JPH0719070B2 - Light receiving member - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to light (here, light in a broad sense, ultraviolet light, visible light,
The present invention relates to a light receiving member sensitive to electromagnetic waves such as infrared rays, X rays, and γ rays). More specifically, it relates to a light receiving member suitable for using coherent light such as laser light.

[Description of Prior Art]

As a method of recording digital image information as an image, an electrostatic latent image is formed by optically scanning a light receiving member with laser light modulated according to the digital image information, and then the latent image is developed, Further, a method of recording an image is known, in which transfer, fixing and the like are performed as necessary. In particular, in the image forming method by electrophotography, a small and inexpensive He-Ne laser or semiconductor laser ( It is common to carry out image recording using a light emission wavelength of 650 to 820 nm).

By the way, as a light receiving member for electrophotography suitable when using a semiconductor laser, in addition to the fact that the matching of the light sensitive region is superior to other types of light receiving members,
The Vickers hardness is high, and the problem of pollution is small. It is evaluated, for example, in JP-A-54-86341 and JP-A-56-837.
Attention has been focused on a light receiving member made of an amorphous material containing silicon atoms (hereinafter abbreviated as "a-Si") as disclosed in Japanese Patent Laid-Open No. 46-46.

However, regarding the light-receiving member, when the light-receiving layer is a single-layer a-Si layer, while maintaining its high photosensitivity, it is possible to secure a dark resistance of 10 ¹² Ωcm or more required for electrophotography. Is required to structurally contain a hydrogen atom, a halogen atom, or a boron atom in addition to them in a controlled amount in a specific amount range. Therefore, various conditions for forming a layer are required. There is a considerable limit to the tolerance of the design of the light receiving member, such as the need to strictly control the It has been proposed to improve the design tolerance by making the high photosensitivity effective even if the dark resistance is low to some extent. That is, for example, JP 54-121743 A, JP 57-
No. 4053, JP-A-57-4172, the light-receiving layer has a layered structure of two or more layers in which layers having different conductivity characteristics are laminated, and a depletion layer is formed inside the light-receiving layer, or JP-A-57-52178, 52179, 52180, 58159
No. 58160, No. 58161, each of which has a multilayer structure in which a barrier layer is provided between the support and the photoreceptive layer or / and on the upper surface of the photoreceptive layer. A light receiving member having improved dark resistance has been proposed.

However, such a light-receiving layer having a multi-layered light-receiving layer has a variation in the layer thickness of each layer, and when laser recording is performed using this, the laser beam is a coherent monochromatic light. From the laser light irradiation side free surface, each layer constituting the light receiving layer and the layer interface between the support and the light receiving layer (hereinafter, both the free surface and the layer interface are collectively referred to as “interface”). Often, each of the reflected light that is reflected causes interference.

This interference phenomenon is a so-called
It appears as an interference fringe pattern, which causes a defective image. In particular, when forming a halftone image with high gradation, a blocking image with extremely poor discrimination is provided.

Another important point is that the absorption of the laser light in the light-receiving layer decreases as the wavelength region of the semiconductor laser light used becomes longer, which causes a problem that the interference phenomenon becomes remarkable. .

This point will be described below with reference to the drawings.

FIG. 6 shows light I ₀ incident on a certain layer constituting the light receiving layer of the light receiving member, reflected light R ₁ reflected by the upper interface 602, and reflected light R ₂ reflected by the lower interface 601. .

Then, the average layer thickness of the layer is d, the refractive index is n, the wavelength of light is λ, and the layer thickness of a certain layer is gentle. If the difference in layer thickness is uneven, the reflected lights R ₁ and R ₂ will be 2nd = mλ.
(M is an integer, reflected light strengthens each other) The amount of absorbed light and the amount of transmitted light of a certain layer change depending on which of the conditions (m is an integer and reflected lights weaken each other) is satisfied. That is, in the case where the light receiving member has a structure of two or more layers (multilayer) as shown in FIG. 7, an interference effect as shown in FIG. The state shown in FIG. 7 is obtained, and as a result, the interferences act synergistically to form an interference fringe pattern, which affects the transfer member as it is, and the interference fringe pattern is formed on the member. If the interference fringes corresponding to the above appear on the visible image transferred and fixed to cause a defective image, there is a problem.

As a measure to solve this problem, (a) a method of diamond-cutting the surface of a support to form irregularities of ± 500Å to ± 10000Å to form a light-scattering surface (see, for example, JP-A-58-162975), (B) A method of providing a light absorbing layer by black-anodizing the surface of an aluminum support or dispersing carbon, a coloring pigment or a dye in a resin (see, for example, JP-A-57-165845). (C) A method of providing a light-scattering and antireflection layer on the surface of an aluminum support by subjecting the surface of the aluminum support to a matte finish alumite treatment or providing fine irregularities in the shape of sand with a sand plast (for example, JP-A-57)
-16554 gazette) is proposed.

Although these proposed methods bring some results, they are not sufficient to completely eliminate the interference fringe pattern appearing on the image.

That is, regarding the method (a), although a large number of irregularities of a specific size are provided on the surface of the support, although the appearance of an interference fringe pattern due to the light scattering effect is prevented for the time being,
Since the specularly reflected light component still remains as the light diffusion, the interference fringe pattern due to the specularly reflected light remains, and the irradiation spot spreads due to the light scattering effect on the surface of the support, and The resolution will be reduced.

With regard to the method (b), the black alumite treatment cannot completely absorb the light, and the reflected light on the surface of the support remains. Further, when providing the color pigment dispersed resin layer,
When the a-Si layer is formed, the degassing phenomenon from the resin layer occurs, and the quality of the formed light-receiving layer is significantly deteriorated. The resin layer is damaged by the plasma when the a-Si layer is formed. As a result, there is a problem that the original absorption function is reduced and the subsequent formation of the a-Si layer is adversely affected by the deterioration of the surface state.

Regarding the method (c), as shown in FIG. 8, for example, incident light I ₀ is partially reflected by the surface of the light receiving layer 802 to become reflected light R ₁ , and the rest is the light receiving layer 802. Enters into the inside of and becomes transmitted light I ₁ . A part of the transmitted light I ₁ is scattered on the surface of the support 801 to become diffused light K ₁ , K ₂ , K ₃ ... And the rest is specularly reflected to become reflected light R ₂ . A part of the emitted light R ₃ goes out to the outside, but the emitted light R ₃ is a component that interferes with the reflected light R ₁ and remains in any case, so the interference fringe pattern still disappears. do not do.

By the way, in order to prevent interference in this case, there is an attempt to increase the diffusivity of the surface of the support 801 so that multiple reflection inside the light-receiving layer does not occur. Then, the light diffuses to cause halation and eventually the resolution is lowered.

In particular, in the multi-layered light receiving member, even if the surface of the support 901 is irregularly roughened as shown in FIG.
Reflected light R ₂ on the surface at 02, reflected light R _{1 on} the second layer, support
The specularly reflected lights R _{3 on} the 901 surface interfere with each other to form an interference fringe pattern according to the thickness of each layer of the light receiving member. Therefore, in the light receiving member having a multilayer structure, it is impossible to completely prevent the interference fringes by irregularly roughening the surface of the support 901.

In addition, when the surface of the support is irregularly roughened by a method such as sandblast, the roughness varies widely among the lots, and the roughness is uneven even within the same lot. Therefore, there is a problem in manufacturing control. In addition, relatively large projections are often formed randomly, and such large projections cause local breakdown of the photoreceptor layer.

Further, when the surface of the support is simply roughened, as shown in FIG. 10, usually, along the uneven shape 1003 of the surface of the support 1001, the light receiving layer 1002 is deposited, so that the support 1001 The uneven inclined surface and the uneven inclined surface of the light receiving layer 1002 are 1003 ′, 10
It becomes parallel as indicated by 04 '.

Therefore, in that part, the incident light is 2nd ₁ = mλ or The relationship is established, and becomes a bright part or a dark part, respectively. In the entire light-receiving layer, the maximum difference among the respective thicknesses d ₁ , d ₂ , d ₃ , and d ₄ of the light-receiving layer is As a result, there is a non-uniformity of the layer thickness such that a bright and dark striped pattern appears.

