JPH0681621B2 - Dental micro drill and manufacturing method thereof - Google Patents

Dental micro drill and manufacturing method thereof

Info

Publication number
JPH0681621B2
JPH0681621B2 JP16238089A JP16238089A JPH0681621B2 JP H0681621 B2 JPH0681621 B2 JP H0681621B2 JP 16238089 A JP16238089 A JP 16238089A JP 16238089 A JP16238089 A JP 16238089A JP H0681621 B2 JPH0681621 B2 JP H0681621B2
Authority
JP
Japan
Prior art keywords
diamond
dental
carbon
microdrill
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16238089A
Other languages
Japanese (ja)
Other versions
JPH0326247A (en
Inventor
肇 北村
玉樹 飯田
俊宏 津森
正嗣 上岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP16238089A priority Critical patent/JPH0681621B2/en
Publication of JPH0326247A publication Critical patent/JPH0326247A/en
Publication of JPH0681621B2 publication Critical patent/JPH0681621B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は歯科用マイクロドリルとその製造方法に関する
ものである。
Description: TECHNICAL FIELD The present invention relates to a dental microdrill and a method for manufacturing the same.

(従来の技術) 従来の歯科用マイクロドリルは硬質金属の表面を凹凸に
したもの、硬質金属に金属又は非金属の炭化物又は酸化
物等の微粒子を研磨剤として接着したもので製作されて
いたが、研磨剤粒子が微細になるに従って、部材表面に
凹凸を付けるのが困難となり、場合によっては、粒子の
角が充分生かされないため、ドリルとしての切れ味が悪
く、しかも耐摩耗性に欠けることが多かった。本発明者
等は先に炭化水素及び水素雰囲気中でマイクロ波を印加
するプラズマ気相沈積法により生成するダイヤモンド膜
及び/又はダイヤモンド状炭素膜を部材に被覆して高性
能の医療用切開、圧入器具を得ることに成功し出願した
が(特開昭63-92345)、歯科用マイクロドリルに応用し
た場合には、上記の諸点で未だ充分満足されるものでは
なかった。
(Prior Art) A conventional dental microdrill has been manufactured with a hard metal having an uneven surface and a hard metal having fine particles such as metal or non-metal carbide or oxide adhered as an abrasive. However, as the abrasive particles become finer, it becomes difficult to make irregularities on the surface of the member, and in some cases the corners of the particles are not fully utilized, resulting in poor sharpness as a drill and often lacking in wear resistance. It was The inventors of the present invention previously coated a member with a diamond film and / or a diamond-like carbon film produced by a plasma vapor deposition method in which a microwave is applied in a hydrocarbon and hydrogen atmosphere to perform high-performance medical incision and press-fitting. Although a successful application for an instrument was filed (Japanese Patent Application Laid-Open No. 63-92345), when it was applied to a dental microdrill, the above-mentioned points were not yet sufficiently satisfied.

(発明が解決しようとする課題) 本発明は前記したような欠点を解決するため、前記出願
の発明を更に改良したもので、より切れ味の良い、微細
部分の切削を可能とした、耐摩耗性のある高性能の歯科
用マイクロドリルを提供するものである。
(Problems to be Solved by the Invention) The present invention is a further improvement of the invention of the above-mentioned application in order to solve the above-mentioned drawbacks. To provide a high performance dental microdrill with

(課題を解決するための手段) 本発明者等は、この課題を解決するために歯科用マイク
ロドリル部材の材質、表面処理方法について鋭意検討し
た結果、本発明に到達した。
(Means for Solving the Problem) The inventors of the present invention have arrived at the present invention as a result of earnestly examining the material and surface treatment method of the dental microdrill member in order to solve the problem.

本発明は、 1.プラズマエッチング処理された部材表面がダイヤモン
ド状炭素の針状及び/又は柱状の結晶で被覆され、かつ
該結晶の間隙が無電解ニッケルメッキで充填されてなる
歯科用マイクロドリル及び 2.部材表面をプラズマエッチング処理した後、炭化水素
及び水素雰囲気中で1〜10GHzのマイクロ波を印加する
プラズマ気相沈積法により、ダイヤモンド状炭素の針状
及び/又は柱状の結晶を析出させた、ついでこの結晶の
間隙に生成している黒鉛をプラズマエッチングで除去
し、さらにこの結晶の間隙を無電解ニッケルメッキで充
填する歯科用マイクロドリルの製造方法を要旨とするも
のである。
BEST MODE FOR CARRYING OUT THE INVENTION 1. A dental microdrill in which the surface of a member that has been plasma-etched is coated with needle-like and / or columnar crystals of diamond-like carbon, and the gaps between the crystals are filled with electroless nickel plating, and 2. After plasma etching the member surface, acicular and / or columnar crystals of diamond-like carbon were deposited by plasma vapor deposition method applying microwave of 1 to 10 GHz in hydrocarbon and hydrogen atmosphere. Then, a method for manufacturing a dental microdrill, in which graphite generated in the crystal gaps is removed by plasma etching and the crystal gaps are filled with electroless nickel plating, is a gist.

