JPH07171375A - Raw material supply method in bubbler raw material supply device - Google Patents
Raw material supply method in bubbler raw material supply deviceInfo
- Publication number
- JPH07171375A JPH07171375A JP34610193A JP34610193A JPH07171375A JP H07171375 A JPH07171375 A JP H07171375A JP 34610193 A JP34610193 A JP 34610193A JP 34610193 A JP34610193 A JP 34610193A JP H07171375 A JPH07171375 A JP H07171375A
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- bubbler
- liquefied
- material supply
- liquefied raw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/86—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid by bubbling a gas through the liquid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
- C03B2207/89—Controlling the liquid level in or supply to the tank
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/90—Feeding the burner or the burner-heated deposition site with vapour generated from solid glass precursors, i.e. by sublimation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
(57)【要約】
【目的】 常時一定濃度の混合ガスを供給することがで
きるバブラー原料供給装置における原料補給方法を提供
する。
【構成】 バブラー１０１内部で気化した原料ガスと前
記キャリアガスとの混合された混合ガスをバーナー側へ
送り出すバブラー原料供給装置において、キャリアガス
と液化原料１０５との各流量を制御する流量制御手段１
０３、１を夫々各補給路１０２、１００に備えるととも
に、バブラー１０１内部の液化原料１０５の液面の下降
若しくは液化原料の重量の低下を検出する検出手段２を
備え、この検出手段２から出力する信号を入力すると、
その信号に応じて流量制御手段１を制御して常時液化原
料の液面若しくは重量を一定に保持する。
(57) [Abstract] [Purpose] To provide a raw material replenishing method in a bubbler raw material supply device capable of constantly supplying a mixed gas of a constant concentration. In a bubbler raw material supply device for sending a mixed gas obtained by mixing a raw material gas vaporized inside a bubbler 101 and the carrier gas to a burner side, a flow rate control means 1 for controlling respective flow rates of a carrier gas and a liquefied raw material 105.
Nos. 03 and 1 are provided in the replenishment paths 102 and 100, respectively, and a detection unit 2 for detecting a drop in the liquid level of the liquefied raw material 105 inside the bubbler 101 or a decrease in the weight of the liquefied raw material is provided, and the detection unit 2 outputs the output. When you input a signal,
The flow rate control means 1 is controlled according to the signal to constantly keep the liquid surface or weight of the liquefied raw material constant.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、アルゴン，ヘリウム
等の不活性ガスを使用したキャリアガスとＧｅＣｌ4 等
の液化原料とを密閉されたバブラー内部に送り込み、こ
のバブラー内部で気化した原料ガスと前記キャリアガス
との混合された混合ガスをバーナー側へ送り出すバブラ
ー原料供給装置に係り、特に液化原料の液面若しくは重
量を常時一定に保持することができるバブラー原料供給
装置における原料補給方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention sends a carrier gas using an inert gas such as argon or helium and a liquefied raw material such as GeCl 4 into a sealed bubbler, and vaporizes the raw material gas inside the bubbler. The present invention relates to a bubbler raw material supply device that sends a mixed gas mixed with the carrier gas to the burner side, and particularly to a raw material replenishing method in a bubbler raw material supply device that can constantly keep the liquid level or weight of the liquefied raw material constant. is there.
【０００２】[0002]
【従来の技術】光ファイバ母材の形成材料を高純度に得
る方法として、液化した材料を気化させて純度を上げ、
これを取り出して利用することがおこなわれている。即
ち、このような方法を利用した原料供給装置としては、
例えば図３に示すように、液化原料１０５を供給する供
給路１００に連結されたバブラー１０１と、このバブラ
ー１０１と連通するキャリアガスの供給路１０２の途中
に設置する流量制御手段であるＭＦＣ（Mass Flow Cont
roller) １０３とを備えたものが知られている。2. Description of the Related Art As a method for obtaining a material for forming an optical fiber preform with high purity, the liquefied material is vaporized to increase the purity.
This is taken out and used. That is, as a raw material supply device utilizing such a method,
For example, as shown in FIG. 3, a bubbler 101 connected to a supply path 100 for supplying a liquefied raw material 105 and an MFC (Mass (Mass) which is a flow rate control means installed in the middle of a carrier gas supply path 102 communicating with the bubbler 101. Flow Cont
and a roller) 103 are known.
