JPH0697498B2 - Thin film type magnetic recording medium - Google Patents

Thin film type magnetic recording medium

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Publication number
JPH0697498B2
JPH0697498B2 JP20919085A JP20919085A JPH0697498B2 JP H0697498 B2 JPH0697498 B2 JP H0697498B2 JP 20919085 A JP20919085 A JP 20919085A JP 20919085 A JP20919085 A JP 20919085A JP H0697498 B2 JPH0697498 B2 JP H0697498B2
Authority
JP
Japan
Prior art keywords
thin film
film layer
magnetic
tensile strength
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20919085A
Other languages
Japanese (ja)
Other versions
JPS6267721A (en
Inventor
秀樹 ▲吉▼田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20919085A priority Critical patent/JPH0697498B2/en
Publication of JPS6267721A publication Critical patent/JPS6267721A/en
Publication of JPH0697498B2 publication Critical patent/JPH0697498B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は保存環境による寸法変化を安定させた薄膜型磁
気記録媒体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic recording medium in which dimensional changes due to storage environment are stabilized.

従来の技術 高密度磁気記録の発達につれ薄膜型磁気記録媒体が実用
化されつつあるが、これらはアルミニウム等を基板とす
るハードディスクと、高分子材料を基板とするフロッピ
ーディスクや磁気テープに大別される。このうち高分子
材料を基板として用いた場合、高分子材料の収縮特性に
よって薄膜型磁気記録媒体が変型することがある。その
うち最も問題となるのはカールの問題であり、薄膜層形
成時の熱りれき等により基板である高分子材料と薄膜層
との間に寸法誤差を生じ、この寸法差によってカールを
生じる。このようなカールを生じると、磁気記録媒体と
磁気ヘッドの安定な接触が困難となり、安定な記録再生
特性が得られなくなる。
2. Description of the Related Art With the development of high-density magnetic recording, thin-film magnetic recording media are being put to practical use, but they are roughly classified into hard disks using aluminum as a substrate and floppy disks and magnetic tapes using a polymer material as a substrate. It When a polymer material is used as the substrate, the thin film magnetic recording medium may be deformed due to the shrinkage characteristics of the polymer material. The most problematic one of them is the problem of curling, and a dimensional error occurs between the thin film layer and the polymer material that is the substrate due to hot flashes and the like when forming the thin film layer, and this dimensional difference causes curling. When such a curl occurs, stable contact between the magnetic recording medium and the magnetic head becomes difficult, and stable recording / reproducing characteristics cannot be obtained.

寸法差によるカールの問題は2つの要素を含んでおり、
1つは不可逆的な変化であり、もう1つは可逆的な変化
である。このうち、不可逆的な変化は常温常湿付近のカ
ールと考えることができ、不可逆的な変化については薄
膜層の製造条件や高分子基板の熱収縮特性を調整するこ
とにより平坦化することが可能であるが、もう一方の可
逆的な変化は基板となる高分子材料の温湿度環境での変
化によるバイメタル効果による変化である。
The problem of curl due to dimensional difference involves two factors,
One is irreversible change and the other is reversible change. Of these, irreversible changes can be considered as curls near room temperature and normal humidity, and irreversible changes can be flattened by adjusting the manufacturing conditions of the thin film layer and the heat shrinkage characteristics of the polymer substrate. However, the other reversible change is the change due to the bimetal effect due to the change in the temperature / humidity environment of the polymer material serving as the substrate.

このバイメタル的な効果は高分子材料を用いる以上極め
て重要な問題点となるが、この問題を避ける為に提案さ
れたのが、第3図に示す様に高分子材料の基板の両側に
薄膜層を形成する方法である。
This bimetal effect is a very important problem as long as a polymer material is used. To avoid this problem, a thin film layer on both sides of the polymer material substrate was proposed as shown in FIG. Is a method of forming.

第3図は従来例を示す断面図であり、6は高分子材料で
形成された高分子基板、7は磁性薄膜層、8は薄膜層で
ある。第3図に示す様に磁性薄膜層7と薄膜層8が高分
子基板6の両側に存在することにより、高分子基板6が
膨張、収縮を生じても磁気記録媒体全体としてのカール
は生じない構造となった。
FIG. 3 is a sectional view showing a conventional example, 6 is a polymer substrate formed of a polymer material, 7 is a magnetic thin film layer, and 8 is a thin film layer. Since the magnetic thin film layer 7 and the thin film layer 8 are present on both sides of the polymer substrate 6 as shown in FIG. 3, even if the polymer substrate 6 expands or contracts, the curl of the entire magnetic recording medium does not occur. It became a structure.