Therefore, the occurrence of the interference fringe pattern cannot be completely prevented only by regularly roughening the surface of the support 1001.

Also, when a multi-layered light-receiving layer is deposited on a support whose surface is regularly roughened, regular reflection on the surface of the support described in the single-layered light-receiving member shown in FIG. In addition to the interference between the light and the reflected light on the surface of the light-receiving layer, the interference due to the reflected light at the interface between the layers is added, so that the degree of appearance of the interference fringe pattern of the light-receiving member having a further structure becomes more complicated.

[Object of the Invention]

An object of the present invention is to eliminate the above-mentioned problems and satisfy various requirements for a light-receiving member having a light-receiving layer mainly composed of a-Si.

That is, the main object of the present invention is that electrical, optical, and photoconductive properties are substantially stable regardless of the use environment, are substantially stable to light, and have excellent light fatigue resistance, and even when repeatedly used, a deterioration phenomenon. To provide a light-receiving member having a light-receiving layer composed of a-Si, which has excellent durability and moisture resistance, does not cause residual potential at all or is hardly observed, and is easy to manage in production. is there.

Another object of the present invention is to provide a photoreceptive member having a photoreceptive layer composed of a-Si, which has high photosensitivity in the entire visible light region, is particularly excellent in mating property with a semiconductor laser, and has a fast photoresponse. To provide.

Still another object of the present invention is to provide a light-receiving member having a light-receiving layer composed of a-Si, which has high photosensitivity, high S / N ratio specification, and high electrical withstand voltage.

Another object of the present invention is to provide excellent adhesion between the layer provided on the support and the support or between the layers of the laminated layers,
A-Si, which is dense and stable in terms of structural arrangement and has high layer quality
Another object of the present invention is to provide a light receiving member having a light receiving layer composed of.

Still another object of the present invention is suitable for image formation using coherent monochromatic light, and even during long-term repeated use, there is no appearance of interference fringe patterns and spots during reversal development, and there are no image defects or images. To provide a photoreceptive member having a photoreceptive layer composed of a-Si capable of obtaining a high-quality image with high density, high density, clear halftone, and no blurring. It is in.

[Structure of Invention]

The present inventors have earnestly studied to overcome the above-mentioned problems of the conventional light-receiving member and achieve the above-mentioned object, and as a result, have obtained the following findings, and based on the findings, the present invention Was completed.

The present invention provides a periodic, on the surface of a cylindrical support having convex portions forming a spiral structure, a silicon atom, at least one of a germanium atom and a tin atom, an oxygen atom, a carbon atom and a nitrogen atom. At least one member selected from the group consisting of, and a light-receiving member having a multi-layered light-receiving layer having at least a photosensitive layer composed of an amorphous material containing, wherein the surface of the cylindrical support is The cross-sectional shape of the convex portion in a plane including the central axis of the cylindrical support is a convex shape in which a sub-peak overlaps the main peak, and the size of one period of the main peak is the cylindrical support. The diameter of the coherent irradiation light to be irradiated onto the cylindrical support, and the light-receiving layer on the surface of the cylindrical support has at least a pair of non-parallel interfaces in the short range, and the non-parallel interfaces. In the plane perpendicular to the layer thickness direction Even without an optical receiving member, characterized in that those that are arrayed in one direction.

By the way, as a result of earnest studies by the present inventors, the findings are as follows: in a light-receiving member having a plurality of layers on a support, an uneven shape finer than the resolution required for the light-receiving member. Is formed on the surface of the support, and at least a pair of non-parallel interfaces is formed in a minute portion (hereinafter, referred to as “short range”) within one cycle of the uneven shape, and the non-parallel interface is formed. The problem of interference fringe patterns appearing during image formation can be solved by arranging a large number in at least one direction within a plane perpendicular to the layer thickness direction, and in that case, the vertical section of the convex and concave portions provided on the surface of the support. The surface shape is
Controlled non-uniformity of the layer thickness of each layer formed in the short range, good adhesion between the support and the layer directly provided on the support, or further secure desired electrical contact Therefore, it is desirable that the main peak has a shape in which the sub-peak is superposed.

This finding is based on the factual relations obtained by various experiments that the present inventors have tried.

This will be described below with reference to the drawings in order to facilitate understanding.

FIG. 1 is a schematic view showing an example of a light-receiving member having a multi-layered light-receiving layer according to the present invention. In this example, the surface of the support 101 has a cross-sectional shape in which a sub-peak is superimposed on the main peak to form a plurality of minute uneven shapes, and on the support 101, along the uneven shape. , A light receiving layer including a first layer 102 and a second layer 103.

2 to 4 are views for explaining the problem of the interference fringe pattern in the light receiving member of the present invention.

FIG. 2 (A) is an enlarged view of a part of the light receiving layer of the light receiving member shown in FIG. 1, and FIG. 2 (B) is a view showing brightness in the same portion. In the figure, 202 is a first layer, 203 is a second layer, 204 is a free surface, and 205 is an interface between the first layer and the second layer. As shown in FIG. 2 (A), since the layer thickness of the second layer 203 continuously changes from d ₂₁ to d ₂₂ in the short range l, the free surface
The interface 204 and the interface 205 have different inclinations. Therefore, the coherent light such as laser light that has entered the short range l causes interference in the short range l, and a minute interference fringe pattern is generated. However, the interference fringes generated in the short range 1 do not appear in the image because the size of the short range 1 is smaller than the irradiation light spot diameter, that is, smaller than the resolution limit.
In addition, although it is almost nonexistent, even if a situation appears in the image, the resolution is less than that of the naked eye, so that there is practically no problem.

On the other hand, in FIG. 3 (however, 302 is the first layer, 303 is the second layer, 304 is the free surface, and 305 is the interface between the first layer 302 and the second layer 303). As shown, when the interface 305 between the first layer 302 and the second layer 303 and the free surface 304 are not parallel (see FIG. 3 (A)), reflection of the incident light I ₀ is performed. Since the traveling directions of light R ₁ and emitted light R ₃ are different,
305 and free surface 304 are parallel (see FIG. 3 (B))
The degree of interference is reduced as compared to the case. That is, even if interference occurs, the degree of interference is smaller when the pair of interfaces are in a non-parallel relationship than when the pair of interfaces are in a parallel relationship, as shown in FIG. 3 (C). Therefore, the difference in brightness of the interference fringe pattern becomes negligibly small, and as a result, the amount of incident light is averaged.

This means that, as shown in FIG. 2 (C), the second layer 203
Is non-uniform macroscopically, that is, the layer thicknesses d ₂₃ and d ₂₄ of the second layer at any two different positions are d ₂₃
Even when ≠ d ₂₄ , the same is true, and the amount of incident light is uniform in all layer regions as shown in FIG. 2 (D).

The case where the light-receiving layer is composed of the first layer and the second layer has been described above, but the light-receiving member of the present invention has a multilayer light-receiving layer having three or more layers. , For example,
Even when the light receiving layer formed on the support 401 as shown in FIG. 4 is composed of a first layer 402, a second layer 403, and a third layer 404, There are reflected lights R ₁ , R ₂ , R ₃ , R ₄ and R ₅ with respect to the light I ₀ , but in each layer of 402, 403 and 404, the amount of incident light as described with reference to FIG. The phenomenon of averaging occurs.

Moreover, the interface of each layer in the short range 1 acts as a kind of slit, where a diffraction phenomenon occurs.

Therefore, the interference in each layer appears as the product of the interference due to the difference in the layer thickness and the interference due to the diffraction at the layer interface.

Therefore, when considering the entire light-receiving layer, interference has a synergistic effect in each layer, so that in the light-receiving member of the present invention, as the number of layers constituting the first layer increases, The influence of interference can be prevented.

The support of the light-receiving member of the present invention having the above-described experimentally confirmed factual relationship has a surface having fine irregularities smaller than the resolution required for the light-receiving member, and The cross-sectional shape of the unevenness has a shape in which a sub-peak is superimposed on a main peak.