以下本発明を詳細に説明する。The present invention will be described in detail below.

先ず、第1の発明である歯科用マイクロドリルについて
説明する。
First, the dental microdrill according to the first invention will be described.

歯科用マイクロドリルの部材としては、Mo、W、Ti等の
金属、これら金属の炭化物(Mo2C,W2C3,Ti2C等)及びセ
ラミックス(Al2O3、ZrO等)が例示されるが、強度およ
び剛性の点から金属の炭化物が好適に使用される。これ
ら部材の少なくとも生体に接触する部分、即ち、刃先部
分の生体に対する切開、圧入抵抗を極力小さくするため
に、先ず、部材の表面をプラズマエッチングにより粗面
とする。この粗さは0.001〜0.1mmの範囲、好ましくは0.
005〜0.05mmが良い。0.001mm以下では細か過ぎ、0.1mm
以上では粗ら過ぎていずれも信頼性に欠けるものとな
る。
Examples of the members of the dental microdrill include metals such as Mo, W and Ti, carbides of these metals (Mo 2 C, W 2 C 3 , Ti 2 C, etc.) and ceramics (Al 2 O 3 , ZrO, etc.). However, a metal carbide is preferably used in terms of strength and rigidity. In order to minimize the incision and press-fit resistance of at least the part of these members that come into contact with the living body, that is, the cutting edge part with respect to the living body, the surface of the member is first roughened by plasma etching. This roughness ranges from 0.001 to 0.1 mm, preferably 0.
005-0.05mm is good. If it is 0.001 mm or less, it is too fine, 0.1 mm
The above results are too rough and unreliable.

次いでプラズマ気相沈積法によって生成するダイヤモン
ド状炭素の針状及び/又は柱状の結晶で被覆する。この
ダイヤモンド状炭素の結晶の長さが50μmより小さいと
切削力について信頼性の乏しいものとなり、500μmを
超えると刃先部分の生体との摩擦抵抗が大きくなるの
で、50μm〜500μmの範囲、好ましくは70μm〜500μ
mの範囲とするのがよい。
Then, it is coated with acicular and / or columnar crystals of diamond-like carbon produced by the plasma vapor deposition method. If the length of this diamond-like carbon crystal is less than 50 μm, the cutting force becomes unreliable, and if it exceeds 500 μm, the frictional resistance between the cutting edge and the living body increases, so the range of 50 μm to 500 μm, preferably 70 μm. ~ 500μ
It is preferable to set it in the range of m.

本発明ではこのダイヤモンド状炭素結晶被覆のみでは、
部材と結晶間の接着力に劣り、又、結晶間の関隙を残し
たままでは柱状結晶の折れおよび研削時の目詰まり等の
不都合があるため、無電解ニッケルメッキを施して、こ
れらの欠点を解決した。この無電解ニッケルメッキの厚
さは上記ダイヤモンド結晶の厚さと同じで良く、そのメ
ッキ部分は結晶の間隙を完全に充填すれば良く、結晶の
上面を全面的に被覆する必要はない。
In the present invention, only this diamond-like carbon crystal coating,
Since the adhesive strength between the member and the crystal is poor, and if there is a gap between the crystals, there are problems such as breakage of columnar crystals and clogging during grinding. Solved. The thickness of the electroless nickel plating may be the same as the thickness of the diamond crystal, and the plated portion may completely fill the gaps between the crystals, and it is not necessary to entirely cover the upper surface of the crystal.

次に第2の発明である歯科用マイクロドリルの製造方法
について説明する。歯科用マイクロドリルを製造するに
は先ず部材の表面をグラインダー、プラズマエッチング
等により前記した範囲の粗さに研磨する。次いで炭化水
素及び水素あるいは必要に応じてキャリヤーガスとして
ヘリウム、アルゴン等の不活性ガスからなる混合ガスを
用い、公知のプラズマ気相沈積法によって、部材上に炭
化水素からダイヤモンド状炭素の針状及び/又は柱状結
晶を析出させる方法で実施される。
Next, a method for manufacturing the dental microdrill according to the second invention will be described. In order to manufacture a dental microdrill, the surface of the member is first ground by a grinder, plasma etching or the like so as to have a roughness within the above range. Then, a mixture gas of hydrocarbon and hydrogen or, if necessary, an inert gas such as helium or argon is used as a carrier gas, and a known plasma vapor deposition method is used to form a needle-shaped diamond-like carbon layer from hydrocarbon on the member. And / or a method of precipitating columnar crystals.