【０００３】そして、この原料供給装置は、キャリアガ
ス側の供給路１０２の先端がバブラー１０１内底部近く
の液化原料１０５内に浸漬されており、キャリアガスが
液化原料１０５内で気泡となって混入するようになって
いるが、かりにその液化原料１０５に不純物が含まれて
いたとしても、その液化原料１０５と不純物とでは蒸気
圧が著しく異なるので、気泡となって液化原料１０５か
ら浮上してきたキャリアガスにはその不純物が殆ど含ま
れないのである。即ち、これは不純物の混入濃度が少な
い分発生する蒸気量も極く僅かであり、バブラー１０１
の上部空間内において、液化原料１０５の蒸気と浮上し
てきたキャリアガスとで殆ど飽和状態となってしまうか
らである。かくして、密閉されたバブラー１０１内の液
化原料１０５が気化して発生する原料ガスと気泡内のキ
ャリアガスとの混合気体は、供給路１０４を介してバー
ナー（図略）側へ送り出されるようになっている。In this raw material supply device, the tip of the supply path 102 on the carrier gas side is immersed in the liquefied raw material 105 near the bottom of the bubbler 101, and the carrier gas is mixed as bubbles in the liquefied raw material 105. However, even if the liquefied raw material 105 contains impurities, since the vapor pressures of the liquefied raw material 105 and the impurities are significantly different, the carriers that have floated up from the liquefied raw material 105 as bubbles. The gas contains almost no impurities. That is, the amount of vapor generated is extremely small due to the low concentration of impurities, and the bubbler 101
This is because the vapor of the liquefied raw material 105 and the floating carrier gas are almost saturated in the upper space. Thus, the mixed gas of the raw material gas generated by the vaporization of the liquefied raw material 105 in the closed bubbler 101 and the carrier gas in the bubbles is sent out to the burner (not shown) side through the supply passage 104. ing.
【０００４】ところで、この原料供給装置では、光ファ
イバ母材を一回分製造させる度に、換言すれば、光ファ
イバ母材を一回分の原料ガスの供給動作が完了するたび
に、所謂バッチ補給、つまりその消費した分だけまとめ
て一度に補給させているため、液化原料１０５を供給す
る供給路１００にはバルブ１０７を設け、補給動作の制
御を図っている。また、バブラー１０１は、重量変化を
検出して補給量を確認するために、ロードセル１０６の
上に載置されている。By the way, in this raw material supply device, so-called batch replenishment is performed every time when the optical fiber preform is manufactured once, in other words, every time the operation of supplying the raw material gas for the optical fiber preform is completed. That is, since the consumed amount is collectively supplied at once, a valve 107 is provided in the supply path 100 for supplying the liquefied raw material 105 to control the supply operation. Further, the bubbler 101 is mounted on the load cell 106 in order to detect a change in weight and confirm the replenishment amount.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、このよ
うな従来の原料供給装置において、液化原料に溶解する
ことができるキャリアガスの質量は一義的に定まってお
り、逐次供給される液化原料にあわせてその液面が低下
すると、溶解できるキャリアガスの質量も相対的に低下
するので、混合ガスの濃度が微妙に変化する不都合を生
じているのである。However, in such a conventional raw material supply apparatus, the mass of the carrier gas that can be dissolved in the liquefied raw material is uniquely determined, and the mass of the liquefied raw material to be successively supplied is determined. When the liquid level is lowered, the mass of the carrier gas that can be dissolved is also lowered, so that the concentration of the mixed gas changes delicately.
【０００６】そこで、この発明は、上記した事情に鑑
み、常時一定濃度の混合ガスを供給することができるバ
ブラー原料供給装置における原料補給方法を提供するこ
とを目的とするものである。In view of the above-mentioned circumstances, the present invention has an object of providing a raw material replenishing method in a bubbler raw material supply apparatus capable of constantly supplying a mixed gas having a constant concentration.
