JPH07126848A - Substrate transporting device for film forming device - Google Patents

Abstract

PURPOSE:To suppress the intrusion of impurities into a vacuum vessel and to shorten the heating and cooling time for substrates without cracking the large-area substrates by providing a film forming device with the substrate transporting device which does not use a substrate holder. CONSTITUTION:The substrates 14 are diagonally erected on a truck 13 of the substrate transporting device and this truck 13 is moved into the vacuum vessel. After the substrates 14 are transferred between a heater 11 and a positioner 12, this positioner 12 is moved diagonally upward and the substrates 14 are transferred to the positioner 12. The positioner 12 is moved and is brought into contact with a heater 11 for heating and the substrate treatment is executed. As a result, the intrusion of the impurities into the vacuum vessel is suppressed without using the substrate holder and the time for heating and cooling the substrates is shortened.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a plasma CVD (chem
The present invention relates to a substrate transfer device for transferring glass, a silicon wafer substrate, or the like into a vacuum container of a film forming device that forms a thin film in a vacuum, such as a ical vapor deposition device and a sputtering device.

[0002]

2. Description of the Related Art Conventionally, when a substrate is put in or taken out of a vacuum container such as a plasma CVD device or a sputtering device, a method of fixing the substrate to a substrate holder and carrying the substrate holder together with the substrate is generally adopted. There is.

FIG. 10 is a perspective view of a conventional film forming apparatus.
As shown in the figure, the film formation is performed in a vacuum container 01, and an electrode 03 is provided on a door 02 that can be opened and closed. In order to transfer the substrate 04, a normal substrate holder 0
A plurality of substrates 04 are attached to the substrate 5, and the substrate holder 05 is hung from the substrate transfer unit 06 provided in the upper part of the vacuum container 01 so that the substrate holder 05 can be moved together with the substrate transfer unit 06 by a moving device (not shown). . Vacuum container 0
A heater 07 is provided at the center of 1. The substrate holder 05 hung on the transfer unit 06 is the heater 0.
After moving between the electrode 7 and the electrode 03 and stopping, the film is formed on the substrate 04.

[0004]

In the above-described transfer method according to the prior art, it takes a lot of time to mount the substrate 04 on the substrate holder 05, and a very complicated robot is required for automation. In addition, for example, when glass is heated in a vacuum as a typical example of the substrate 04, the substrate holder 05 is also heated, which causes not only a trouble in the transfer system but also a break in the glass. In particular, large area substrates are easily broken. Further, as compared with the case of heating and cooling only glass, a longer processing time is required in the case of mounting the substrate holder 05 for heating or the like. Further, since the substrate holder 05 moves in the vacuum container 01, it causes impurities to be mixed, and there is a problem that the substrate holder 05 having the substrate attached must be returned from the outlet to the inlet.

The present invention solves the above-mentioned drawbacks of the prior art, eliminates the need for a substrate holder, does not crack even a large-sized substrate, prevents impurities from being mixed in a vacuum container, and requires substrate heating and cooling. It is an object of the present invention to provide a substrate transfer device for a film forming apparatus that shortens the time.

[0006]

Means for Solving the Problems The present invention has been made to solve the above-mentioned problems, in which a substrate is formed on a heating surface of a heater of a film forming apparatus for forming a film on the substrate between a heater and an electrode in a vacuum container. In a transporting device, a carriage that holds the substrate at a stable angle and can move in a direction parallel and horizontal to the heater, a drive device that moves the carriage in the direction, and faces a heating surface of the heater. A positioner provided at a position, and an oblique feed device for moving the positioner diagonally upward substantially orthogonal to the substrate held by the carriage. When it arrives in the meantime, the positioner is moved toward the board on the carriage to hold the board on the carriage, and the positioner is further moved to hold it. The substrate in close contact with the heating surface of the heater,
Further, the driving device is related to the substrate transfer device of the film forming apparatus, which returns the emptied trolley to the original position.

[0007]

In the above structure, the substrate is held in a state of leaning on the trolley, and the trolley is moved into the vacuum container.
After moving the substrate between the heater and the positioner, the positioner is moved obliquely upward to deliver the substrate to the positioner, and the positioner is moved to be in close contact with the heating heater to perform substrate processing such as film formation processing. This eliminates the need for a substrate holder that is conventionally used to hold a substrate.

[0008]

1 is a perspective view of a film forming apparatus according to an embodiment of the present invention. The film forming apparatus of this embodiment shows an example of an apparatus applied to a plasma CVD apparatus or the like. In the figure, only the internal mechanism arranged inside the vacuum container is shown. The vacuum container itself is not shown. Reference numeral 11 denotes a heater provided in the center of the inside of the vacuum container, which transfers heat to both sides. Positioners 12 provided on both sides of the heater 11 hold the substrate during the film forming process. Reference numeral 13 is a dolly, 17 is a board supporting rod provided on the dolly, 14 is a board placed on the dolly, and 26 is a board positioning claw. Reference numeral 22 is a support arm attached to the positioner 12, and 23 is an oblique feeding device driven from the outside of the vacuum container. Reference numeral 25 is a notch provided in the positioner, which is provided to avoid contact with the substrate positioning claw when the positioner moves.