発明が解決しようとする問題点 しかしながら、高分子材料の収縮特性によって、カール
と並んで重要な問題は磁気記録媒体全体が伸び縮みする
ことによって生じるスキュー歪である。このスキュー歪
はカールの場合とやや異なり、高分子材料を使ってもそ
の高分子材料に十分な熱りれき特性を与えれば、高分子
材料は変形しない。故に理想的には高分子材料の熱りれ
き特性を十分に制御することにより解決できる問題と言
える。しかし現実には高分子材料が一度スキュー歪が生
じないような熱りれきを受けても、その後薄膜層形成時
に別の熱りれきを受けることによって大きなスキュー歪
を生じる様になってしまう。具体的には、前述の第3図
の様に高分子基板材料の両側に薄膜層を持つ磁気記録媒
体の場合、少なくとも2回の熱りれきを受けてしまい、
特に両側に薄膜層を形成する場合の薄膜層形成時は薄膜
層の形成時の熱りれきが大きく、結果として大きなスキ
ュー歪を安定化させるのが難しい。なぜならば、片側に
薄膜層を形成する場合の薄膜層形形成時は高分子材料に
よる基板の片側だけに薄膜層を形成しているからもう片
方の側の表面は高分子材料であり、冷却した金属等に接
触させると、(1)高分子材料の変形により真実接触面
積が大きくなり、(2)高分子材料と冷却した金属は高
分子材料の電気絶縁性により静電的な力により極めて強
く密着し、(3)高分子材料を直接的に十分に冷却する
ことが可能である。これに対し両側に薄膜層を形成する
場合の薄膜層形成時には、形成しつつある薄膜層の反対
側には既に薄膜層が形成されており、既に形成された薄
膜層を通して冷却する場合、(1)薄膜層は変形しにく
いので真実接触面積が小さく、(2)薄膜層は高分子材
料の様な高い電気絶縁性を持たないので静電的な力によ
り密着せず、(3)高分子材料を薄膜層を通し間接的に
冷却するので、片側に薄膜層を形成する場合の熱りれき
より大きな熱りれきを受けることが多い。
Problems to be Solved by the Invention However, due to the shrinkage property of the polymer material, a skew distortion caused by the expansion and contraction of the entire magnetic recording medium is an important problem along with the curl. This skew distortion is slightly different from the case of curling, and even if a polymer material is used, if the polymer material is provided with sufficient heat-shrinking characteristics, the polymer material does not deform. Therefore, ideally, it can be said that the problem can be solved by adequately controlling the heat-creep characteristics of the polymer material. However, in reality, even if the polymer material is once subjected to heat rubble such that skew distortion does not occur, a large skew strain will be generated by subsequently receiving another heat rubble when forming the thin film layer. Specifically, in the case of a magnetic recording medium having thin film layers on both sides of a polymer substrate material as shown in FIG.
In particular, when thin film layers are formed on both sides, a large amount of heat leakage occurs when the thin film layers are formed, and as a result, it is difficult to stabilize a large skew strain. Because when forming a thin film layer when forming a thin film layer on one side, the thin film layer is formed on only one side of the substrate made of a polymeric material, so the surface on the other side is a polymeric material and is cooled. When brought into contact with metal, etc., (1) the true contact area increases due to the deformation of the polymeric material, and (2) the polymeric material and the cooled metal are extremely strong due to the electrostatic force due to the electrical insulation of the polymeric material. It is possible to closely adhere and (3) the polymer material to be directly and sufficiently cooled. On the other hand, when forming a thin film layer when forming thin film layers on both sides, a thin film layer has already been formed on the opposite side of the thin film layer that is being formed, and when cooling through the already formed thin film layer, (1 ) Since the thin film layer is difficult to deform, the real contact area is small. (2) Since the thin film layer does not have high electrical insulation like polymer materials, it does not adhere due to electrostatic force, and (3) polymer material Since it is indirectly cooled through the thin film layer, it often receives a larger amount of heat speck than that when forming a thin film layer on one side.