【０００７】[0007]
【課題を解決するための手段】即ち、この発明は、アル
ゴン，ヘリウム等の不活性ガスを使用したキャリアガス
とＧｅＣｌ4 等の液化原料とを夫々補給路を介して密閉
されたバブラー内部に送り込み、このバブラー内部で気
化した原料ガスを前記キャリアガスに混合させた混合ガ
スをバーナー側へ送り出すバブラー原料供給装置におい
て、前記キャリアガスと前記液化原料との各補給流量を
制御する流量制御手段を夫々前記各補給路の一部に備え
るとともに、前記バブラー内部の液化原料の液面の若し
くは液化原料の重量を検出する検出手段を備え、この検
出手段から前記液化原料の液面若しくは重量に応じて出
力する信号を入力すると、その信号に基づいて少なくと
も前記液化原料側の流量制御手段を制御し常時液化原料
の液面を一定に保持するものである。That is, according to the present invention, a carrier gas using an inert gas such as argon or helium and a liquefied raw material such as GeCl 4 are fed into a sealed bubbler through a supply passage. In the bubbler raw material supply device for sending a mixed gas obtained by mixing the raw material gas vaporized in the bubbler with the carrier gas to a burner side, flow rate control means for controlling each replenishment flow rate of the carrier gas and the liquefied raw material are respectively provided. In addition to being provided in a part of each of the replenishing passages, a detection means for detecting the liquid level of the liquefied raw material in the bubbler or the weight of the liquefied raw material is provided, and the detection means outputs the liquid level or the weight of the liquefied raw material according to Inputting a signal for controlling the flow rate control means at least on the liquefaction raw material side based on the signal, the liquid surface of the liquefaction raw material is constantly maintained at a constant level. It is intended to.
【０００８】[0008]
【作用】この発明では、検出手段から前記液化原料の液
面若しくは重量に応じて出力する信号を入力すると、制
御部がその信号に基づいて少なくとも液化原料側の流量
制御手段を制御し、液化原料の液面を一定に保持するこ
とにより常時一定濃度の混合ガスを安定して供給する。According to the present invention, when a signal to be output according to the liquid level or the weight of the liquefied raw material is input from the detection means, the control unit controls at least the flow rate control means on the liquefied raw material side based on the signal, By keeping the liquid surface of the above constant, a mixed gas of a constant concentration is always stably supplied.
【０００９】[0009]
【実施例】以下、この発明について添付図面を参照しな
がら説明する。なお、この実施例において、先の従来例
と同一部分には同一符号を附して説明を省略する。図１
はこの発明にかかる原料補給方法が適用されたバブラー
原料供給装置を示す略線図である。この実施例のバブラ
ー原料供給装置は、キャリアガスと液化原料１０５との
各流量を制御する第１、第２の流量制御手段１０３、１
を夫々各補給路１０２、１００に付設させているととも
に、液化原料１０５の重量検出手段としてロードセル２
を備え、かつ、このロードセル２からの検出信号に応じ
て第２の流量制御手段１を常時制御する制御部３を備え
たものである。なお、図中符号４はバブラー１０１を収
容した恒温槽を示すものであり、液化原料１０５の気化
温度を常時一定に保持させるものである。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings. In this embodiment, the same parts as those in the above-mentioned conventional example are designated by the same reference numerals and the description thereof will be omitted. Figure 1
FIG. 3 is a schematic diagram showing a bubbler raw material supply device to which the raw material supply method according to the present invention is applied. In the bubbler raw material supply device of this embodiment, first and second flow rate control means 103, 1 for controlling respective flow rates of the carrier gas and the liquefied raw material 105 are provided.
A load cell 2 is provided as a weight detection means for the liquefied raw material 105, while being attached to each of the supply paths 102, 100.
And a control section 3 for constantly controlling the second flow rate control means 1 in accordance with the detection signal from the load cell 2. In the figure, reference numeral 4 indicates a thermostatic chamber containing the bubbler 101, which keeps the vaporization temperature of the liquefied raw material 105 constant at all times.
【００１０】第２の流量制御手段１は、バーナー側へ送
られて消費される混合ガスの成分のうち、特に消費にと
もない重量減少の大幅変化をもたらす原料ガス（例えば
ＧｅＣｌ4 等の液化原料１０５）について、その補給量
（流量）を逐次調整することによって、各補給路１０２
の先端から液化原料１０５の液面までの高さ（ｈ）を常
時一定に保持させるようになっている。そのためこの実
施例では、この第２の流量制御手段１では、第１流量制
御手段１と同様のＭＦＣが使用されて図２に示すように
制御部３の出力と接続されており、液化原料１０５の単
位時間当たりの重量変化の増減に合わせて随時各補給路
１００内を通過する液化原料１０５の通過量を最適な状
態に調整させている。The second flow rate control means 1 is a raw material gas (for example, a liquefied raw material 105 such as GeCl 4) that causes a large change in weight reduction among the components of the mixed gas sent to the burner and consumed. ), The supply amount (flow rate) is sequentially adjusted,
The height (h) from the tip to the liquid surface of the liquefied raw material 105 is always kept constant. Therefore, in this embodiment, the second flow rate control means 1 uses the same MFC as the first flow rate control means 1 and is connected to the output of the control unit 3 as shown in FIG. The amount of the liquefied raw material 105 passing through each replenishment passage 100 is adjusted to an optimum state at any time according to the increase or decrease in the weight change per unit time.
