JPH0679617A - Surface finishing device for surface plate in polishing machine - Google Patents

Abstract

PURPOSE:To finish the surfaces of both an upper and a lower surface plates into a prescribed shape surely and easily by controlling the degree of freedom of inclination of an upper side surface plate, which is suspended through a universal joint, relative to the rotation axis thereof with a regulating tool or a fixing tool. CONSTITUTION:A handle 33 of a cutting tool 26 is rotated to adjust a cutting blade 32 at a position for cutting the lower surface of an upper surface plate 10, and thereafter, a movable body 25 is moved. The movable body 25 is moved inside and outside in the radial direction, and the upper surface plate 10 is rotated, and the movable body 25 is slowly moved in the radial direction. As a result, the surface of the upper surface plate 10 can be finished into a prescribed shape easily and accurately with the excellent reproducibility. In the case of grinding the surface of a lower surface plate 5, a holder 31 of the cutting tool 26 is turned by 180 degrees to adjust the cutting blade at a position for cutting the upper surface of the lower surface plate 5, and thereafter, the similar operation is performed. The surface of the lower surface plate 5 is thereby finished into the prescribed shape.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface finishing device for a surface plate of a polishing machine.

[0002]

2. Description of the Related Art As a polishing machine for polishing an object to be polished such as a wafer, a double-side polishing machine for simultaneously polishing both surfaces thereof is used.

In this double-sided polishing machine, a lower turn table is fixed to the upper surface of a lower turn table that is rotated by a rotary drive unit, and an upper turn table is fixed to the lower surface of an upper turn table that is turned by a rotary drive unit. In addition, the upper surface plate has a large degree of freedom of inclination in the vertical plane with respect to the rotational axis of the upper surface table for the purpose of absorbing the rotational error of the lower surface plate, that is, the upper rotary table is It was configured to be suspended from the rotating shaft through a universal joint.

By the way, since surface irregularities are formed on the upper and lower surface plates while the polishing machine is being used, the surfaces of these surface plates are polished to finish the surface into a predetermined plane shape. There is a need.

Conventionally, in order to finish the surfaces of the upper and lower surface plates in such a double-sided polishing machine, a correction carrier made of the same material as the surface plate or a pellet-shaped grindstone is attached to a metal carrier. The correction carrier is sandwiched between upper and lower surface plates, and the surface of each surface plate is polished and corrected by a combination of the rotary motions of the surface plate and the correction carrier.

[0006]

However, according to the above-mentioned conventional surface finishing method, the work of finishing the surface of each surface plate with a predetermined shape and with a predetermined accuracy requires special skill and trial and error. There is a problem that it is a very difficult work and a reproducibility is low in order to obtain a predetermined plane shape with high accuracy.

There is a finishing device to which the mechanism of a vertical lathe is applied, but this is a single-sided polishing machine, and like the double-sided polishing machine described above, the upper surface plate is placed in a vertical plane with respect to its rotation axis. If there is a degree of freedom, it cannot be applied.

Therefore, an object of the present invention is to provide a surface finishing device for a surface plate in a polishing machine which can solve the above problems.

[0009]

In order to solve the above-mentioned problems, the first means of the present invention has a lower surface plate part and an upper surface plate part that are rotatably provided, and an upper surface plate part A surface finishing device for a surface plate in a polishing machine suspended from a rotary shaft through a universal joint, which is mounted on a frame via guide rails between upper and lower surface plate parts and in a radial direction of rotation thereof. A movable body that is movably guided, a moving device that moves the movable body along a guide rail, and a cutting tool provided on the movable body, and is inserted and arranged between the upper and lower surface plate portions. The surface finishing device for the surface plate of the polishing machine is provided with a restricting tool that restricts the inclination of the upper surface plate portion with respect to the rotation axis.

In order to solve the above-mentioned problems, the second means of the present invention has a lower surface plate part and an upper surface plate part which are rotatably provided, and the upper surface plate part is via a universal joint. A surface finishing device for a surface plate in a polishing machine suspended by a rotating shaft body, and guided movably between upper and lower surface plate parts on a frame via guide rails and in the radial direction of rotation. A moving body, a moving device for moving the moving body along a guide rail, and a cutting tool provided on the moving body, and the upper surface plate part is fixed to the rotating shaft body. It is a surface finishing device for a surface plate of a polishing machine, which is equipped with a fixing tool.