The use of a support having a hard surface shape causes an image formed by interfering with a light-receiving member having a light-receiving layer formed thereon, by reflecting light passing through the light-receiving layer on the surface of the support. Is efficiently prevented from forming a striped pattern, which leads to formation of an excellent image.

With respect to the surface of the support of the light receiving member of the present invention, the size l of one cycle of the suitable uneven shape is L is the spot diameter of the irradiation light.
If so, it is necessary that l ≦ L.

Further, the multi-layered light-receiving layer of the light-receiving member of the present invention has a silicon atom (Si), at least one of a germanium atom (Ge) and a tin atom (Sn), an oxygen atom (O), and a carbon atom. Amorphous material containing at least one selected from (C) and nitrogen atom (N), and preferably at least one of hydrogen atom (H) and halogen atom (X) [hereinafter referred to as “a-Si (Ge, S
n) (H, X) ”. ] And at least an atom belonging to Group III or Group V of the periodic table (a substance which controls conductivity) can be contained. The light receiving layer comprises a charge injection blocking layer containing a substance that controls conductivity as one of the constituent layers.
It is desirable to have one of the constituent layers and / or one of the barrier layers.

In the light receiving member of the present invention, the support having the above surface shape and the light receiving layer formed on the support are closely related. That is, the light-receiving member of the present invention has a first layer and a second layer laminated on a support, and the first layer will be described in detail later. As described above, for the purpose of preventing interference, a localized region containing a relatively large amount of germanium atoms and / or tin atoms is formed at the end of the first layer on the support side, or / and A localized region (ie, charge blocking layer) containing a relatively large amount of a substance that controls conductivity is formed at the end of the first layer on the support side, and / or the end of the first layer on the support side. It is desirable to form a barrier layer on the support, and in the light-receiving member of the present invention having such a structure, a plurality of interfaces are formed by a plurality of layers on the support. There is at least one pair of non-parallel interfaces in l.

In order to achieve the object of the present invention more effectively, the difference in the layer thickness in the short range 1, for example, the difference between d ₂₁ and d ₂₂ in FIG. Let λ be the following equation: It is desirable to satisfy. The upper limit of the difference in layer thickness is preferably 0.1 μm to 2 μm, more preferably 0.1 μm.
m to 1.5 μm, optimally 0.2 μm to 1 μm.

As described above, in the light receiving member of the present invention, the layer thickness of each layer is controlled so that at least any two interfaces are in a non-parallel relationship within the short range 1, but as long as this condition is satisfied, There may be parallel interfaces. However, in that case, when two arbitrary positions are taken at interfaces having a parallel relationship, the layer thickness difference at those positions is Δl, the wavelength of the irradiation light is λ, and the refractive index of the layer is n. , The following formula: It is desirable to form the layer or layer region so as to satisfy

Regarding the production of the first layer and the second layer of the present invention, in order to efficiently achieve the aforementioned objects of the present invention, it is necessary to precisely control the layer thickness at an optical level, Vacuum deposition methods such as glow discharge method, spattering method and ion plating method are usually used.
A CVD method, a thermal CVD method or the like can also be adopted.

Hereinafter, the specific structure of the light receiving member of the present invention will be described in detail with reference to FIG.

FIG. 1 is a diagram schematically showing the layer structure of the light receiving member of the present invention, in which 100 is a light receiving member, 1
01 is a support, 102 is a first layer, 103 is a second layer, and 104 is a free surface.

Support 101 The support 101 in the light receiving member of the present invention has a surface having unevenness smaller than the resolution required for the light receiving member, and the cross-sectional shape of the unevenness has a main peak and a sub-peak superposed thereon. It has a shape.

The concavo-convex shape provided on the surface of the support is formed by a chemical method such as chemical etching, electric plating, a physical method such as vapor deposition and sputtering, and a mechanical method such as lathe processing. To make it easier,
A mechanical working method such as a lathe is preferable.

For example, when the surface of a support is machined by a lathe, a cutting tool having a V-shaped cutting edge is fixed at a predetermined position of a cutting machine such as a milling machine or a lathe, and a cylindrical support is designed in advance as desired. The surface of the support is accurately cut by rotating the support in a predetermined direction while rotating it in accordance with the program thus formed, so that a desired uneven shape, pitch, and depth are formed. The linear protrusion formed by the unevenness formed by such a cutting method has a spiral structure centered on the central axis of the cylindrical support. The spiral structure of the protrusion may be a double or triple multiple spiral structure or a cross spiral structure. Alternatively, in addition to the spiral structure, a linear structure along the central axis may be introduced.

Further, it is preferable that the uneven shapes are regularly or periodically arranged in order to efficiently achieve the object of the present invention. Furthermore, in addition to this, in order to efficiently scatter the incident light in one direction, the uneven shape is symmetrical (FIG. 5 (A)) or asymmetrical (fifth) with respect to the main peak thereof.
It is preferable that they are unified as shown in FIG. But,
In order to increase the degree of freedom in processing control of the support, it is preferable that both are mixed.

In the present invention, each dimension of minute irregularities provided on the surface of the support in a controlled state is set so as to effectively achieve the object of the present invention in consideration of the following points. .

That is, first, the a-Si layer constituting the light receiving layer is structurally sensitive to the state of the surface on which the layer is formed, and the layer quality greatly changes depending on the surface state.

Therefore, it is necessary to set the dimension of minute irregularities provided on the surface of the support so as not to deteriorate the quality of the a-Si layer.

Secondly, if the free surface of the light-receiving layer has extreme irregularities, it becomes impossible to completely perform cleaning after image formation.

Further, when performing blade cleaning, there is a problem that damage to the blade becomes faster.

As a result of examining the above-mentioned problems in layer deposition, problems in the process of electrophotography, and conditions for preventing interference fringe patterns,
The pitch of the recess on the surface of the support is usually 0.3 μm to 500 μm.
m, preferably 1 μm to 200 μm, more preferably 5 μm
It is desirable that it is m to 50 μm.

The maximum depth of the recess is preferably 0.1 μm to 5 μm,
More preferably 0.3 μm to 3 μm, optimally 0.6 μm to 2
It is desirable to be set to μm. When the pitch and the maximum depth of the concave portion on the surface of the support are within the above range, the inclination of the inclined surface of the concave portion (or linear projection) is preferably 1 to 20 degrees, more preferably 3 to 15 degrees, Optimally, it is desirable to set it to 4 to 10 degrees.

The support 101 used in the present invention may be either conductive or electrically insulating. As the conductive support, for example, NiCr, stainless steel, Al, Cr, Mo,
Examples include metals such as Au, Nb, Ta, V, Ti, Pt, and Pb, and alloys thereof.

Examples of the electrically insulating support include films or sheets of synthetic resin such as polyester, polyethylene, polycarbonate, cellulose, acetate, polypropylene, polyvinyl chloride, polyvinylidene chloride, polystyrene and polyamide, glass, ceramics, paper and the like. It is preferable that at least one surface of these electrically insulating supports is subjected to a conductive treatment, and a light receiving layer is provided on the surface side subjected to the conductive treatment.

For example, if it is glass, NiCr, Al, Cr,
Mo, Au, Ir, Nb, Ta, V, Ti, Pt, Pd, In ₂ O ₃ , SnO ₂ , I
Conductivity is provided by providing a thin film made of TO (In ₂ O ₃ + SnO ₂ ) or the like, or synthetic resin film such as polyester film is made of NiCr, Al, Ag, Pb, Zn, Ni,
A thin film of a metal such as Au, Cr, Mo, Ir, Nb, Ta, V, Tl, or Pt is provided on the surface by vacuum evaporation, electron beam evaporation, sputtering, or the surface is laminated with the metal. Conductivity is given to the surface. The shape of the support can be any shape such as a cylindrical shape, a belt shape, a plate shape, etc., but the shape can be appropriately determined depending on the application and desire. For example, the light receiving member 100 of FIG.
When used as an electrophotographic image forming member, in the case of continuous high speed copying, an endless belt shape or a cylindrical shape is desirable. The thickness of the support is appropriately determined so that a desired light-receiving member can be formed, but when flexibility is required as the light-receiving member, a range in which the function as the support is sufficiently exhibited It can be made as thin as possible.
However, in terms of mechanical strength and the like in terms of manufacturing and handling of the support, it is usually 10 μm or more.