このように大きな熱りれきを磁気記録媒体の製造工程中
で受けなければならないので、薄膜型磁気記録媒体では
一般にスキュー歪が問題となるが、第3図の様にカール
の安定化を考慮した構成の場合は、さらに大きな熱りれ
きを受けスキュー歪を安定化させるのが難しい。
Since such a large amount of hot dust must be received during the manufacturing process of the magnetic recording medium, skew distortion is generally a problem in the thin film magnetic recording medium, but as shown in FIG. 3, the curl stabilization is taken into consideration. In the case of the configuration, it is difficult to stabilize the skew distortion by receiving even greater heat dust.

本発明は、高分子材料を基板とする薄膜型磁気記録媒体
において、従来、製造工程中における熱りれきによりス
キュー歪の安定化が極めて困難で、寸法変化を生じやす
かったという問題点を解決しようとするものである。
The present invention solves the problem that, in a thin film magnetic recording medium using a polymer material as a substrate, it has been extremely difficult to stabilize the skew distortion due to hot rippling during the manufacturing process, and is likely to cause a dimensional change. It is what

問題点を解決するための手段 本発明においては前記の様な問題点を解決するため、高
分子材料による基板の両側に薄膜層を有した薄膜型磁気
記録媒体において、全厚の引っ張り強度に対し薄膜層の
引っ張り強度を30%以上であることを特徴とするもので
ある。
Means for Solving the Problems In order to solve the above problems in the present invention, in a thin film magnetic recording medium having a thin film layer on both sides of a substrate made of a polymer material, the tensile strength against the total thickness is The tensile strength of the thin film layer is 30% or more.

作用 本発明においては、高分子基板の両側に薄膜層を有した
薄膜型磁気記録媒体において、全厚の引っ張り強度に対
し薄膜層の引っ張り強度を30%以上とし、高分子材料の
引っ張り強度を70%以下とすることによって、高分子材
料による基板に内部応力が生じても薄膜層の強度により
高分子材料による基板の変形を押えて磁気記録媒体全体
としての寸法変化を改善し、スキュー歪を改善するもの
である。
Action In the present invention, in a thin film magnetic recording medium having thin film layers on both sides of a polymer substrate, the tensile strength of the thin film layer is 30% or more with respect to the tensile strength of the entire thickness, and the tensile strength of the polymer material is 70% or more. % Or less, even if internal stress occurs in the substrate made of the polymer material, the deformation of the substrate made by the polymer material is suppressed by the strength of the thin film layer, and the dimensional change of the magnetic recording medium as a whole is improved and the skew distortion is improved. To do.

実 施 例 本発明による薄膜型磁気記録媒体の構成の一実施例の断
面図を第1図に示す。第1図において、1は高分子材料
から成る高分子基板、2は磁性層側下地層、3は磁性薄
膜層、4は第1薄膜層、5は第2薄膜層である。
Example FIG. 1 is a sectional view showing an example of the structure of a thin film magnetic recording medium according to the present invention. In FIG. 1, 1 is a polymer substrate made of a polymer material, 2 is a magnetic layer side underlayer, 3 is a magnetic thin film layer, 4 is a first thin film layer, and 5 is a second thin film layer.

第1図において、磁性面側の薄膜層は磁性層側下地層2
と磁性薄膜層3の2層から形成されており、磁性面と反
対側は2層の薄膜層4,5から形成されているが、ここで
各々2層としたのは本発明の実施例の一例を示しただけ
であり、3層、4層とさらに多層にすることにより容易
にスキュー歪の改善をすることができ、或いは逆に1層
であっても基板や薄膜層の製造条件を十分に検討するこ
とによって本発明の意義は達せられるものである。
In FIG. 1, the thin film layer on the magnetic surface side is the underlayer 2 on the magnetic layer side.
And the magnetic thin film layer 3 on the opposite side to the magnetic surface. Two thin film layers 4 and 5 are formed on the side opposite to the magnetic surface. Only one example is shown, and the skew distortion can be easily improved by further increasing the number of layers to 3 or 4, or conversely, even if only 1 layer, the manufacturing conditions of the substrate and the thin film layer are sufficient. The significance of the present invention can be achieved by examining the above.

