JPH0696141B2 - Ultrasonic cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is used in, for example, a cleaning process of electronic equipment, precision equipment, and the like, and ultrasonic waves aiming to improve the cleanliness of air in a cleaning chamber to improve cleaning ability. The present invention relates to a cleaning device.

[Conventional technology]

Conventionally, in the manufacturing process of electronic equipment and precision equipment, there is a cleaning process for cleaning various parts. In this process, the work is immersed in a cleaning tank filled with various cleaning liquids and the Impurities are liberated from the surface of the work by the cavitation phenomenon generated by the vibration of the sound waves to perform cleaning.

In the above-mentioned cleaning process, a large number of cleaning tanks filled with an organic solvent are juxtaposed in a cleaning chamber having a closed structure, and an ultrasonic cleaning device which realizes a fully automatic cleaning by using a carrier and a conveying means is used in this chamber. There is.

[Problems to be Solved by the Invention]

The transfer means in the ultrasonic cleaning device is for vertically moving the carrier and the work inside and outside the cleaning tank, and for horizontally transferring between the cleaning tanks in sequence, and is enlarged to realize a complicated operation. Is located directly above the cleaning tank.

By the way, semiconductor components are required to be cleaned in an ultra-clean air atmosphere in the cleaning process due to the recent tendency toward VLSI. However, in the current apparatus in which a large-sized conveying means is arranged directly above the cleaning tank, the movable part which acts as a source of dust such as fine metal scraps is located directly above the cleaning tank. The dust as described above floats in the cleaning chamber to lower the degree of air cleaning, or falls into the cleaning tank to increase the content of impurities in the cleaning liquid. As a result, there are problems that dust adheres to the work when the carrier is transferred in the cleaning chamber, and impurities in the liquid adhere to the work when the carrier is pulled up from the cleaning tank, and the cleaning effect is significantly impaired.

[Means for Solving the Problems]

The present invention is a cleaning room (1) in which a large number of cleaning tanks (2) (2) are arranged in series and a HEPA filter (3) is arranged on the ceiling.
An inverted U-shaped swing arm (4) having a tray (5) fixed to the lower end thereof, and guide rods (23) (23) vertically provided corresponding to the cleaning tanks (2) (2). A slide member (24) (25) which is slidably attached to the first hook member (36) and the second hook member (37), and the swing arm (4) is vertically installed.
A pair of two horizontally long, vertically movably arranged
Lower lift bar (29) (30) and above / lower lift bar (29)
A plate that is laterally slidably disposed on the (30) and has an upper hook member (34) and a lower hook member (35) fixedly engaged with the first hook member (36) or the second hook member (37). The swing arm (4) including the slide members (43) and (44) connected together by the member (45) is used as the cleaning tank (2).
(2) A slide member (43) integrally connected by an elevating mechanism (6) for moving up and down inside and outside, and a plate member (45) to which the upper hook member (34) and the lower hook member (35) are fixed. ) (44), a clutch mechanism (8) for switching the height position at which the swing arm (4) is stopped, and the washing tanks (2) (2) ... Above the row and on the washing machine (2). (2) ... A long base (47) arranged so as to be capable of reciprocating horizontally at a constant pitch along the row, and each cleaning tank (2) (2) on the base (47). ... and a plurality of pairs of slide members (51) (51) which are laterally laid so as to be able to approach and separate from each other, and arranged on the slide members (51) (51) of each pair. Washing tank (2) (2) ... A pair of two arm members (53a) (53a), (53b) (53b) extending upward
, The first and second connecting members (54) (55) in which the slide members (51) (51) are connected to each other on both sides at a constant pitch. Two connecting members (54)
Drive means (56) for reciprocating the (55) in opposite directions by a fixed pitch, and each pair of arm members (53a) (53).
a), (53b) and (53b) are brought close to and separated from each other to hold and open the carrier (7), and the base (47) is reciprocally moved at a constant pitch to move the carrier (7) to each cleaning tank (2) ( 2) ...
The above-mentioned problems are solved by providing an ultrasonic cleaning device characterized by comprising a traverse mechanism (9) which is sequentially fed.

[Action]

The swing arm lowers the carrier into the cleaning tank,
The carrier is lifted from the cleaning tank, and the carrier is horizontally transferred by the traverse mechanism. Also, the height position at which the swing arm is stopped differs between when the carrier is horizontally transferred over a high bulkhead and when it is horizontally transferred at the same height. Done.

In addition, the transfer means has a structure in which the swing arm and the traverse mechanism are divided, and in particular, most of the movable parts of the traverse mechanism are arranged on the side of the cleaning tank, and the movable parts arranged immediately above the cleaning tank are as much as possible. Reduce. Then, a HEPA filter is placed on the ceiling, which is a space above the room, and clean air is downflowed into the washing room.