Photoreceptive Layer In the photoreceptive member of the present invention, the photoreceptive layer 102 is formed on the above-mentioned support 101, and is a-Si (Ge, Sn) (C, O, N) (H, X).
And has a free surface 103 on one end face. Further, the photoreceptive layer may optionally contain a substance controlling conductivity, and a charge injection blocking layer containing a relatively large amount of the substance controlling conductivity and / or
Alternatively, it is desirable to have a barrier layer as a constituent layer of the end portion on the support side.

Specific examples of the halogen atom that can be contained in the light-receiving layer of the present invention include fluorine, chlorine, bromine, and iodine, and fluorine and chlorine are particularly preferable. The amount of hydrogen atoms (H) or the amount of halogen atoms (X) or the sum of the amounts of hydrogen atoms and halogen atoms (H + X) contained in the receptor layer of the present invention is preferably 0.01 to 40 atomic%, Preferably 0.05 to 30 atomic%,
Optimally, 0.1 to 25 atomic% is desirable.

Further, in the light receiving member of the present invention, the layer thickness of the light receiving layer is one of the important factors for efficiently achieving the object of the present invention, and the desired property is given to the light receiving member. As described above, it is necessary to pay sufficient attention when designing the light receiving member, and usually 1 to 100 μm, but preferably 1 to 80 μm.
μ, and more preferably 2 to 50 μ.

By the way, the purpose of incorporating a germanium atom and / or a tin atom into the light-receiving layer of the light-receiving member of the present invention is mainly to improve the absorption spectrum characteristics on the long wavelength side of the light-receiving member.

That is, by containing a germanium atom and / or a tin atom in the light-receiving layer, the light-receiving member of the present invention exhibits various excellent properties, and particularly includes the visible light region. The photosensitivity is excellent and the light responsivity is fast with respect to the light having the wavelength in the entire range from the relatively short wavelength to the relatively long wavelength. And this is especially remarkable when a semiconductor laser is used as a light source.

In the light-receiving layer in the present invention, germanium atoms and / or tin atoms are contained in the entire layer region in a uniform distribution state or in a non-uniform distribution state. (Here, the uniform distribution state means that the distribution concentration of germanium atoms and / or tin atoms is uniform in the plane direction parallel to the support surface of the photoreceptor layer, and even in the layer thickness direction of the photoreceptor layer. The nonuniform distribution state means that the distribution concentration of germanium atoms and / or tin atoms is uniform in the plane direction parallel to the support surface of the photoreceptor layer, In the light-receiving layer of the present invention, a relatively large amount of a germanium atom and / or a tin atom is contained in a uniform distribution in the end portion on the support side. It is desirable to provide a layer to be formed, or to contain germanium atoms and / or tin atoms so as to be distributed more on the support side than on the free surface side. In such a case, the germanium atom at the end on the support side is preferable. When the distribution concentration of atoms and / or tin atoms is made extremely large, when a long-wavelength light source such as a semiconductor laser is used, almost all of the constituent layers or layer regions close to the free surface side of the light-receiving layer are exposed. Long-wavelength light that cannot be completely absorbed is substantially completely absorbed in the constituent layer or layer region of the light-receiving layer which is in contact with the support, so that interference due to light reflected from the support surface is prevented. .

As described above, in the light-receiving layer of the present invention, germanium atoms and / or tin atoms can be uniformly distributed in the entire layer region, or can be continuously and unevenly distributed in the layer thickness direction. Hereinafter, some typical examples of the distribution state in the layer thickness direction will be described with reference to FIGS. 11 to 19 by taking a germanium atom as an example.

11 to 19, the horizontal axis represents the distribution concentration C of germanium atoms, the vertical axis represents the layer thickness of the photoreceptive layer, t _B represents the position of the end surface of the photoreceptive layer on the support side, t _T Indicates the position of the end surface on the free surface side opposite to the support side. That is, the photoreceptive layer containing germanium atoms is formed from the t _B side toward the t _T side.

It should be noted that in each figure, the display of the layer thickness and the concentration is shown in an extreme form because the difference between the figures becomes unclear if the values are shown as they are. It is a schematic one for explaining to do.

FIG. 11 shows a first typical example of the distribution state of germanium atoms contained in the light-receiving layer in the layer thickness direction.

In the example shown in FIG. 11, the distribution concentration C of germanium atoms is from the interface position t _B where the support surface on which the photoreceptive layer containing germanium atoms is formed and the photoreceptive layer are in contact to the position t _1. The germanium atom is contained in the photoreceptive layer so that the concentration becomes C ₁ and the concentration is gradually reduced continuously from the position t ₁ to the position t _T from the concentration C ₂ . At the position t _T , the distribution concentration C of germanium atoms is substantially zero. (Here, substantially zero is the case where the amount is less than the detection limit amount.) In the example shown in FIG. 12, the distribution concentration C of germanium atoms contained is from the position t _B to the position t _T.
A distribution state is formed in which the concentration gradually decreases continuously from C ₃ and the concentration becomes C ₄ at the position t _T.

In the case of FIG. 13, from the position t _B to the position t ₂ , the distribution concentration C of germanium atoms is set at a constant position with the concentration C ₅ ,
between t ₂ and position t _T , gradually and continuously reduced,
At the position t _T , the distribution density C is substantially zero.

In the case of FIG. 14, the distribution concentration C of germanium atoms gradually decreases continuously from the position t _B to the position t _T , starting from the concentration C _{6 and} rapidly decreasing from the position t _3. And is made substantially zero at the position t _T.

In the example shown in FIG. 15, the distribution concentration C of germanium atoms is a constant value with the concentration C ₇ between the positions t _B and t ₄ , and the distribution concentration C is at the position t _T. It will be zero. position
Between t ₄ and the position t _T , the distribution density C is linearly positioned.
It is reduced from t ₄ to the position t _T.

In the example shown in FIG. 16, the distribution density C takes a constant value of the density C ₈ from the position t _B to the position t ₅ , and the position from the position t ₅
Up to t _T, the distribution state is such that it decreases linearly from concentration C ₉ to concentration C ₁₀ .

In the example shown in FIG. 17, from the position t _B to the position t _T , the distribution concentration C of germanium atoms is linearly reduced from the concentration C ₁₁ and reaches zero.

In FIG. 18, the distribution concentration C of germanium atoms from the position t _B to the position t ₆ is linearly decreased from the concentration C ₁₂ to the concentration C _13, and between the positions t ₆ and t _T. Shows an example in which the concentration C _{13 is} a constant value.

In the example shown in FIG. 19, the distribution concentration C of germanium atoms is the concentration C ₁₄ at the position t _B , and is gradually reduced from this concentration C ₁₄ until reaching the position t ₇ , and then t ₇ in the vicinity of the position, the position is rapidly reduced t ₇
Then the concentration is C ₁₅ .

Between position t ₇ and position t ₆ , the concentration is first sharply reduced, and then gradually and gradually reduced to the concentration at position t ₈ .
It becomes C ₁₆ and is gradually reduced between the positions t ₈ and t ₉ to reach the concentration C ₁₇ at the position t ₉ . Position t ₉ and position t _T
In the range between and, the concentration is decreased according to the curve having the shape as shown in the figure so that the concentration becomes substantially zero than C ₁₇ .

As described above with reference to FIGS. 11 to 19, some of typical examples of the distribution state of germanium atoms and / or tin atoms contained in the light receiving layer in the layer thickness direction are explained. In the member, on the support side, a portion having a high distribution concentration C of germanium atoms or / and tin atoms,
On the end face t _T side, it is preferable that the light receiving layer is provided with a distribution state of germanium atoms and / or tin atoms having a portion where the distribution concentration C is considerably lower than that on the support side.