【００１１】なお、バーナー側へ送られて消費される混
合ガスの成分のうちキャリアガスについては、常時気体
状態にあるので液化原料１０５に比べ密度が小さく消費
にともなう重量変化は殆ど無視することができるもので
あるから、バブラー１０１の重量変化に対応して第２の
流量制御手段１の調整制御は行っていない。Since the carrier gas, which is a component of the mixed gas sent to the burner side and consumed, is always in a gaseous state, its density is smaller than that of the liquefied raw material 105 and the weight change due to consumption can be almost ignored. Therefore, the adjustment control of the second flow rate control means 1 is not performed in response to the change in the weight of the bubbler 101.
【００１２】ロードセル２は、バブラー１０１の重量を
計測することによってそのバブラー１０１の内の液化原
料１０５の液面の変化を検出するようになっており、適
宜の材料で密閉状態に形成されている。なお、液化原料
の重量検出手段として、特にこの実施例のものに限定さ
れるものではなく、種々のものが適用可能である。The load cell 2 detects the change in the liquid level of the liquefied raw material 105 in the bubbler 101 by measuring the weight of the bubbler 101, and is formed in a hermetically sealed state with an appropriate material. . The means for detecting the weight of the liquefied raw material is not particularly limited to that of this embodiment, and various means can be applied.
【００１３】制御部３は、ロードセル２から逐次出力さ
れる重量検出信号に基づき、液化原料１０５（勿論キャ
リアガスも含む）を収容させたバブラー１０１の総重量
を計測するとともに、液化原料１０５が予め設定された
基準液面のときのバブラー１０１の総重量（基準重量）
との比較演算を行い、これよりも大きければ第２の流量
制御手段１による通過流量を抑制するとともに、小さけ
れば第２の流量制御手段１による通過流量を緩和するよ
うに、所定の制御信号を第２の流量制御手段１に出力さ
せるようになっている。The control unit 3 measures the total weight of the bubbler 101 accommodating the liquefied raw material 105 (including the carrier gas, of course) based on the weight detection signal sequentially output from the load cell 2, and the liquefied raw material 105 is preliminarily measured. Total weight of bubbler 101 when the set reference liquid level (reference weight)
And a predetermined control signal so as to suppress the passage flow rate by the second flow rate control means 1 if it is larger than this and reduce the passage flow rate by the second flow rate control means 1 if it is smaller than this. The second flow rate control means 1 is made to output.
【００１４】従ってこの実施例によれば、従来のような
バッチ補給、つまり光ファイバ母材を一本製造するごと
ではなく、微小単位時間当たりの重量変化を逐一精密に
計測させ、これに応じて液化原料１０５の重量制御を逐
次行うことによって、液化原料１０５の液面高さを常時
一定に制御し、バーナーへ供給する混合ガスの濃度を一
定に維持することができる。Therefore, according to this embodiment, rather than the conventional batch replenishment, that is, every time one optical fiber preform is manufactured, the weight change per minute unit time is measured precisely, and accordingly, the weight change is measured. By sequentially controlling the weight of the liquefied raw material 105, the liquid surface height of the liquefied raw material 105 can be constantly controlled and the concentration of the mixed gas supplied to the burner can be maintained constant.
【００１５】[0015]
【発明の効果】以上、説明してきたように、この発明に
よれば、検出手段から液化原料の液面の下降若しくは重
量の低下を検出するときに出力する信号を入力すると、
その信号に応じて流量制御手段を制御して常時液化原料
の液面若しくは重量を一定に保持することができるの
で、正確な配分比率で混合ガスをバーナーへ供給させる
ことができ、ひいては高品質の光ファイバ母材が製造で
きる効果がある。As described above, according to the present invention, when a signal output when detecting a drop in the liquid level of the liquefied raw material or a decrease in weight is input from the detecting means,
Since the flow rate control means can be controlled according to the signal to keep the liquid level or the weight of the liquefied raw material constant at all times, the mixed gas can be supplied to the burner at an accurate distribution ratio, which in turn results in high quality. There is an effect that the optical fiber preform can be manufactured.
【図１】この発明にかかる原料補給方法が適用されたバ
ブラー原料供給装置を示す略線図。FIG. 1 is a schematic diagram showing a bubbler raw material supply device to which a raw material supply method according to the present invention is applied.
【図２】この発明にかかる原料補給方法が適用されたバ
ブラー原料供給装置を示す構成ブロック図。FIG. 2 is a configuration block diagram showing a bubbler raw material supply device to which the raw material supply method according to the present invention is applied.
【図３】従来のバブラー原料供給装置を示す略線図。FIG. 3 is a schematic diagram showing a conventional bubbler raw material supply device.
１第２の流量制御手段 ２ ロードセル ３ 制御部 ４ 恒温槽 １００，１０２ 補給路 １０１ バブラー １０３ 第１の流量制御手段（ＭＦＣ） １０５ 液化原料 ４ 回転機構 1 2nd flow control means 2 load cell 3 control part 4 thermostat 100, 102 replenishment path 101 bubbler 103 1st flow control means (MFC) 105 liquefaction raw material 4 rotation mechanism
Claims (1)
用したキャリアガスとＧｅＣｌ4 等の液化原料とを夫々
補給路を介して密閉されたバブラー内部に送り込み、こ
のバブラー内部で前記液化原料から気化する原料ガスを
前記キャリアガスに混合させて製造した混合ガスをバー
ナー側へ送り出すバブラー原料供給装置において、 前記キャリアガスと前記液化原料との各補給流量を制御
する流量制御手段を夫々前記各補給路の一部に備えると
ともに、 前記バブラー内部の液化原料の液面の若しくは液化原料
の重量を検出する検出手段を備え、 この検出手段から前記液化原料の液面若しくは重量に応
じて出力する信号を入力すると、その信号に基づいて少
なくとも前記液化原料側の流量制御手段を制御し常時液
化原料の液面を一定に保持することを特徴とするバブラ
ー原料供給装置における原料補給方法。1. A carrier gas using an inert gas such as argon or helium and a liquefied raw material such as GeCl 4 are fed into a sealed bubbler through replenishment paths, respectively, and vaporized from the liquefied raw material inside the bubbler. In the bubbler raw material supply device for sending the mixed gas produced by mixing the raw material gas to the carrier gas to the burner side, flow rate control means for controlling the respective replenishment flow rates of the carrier gas and the liquefied raw material are provided in the respective replenishment paths. And a detection means for detecting the liquid level of the liquefied raw material inside the bubbler or the weight of the liquefied raw material, and a signal to be output according to the liquid level or the weight of the liquefied raw material is input from this detection means. Then, based on the signal, at least the flow rate control means on the liquefaction raw material side is controlled to keep the liquid surface of the liquefaction raw material constant at all times. Raw material supply method in bubbler material supply device according to claim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34610193A JPH07171375A (en) | 1993-12-22 | 1993-12-22 | Raw material supply method in bubbler raw material supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34610193A JPH07171375A (en) | 1993-12-22 | 1993-12-22 | Raw material supply method in bubbler raw material supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07171375A true JPH07171375A (en) | 1995-07-11 |
Family
ID=18381145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34610193A Pending JPH07171375A (en) | 1993-12-22 | 1993-12-22 | Raw material supply method in bubbler raw material supply device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07171375A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040000689A (en) * | 2002-06-25 | 2004-01-07 | 삼성전자주식회사 | Raw material providing device for chemical vapor deposition process |
| KR100814925B1 (en) * | 2006-08-25 | 2008-03-19 | (주)지오엘리먼트 | Method of bubbling precursor using precursor precursor container |
| KR20190052506A (en) * | 2017-11-08 | 2019-05-16 | 한국세라믹기술원 | Source Gas Supply Device |
| CN115407805A (en) * | 2022-09-07 | 2022-11-29 | 常州时创能源股份有限公司 | Control system and method for diffusing carrier gas |
-
1993
- 1993-12-22 JP JP34610193A patent/JPH07171375A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040000689A (en) * | 2002-06-25 | 2004-01-07 | 삼성전자주식회사 | Raw material providing device for chemical vapor deposition process |
| KR100814925B1 (en) * | 2006-08-25 | 2008-03-19 | (주)지오엘리먼트 | Method of bubbling precursor using precursor precursor container |
| KR20190052506A (en) * | 2017-11-08 | 2019-05-16 | 한국세라믹기술원 | Source Gas Supply Device |
| CN115407805A (en) * | 2022-09-07 | 2022-11-29 | 常州时创能源股份有限公司 | Control system and method for diffusing carrier gas |
| CN115407805B (en) * | 2022-09-07 | 2026-02-24 | 常州时创能源股份有限公司 | Control system and method for diffusing carrier source gas |
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