このプラズマ気相沈積法には、高周波、直流、マイクロ
波および金属線の加熱コイルを入れたプラズマ法、イオ
ンビーム蒸着法等が例示されるが、1GHz以上、好ましく
は1〜10GHzのマイクロ波電力を利用するのがよい。ま
ず反応器内にマイクロドリル部材を設置し、この反応器
内に炭化水素と水素又は必要により不活性ガスとの混合
ガスを導入する。ここで使用される炭化水素としてはメ
タン、エタン、プロパン、エチレンなどが例示されるが
メタンが好ましい。炭化水素(A)と水素ガス(B)の
容量割合はA/B=500〜0.001の広範囲で使用出来る。ま
た不活性ガスを使用した場合は、炭化水素(A)と水素
ガス(B)およびと不活性ガス(C)との容量割合はA/
B+C=500〜0.001で、CのBに対する置換率は50容量
%以下であることが好ましい。器内の圧力はプラズマを
安定に維持するために75〜230パスカルの範囲になるよ
うに調整し、次いでこれにマイクロ波電力を印加して系
内にプラズマを発生させると共に、部材の温度が500〜1
300℃になるように調整する。部材温度が500℃以下では
析出したダイヤモンド状炭素の針状、柱状結晶の強度が
不足し、又1300℃を超えると析出したダイヤモンド状炭
素が黒鉛に逆転移する欠点を生ずるので500℃〜1200℃
の範囲とするのが好ましい。この条件により炭化水素が
プラズマ火炎との接触で熱分解されて析出したダイヤモ
ンド状炭素の針状、柱状結晶がその間隙に黒鉛を含んだ
状態で均一に部材表面上に所望の厚さで被着する。次い
でこのダイヤモンド状炭素結晶の間隙に生成している黒
鉛を除去する。このダイヤモンド状炭素結晶で被覆され
た部材を別の反応器内に設置し、水素を導入する。器内
の圧力はプラズマ安定のために5〜55パスカルの範囲に
なるように調整し、ついでこれにマイクロ波電力(13.5
6MHz×50W)を印加して系内にプラズマを発生させ、黒
鉛をエッチングして除去する。水素の代りに空気を入れ
ると不完全なダイヤモンド、黒鉛は酸素と反応してエッ
チングされ、微細な針状及び/又は柱状のダイヤモンド
が残留するため、後のメッキの乗りが悪くなる。さらに
最後の仕上げにこの部材に無電解ニッケルメッキを施
す。無電解ニッケルメッキ浴組成は、従来公知の技術に
よるもので良い。例えば、次亜りん酸ナトリウムを還元
剤とするものが挙げられる。このメッキ浴に部材を80℃
×20分間〜90℃×60分間浸漬すると結晶間に上記工程で
除去された黒鉛等の代りにニッケルが入り込んで針状、
柱状のダイヤモンド状炭素結晶を支え、部材に対して強
固に接着する。
Examples of the plasma vapor deposition method include high-frequency, direct current, microwave and plasma methods in which a heating coil of a metal wire is inserted, an ion beam deposition method, etc., but microwave power of 1 GHz or more, preferably 1 to 10 GHz. It is better to use. First, a microdrill member is installed in the reactor, and a mixed gas of hydrocarbon and hydrogen or, if necessary, an inert gas is introduced into the reactor. Examples of the hydrocarbon used here include methane, ethane, propane and ethylene, but methane is preferable. The volume ratio of hydrocarbon (A) and hydrogen gas (B) can be used in a wide range of A / B = 500 to 0.001. When an inert gas is used, the volume ratio of hydrocarbon (A) to hydrogen gas (B) and to inert gas (C) is A /
It is preferable that B + C = 500 to 0.001 and the substitution ratio of C to B is 50% by volume or less. The pressure in the vessel was adjusted to be in the range of 75 to 230 Pascal to maintain the plasma stable, and then microwave power was applied to this to generate plasma in the system and the temperature of the member was 500 ~ 1
Adjust to 300 ° C. When the member temperature is 500 ° C or lower, the needle-like and columnar crystal strength of the precipitated diamond-like carbon is insufficient, and when it exceeds 1300 ° C, the precipitated diamond-like carbon causes a reverse transformation to graphite, so 500 ° C to 1200 ° C.
The range is preferably Under this condition, the needle-like and columnar crystals of diamond-like carbon deposited by the thermal decomposition of hydrocarbons in contact with the plasma flame are uniformly deposited on the surface of the member with the desired thickness in the state that graphite is contained in the gaps. To do. Next, the graphite formed in the gaps between the diamond-like carbon crystals is removed. The member coated with this diamond-like carbon crystal is placed in another reactor, and hydrogen is introduced. The pressure inside the vessel was adjusted to be in the range of 5 to 55 pascals for plasma stabilization, and then the microwave power (13.5
6MHz x 50W) is applied to generate plasma in the system, and graphite is removed by etching. When air is introduced instead of hydrogen, incomplete diamond and graphite react with oxygen and are etched, and fine needle-like and / or columnar diamond remains, so that the subsequent plating is poor. In addition, electroless nickel plating is applied to this member for the final finishing. The electroless nickel plating bath composition may be based on a conventionally known technique. For example, one using sodium hypophosphite as a reducing agent can be mentioned. 80 ° C for parts in this plating bath
When immersed for 20 minutes to 90 ° C for 60 minutes, nickel enters into the crystal instead of the graphite, etc. removed in the above step, and needle-shaped,
Supports columnar diamond-like carbon crystals and firmly adheres to members.