That is, the light-receiving layer constituting the light-receiving member in the present invention preferably has a localized region containing a relatively high concentration of germanium atoms and / or ds atoms on the support side as described above. Is desirable.

In the light receiving member of the present invention, the localized region is preferably provided within 5 μm from the interface position t _B , as described using the symbols shown in FIGS. 11 to 19.

The localized region may be the entire layer region up to the thickness of 5 μm from the interface position t _B , or may be a part of the layer region.

Whether the localized region is a part or the whole of the layer region is
It is appropriately determined according to the characteristics required of the formed light receiving layer.

The localized region is a germanium atom contained in it or /
And, as the distribution state of the tin atoms in the layer thickness direction, the maximum value C _max of the distribution concentration of germanium atoms or / and tin atoms is preferably 1000 atomic ppm or more, more preferably 5000 atomic ppm or more, most preferably to the silicon atom. 1 × 10 ⁴ atomi
It is desirable to form a layer so that a distribution state such as c ppm or more can be obtained.

That is, in the light-receiving member of the present invention, the light-receiving layer containing germanium atoms and / or tin atoms has a distribution concentration within 5 μm (layer region from t _B to 5 μm) within the layer thickness from the support side. It is preferably formed such that there is a maximum value C _max .

In the light receiving member of the present invention, the content of the germanium atom or / and the soot atom to be contained in the light receiving layer needs to be appropriately determined as desired so that the object of the present invention can be efficiently achieved, It is usually 1 to 6 × 10 ⁵ atomic ppm, preferably 10 to ³ × 10 ⁵ atomic ppm, more preferably 1 × 10 ² to 2 × 10 ⁵ atomic ppm.

The purpose of incorporating at least one selected from oxygen atom, carbon atom and nitrogen atom in the light-receiving layer of the light-receiving member of the present invention is mainly to increase the photosensitivity and dark resistance of the light-receiving member, and to support it. It is to improve the adhesion between the body and the light receiving layer.

In the light-receiving layer of the present invention, when at least one selected from oxygen atom, carbon atom and nitrogen atom is contained, it is contained in a uniform distribution state in the layer thickness direction,
Alternatively, whether or not it is contained in a non-uniform distribution state in the layer thickness direction differs depending on the above-mentioned purpose or expected effect, and therefore the amount to be contained also differs.

That is, in the case of aiming at high photosensitivity and high dark resistance of the light receiving member, it is contained in a uniform distribution state in the entire layer region of the light receiving layer, in this case, carbon atoms contained in the light receiving layer, The amount of at least one selected from oxygen atoms and nitrogen atoms may be relatively small.

Further, when the purpose is to improve the adhesiveness between the support and the light-receiving layer, it is uniformly contained in the constituent layer 102 at the end of the light-receiving layer on the support side, or the support of the light-receiving layer is supported. At the body side end, carbon atoms, oxygen atoms, and at least one selected from the nitrogen atoms contained in a distributed state such that the distribution concentration is high, in this case, oxygen atoms contained in the light-receiving layer, carbon atoms, The amount of at least one selected from the group consisting of nitrogen atoms and nitrogen atoms is made relatively large in order to surely improve the adhesion to the support.

In the light receiving member of the present invention, the amount of at least one selected from oxygen atom, carbon atom and nitrogen atom contained in the light receiving layer is not limited to the above-mentioned properties required for the light receiving layer. In addition, it is determined in consideration of organic relevance such as characteristics at the contact interface with the support, and usually 0.001 to 50 atomic%, preferably
0.002 to 40 atomic%, optimally 0.003 to 30 atomic%.

By the way, when it is contained in the whole layer area of the light-receiving layer, or when the ratio of the layer thickness of a part of the layer area to be contained in the layer thickness of the light-receiving layer is large, the above-mentioned upper limit of the content is included. Is reduced. That is, in that case, for example, the layer thickness of the layer region to be contained is equal to the layer thickness of the light receiving layer.
In case of 2/5, the content is usually 30a.
tomic% or less, preferably 20atomic% or less, optimally 10a
tomic% or less.

Next, the amount of at least one selected from oxygen atoms, carbon atoms and nitrogen atoms contained in the light-receiving layer of the present invention is relatively large on the support side, and the amount of at least one from the end on the support side to the free surface side. Some of the typical examples of decreasing toward the edge and distributing relatively small amount or near zero near the edge on the free surface side of the photoreceptor layer. Will be described with reference to FIGS. 20 to 28. However, the invention is not limited by these examples. Hereinafter, at least one selected from carbon atom, oxygen atom and nitrogen atom will be referred to as “atom (O, C, N)”. 20 to 28, the horizontal axis represents the distribution concentration C of atoms (O, C, N), the vertical axis represents the layer thickness of the light receiving layer, and t _B represents the interface position between the support and the light receiving layer. , _{T T} represents the position of the end surface on the free surface side of the photoreceptor layer.

FIG. 20 shows a first typical example of the distribution state of atoms (O, C, N) contained in the light-receiving layer in the layer thickness direction. In this example, the distribution concentration C of atoms (O, C, N) is C ₁ from the interface position t _B between the photoreceptor layer containing the atoms (O, C, N) and the support to the position t _1. It takes a constant value, the position t ₁ from the free surface side end surface position t _T to the atom (O, C, N) distribution concentration C of continuously decreases from the concentration C _2, atoms in position t _T (O, The distribution concentration C of (C, N) becomes the concentration C ₃ .

In another typical example shown in FIG. 21, the distribution concentration C of atoms (O, C, N) contained in the photoreceptive layer varies from the position t _B to the position t.
_It continuously decreases from the concentration C ₄ until reaching _T, and reaches the concentration C ₅ at the position t _T.

In the example shown in FIG. 22, from the position t _B to the position t ₂ the atom (O,
C, N) distribution density C keeps a constant value of density C ₆ , and at position t ₂
From the position C to the position t _T , the distribution concentration C of the atom (O, C, N) gradually and continuously decreases from the concentration C _7, and the distribution concentration of the atom (O, C, N) at the position t _T. C is substantially zero.

In the example shown in FIG. 23, atoms (O, C, N) until the distribution concentration C of the lead to the position t _T to the position t _B, gradually decreases from the concentration C ₈ continuously atom in position t _T The distribution concentration C of (O, C, N) becomes substantially zero.

In the example shown in FIG. 24, the distribution concentration C of atoms (O, C, N) is
From the position t _B to the position t ₃ , the concentration C _{9 is} a constant value, and between the position t ₃ and the position t _T , the concentration C ₉ to the concentration C _9.
It decreases linearly until it reaches C ₁₀ .

In the example shown in FIG. 25, the distribution concentration C of atoms (O, C, N) is
The concentration C ₁₁ is constant from the position t _B to the position t ₄ , and the concentration C ₁₂ to the concentration C is from the position t ₄ to the position t _T.
It decreases linearly until it reaches ₁₃ .

In the example shown in FIG. 26, the distribution concentration C of atoms (O, C, N) decreases linearly from the position t _B to the position t _T, and from the concentration C ₁₄ to substantially zero. To do.

In the example shown in FIG. 27, the distribution concentration C of atoms (O, C, N) is
It decreases linearly from the position t _B to the position t ₅ until it reaches the concentration C ₁₅ to the concentration C _16, and maintains a constant value of the concentration C ₁₆ from the position t ₅ to the position t _T.

Finally, in the example shown in FIG. 28, the distribution concentration C of the atoms (O, C, N) is the concentration C ₁₇ at position t _B, from the position t _B to the position t _6, starting from the concentration C ₁₇ decreases with Wayutsukuri, decreased sharply in the vicinity of the position t _6, the position t ₆ the density C ₁₈
Becomes Then decreases from position t ₆ position to t ₇ is sharply at first, then decreases gradually or gently, the concentration C ₁₉ in the position t _7. Furthermore, between position t ₇ and position t ₈ , there is extremely gradual decrease and the concentration C increases at position t ₈ .
₂₀ . Furthermore, from the position t ₈ to the position t _T , the concentration C ₂₀ gradually decreases until it becomes substantially zero.