[0011]

According to each of the above constructions, the upper surface plate portion suspended through the universal joint can be regulated in the degree of freedom of inclination with respect to the axis of rotation by the restraint tool or the fixture. Even with a cutting tool that is movable along the turning radius of the platen, the surfaces of both platens can be easily and reliably finished into a predetermined shape.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIG. In FIG. 1, reference numeral 1 is a double-sided polishing machine for polishing both sides of an object to be polished such as a wafer, and includes a lower surface plate part 2, an upper surface plate part 3, and these surface plate parts 2 and 3, respectively. It is composed of a lower side and an upper side rotation drive section (not shown) for rotating.

The lower surface plate 2 comprises a lower rotary table 4 rotatably provided by a lower rotary drive unit, and a lower surface plate 5 fixed to the upper surface of the lower rotary table 4. In addition, the upper surface plate 3 is provided on the lower surface of the upper rotary table 9 and the upper rotary table 9 which is connected to the rotary shaft body 6 of the upper rotary drive unit through the universal joint 7 and the mounting plate 8. It is composed of a fixed upper platen 10. Reference numeral 11 denotes a sun gear arranged in the center of the lower surface plate portion 2 for rotating a carrier for holding an object to be polished, which is inserted between the upper and lower surface plates 5 and 10.

Next, a surface finishing device (also referred to as a facing device) for the surface plate of the double-sided polishing machine will be described. The surface finishing device 21 includes a pedestal 22 installed on a side portion of the double-sided polishing machine 1, a guide rail 23 arranged on the pedestal 22 and along the turning radii of the surface plates 5 and 10. Slide member 24 on the guide rail 23
A moving body 25 guided through the moving body 25, a cutting tool 26 for surface finishing which is rotatably attached to the tip of the moving body 25 up and down by 180 degrees as shown by an arrow a, and the moving body 25 is guided. A moving device 27 for reciprocating along the rail 23 is provided, and a restricting tool 28 for restricting the degree of freedom of inclination in the vertical plane with respect to the rotation axis of the upper surface plate part 3 is further provided. It is a thing.

The cutting tool 26 is a holder 3 attached to the tip of the moving body 25 so as to be rotatable 180 degrees in the vertical plane.
1, a cutting blade (bite) 32 that is attached to the holder 31 so that the amount of protrusion thereof can be adjusted, and a knob 33 that adjusts the amount of protrusion of the cutting blade 32.

The moving device 27 has one end rotatably supported around a horizontal axis about a support body 41 erected at the end of the pedestal 22 via a bearing 42, and the other end moves. Screw body 43 for being attached to the body 25 side
The rotary screw shaft body 44 screwed into the
4, a driven gear 45 fixed to one end of the motor 4, an electric motor 46 provided on the gantry 22 side, an output shaft portion 46a of the electric motor 46, and a timing belt 47 to the driven gear 45. Drive-side gear 4 connected in interlock
8 and. The rotary screw shaft body 44
For example, a ball screw is used as the
A ball bush is used as 3.

Therefore, by driving the electric motor 46 to rotate the rotary screw shaft body 44, the moving body 25, that is, the cutting tool 26 is freely moved along the surface of each surface plate 5 and 10 and in the radial direction of rotation thereof. Can be moved to.

The restricting tool 28 is supported by a lower support member 51 mounted on the central portion of the lower rotary table 4 and a thrust bearing 52 on the lower support member 51 so as to rotate upward. It is composed of an upper support member 53 that supports the central portion of the table 9. The lower support member 51 is formed in a tubular shape so as to cover the sun gear 11, and the upper support member 53 is also formed in a tubular shape.
3a is surely brought into contact with the surface of the upper rotary table 9, and the upper and lower support members 51, 53 are connected to each other in the vertical direction by connecting bolts 54, but they are allowed to rotate with each other. Has been

Next, the surface finishing work of each surface plate will be described. First, the upper and lower support members 51, 53 are connected to each other with the thrust bearing 52 inserted therebetween and the connecting bolt 54.
After mounting the lower support member 51 on the central portion of the upper surface of the lower rotary table 4 in a state in which they are connected to each other so that they can rotate with each other, the upper rotary table 9 is lowered and the lower surface thereof is supported by the upper support member. If the upper rotary table 9, that is, the upper surface plate 10 is mounted on the flange portion 53 a of the reference numeral 53, the rotational axis of the upper rotary table 9 can be fixed to the lower rotary table 4. That is, the upper surface plate 10 is completely free from the inclination degree of freedom in the vertical plane with respect to the rotation axis of the rotation shaft body 6.