第2図において、高分子材料による基板4はポリエチレ
ン、ポリスチレン、ポリアミド、ポリイミド、塩化ビニ
ール等の従来知られた各種高分子材料から適宜撰択さ
れ、磁性薄膜層はCoCr,CoNiO,CoO,CoP,γ−Fe2O3,Fe3O4
等の従来知られた各種磁性材料から適宜選択され、磁性
層側下地層2,薄膜層4及び5は各種金属及びその酸化
物、窒化物等、一般に薄膜を形成する材料の中から広く
選ぶことができる。磁性薄膜層3,磁性層側下地層2,薄膜
層4及び5の形成方法は、真空蒸着法、スパッタ法、イ
オンプレーティング法、メッキ法等、従来知られた各種
の薄膜製造法によるものである。
In FIG. 2, the substrate 4 made of a polymer material is appropriately selected from conventionally known polymer materials such as polyethylene, polystyrene, polyamide, polyimide and vinyl chloride, and the magnetic thin film layer is made of CoCr, CoNiO, CoO, CoP, γ-Fe 2 O 3 , Fe 3 O 4
The magnetic layer-side underlayer 2, the thin film layers 4 and 5 are selected from various conventionally known magnetic materials as appropriate, and various metals and their oxides, nitrides, etc. can be widely selected from materials that generally form a thin film. You can The magnetic thin film layer 3, the magnetic layer side underlayer 2, and the thin film layers 4 and 5 are formed by various conventionally known thin film manufacturing methods such as a vacuum deposition method, a sputtering method, an ion plating method and a plating method. is there.

以下、本発明の意義について、いくつかの具体例につい
てその効果を説明する。
The effect of the present invention will be described below with respect to some specific examples.

(実施例1) 基板として厚み12μmのポリエチレンテレフタレートを
用いCoNi(20wt%)を5×10-3Torrの酸素雰囲気中で12
00Åの厚みに蒸着した。次に磁性面と反対の側に8×10
-3Torrの酸素雰囲気中でMgの1回につき1,000Åずつ蒸
着し、Mgを蒸着しなかったサンプルA,1回蒸着したサン
プルB,2回蒸着したサンプルC,3回蒸着したサンプルD,4
回蒸着したサンプルE,5回蒸着したサンプルFを得て、
これらをもとに8ミリ幅の磁気テープを作成した。この
磁気テープの60℃,90%,100H保存でのスキュー歪を回転
ヘッドビデオテープレコーダー(VTR)によってNTSC信
号を用いて評価した。又、磁気テープの引っ張り強度は
引っ張り試験機による引っ張り速度0.05%/secで0.2%
変形をおこす時の力をもとに計算し、薄膜層の引っ張り
強度は全厚の引っ張り強度と、エッチングにより薄膜層
を除去した後の基板単位での引っ張り強度の差から求め
た。これらの評価結果を第1表にまとめる。
(Example 1) 12 μm thick polyethylene terephthalate was used as a substrate, CoNi (20 wt%) was used in an oxygen atmosphere of 5 × 10 −3 Torr.
It was vapor-deposited to a thickness of 00Å. Next, 8 × 10 on the side opposite to the magnetic surface
In the oxygen atmosphere of -3 Torr, Mg was vapor-deposited at a rate of 1,000Å each time, and sample A was not vapor-deposited, sample B was deposited once, sample C was deposited twice, sample D was deposited three times,
Obtained sample E that was vapor-deposited twice and sample F that was vapor-deposited 5 times,
Based on these, an 8 mm wide magnetic tape was prepared. Skew distortion of this magnetic tape at 60 ℃, 90%, 100H storage was evaluated using NTSC signal by a rotary head video tape recorder (VTR). The tensile strength of the magnetic tape is 0.2% at a pulling speed of 0.05% / sec using a tensile tester.
The tensile strength of the thin film layer was calculated from the tensile strength of the entire thickness and the difference between the tensile strength of each substrate after the thin film layer was removed by etching. The results of these evaluations are summarized in Table 1.