As in the example shown in FIG. 20 to FIG. 28, the end portion of the light-receiving layer on the support side has a portion having a high concentration concentration C of atoms (O, C, N), and the end of the free surface side of the light-receiving layer is In the part, when the distribution concentration C has a portion where the distribution concentration C is considerably low, or when it has a concentration portion substantially close to zero, the atoms (O, C, N By providing a localized region having a relatively high distribution concentration of), preferably the localized region is provided within 5 μm from the interface position t _B between the surface of the support and the light receiving layer, It is possible to more efficiently improve the adhesion to the receiving layer.

The localized region may be the whole or a part of the partial layer region at the support side end of the photoreceptor layer containing the atoms (O, C, N), whichever is selected. Is appropriately determined according to the characteristics required of the formed light receiving layer.

The amount of atoms (O, C, N) contained in the localized region is such that the maximum value of the distribution concentration C of atoms (O, C, N) is 500 atomic ppm or more,
Preferably 800 atomic ppm or higher, optimally 1000 atomic pp
It is desirable that the distribution state be m or more.

Further, in the light receiving member of the present invention, a substance for controlling conductivity may be contained in the light receiving layer in the entire layer region or a part of the layer region in a uniform or non-uniform distribution state, if necessary.

Examples of the substance that controls the conductivity include so-called impurities in the field of semiconductors. An atom belonging to Group III of the periodic table that gives p-type conductivity (hereinafter simply referred to as “I
Group II atom ”. ), Or an atom belonging to Group V of the periodic table that gives n-type conductivity (hereinafter simply referred to as “Group V atom”). Specific examples of the group III atom include B (boron), Al (aluminum), Ga (gallium), In (indium), and Tl (thallium), but the particularly preferable one is B. , Ga. Examples of the Group V atom include P (phosphorus), As (arsenic), Sb (antimony), Bi (bisman), and the like, with P and Sb being particularly preferable.

The light-receiving layer of the present invention, which is a substance for controlling conductivity, III
When a group atom or a group V atom is contained, whether it is contained in the whole layer region or a part of the layer region is different depending on the intended place or expected action and effect as described later, The amount to be contained also differs.

That is, when the main purpose is to control the conductivity type and / or the conductivity of the light-receiving layer, it should be contained in the entire region of the light-receiving layer. In this case, a group III atom or a group V atom The content of may be relatively small, usually 1 × 10 ^-3 ~
1 × 10 ³ atomic ppm, preferably 5 × 10 ^{−2 to} 5 × 1
0 ² atomic ppm, optimally 1 × 10 ^-1 to 2 × 10 ² atomic ppm
Is.

Further, a group III atom or a group V atom is contained in a uniform distribution state in a part of the layer region in contact with the support, or the distribution concentration of the group III atom or the group V atom in the layer thickness direction is In the case where it is contained so that the concentration is high on the side in contact with the support, such Group III atoms or V
A partial layer region containing a group atom or a region containing a high concentration serves as a charge injection blocking layer. That is, when the group III atom is contained, the movement of electrons injected from the support side into the light-receiving layer is more efficiently performed when the free surface of the light-receiving layer is subjected to a polar charging treatment. When the free surface of the photoreceptive layer is subjected to a polar electrification treatment, holes injected from the support side into the photoreceptive layer can be blocked. Can be prevented more efficiently. And
In such a case, the content is relatively large, specifically, 30 to 5 × 10 ⁴ atomic ppm, preferably 50 to 1 × 10 ⁴ at
Omic ppm, optimally 1 × 10 ^{2 to} 5 × 10 ³ atomic ppm. Further, in order to effectively exhibit the effect as the charge injection blocking layer, the layer thickness of the layer or the layer region provided at the end portion on the support side containing the group III atom or the group V atom is t.
When the layer thickness of the light receiving layer is T, it is desirable that the relationship of t / T ≦ 0.4 is satisfied. More preferably, the value of the relational expression is 0.35 or less, and optimally 0.3 or less. Is desirable. The layer thickness t of the layer or layer region is generally 3 × 10 ^{−3 to} 10 μ, but preferably 4 × 10 ⁻³ to 8 μm.
μ, optimally 5 × 10 ^{−3 to} 5 μ.

The amount of the group III atom or the group V atom contained in the light receiving layer is relatively large on the support side and decreases from the support side to the side having the free surface, and the free surface of the light receiving layer is reduced. A typical example of the case where the group III atom or the group V atom is distributed in a relatively small amount or close to zero in the vicinity is as follows. 20th to 28th exemplified when at least one of an atom and a nitrogen atom is contained
It can be explained by means of examples similar to those in the figures, but the invention is not limited by these examples.

Then, as in the example shown in FIGS. 20 to 28, a portion of the light-receiving layer having a high concentration concentration C of group III atoms or group V atoms is provided on the side close to the support side of the light-receiving layer. On the free surface side, in the case where the distribution concentration C has a considerably low concentration portion or a concentration portion substantially close to zero, in the portion close to the support side, a group III atom or a group V atom By providing a localized region having a relatively high concentration of distribution, preferably by providing the localized region within 5 μm from the interface position in contact with the surface of the support, the distribution of group III atoms or group V atoms The above-described effect that the layer region having a high concentration forms the charge injection blocking layer is more efficiently exhibited.

As described above, the action and effect of each of the distribution states of the group III atoms or the group V atoms have been described individually. For obtaining the light receiving member having the characteristics capable of achieving the desired purpose
It goes without saying that the distribution state of these Group III atoms or Group V atoms and the amount of Group III atoms or Group V atoms to be contained in the light-receiving layer are appropriately combined as necessary. Nor. For example, when a charge injection blocking layer is provided at the end of the light receiving layer on the support side, a constituent layer of the light receiving layer other than the charge injection blocking layer (FIG. 102) (FIG. 103)
May contain a substance that controls the conductivity of a polarity different from the polarity of the substance that controls the conductivity contained in the charge injection blocking layer, or a substance that controls the conductivity of the same polarity, It may be contained in an amount much smaller than that contained in the charge injection blocking layer.

Furthermore, in the light receiving member of the present invention, as the constituent layer provided at the end portion on the support side, instead of the charge injection blocking layer,
A so-called barrier layer made of an electrically insulating material may be provided, or both the barrier layer and the charge injection blocking layer may be constituent layers. Examples of the material forming the barrier layer include inorganic electrically insulating materials such as Al ₂ O ₃ , SiO ₂ , and Si ₃ N _4, and organic electrically insulating materials such as polycarbonate.

Since the light-receiving member of the present invention has the above-mentioned layer structure, it is possible to solve all of the problems of the above-described light-receiving member having a multilayer light-receiving layer composed of amorphous silicon. Even when the coherent monochromatic laser light is used as the light source, it is possible to remarkably prevent the appearance of the interference fringe pattern in the formed image due to the interference phenomenon, and to form a very high quality visible image.

Further, the light-receiving member of the present invention has a high photosensitivity in the entire visible light region, and is particularly excellent in the photosensitivity characteristic on the long wavelength side, so that it is particularly excellent in matching with a semiconductor laser, and has an optical response. It exhibits high electrical properties, excellent electrical, optical and photoconductive properties, electrical withstand voltage and use environment characteristics.

In particular, when it is applied as a photoreceptive member for electrophotography, it has no influence of residual potential on image formation, its electrical characteristics are stable, high sensitivity, and high SN ratio. Therefore, it is possible to stably and repeatedly obtain a high-quality image having light fatigue resistance, ability to identify repeated use, high density, clear halftone, and high resolution.

Next, a method for forming the light receiving layer of the present invention will be described.

Any of the amorphous materials forming the light receiving layer of the present invention is formed by a vacuum deposition method utilizing a discharge phenomenon such as a glow discharge method, a sputtering method, or an ion plating method. These manufacturing methods are appropriately selected and adopted depending on factors such as the manufacturing conditions, the load level of capital investment, the manufacturing scale, and the desired characteristics of the light receiving member to be manufactured. Since it is relatively easy to control the conditions for producing the light receiving member having, and the carbon atom and the hydrogen atom can be easily introduced together with the silicon atom, the glow discharge method or the sputtering method is used. It is suitable. Then, the glow discharge method and the sputtering method may be used together in the same apparatus system.