以下、本発明の具体的実施態様を実施例に挙げて説明す
るが、本発明はこれらに限定されるものではない。例中
の部および%は重量に拠る。
Hereinafter, specific embodiments of the present invention will be described with reference to examples, but the present invention is not limited to these. Parts and percentages in the examples are by weight.

(実施例) 直径0.5mmの円錐状モリブデン棒の表面をプラズマエッ
チングにより表面粗さが0.01mmになるまで研削した後、
これを反応器内に設置し、この反応器内の圧力を5パス
カル程度まで排気した後、ここに5容量%のメタンと95
容量%の水素ガスからなる混合ガスを導入し、ガス流通
下に反応器内の圧力を100パスカルに調整し、この雰囲
気下でマグネトロンから発信したマイクロ波(2.45GH
z)をアイソレーター、パワーモーター、スリースタブ
チューナーを通し、導波管で石英製反応管に導いて、部
材の周囲にプラズマ放電を発生させ、部材が所定の温度
(930℃)になるようにマイクロ波電力(300w)を調整
したところ、部材に長さ150μmのダイヤモンド状炭素
の針状柱状結晶が形成された。ついでこの部材を別の反
応器内に設置し、この反応器内の圧力を5パスカル程度
まで排気したのち、ここに空気を導入し、反応器内の圧
力を20パスカルに調整し、この雰囲気下でマイクロ波電
力(13.56MHz)を印加し、部材の周囲にプラズマ放電を
発生させたところ、ダイヤモンド状炭素結晶の間隙にあ
った黒鉛がエッチングされて除去され、針状及び柱状の
ダイヤモンド状炭素のみで被覆されたものとなった。さ
らにこの部材を無電解ニッケルメッキ液(浴組成:塩化
ニッケル30g/l、次亜りん酸ナトリウム10g/l、クエン酸
ナトリウム10g/l、pH=4〜6)に90℃×20分間浸漬し
たところ、針状及び柱状のダイヤモンド状炭素の間隙が
ニッケルで埋められ針状及び柱状結晶の頭部のみ表面に
現れた形状の歯科用マイクロドリルを得た。次にこのド
リルの切削試験を行った。被削材は5mmの透明のガラス
板で、押し付け荷重を80gとし、ドリルの回転速度は48
万回転で、注水下での研削距離は50秒間に26mmであっ
た。これは従来のダイヤモンド粒子をニッケルメッキで
接着したドリルが18mmなのに比べて優れた研削性を示し
ている。
(Example) After grinding the surface of a conical molybdenum rod having a diameter of 0.5 mm by plasma etching until the surface roughness became 0.01 mm,
This was installed in the reactor, the pressure in the reactor was exhausted to about 5 Pascal, and then 5% by volume of methane and 95
Introduce a mixed gas consisting of hydrogen gas of volume%, adjust the pressure inside the reactor to 100 Pascal under the gas flow, and under this atmosphere, the microwave emitted from the magnetron (2.45GH
z) is passed through an isolator, a power motor and a slush tub tuner, and is guided to a quartz reaction tube by a waveguide to generate plasma discharge around the member, so that the member is heated to a predetermined temperature (930 ° C). When the wave power (300 w) was adjusted, needle-like columnar crystals of diamond-like carbon having a length of 150 μm were formed on the member. Then, install this member in another reactor, exhaust the pressure in this reactor to about 5 Pascal, and then introduce air into it to adjust the pressure in the reactor to 20 Pascal, and under this atmosphere Microwave power (13.56MHz) was applied to generate plasma discharge around the member, and the graphite in the gaps between the diamond-like carbon crystals was etched and removed, leaving only needle-like and columnar diamond-like carbon. It was covered with. Further, this member was immersed in an electroless nickel plating solution (bath composition: nickel chloride 30 g / l, sodium hypophosphite 10 g / l, sodium citrate 10 g / l, pH = 4 to 6) at 90 ° C. for 20 minutes. A dental microdrill having a shape in which the gaps between acicular and columnar diamond-like carbons were filled with nickel and only the heads of acicular and columnar crystals appeared on the surface was obtained. Next, a cutting test of this drill was conducted. The work material is a 5 mm transparent glass plate, the pressing load is 80 g, and the rotation speed of the drill is 48
At 10,000 revolutions, the grinding distance under water injection was 26 mm in 50 seconds. This shows excellent grindability as compared with the conventional 18 mm diameter diamond particle-bonded drill.

