JPH0718765Y2 - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPH0718765Y2
JPH0718765Y2 JP1989091386U JP9138689U JPH0718765Y2 JP H0718765 Y2 JPH0718765 Y2 JP H0718765Y2 JP 1989091386 U JP1989091386 U JP 1989091386U JP 9138689 U JP9138689 U JP 9138689U JP H0718765 Y2 JPH0718765 Y2 JP H0718765Y2
Authority
JP
Japan
Prior art keywords
susceptor
point
chamber
wafer
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989091386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330269U (fr
Inventor
公人 西川
清 久保田
浩一 香門
忠行 大久保
秀之 土井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Original Assignee
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd, Sumitomo Electric Industries Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1989091386U priority Critical patent/JPH0718765Y2/ja
Publication of JPH0330269U publication Critical patent/JPH0330269U/ja
Application granted granted Critical
Publication of JPH0718765Y2 publication Critical patent/JPH0718765Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1989091386U 1989-08-01 1989-08-01 薄膜形成装置 Expired - Fee Related JPH0718765Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989091386U JPH0718765Y2 (ja) 1989-08-01 1989-08-01 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989091386U JPH0718765Y2 (ja) 1989-08-01 1989-08-01 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0330269U JPH0330269U (fr) 1991-03-25
JPH0718765Y2 true JPH0718765Y2 (ja) 1995-05-01

Family

ID=31640871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989091386U Expired - Fee Related JPH0718765Y2 (ja) 1989-08-01 1989-08-01 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0718765Y2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000025719A (ja) * 1998-07-08 2000-01-25 Saitama Medeikomu Kk 薬袋作成システム
JP4987192B2 (ja) * 2001-03-28 2012-07-25 東日本メディコム株式会社 薬剤の服用時点別包装システム
JP2005183834A (ja) 2003-12-22 2005-07-07 Toshiba Ceramics Co Ltd バレル型サセプタ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5948789B2 (ja) 2011-10-18 2016-07-06 大日本印刷株式会社 複写帳票

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5948789B2 (ja) 2011-10-18 2016-07-06 大日本印刷株式会社 複写帳票

Also Published As

Publication number Publication date
JPH0330269U (fr) 1991-03-25

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Legal Events

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LAPS Cancellation because of no payment of annual fees