Silicon atoms (Si) can be supplied to form a photoreceptive layer composed of a-SiGe (H, X) by the glow discharge method.
Source gas for supplying Si, source gas for supplying Ge capable of supplying germanium atom (Ge), hydrogen atom (H) and / or hydrogen atom (H) capable of supplying halogen atom (X), and / or A raw material gas for supplying halogen atoms (X) is introduced into a deposition chamber whose inside can be decompressed in a desired gas pressure state to cause glow discharge in the deposition chamber and to be placed at a predetermined position in advance. A layer composed of a-SiGe (H, X) is formed on the surface of the support.

The substance that can be the source gas for supplying Si is Si.
_{H 4, Si 2 H 6,} Si 3 H 8, Si 4 H hydrogenation may or gasified gas state such as ₁₀ silicon (silanes). In particular, the layer forming operation when ease of handling, Si supply In terms of efficiency, Si
H ₄ and Si ₂ H ₆ are preferred.

Further, as the substance that can be the raw material gas for supplying Ge, GeH ₄ , Ge ₂ H ₆ , Ge ₃ H ₈ , Ge ₄ H ₁₀ , Ge ₅ H ₁₂ , Ge ₆ H ₁₄ , Ge
It is possible to use germanium hydride in a gas state or gasifiable such as ₇ H ₁₆ , Ge ₈ H ₁₈ , and Ge ₉ H ₂₀ . In particular, from the viewpoint of ease of handling during layer creation work, good Ge supply efficiency, etc.
GeH ₄ , Ge ₂ H ₆ , and Ge ₃ H ₈ are preferred.

Further, there are many halogen compounds as the substances that can be the raw material gas for supplying the halogen atoms, and for example, halogen gas, halides, interhalogen compounds, silane derivatives substituted with halogen, or the like in a gas state or gasifiable. A halogen compound can be used. Specifically, fluorine, chlorine, bromine, iodine halogen gas, Br
F, ClF, ClF ₃ , BrF ₃ , BrF ₅ , IF ₃ , IF ₇ , interhalogen compounds such as ICl, IBr, and halogenated silicon compounds such as SiF ₄ , Si ₂ F ₆ , SiCl ₄ , SiBr ₄ are preferable. It is mentioned as a thing.

In the case where a silicon compound containing a halogen atom as described above in a gas state or a gasifiable substance is formed by a glow discharge method as a raw material gas, without using a silicon hydride gas as a raw material gas for supplying Si atoms. It is particularly effective since a layer composed of a-Si containing a halogen atom can be formed on a predetermined support.

When the light-receiving layer is formed using the glow discharge method, basically, a silicon halide and a raw material gas for supplying Si are used.
Germanium hydride as a raw material for supplying Ge and Ar, H ₂ , and He
A gas such as the above is introduced into the deposition chamber at a predetermined mixing ratio and gas flow rate, and a glow discharge is generated to form a plasma atmosphere of these gases, thereby forming a light receiving layer on the support. In order to make it easier to control the content of hydrogen atoms (H), which is very effective in controlling electrical or photoelectric properties, it is necessary to add hydrogen to these gases. It is also possible to mix a raw material gas for supplying atoms. As the gas for supplying hydrogen atoms, hydrogen gas or silicon hydride gas such as SiH ₄ , Si ₂ H ₆ , Si ₃ H ₈ and Si ₄ H ₁₀ is used. Further, as a gas for supplying hydrogen atoms, halides such as HF, HCl, HBr, HI, SiH ₂ F ₂ , SiH ₂
In the case of using a halogen-substituted silicon hydride such as I ₂ , SiH ₂ Cl ₂ , SiHCl ₃ , SiH ₂ Br ₂ , SiHBr ₃ or the like in a gas state or gasifiable, introduction of a halogen atom (X) At the same time, a hydrogen atom (H) is also introduced, which is effective.

To form a photoreceptive layer composed of a-SiGe (H, X) by the sputtering method, two targets, a target made of silicon and a target made of germanium, or a target made of silicon and germanium are used. And are sputtered in a desired gas atmosphere.

When the light receiving layer is formed by using the ion plating method, for example, polycrystalline silicon or single crystal silicon and polycrystalline germanium or single crystal germanium are housed in a vapor deposition boat as evaporation sources, and this evaporation source is It can be carried out by heating and evaporating by a resistance heating method, an electron beam method (EB method), or the like, and passing the flying evaporate in a desired gas plasma atmosphere.

In both cases of the sputtering method and the ion plating method, in order to allow the halogen atom to be contained in the layer to be formed, a gas of the above-mentioned halide or a silicon compound containing the halogen atom is introduced into the deposition chamber, and the gas is introduced. The plasma atmosphere may be formed. Further, when hydrogen atoms are introduced, a raw material gas for supplying hydrogen atoms, for example, H ₂ or the above-mentioned gases such as hydrogenated silanes and / or germanium hydride is introduced into the deposition chamber for spattering. It suffices to form a plasma atmosphere of gases such as. Further, as the raw material gas for supplying halogen atoms, the above-mentioned halides or silicon compounds containing halogen are mentioned as effective ones, but in addition, hydrogen halides such as HF, HCl, HBr and HI, SiH ₂ F ₂ , SiH ₂ I ₂ , SiH ₂ Cl ₂ , SiHCl ₃ , S
iH ₂ Br ₂ , halogen-substituted silicon hydrides such as SiHBr ₃ , and Ge
HF ₃ , GeH ₂ F ₂ , GeH ₃ F, GeHCl ₃ , GeH ₂ Cl ₂ , GeH ₃ Cl, GeHBr
₃ , GeH ₂ Br ₂ , GeH ₃ Br, GeHI ₃ , GeH ₂ I ₂ , GeH ₃ I, etc.Hydrogen halide germanium, etc., GeF ₄ , GeCl ₄ , GeBr ₄ , Ge
Gaseous or gasifiable substances such as germanium halides such as I ₄ , GeF ₂ , GeCl ₂ , GeBr ₂ , GeI _2, etc. can also be used as effective starting materials.

In a preferred example of the present invention, the amount of hydrogen atoms (H) or halogen atoms (X) contained in the formed light-receiving layer.
Of hydrogen or the amount of hydrogen and halogen atoms (H + X)
Is preferably 0.01 to 40 atomic%, more preferably 0.05 to
30atomic%, optimally 0.1 to 25atomic% is desirable.

A light-receiving layer composed of tin-atom-containing amorphous silicon (hereinafter referred to as "a-SiGe (H, X)") is formed by glow discharge method, spattering method, or ion plating method. A-SiSn (H,
The starting material for supplying germanium atoms is used in place of the starting material for supplying tin atoms (Sn) during the formation of the layer composed of X), while controlling the amount thereof in the layer to be formed. By including it.

Examples of the substance that can be the source gas for supplying the tin atom (Sn) include tin hydride (SnH ₄ ), SnF ₂ , SnF ₄ , SnCl ₂ , and SnC.
l _4, SnBr _2, SnBr _4, SnI _2, those can be used which can be SnI or gasified gas state such as tin halide, such as _4,
The use of tin halide is particularly effective because a layer composed of a-Si containing a halogen atom can be formed on a predetermined support. Among them, SnCl is easy to handle during layer formation work, and has good Sn supply efficiency.
₄ is preferred.

When SnCl ₄ is used as a starting material for supplying tin atoms (Sn), solid SnCl ₄ can be used for gasification.
It is desirable to boil an inert gas such as Ar and He while heating and bubbling using the inert gas.The gas thus generated is introduced into the deposition chamber whose inside pressure is reduced in a desired gas pressure state. To do.

