JPH071789Y2 - 縦型気相成長装置 - Google Patents
縦型気相成長装置Info
- Publication number
- JPH071789Y2 JPH071789Y2 JP1989011829U JP1182989U JPH071789Y2 JP H071789 Y2 JPH071789 Y2 JP H071789Y2 JP 1989011829 U JP1989011829 U JP 1989011829U JP 1182989 U JP1182989 U JP 1182989U JP H071789 Y2 JPH071789 Y2 JP H071789Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- lid member
- partition wall
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989011829U JPH071789Y2 (ja) | 1989-02-03 | 1989-02-03 | 縦型気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989011829U JPH071789Y2 (ja) | 1989-02-03 | 1989-02-03 | 縦型気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02102723U JPH02102723U ( ) | 1990-08-15 |
| JPH071789Y2 true JPH071789Y2 (ja) | 1995-01-18 |
Family
ID=31220726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989011829U Expired - Fee Related JPH071789Y2 (ja) | 1989-02-03 | 1989-02-03 | 縦型気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071789Y2 ( ) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6356004B2 (ja) * | 2014-08-05 | 2018-07-11 | 住友化学株式会社 | 反応容器の密閉構造、および基板処理装置 |
| JP6455480B2 (ja) * | 2016-04-25 | 2019-01-23 | トヨタ自動車株式会社 | 成膜装置及び成膜方法 |
| US11251019B2 (en) | 2016-12-15 | 2022-02-15 | Toyota Jidosha Kabushiki Kaisha | Plasma device |
| CN107326340B (zh) * | 2017-08-29 | 2023-06-13 | 京东方科技集团股份有限公司 | 成膜设备 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63190327A (ja) * | 1987-02-03 | 1988-08-05 | Toshiba Corp | 気相成長装置 |
-
1989
- 1989-02-03 JP JP1989011829U patent/JPH071789Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02102723U ( ) | 1990-08-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |