched, and the rectifier can be attached and detached. Since it is possible to save time and the structure is simple, it is possible to configure a DC high-voltage generator capable of switching polarities at low cost. Also, by using a plug or jack type loose contact connector as the connector member, it is possible to save the labor of reconnecting the lead wires, and even in the case of the screw terminal type, each lead wire of the rectifier Since only one terminal needs to be reconnected, the connection change work can be performed more easily than when attaching and detaching the rectifier.
【図1】本発明の実施例の組立て構成図である。FIG. 1 is an assembly configuration diagram of an embodiment of the present invention.
【図2】図1の部分拡大図である。FIG. 2 is a partially enlarged view of FIG.
【図3】整流器の接続変更についての説明図である。FIG. 3 is an explanatory diagram of connection change of a rectifier.
【図4】着脱可能のコネクタ部材についての他の実施例
の構成図である。FIG. 4 is a configuration diagram of another embodiment of a detachable connector member.
【図5】シェンケル型高電圧発生装置の回路図である。FIG. 5 is a circuit diagram of a Schenkel type high voltage generator.
【図6】従来の極性変更が行えるシェンケル型高電圧発
生装置の回路図である。FIG. 6 is a circuit diagram of a conventional Schenkel type high voltage generator capable of changing polarity.
5,6 シールド電極 9,10 整流器 15 整流器端子 19 リード線 21 着脱可能のコネクタ部材 5,6 Shield electrode 9,10 Rectifier 15 Rectifier terminal 19 Lead wire 21 Detachable connector member
Claims (1)
れているシェンケル型直流高電圧発生装置において、各
整流器の端子にそれぞれ一端が接続されているリード線
と、このリード線とシールド電極とをそれぞれ接続する
着脱可能のコネクタ部材とを備え、このコネクタ部材に
よって、前記各整流器に接続されているリード線の他端
が、隣接する二つのシールド電極の何れか一つに接続変
更できるように構成されていることを特徴とするシェン
ケル型直流高電圧発生装置。1. A Schenkel type DC high voltage generator in which a rectifier is provided between each stage of a shield electrode, a lead wire whose one end is connected to a terminal of each rectifier, and the lead wire and the shield electrode. And a detachable connector member for connecting each of the two, so that the other end of the lead wire connected to each of the rectifiers can be connected and changed to any one of two adjacent shield electrodes by the connector member. A Schenkel type DC high voltage generator characterized in that it is configured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4248867A JP2776167B2 (en) | 1992-08-26 | 1992-08-26 | Schenkel-type DC high-voltage generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4248867A JP2776167B2 (en) | 1992-08-26 | 1992-08-26 | Schenkel-type DC high-voltage generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0678545A true JPH0678545A (en) | 1994-03-18 |
| JP2776167B2 JP2776167B2 (en) | 1998-07-16 |
Family
ID=17184605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4248867A Expired - Lifetime JP2776167B2 (en) | 1992-08-26 | 1992-08-26 | Schenkel-type DC high-voltage generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2776167B2 (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615289U (en) * | 1979-07-13 | 1981-02-09 | ||
| JPS5822087U (en) * | 1981-07-27 | 1983-02-10 | 株式会社明電舎 | semiconductor rectifier |
| JPS5895660U (en) * | 1981-12-23 | 1983-06-29 | 日本電気株式会社 | semiconductor equipment |
| JPS60190186U (en) * | 1984-05-23 | 1985-12-17 | 住友電装株式会社 | Chain connected rectifier |
| JPH0214295U (en) * | 1988-07-12 | 1990-01-29 | ||
| JPH0297891U (en) * | 1989-01-17 | 1990-08-03 |
-
1992
- 1992-08-26 JP JP4248867A patent/JP2776167B2/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5615289U (en) * | 1979-07-13 | 1981-02-09 | ||
| JPS5822087U (en) * | 1981-07-27 | 1983-02-10 | 株式会社明電舎 | semiconductor rectifier |
| JPS5895660U (en) * | 1981-12-23 | 1983-06-29 | 日本電気株式会社 | semiconductor equipment |
| JPS60190186U (en) * | 1984-05-23 | 1985-12-17 | 住友電装株式会社 | Chain connected rectifier |
| JPH0214295U (en) * | 1988-07-12 | 1990-01-29 | ||
| JPH0297891U (en) * | 1989-01-17 | 1990-08-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2776167B2 (en) | 1998-07-16 |
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