JPH0711440Y2 - 超高温化学反応制御装置 - Google Patents

超高温化学反応制御装置

Info

Publication number
JPH0711440Y2
JPH0711440Y2 JP13158588U JP13158588U JPH0711440Y2 JP H0711440 Y2 JPH0711440 Y2 JP H0711440Y2 JP 13158588 U JP13158588 U JP 13158588U JP 13158588 U JP13158588 U JP 13158588U JP H0711440 Y2 JPH0711440 Y2 JP H0711440Y2
Authority
JP
Japan
Prior art keywords
reactant
ring
reaction tube
shaped
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13158588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252300U (fr
Inventor
豊信 吉田
高伸 天野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP13158588U priority Critical patent/JPH0711440Y2/ja
Publication of JPH0252300U publication Critical patent/JPH0252300U/ja
Application granted granted Critical
Publication of JPH0711440Y2 publication Critical patent/JPH0711440Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
JP13158588U 1988-10-07 1988-10-07 超高温化学反応制御装置 Expired - Lifetime JPH0711440Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13158588U JPH0711440Y2 (ja) 1988-10-07 1988-10-07 超高温化学反応制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13158588U JPH0711440Y2 (ja) 1988-10-07 1988-10-07 超高温化学反応制御装置

Publications (2)

Publication Number Publication Date
JPH0252300U JPH0252300U (fr) 1990-04-16
JPH0711440Y2 true JPH0711440Y2 (ja) 1995-03-15

Family

ID=31387794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13158588U Expired - Lifetime JPH0711440Y2 (ja) 1988-10-07 1988-10-07 超高温化学反応制御装置

Country Status (1)

Country Link
JP (1) JPH0711440Y2 (fr)

Also Published As

Publication number Publication date
JPH0252300U (fr) 1990-04-16

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