FIG. 2 is a side view of the above embodiment. In the figure, reference numeral 15 denotes a guide roller attached to the trolley,
Reference numeral 16 is a guide rail on which the guide roller rolls, 20 is a driving force transmission portion (rack) provided on the carriage, and 21 is a drive device (pinion) for moving the carriage 13 via the transmission portion. is there. Reference numeral 18 denotes a claw provided on the positioner 12 for mounting a substrate. Reference numeral 19 denotes a recess provided in the heater 11,
This is the part into which the claw 18 is inserted.

1 and 2, the Z axis is the vertical axis of the apparatus, the Y axis is the front-rear horizontal axis of the apparatus, the X axis is the horizontal horizontal axis of the apparatus, and the moving direction of the carriage 13 and the arrow θ direction are. , Is an obliquely upward direction forming an angle θ with the Y axis,
Positioner 1 performed by the oblique feeding device 23
2 is the moving direction. The substrate support rod 17 of the carriage 13 also holds the substrate while being inclined by an angle θ with respect to the vertical. When the dolly moves, the board moves in the positioner direction (θ direction)
Orthogonal to. The angle θ is about 10 degrees. Oblique feeding device 23
Is driven from the outside of the vacuum container by a hydraulic device (not shown) or the like.

FIG. 3 shows the positioner 1 in the above embodiment.
2 is a perspective view of the positioner, FIG. 4 is a two-sided view of the positioner, FIG. 4A is a front view, and FIG. 4B is a side view. The center portion of the positioner 12 is cut out to the same size as the substrate 14, and the lower end portion thereof is cut out with the same width as the substrate to avoid the carriage 13 when receiving the substrate. Numerals 29 are stoppers provided at the four corners of the central lacking portion of the positioner 12, a portion for holding the substrate, dotted lines 24 in the drawing are substrate outlines, and 25 are notches for avoiding the substrate positioning claws 26. .

5A and 5B are views showing the mutual positional relationship when the carriage 13 and the positioner 12 are close to each other. FIG. 5A is a front view and FIG. 5B is a side view of the positioner.
FIG. 3C is a side view of a part of the truck. This figure shows the mutual positional relationship between the board positioning claw 26 and the notch 25.

FIG. 6 is a perspective view showing another example of the shape of the positioner in the above embodiment, and 12 'is a positioner which is separated into left and right. Any shape may be used as long as the substrate can be held and the carriage and the positioner do not come into contact with each other. As shown in the figure, if the pawl 18 and the oblique feeding device 23 are provided, they function as a positioner. Various shapes other than those shown are conceivable.

The substrate 14 is made of flat glass or the like,
Substrate positioning claw 26 in a state of being leaned against a substrate support rod 17 extending at an angle θ (about 10 °) above the carriage 13
X-axis which is detachably fixed by the
It is conveyed in the axial direction. This board carrier 13
As shown in FIG. 2, is a table mounted on a guide rail 16 provided at the bottom of the vacuum container via guide rollers (wheels, etc.) 15.
Is provided and is in contact with a drive device 21 which is erected from the outside of the bottom of the vacuum container and erected. According to the guide rails 16, a plurality of the driving devices 21 are arranged at a constant interval (conveyance vehicle 1
3 is smaller than the length of the drive transmission unit 20), and the rotational force is transmitted from the outside, the drive device 21 rotates, and this rotational force is transmitted to the drive transmission unit 20 to move the substrate transfer carriage 13. I am trying. In the present embodiment, a pinion is used as the drive unit and a rack or the like is used as the drive transmission unit 20. However, these may be replaced with rollers and flat plates, respectively, and other transmission means may be used as required. May be used.

This device is used as follows. The carrier vehicle 13 moves in the X direction while holding the substrate 14,
It stops when the substrate 14 reaches a predetermined position between the heater 11 and the positioner 13. FIG. 2 is a side view showing this state.

Next, an oblique feeding device 23 provided penetrating from the bottom of the vacuum container moves the positioner in the θ direction. The positioner 12 avoids the carriage 13 in the positional relationship shown in FIG. 5A and receives only the substrate 14 and fixes it to the film forming apparatus. The substrates 14 are transferred one by one to the positioners 12 located on both sides of the heater 11 for double-sided heating, pressed against the heater 11 and heated. At this time, the claw 18 of the positioner 12 is housed in the recess 19 provided in the heater 11, so that the substrate is in close contact with the heater. FIG. 7 is a side view showing this state. In the figure, reference numeral 27 is the position of the substrate 14 that is brought into close contact with the heater, that is, the film formation position, and at this time, the positioner 12 is in close contact with the back of the substrate 14. Reference numeral 28 is a substrate transfer position (original position of the substrate), and 30 is an original position of the positioner.