第1表においてスキュー歪はNTSC信号の再生信号のズレ
時間で示され、マイナスと表示されるのは磁気テープ長
手方向に対し収縮していることを示す。VTRでの再生に
おいてスキュー歪が30μsec以上になると画像に影響
し、10μsec以上ではFM変調しNTSC信号に多重させた音
声信号に影響する。第1表から明らかなように全厚の引
っ張り強度に対する薄膜層の引っ張り強度を20%以上と
することによりスキュー歪は次第に改善され始め、画像
に影響がなくなり、さらに全厚の引っ張り強度に対する
薄膜層の引っ張り強度を30%以上とすることによりスキ
ュー歪はさらに改善されてFM変調された音声信号にも影
響がなくなった。なお、カールの変化については磁性面
側にしか薄膜層を持たないサンプルAについては、カー
ルの変化が大きく安定した再生信号が得られなかった
が、基板の両側に薄膜層を有するサンプルB〜Fについ
ては、カールの変化が小さく、安定した再生信号を得る
ことができた。なお、第1表においてサンプルAのスキ
ュー歪がサンプルBのスキュー歪より大きいのは、サン
プルAが片面のみに薄膜層を有するのに対し、サンプル
Bが両面に薄膜層を有するので、より大きな熱りれきを
受けたためであると思われる。
In Table 1, the skew distortion is indicated by the shift time of the reproduction signal of the NTSC signal, and the negative sign indicates that the NTSC signal is contracted in the longitudinal direction of the magnetic tape. When the skew distortion during VTR playback is 30 μsec or more, it affects the image, and when it is 10 μsec or more, it affects the audio signal multiplexed by FM modulation and NTSC signal. As is clear from Table 1, skew strain gradually begins to improve by setting the tensile strength of the thin film layer to 20% or more with respect to the tensile strength of the entire thickness, and the image is no longer affected. Skew distortion was further improved by setting the tensile strength of to 30% or more, and the influence on the FM-modulated audio signal was eliminated. Regarding the change in curl, sample A having a thin film layer only on the magnetic surface side showed a large change in curl and a stable reproduction signal could not be obtained, but samples B to F having thin film layers on both sides of the substrate were obtained. With respect to, the change in curl was small and a stable reproduction signal could be obtained. In Table 1, the skew strain of sample A is larger than the skew strain of sample B because sample A has a thin film layer on only one side, while sample B has a thin film layer on both sides. It seems that it was because I received a reminder.

(実施例2) 基板として厚み30μmの芳香族ポリアミドを用い、磁性
層側下地層としてFeNi(20wt%)を2,000Åの厚みにス
パッタし、さらにその上に2,000ÅのCoCr(20wt%)を
スパッタした。次に磁性面と反対の側に1×10-2Torrの
N2雰囲気中で1回につき2,000ÅずつSiのスパッタを行
い、磁性面側にプラズマ重合膜を形成した後、8ミリ幅
の磁気テープに作成した。作成したサンプルはSiのスパ
ッタ層数1〜7に対応してG,H,I,J,K,L,Mの7サンプル
である。これらのテープの60℃,90%,100H保存でのスキ
ュー歪を回転ヘッドVTRによってNTSC信号を用いて評価
した。又、磁気テープの引っ張り強度を、引っ張り試験
機による引っ張り速度0.05%/secで0.2%変形をおこす
時の力をもとに計算した。これらの評価結果を第2図に
示す。第2図から明らかなように、全厚の引っ張り強度
に対する薄膜層の引っ張り強度を20%以上とすることに
よりスキュー歪の改善効果が現われ始め、全厚の引っ張
り強度に対する薄膜層の引っ張り強度を30%以上とする
ことによりスキュー歪は大幅に改善される。
(Example 2) Using an aromatic polyamide having a thickness of 30 µm as a substrate, FeNi (20 wt%) was sputtered as a magnetic layer side underlayer to a thickness of 2,000 Å, and further 2,000 Å CoCr (20 wt%) was sputtered thereon. did. Next, on the side opposite to the magnetic surface, of 1 × 10 -2 Torr
Si was sputtered at a rate of 2,000Å each time in an N 2 atmosphere to form a plasma polymerized film on the magnetic surface side, and then a magnetic tape having a width of 8 mm was prepared. The prepared samples are 7 samples of G, H, I, J, K, L and M corresponding to the number of Si sputter layers of 1 to 7. The skew distortion of these tapes at 60 ℃, 90% and 100H storage was evaluated by NTV signal by a rotary head VTR. Also, the tensile strength of the magnetic tape was calculated based on the force at the time of 0.2% deformation at a tensile speed of 0.05% / sec by a tensile tester. The results of these evaluations are shown in FIG. As is clear from FIG. 2, the effect of improving skew distortion begins to appear when the tensile strength of the thin film layer with respect to the tensile strength of the entire thickness is 20% or more, and the tensile strength of the thin film layer with respect to the tensile strength of the full thickness is 30%. By setting the ratio to be at least%, the skew distortion is significantly improved.