〔Example〕

Embodiments of an ultrasonic cleaning apparatus according to the present invention are shown in FIGS.
Description will be given with reference to the drawings.

1 to 3 are a front view and a plan view of an ultrasonic cleaning device.
A side view is shown. In the figure, (1) is a hermetically sealed cleaning chamber, (2), (2) ... Are cleaning tanks arranged in series,
(3) (3) ... are HEPA filters placed on the ceiling.
(4) is an inverted U-shaped swing arm, (5) is a tray attached to the lower end of the swing arm (4), (6) is a lifting mechanism for moving the swing arm (4) up and down, (7) is It is a carrier that accommodates a large number of works (not shown). (8) is a clutch mechanism for switching the height position for stopping the swinging arm (4), and (9) is a traverse mechanism for holding the carrier (7) and horizontally transferring it.

Carry-in / carry-out conveyors (10) (11) to the cleaning room (1)
The carrier (7) is taken in and out via the. (12) (12) ...
Is an exhaust duct, (13) is a water separator, (14) is a distillation / regeneration device, (15) is a cooling water production device, (16) is a pure water device, and (1)
7) is a large water separator. Partition wall (1
8) (18)… Inside the room surrounded by
Clean air is down-flowed through the A filter (3) (3), so that the inside of this room is always kept at a positive pressure to prevent unnecessary outside air from entering and maintain a high air cleanliness inside the room. ing.

Various cleaning liquids (19) such as organic solvents are stored in the cleaning tanks (2) (2), and since it is dangerous that these cleaning liquids (19) vaporize and flow out, they are surrounded by a high side wall (2a). Further, partition walls (2b) (2b) ... Are erected between the adjacent cleaning tanks (2) and (2) that store different types of cleaning liquids to prevent mixing of the cleaning liquids. Corresponding to the cleaning tanks (2), (2), ..., 20 (20) ... are jet means arranged in the upper side wall (2a) of the cleaning tank (2). Improves the cleaning effect by washing off the adhered dust etc. Numerals (21), (21) ... Are cooling pipes of multiple pipes arranged in the side wall (2a) further above the jet means (20), and cool the vaporized cleaning liquid to liquefy it. (22) (22) ... are ultrasonic vibration sources arranged at the bottom of the cleaning tank (2), which generate a cavitation phenomenon due to ultrasonic vibrations in the liquid.

The swing arm (4) is formed by bending one rod into an inverted U-shape. The tray (5) is fixed to one lower end and the other end is connected to the lifting mechanism (6). is there.

As shown in FIG. 4, the tray (5) is formed by forming recesses (5b) (5b) ... at four corners of a rectangular frame body (5a). As shown in FIG. A hook (7c) formed by bending a bar with a net (7b) fixed to the bottom of a rectangular frame body (7a).
Carrier (7) with (7c) provided on both sides of the frame body (7a)
The four corners of the bottom of the carrier are engaged with the recesses (5b) (5b) to prevent the carrier (7) from being displaced on the tray (5),
Place the carrier (7) in a stable condition.

The lifting mechanism (6) will be described below with reference to FIGS. In the lifting mechanism (6) shown in the figure, (23)
(23) ... carries in and out conveyors (1) along with each cleaning tank (2)
Corresponding to 0) (11), 2 on the back side through the partition wall (18)
Guide rods hung vertically in pairs, (24) (24) (25)
Reference numeral (25) is a slide member slidably mounted on the guide rods (23) and (23), and the two members are paired vertically. (26)
(27) is a slide plate (24) or (25) connecting and integrating them together, and is a lower plate member, which is on the cleaning tank side, and the lower plate members (26) and (27) are attached to other parts of the swing arm (4). Connect and integrate at the end. (28), (28) ... are rollers fixed to the lower plate material (26), and (29) and (30) are sliding members (32) on guide rods (31) and (31) suspended on both sides of the cleaning chamber (1). ) (32)
A pair of upper and lower elevating bars slidably mounted via ... Is moved up and down by a drive source (not shown) connected via chains (33) (33). (34) (34) ... are upper hook members fixed to the upper lifting bar (29), (35) (35)
... is a hook-shaped lower hook member further extended and fixed to the lower lift bar (30), and (36) is the upper plate member (26).
A first hook member (37) fixed to the upper plate member (26) and engaged with the upper hook member (34).
It is a second hook member that engages with the lower hook member (35). (38) is a swinging mechanism, and eccentric cams (40) (40) ... Are attached to the rotating shaft (39) at a constant pitch. The rotating shaft (39) with the roller (28) in contact with the eccentric cam (40).
When is rotated, the swing arm (4) moves up and down with a constant stroke.