On the side of the polishing machine 1, a pedestal 22
Is installed, and the moving direction of the moving body 25 is set to be the same direction as the radius of gyration of the surface plates 5 and 10. Next, the knob 33 of the cutting tool 26 is rotated to rotate the cutting blade 32.
Is adjusted to a position where the lower surface of the upper surface plate 10 is cut, the moving body 25 is moved to be moved inward or outward in the radial direction, and the upper surface plate 10 is rotated and moved. By slowly moving the body 25 in the radial direction, the surface of the upper surface plate 10 can be easily and accurately finished into a predetermined shape. Moreover, in this case, the surface finish is reproducible.

When the surface of the lower surface plate 5 is cut, the holder 31 of the cutting tool 26 is rotated by 180 degrees and the upper surface of the lower surface plate 5 is adjusted to a position where it is cut, and then the same as above. If the operation is performed, the surface of the lower turn table 5 can be finished into a predetermined shape.

Next, a second embodiment of the present invention will be described with reference to FIG. While the upper surface plate 3 is supported on the lower surface plate 2 side in the first embodiment,
In the second embodiment, the upper surface plate part 3 is supported on the rotary shaft body 6 side via a fixture.

Since the second embodiment is different only in the structure for supporting the upper surface plate part 3, the same parts as those in the first embodiment are designated by the same reference numerals and their description will be omitted. Omit it.

That is, a threaded portion 6a is formed in a portion near the lower end of the rotary shaft body 6, and a lower end surface of the tubular body (fixed body) which can be brought into contact with the upper surface of the mounting plate 8 supporting the upper rotary table 9. One example of a tool) 61 is screwed and held on the male screw portion 6a.

Therefore, by rotating the cylindrical body 61 and lowering it so that the lower end surface of the cylindrical body 61 contacts the upper surface of the upper rotary table 9 (indicated by the arrow b in FIG. 2), the upper surface plate section 3 is formed. Means that the degree of freedom of inclination within the vertical plane with respect to the axis of rotation is lost.

In this state, similarly to the first embodiment, if the upper platen 10 is rotated and the movable body 25 is moved in the radial direction of rotation, the surface of the upper platen 10 can be easily and accurately determined. It can be finished in the shape of.

The surface of the lower platen 5 may be finished in the same manner as in the first embodiment.

[0028]

As described above, according to the structure of the present invention, the degree of freedom of inclination of the upper surface plate portion suspended through the universal joint with respect to the rotational axis thereof is restricted by the restricting tool or the fixing tool. Thus, even with a cutting tool that is movable along the radius of gyration of the surface plate, the surfaces of both surface plates can be easily and reliably finished into a predetermined shape.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing the configuration of a surface finishing device according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the structure of a surface finishing device according to a second embodiment of the present invention.

[Explanation of symbols]

 1 Double-sided polishing machine 2 Lower surface plate part 3 Upper surface plate part 4 Lower rotation table 5 Lower surface plate 6 Rotating shaft body 6a Male screw part 7 Universal joint 9 Lower rotation table 10 Lower surface plate 21 Surface finishing device 22 Stand 23 Guide Rail 25 Moving body 26 Cutting tool 27 Moving device 28 Regulation tool 51 Lower support member 52 Thrust bearing 53 Upper support member 61 Cylindrical body

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshiro Yamashiro 5-3-3, Nishikujo 5-chome, Konohana-ku, Osaka City, Osaka Prefecture Hitachi Shipbuilding Co., Ltd.

Claims (2)

[Claims] 1. A surface plate of a polishing machine having a lower surface plate part and an upper surface plate part which are rotatably provided, and the upper surface plate part is suspended from a rotary shaft through a universal joint. A surface finishing device, in which a movable body is movably guided between the upper and lower surface plate portions and in the radial direction of rotation on a frame via a guide rail, and the movable body is moved along the guide rail. A regulation that is composed of a moving device for moving and a cutting tool provided on the moving body, and is inserted and arranged between the upper and lower surface plate portions, and regulates the inclination with respect to the rotation axis of the upper surface plate portion. A surface finishing device for a surface plate in a polishing machine, which is equipped with a tool. 2. A surface plate of a polishing machine having a lower surface plate portion and an upper surface plate portion that are rotatably provided, and the upper surface plate portion is suspended by a rotating shaft through a universal joint. A surface finishing device, in which a movable body is movably guided between the upper and lower surface plate portions and in the radial direction of rotation on a frame via a guide rail, and the movable body is moved along the guide rail. And a cutting tool provided on the moving body, and a fixture for fixing the upper platen to the rotating shaft body. Board surface finishing device.