In this state, if the carriage is returned from the film forming chamber to the original chamber from which the substrate was carried, only the substrate 14 will remain.
After that, the film is formed on the substrate 14. FIG. 8 is a side view showing a state where the substrate remains in the film forming chamber. Plasma CV
By using this transfer means in the D apparatus, it is possible to minimize the mixing of impurities into the substrate 14, and it is possible to increase the processing speed by shortening the heating / cooling time.

As described above, when the carriage 13 conveys the substrate 14 in the X-axis direction and moves the positioner 12 in the θ direction, only the substrate 14 is set on the heater 11. Further, after the film formation is completed, the dolly is placed at a fixed position and the positioner 12 is rotated by
When it is returned to the lower side, the board 14 is returned to the carriage 13. FIG. 9 is a side view showing a state in which the carriage is again moved to the film forming chamber, the positioner is retracted, and the substrate is transferred to the carriage. After this, the substrate is moved to another chamber by the carriage.

As described above in detail, according to the embodiment, since the substrate processing can be performed without using the substrate holder, the mixing of impurities in the vacuum container can be minimized, and even in the large area substrate. The time for heating and cooling the substrate can be shortened without cracking. In addition, a vacuum substrate transfer device that does not require the return function of the conventional substrate holder is possible, and is extremely effective when used in a thin film manufacturing device that requires a vacuum such as a large area plasma CVD device and sputtering.

[0020]

In the substrate transporting apparatus of the film forming apparatus of the present invention, the carriage which holds the substrate tilted at a stable angle and can move in the direction parallel and horizontal to the heater in the above direction. A driving device for moving, a positioner provided at a position facing the heating surface of the heater, and an oblique feeding device for moving the positioner diagonally upward substantially orthogonal to the substrate held by the carriage,
When the carriage arrives between the heater and the positioner, the diagonal feeding device moves the positioner toward the board on the carriage, holds the board on the carriage, and further moves the positioner. The substrate held by the heater is brought into close contact with the heating surface of the heater, and the driving device returns the emptied trolley to the original state, so that the substrate processing can be performed without using the substrate holder. So
It is possible to minimize the mixing of impurities in the vacuum container, to prevent the cracking of a large-sized substrate, and to shorten the time for heating and cooling the substrate.

[Brief description of drawings]

FIG. 1 is a perspective view of a film forming apparatus according to an embodiment of the present invention.

FIG. 2 is a side view of the above embodiment.

FIG. 3 is a perspective view of a positioner in the above embodiment.

FIG. 4 is a two-sided view of the positioner. (A) is a front view,
(B) is a side view.

FIG. 5 is a diagram showing a mutual positional relationship in a state where a dolly and a positioner are close to each other in the above embodiment. (A) is a front view, (b) is a side view of a positioner, (c) is a side view of a part of a trolley.

FIG. 6 is a perspective view showing another example of the shape of the positioner in the above embodiment.

FIG. 7 is an explanatory view of the operation of the above embodiment.

FIG. 8 is an explanatory view of the operation of the above embodiment.

FIG. 9 is an explanatory view of the operation of the above embodiment.

FIG. 10 is a perspective view of a conventional film forming apparatus.

[Explanation of symbols]

 01 Conventional Vacuum Container 02 Conventional Door 03 Conventional Electrode 04 Conventional Substrate 05 Conventional Substrate Holder 06 Conventional Substrate Transfer Part 07 Conventional Heating Heater 11 Heater 12 Positioner 13 Carriage 14 Substrate 15 Guide Roller 16 Guide Rail 17 Substrate Support Bar 18 claw 19 dent 20 driving force transmission part 21 driving device 22 support arm 23 oblique feeding device 24 substrate outline 25 substrate positioning claw notch 26 substrate positioning claw 27 film forming device 28 substrate transfer device (original position of substrate) 29 Stopper 30 Original position of positioner

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Reference number within the agency FI technical display location C30B 25/12 H01L 21/68 A N (72) Inventor Takanori Kondo 1st No. 1 Atsunoura-cho, Nagasaki No. Mitsubishi Heavy Industries Ltd. Nagasaki Shipyard (72) Inventor Yoshikazu Nawata 1-1 No. 1 Atsunouramachi, Nagasaki City Mitsubishi Heavy Industries Ltd. Nagasaki Shipyard

Claims (1)

[Claims] 1. An apparatus for transporting a substrate to a heating surface of a heater of a film forming apparatus for forming a film on a substrate between a heater and an electrode in a vacuum container, wherein the substrate is held while being inclined at a stable angle. A carriage that can move in a direction parallel and horizontal to the carriage, a drive device that moves the carriage in the direction described above, a positioner provided at a position facing the heating surface of the heater, and a substrate held by the carriage. It consists of an oblique feeding device that moves the positioner toward diagonally upward, which is almost orthogonal, and when the dolly arrives between the heater and the positioner, the diagonal feed device moves the positioner toward the board on the dolly. The substrate is moved to hold the substrate on the carriage, the positioner is moved to bring the substrate held by the substrate into close contact with the heating surface of the heater, and the drive device is A substrate transfer apparatus for a film forming apparatus, which returns the empty dolly to its original state.