In addition, the swing arm (4) has a corresponding conveyor (10).
The pattern of the height position to be stopped differs depending on (11) and the washing tank (2). At the stop position of the swing arm (4), there are a lowermost part in the cleaning liquid, an uppermost part further above the side wall (2a), a lowermost part and an uppermost part, and an intermediate part. There are a moving pattern, a reciprocating pattern between the lowermost part and the middle part, and a pattern in which the reciprocating motion between the lowermost part and the uppermost part and the reciprocating motion between the lowermost part and the intermediate part are switched. The pattern is realized by the engagement of the upper hook member (34) and the first hook member (36) as shown in FIGS. 5 and 6. The pattern is realized by the engagement of the lower hook member (35) and the second hook member (37) as shown in FIGS. 5 and 7. The pattern is
As shown in FIGS. 5 and 8, the pattern is switched from pattern to pattern by the clutch mechanism (8). The pattern is switched from pattern to pattern by a clutch mechanism (8), as shown in FIGS. 5 and 9.

The clutch mechanism (8) will be described below with reference to FIG. 5, FIG. 8, FIG. 9 and FIG. In the clutch mechanism (8) shown in the figure, (41) and (42) are upper and lower lifting bars (2
9) Guide rods arranged in each of (30), (43) (4
4) is a slidable slide member mounted on the guide rods (41) (42), and (45) (45) is a slide member (43).
A plate material that connects (44) together and integrates it.
9) Secure the same hook member as the upper hook member (34). Reference numeral (46) is a connecting member for connecting the plate members (45) and (45) to each other, and the connecting members (46) simultaneously switch the clutch mechanisms (8) (8). Fig. 5,
The left side of the slide members (43) (44) is shown, in which the upper hook member (34) and the first hook member (3) are shown.
By engaging with 6), reciprocating motion between the lowermost part and the uppermost part is realized. In addition, by engaging the lower hook member (34) and the second hook member (36), reciprocation between the lowermost portion and the intermediate portion is realized. FIG. 10 shows a state in which the slide member (34) has been laterally moved to the right, and by engaging the lower hook member (35) and the second hook member (37), the lowermost part and the intermediate part are shown. The reciprocating motion between the lowermost part and the uppermost part is realized by the engagement between the upper hook member (34) and the first hook member (36).

The traverse mechanism (9) will be described below with reference to FIGS. 11 to 13. In the traverse mechanism (9) shown in the figure, (47) is a long base, and is horizontally moved via two guide rods (48) (48) arranged side by side through sliders (49) (49). Arranged freely. (50) and (50) are two guide rods horizontally mounted on the base (47), (51) (51) ... are a large number of slide members mounted on the guide rods (50) and (50), ( 52) (52) ... is a pair of slide members (51)
The plate members (53a), (53a), etc., fixed on the (51) are a pair of two arm members extending straight on the cleaning tank (2), and the hooks (7c) of the carrier (7) at the uppermost part. Hold (7c).
(53b) (53b) are a pair of arm members that are bent and extend above the cleaning tank (2), and hold the hooking portions (7c) (7c) of the carrier (7) at the intermediate portion. Reference numerals (54) and (55) are first and second connection members for connecting one slide member (51) and (51) at a fixed pitch and sliding them in synchronization, and (56) is the first and second connection members. A motor (57) that is a drive means for moving the members (54) (55) in opposite directions and is capable of forward and reverse rotation as a drive source.
And a pinion (58) mounted on the output shaft of the motor (57)
And a pair of slide members (51) (51) connected by the first and second connecting members (54) (55) to one of the groups via brackets (59) (59). (58) and racks (60) and (60) that mesh with each other. Therefore, the respective slide members (51) (51) ... Group move in opposite directions by the forward and reverse rotation of the motor (57), and the adjacent arm members (53a) (53a) or (53b) (53b) come close to each other, Separation takes place. The carrier (7) is held at the time of approaching and the carrier (7) is opened at the time of separation.

As shown in FIG. 11, the traverse mechanism (9) includes a base (47) with arm members (53a) (53a) (53b) (53b) held in close proximity to each other and holding a carrier (7). The carrier (7) is horizontally moved to sequentially feed the cleaning tanks (2). Also,
As shown in Fig. 12, the arm members (53a) (53a) (53b) (53
The carrier (7) is opened by separating b), and the carrier (7) is lowered into the cleaning tank (2) by the swing arm (4).