(発明の効果) 本発明は拠れば、従来の技術と比較して、極めて優れた
切れ味と微細部分の切削を可能とし、耐摩耗性のある歯
科用マイクロドリルが得られ、医療業界における利用価
値は極めて高い。
(Effects of the Invention) According to the present invention, as compared with the prior art, it is possible to obtain a dental microdrill having extremely excellent sharpness and cutting of a fine portion, and having wear resistance, which is useful in the medical industry. Is extremely high.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 津森 俊宏 茨城県鹿島郡神栖町大字東和田1番地 信 越化学工業株式会社高分子機能性材料研究 所内 (72)発明者 上岡 正嗣 茨城県鹿島郡神栖町大字東和田1番地 信 越化学工業株式会社高分子機能性材料研究 所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Toshihiro Tsumori, Toshihiro Tsumori, Izumi, Kashima-gun, Kamisu-cho 1 Towada, Shin-Etsu Chemical Co., Ltd., Polymer Functional Materials Research Institute (72) Masatsugu Ueoka, Kamisu, Kashima-gun, Ibaraki No. 1 Towada, Oomachi-machi, Shin-Etsu Chemical Co., Ltd., Functional Polymer Research Center

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】プラズマエッチング処理された部材表面が
ダイヤモンド状炭素の針状及び/又は柱状の結晶で被覆
され、かつ該結晶の間隙が無電解ニッケルメッキで充填
されてなる歯科用マイクロドリル。
1. A dental microdrill in which the surface of a member subjected to plasma etching is covered with needle-like and / or columnar crystals of diamond-like carbon, and the gaps between the crystals are filled with electroless nickel plating.
【請求項2】部材表面をプラズマエッチング処理した
後、炭化水素及び水素雰囲気中で1〜10GHzのマイクロ
波を印加するプラズマ気相沈積法により、ダイヤモンド
状炭素の針状及び/又は柱状の結晶を析出させ、ついで
この結晶の間隙に生成している黒鉛をプラズマエッチン
グで除去し、さらにこの結晶の間隙を無電解ニッケルメ
ッキで充填することを特徴とする歯科用マイクロドリル
の製造方法。
2. A needle-like and / or columnar crystal of diamond-like carbon is formed by a plasma vapor deposition method in which a microwave of 1 to 10 GHz is applied in a hydrocarbon and hydrogen atmosphere after plasma-treating the surface of a member. A method for manufacturing a dental microdrill, which comprises depositing, then removing the graphite generated in the crystal gaps by plasma etching, and further filling the crystal gaps with electroless nickel plating.
JP16238089A 1989-06-23 1989-06-23 Dental micro drill and manufacturing method thereof Expired - Lifetime JPH0681621B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16238089A JPH0681621B2 (en) 1989-06-23 1989-06-23 Dental micro drill and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16238089A JPH0681621B2 (en) 1989-06-23 1989-06-23 Dental micro drill and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPH0326247A JPH0326247A (en) 1991-02-04
JPH0681621B2 true JPH0681621B2 (en) 1994-10-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009136775A3 (en) * 2008-05-09 2010-03-04 Kim Daeyuen Pressure responsive drill

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113529050B (en) * 2021-07-05 2022-09-20 云南民族大学 Plasma etching method for polishing diamond film and product thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009136775A3 (en) * 2008-05-09 2010-03-04 Kim Daeyuen Pressure responsive drill

Also Published As

Publication number Publication date
JPH0326247A (en) 1991-02-04

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