(実施例3) 基板として厚み10μmのポリエチレンテレフタレートを
用い、薄膜層を形成した。形成した薄膜層は第2図をも
とに説明すると、磁性薄膜層のみ形成……サンプルN,磁
性薄膜層と薄膜層1……サンプルO,磁性薄膜層と薄膜層
1と薄膜層2……サンプルP,磁性層側下地層と磁性薄膜
層と薄膜層1と薄膜層2……サンプルQの4種である。
磁性薄膜層の形成は4×10-3Torrの酸素雰囲気中で厚さ
1,000ÅのCoの蒸着を行い、薄膜層1と薄膜層2と磁性
層側下地層として厚さ1,000Åの銅の蒸着を行った。こ
れら試料を磁気テープに作成し、60℃,90%,100Hの回転
VTRによるNTSC信号のスキュー歪と、0.2%変形に要する
引っ張り強度を評価した。これらの結果を第2表にまと
めた。
Example 3 A thin film layer was formed by using polyethylene terephthalate having a thickness of 10 μm as a substrate. The thin film layer formed will be described with reference to FIG. 2. Only the magnetic thin film layer is formed ... Sample N, magnetic thin film layer and thin film layer 1 ... Sample O, magnetic thin film layer and thin film layer 1 and thin film layer 2 ... Sample P, magnetic layer side underlayer, magnetic thin film layer, thin film layer 1, thin film layer 2 ... Sample Q.
The magnetic thin film layer is formed with a thickness of 4 × 10 -3 Torr in an oxygen atmosphere.
1,000 Å of Co was vapor-deposited, and 1,000 Å of copper was vapor-deposited as a thin film layer 1, a thin film layer 2, and a magnetic layer side underlayer. Create these samples on magnetic tape and rotate at 60 ℃, 90%, 100H
Skew distortion of NTSC signal by VTR and tensile strength required for 0.2% deformation were evaluated. The results are summarized in Table 2.

第2表から明らかな様に、全厚の引っ張り強度に対する
薄膜の引っ張り強度を20%以上とすることによりスキュ
ー歪は改善効果が現われ始め、全厚の引っ張り強度に対
する薄膜層の引っ張り強度を30%以上とすることによ
り、スキュー歪は大幅に改善される。
As is clear from Table 2, when the tensile strength of the thin film is 20% or more with respect to the tensile strength of the entire thickness, the skew strain begins to show an improvement effect, and the tensile strength of the thin film layer is 30% with respect to the tensile strength of the entire thickness. Due to the above, the skew distortion is significantly improved.

(実施例4) 基板として厚み7μmのポリエチレンナフタレートを用
い、8×10-3Torrの酸素雰囲気中でCoNi(20wt%)を2,
000Åの厚みに蒸着した。その後塗布法によってバック
コート層を形成し、磁性面側に滑剤を塗布し8ミリ幅の
磁気テープとしてサンプルRを得た。一方、CoNi(20wt
%)の磁性薄膜層形成後、5×10-3Torrの酸素雰囲気中
で磁性面と反対側にAlの蒸着を行い、2,000Åの厚みに
蒸着したサンプルS,4,000Åの厚みに蒸着したサンプル
Tを得た。サンプルS,Tとも磁性面側に滑剤を塗布し8
ミリ幅の磁気テープとした。これらのテープを60℃,90
%,100H保存でのスキュー歪を回転ヘッドVTRによってNT
SC信号を用いて評価した。
(Example 4) As a substrate, polyethylene naphthalate having a thickness of 7 μm was used, and CoNi (20 wt%) was added in an oxygen atmosphere of 8 × 10 −3 Torr to 2,
It was deposited to a thickness of 000Å. After that, a back coat layer was formed by a coating method, and a lubricant was applied to the magnetic surface side to obtain a sample R as an 8 mm wide magnetic tape. On the other hand, CoNi (20wt
%) After forming a magnetic thin film layer, Al was vapor-deposited on the side opposite to the magnetic surface in an oxygen atmosphere of 5 × 10 -3 Torr, and the sample was vapor-deposited to a thickness of 2,000Å. I got T. Applying a lubricant to the magnetic side of both samples S and T 8
It was a magnetic tape of millimeter width. Apply these tapes at 60 ℃, 90
%, Skew distortion at 100H storage NT by rotating head VTR
It was evaluated using the SC signal.