Next, an example of the operation of the ultrasonic cleaning device (1) having the above structure will be described below with reference to FIGS. 14 to 21. FIG. 14 shows a swing arm (4) corresponding to each washing tank (2) (2) ... for swinging the carrier (7) placed on the tray (5) up and down in the wash fluid. (4) ... is shown at the bottom, and the swinging arms (4) and (4) corresponding to both conveyors (10) and (11) are shown in a state in which they are stopped in the middle, and the arm members (53a) (53) are shown.
a) (53b) (53b) ... are open. FIG. 15 shows the time when the carrier (7) is pulled up, and the carrier (7) which traverses the side wall (2a) or the partition (2b) and laterally traverses it swings the swinging arm to the uppermost part and simply laterally traverses it. The carrier (7) stops the swing arm (4) in the middle. Then, as shown in FIG. 16, the arm members (53a) (53a) (53b) (53b) ...
To hold the carrier (7). Then, as shown in FIG. 17, the swing arms (4) (4) ... Are once lowered. Next, as shown in FIG. 18, carriers (7) (7)
... is fed horizontally. Then, as shown in FIG. 19, the swinging arms (4) (4) ... Are lifted to place the carriers (7) (7) ... on the trays (5) (5). At this time, those having different height positions for stopping the swing arm (4) are simultaneously switched by the clutch mechanism. Then, as shown in FIG. 20, the arm members (53a) (5
3a) (53b) (53b) ... open and carrier (7) (7) ...
Open up. Then, as shown in FIG. 21, the swinging arms (4) (4) ... Are lowered to swing the carriers (7) (7). By repeating the operations shown in FIGS. 14 to 21, the carriers (7), (7) are sequentially transferred from the carry-in conveyor (10) to the cleaning tanks (2), (2), ..., And the carry-out conveyor (11). Go away.

〔The invention's effect〕

According to the ultrasonic cleaning apparatus of the present invention, the carrier conveying means has a structure in which the swing arm directly connected to the elevating mechanism and the traverse mechanism are divided to reduce the air cleanliness in the cleaning chamber or to remove impurities in the cleaning liquid. Minimize the number of moving parts that act as a dust source for increasing the concentration just above the cleaning tank. Furthermore, a HEPA filter is installed on the ceiling, which is a space above the cleaning tank, and clean air is downflowed into the cleaning chamber. Therefore, while maintaining a high air cleanliness in the cleaning chamber, the cleaning liquid can also exert an efficient cleaning effect, and it is possible to provide an apparatus having a high cleaning ability capable of significantly improving the cleanliness of the object to be cleaned. it can.

[Brief description of drawings]

1 to 3 are a schematic front view, a plan view and a side view of an ultrasonic cleaning apparatus according to the present invention, FIG. 4 is a perspective view of a tray and a carrier, and FIGS. 5 and 10 are lifting mechanisms and clutches. The rear view of the main part of the mechanism, FIGS. 6 to 9 are AA of FIG.
Line, B-B line, C-C line, D-D line arrow view, FIG. 11 and FIG. 12 are plan views of essential parts of the traverse mechanism, FIG. 13 is a side view of FIG. 11, and FIG. 21 to 21 are schematic front views in each state for explaining the operation of the device of the present invention. (1) ... Washing room, (2) ... Washing tank, (3) ... HEPA filter, (4) ... Swing arm, (5) ... Tray, (6) ... Lifting mechanism, (7) ) ... Carrier, (8) ... Clutch mechanism, (9) ... Traverse mechanism.

Claims (1)

[Claims] 1. A large number of cleaning tanks are arranged side by side in series and HEPA is installed on the ceiling.
A washing chamber in which a filter is arranged, an inverted U-shaped swinging arm having a tray fixed to the lower end, and a guide rod vertically installed corresponding to the washing tank are slidably attached to a first hook member. A slide member to which the second hook member is fixed and a swing arm is provided vertically, a pair of vertically elongated vertically-movable upper and lower lifting bars, and the above-mentioned upper and lower bars. From a slide member which is disposed on the lower elevating bar so as to be slidable laterally and which is engaged with the first hook member or the second hook member and which is integrally connected by a plate member to which the lower hook member is fixed. The above-mentioned rocking arm is moved up and down inside and outside the cleaning tank, and the rocking arm is stopped by a slide member which is integrally connected by a plate member to which the upper hook member and the lower hook member are fixed. A clutch mechanism that switches the height position and the above washing On the upper side of the tank row, and along the cleaning tank row, a long base arranged so as to be capable of reciprocating in the horizontal direction at a constant pitch, and corresponding to each cleaning tank on the base, In addition, a large number of pairs of slide members that are laterally laid so as to be able to approach and separate from each other, a pair of two arm members extending above the cleaning tank disposed on the slide members of each pair, and each slide member described above. A first and a second connecting member, which are connected to each other on both sides at a constant pitch, and a drive means for reciprocating the first and second connecting members in opposite directions with a constant pitch. And a traverse mechanism that holds and releases the carrier by moving the pair of arm members close to and away from each other and reciprocally moves the base table at a constant pitch to sequentially feed the carrier to each cleaning tank. Characteristic ultrasonic cleaning device.