又、磁気テープの引っ張り強度を、引っ張り試験機によ
る引っ張り速度0.05%/secで0.2%変形をおこす時の力
をもとに計算した。これらの結果を第3表にまとめる。
Also, the tensile strength of the magnetic tape was calculated based on the force at the time of 0.2% deformation at a tensile speed of 0.05% / sec by a tensile tester. These results are summarized in Table 3.

第3表から明らかなように、全厚の引っ張り強度に対す
る薄膜の引っ張り強度を20%以上とすることによりスキ
ュー歪は改善され、さらに全厚の引っ張り強度に対する
薄膜層の引っ張り強度を30%以上とすることにより、ス
キュー歪は大幅に改善される。
As is clear from Table 3, skew strain is improved by setting the tensile strength of the thin film to 20% or more with respect to the tensile strength of the entire thickness, and further, the tensile strength of the thin film layer to 30% or more with respect to the tensile strength of the entire thickness. By doing so, skew distortion is significantly improved.

以上、4つの具体例によって本発明の効果を説明した
が、本発明はこの具体例に限ることなく本発明の趣旨を
満たしたすべての磁気記録媒体に及ぶものである。なお
各実施例においてはスキュー歪を正確に測定するため磁
気テープを例として挙げたが、フロッピーディスク等の
別の形態をとった磁気記録媒体の寸法安定性の改善につ
いてもその効果は大なるものがある。
Although the effects of the present invention have been described above with reference to four specific examples, the present invention is not limited to these specific examples and extends to all magnetic recording media satisfying the spirit of the present invention. In each of the embodiments, the magnetic tape is taken as an example in order to accurately measure the skew distortion, but the effect is also great in improving the dimensional stability of a magnetic recording medium having another form such as a floppy disk. There is.

発明の効果 以上のように本発明によれば、高分子基板の両側に薄膜
層を有した薄膜型磁気記録媒体において、全厚の引っ張
り強度に対し薄膜層の引っ張り強度を30%以上とするこ
とにより、磁気記録媒体の寸法安定性を向上させ、スキ
ュー歪を改善するというすぐれた効果を得ることができ
る。
As described above, according to the present invention, in the thin film magnetic recording medium having the thin film layers on both sides of the polymer substrate, the tensile strength of the thin film layer is 30% or more with respect to the tensile strength of the entire thickness. As a result, the excellent effect of improving the dimensional stability of the magnetic recording medium and improving the skew distortion can be obtained.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の一実施例の断面図、第2図は同実施例
におけるスキュー歪と引っ張り強度の関係を示す特性
図、第3図は従来例の断面図である。 1……高分子材料による基板、2……磁性層側下地層、
3……磁性薄膜層、4,5……薄膜層。
FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a characteristic diagram showing the relationship between skew strain and tensile strength in the same embodiment, and FIG. 3 is a sectional view of a conventional example. 1 ... Substrate made of polymer material, 2 ... Underlayer on magnetic layer side,
3 ... Magnetic thin film layer, 4,5 ... Thin film layer.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】高分子基板の両側に薄膜層を有した薄膜型
磁気記録媒体であって、全厚の引っ張り強度に対し前記
薄膜層の引っ張り強度が30%以上であることを特徴とす
る薄膜型磁気記録媒体。
1. A thin film magnetic recording medium having thin film layers on both sides of a polymer substrate, wherein the tensile strength of the thin film layer is 30% or more of the tensile strength of the entire thickness. Type magnetic recording medium.
JP20919085A 1985-09-20 1985-09-20 Thin film type magnetic recording medium Expired - Lifetime JPH0697498B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20919085A JPH0697498B2 (en) 1985-09-20 1985-09-20 Thin film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20919085A JPH0697498B2 (en) 1985-09-20 1985-09-20 Thin film type magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS6267721A JPS6267721A (en) 1987-03-27
JPH0697498B2 true JPH0697498B2 (en) 1994-11-30

Family

ID=16568839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20919085A Expired - Lifetime JPH0697498B2 (en) 1985-09-20 1985-09-20 Thin film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0697498B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110835434A (en) * 2019-12-17 2020-02-25 惠州清水湾生物材料有限公司 Magnetic film and preparation method thereof

Also Published As

Publication number Publication date
JPS6267721A (en) 1987-03-27

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