Using the glow discharge method, a-SiGe (H, containing at least one selected from oxygen atom, carbon atom, nitrogen atom
X), a-SiSn (H, X) or a-SiGeSn (H, X) or a partial layer region is formed, the above-mentioned a-SiGe (H, X)
X) or / and / or a-SiSn (H, X) when forming a layer, a-SiGe (H, X) is used as a starting material for introducing atoms (O, C, N).
Or / and by using with a starting material for the formation of a-SiSn (H, X), the controlled inclusion of their amount in the layer to be formed.

As a starting material for introducing such an atom (O, C, N),
Almost any substance can be used as long as it is a gaseous substance or a substance that can be gasified and has at least atoms (O, C, N) as constituent atoms.

Specifically, as a starting material for introducing an oxygen atom (O), for example, oxygen (O ₂ ), ozone (O ₃ ), nitric oxide (NO),
Nitrogen dioxide (NO _2), one nitrogen dioxide (N ₂ O), sesquioxide nitrogen (N ₂ O _3), four nitrogen dioxide (N ₂ O _4), five nitrogen dioxide (N ₂
O ₅ ), nitric oxide (NO ₃ ), silicon atom (Si), oxygen atom (O) and hydrogen atom (H) as constituent atoms, such as disiloxane (H ₃ SiOSiH ₃ ), trisiloxane ( H ₃ S
lower siloxanes such as iOSiH ₂ OSiH ₃ ) and the like, and examples of starting materials for introducing carbon atoms (C) include methane (CH ₄ ), ethane (C ₂ H ₆ ), propane (C ₃ H ₈ ). , n- butane (nC ₄ H _10), 1~5 carbon atoms such as pentane (C ₅ H ₁₂₎
Saturated hydrocarbons, ethylene (C ₂ H ₄ ), propylene (C
₃ H _6), Buden -1 (C ₄ H _8), butene--2 (C ₄ H _8), isobutylene (C ₄ H _8), pentene (C ₅ H ₁₀₎ carbon atoms, such as 2
To 5 ethylene-based hydrocarbons, acetylene (C ₂ H ₂ ), methylacetylene (C ₃ H ₄ ), butyne (C ₄ H ₆ ), etc.
4, acetylene-based hydrocarbons and the like. Examples of the starting material for introducing a nitrogen atom (N) include nitrogen (N ₂ ), ammonia (NH ₃ ), hydrazine (H ₂ NNH ₂ ),
Examples thereof include hydrogen azide (HN ₃ ), ammonium azide (NH ₄ N ₃ ), nitrogen trifluoride (F ₃ N) and nitrogen tetrafluoride (F ₄ N).

In addition, a-SiGe (H, X), a-SiSn (H, X) or a-SiGeSn (H, H containing atoms (O, C, N) is produced by the sputtering method.
X)) to form a layer composed of atoms (O, C, N)
As the starting material for introduction, in addition to the above-mentioned gasifiable starting materials listed in the glow discharge method, SiO ₂ , Si ₃ N ₄ , carbon black and the like can be mentioned as solidified starting materials. . These can be used together with a target such as Si in the form of a target for spattering.

It is composed of a-SiGe (H, X) or / and a-SiSn (H, X) containing a group III atom or a group V atom by using a glow discharge method, a sputtering method or an ion plating method. To form a layer or partial layer region, use the a-SiGe
When forming a layer composed of (H, X) or / and a-SiSn (H, X), a starting material for introducing a Group III atom or a Group V atom is a-SiGe (H, X). ) Or / and with the starting materials for forming a-SiSn (H, X), and their controlled inclusion in the layers to be formed.

Specifically as a starting material for introducing a group III atom, for introducing a boron atom, B ₂ H ₆ , B ₄ H ₁₀ , B ₅ H ₉ , B ₅ H ₁₁ , B
_{6 H 10, B 6 H 12} , B 6 H 14 borohydride such _{as, BF 3, BCl 3, BBr} 3
And the like. In addition to this, AlCl ₃ , C
Other examples include aCl ₃ , Ga (CH ₃ ) ₂ , InCl ₃ and TlCl ₃ .

As a starting material for introducing a Group V atom, specifically, for introducing a phosphorus atom, phosphorus hydride such as PH ₃ , P ₂ H ₆ or the like, PH ₄ I, PF ₃ , PF
Examples thereof include phosphorus halides such as ₅ , PCl ₃ , PCl ₅ , PBr ₃ , PBr ₅ , and PI ₃ . In addition, AsH ₃ , AsF ₃ , AsCl ₃ , AsBr ₃ , ArF ₅ ,
SbH ₃ , SbF ₃ , SbF ₅ , SbCl ₃ , SbCl ₅ , BiH ₃ , BiCl ₃ , BiBr ₃
Etc. can also be mentioned as effective starting materials for introducing a Group V atom.

As described above, the light-receiving layer of the light-receiving member of the present invention is formed by using the glow discharge method, the sputtering method, or the like.
And tin atom, oxygen atom, carbon atom or nitrogen atom, or group III atom or group V atom, or further control of the content of each hydrogen atom and / or halogen atom,
It is carried out by controlling the gas flow rate of each atom supply starting material or the gas flow rate ratio between each atom supply starting material flowing into the deposition chamber.

In addition, conditions such as the temperature of the support at the time of forming the light receiving layer, the gas pressure in the deposition chamber, and the discharge power are important factors for obtaining a light receiving member having desired characteristics, and the function of the layer to be formed is determined. It will be appropriately selected taking into consideration. Furthermore, since the conditions for forming these layers may differ depending on the type and amount of each of the above-mentioned atoms contained in the light-receiving layer, it is determined by taking into consideration the type of the contained atoms or the amount thereof. You also need to do it.

Specifically, a-SiGe (H, which contains atoms (O, C, N)
X) when forming a layer consisting of, or atoms (O, C, N)
And a-SiG containing group III or group V atoms
In the case of forming a layer composed of e (H, X), the support temperature is usually 50 to 350 ° C, more preferably 50 to 3 ° C.
The temperature is 00 ° C, particularly preferably 100 to 300 ° C. The gas pressure in the deposition chamber is usually 0.01 to 5 Torr, preferably 0.001 to 3 Torr, and particularly preferably 0.1 to 1 Torr.
Although the discharge power is usually to the 0.005~50W / cm ^2, preferably 0.01~30W / cm ^2, particularly preferably 0.01
~ 20W / cm ²

However, the specific conditions of the temperature of the support, the discharge power, and the gas pressure in the deposition chamber for forming layers are usually difficult to determine individually.
Therefore, in order to form an amorphous material layer with desired characteristics,
It is desirable to determine the optimum conditions for layer formation based on mutual and organic relationships.

The light receiving layer of the present invention is required to have the light receiving layer formed so as to have at least a pair of non-parallel interfaces in the short range as described above, and therefore, the light receiving layer is formed on the support. The surface of the formed layer is formed to be non-parallel to the surface of the support. To do so, the discharge power and gas pressure should be kept relatively high during the film formation operation. Is done. The discharge power and gas pressure differ depending on the type of gas used, the material of the support, the shape of the support surface, the support temperature, etc., and are determined in consideration of these various conditions.

By the way, the distribution state of the germanium atom or / and the tin atom, the atom (O, C, N), the group III atom or the group V atom, or the hydrogen atom or / and the halogen atom contained in the light receiving layer of the present invention is In order to make it uniform, it is necessary to keep the above conditions constant when forming the light-receiving layer.

Further, in the present invention, when the light-receiving layer is formed, the distribution concentration of germanium atom or tin atom, atom (O, C, N) or group III atom or group V atom contained in the layer is controlled. In the case of using a glow discharge method, a germanium atom or / and a tin atom, in order to form a light-receiving layer having a desired state of distribution in the thickness direction by changing the thickness direction,
Atom (O, C, N), or the gas flow rate when introducing the gas of the starting material for introducing the group III atom or the group V atom into the deposition chamber is appropriately changed according to the desired rate of change, and other It is formed while keeping the condition of 1 constant. Then, in order to change the gas flow rate, concretely, for example, manually or by some commonly used method such as an external drive motor, the opening of a predetermined needle valve provided in the middle of the gas flow path system is gradually increased. It suffices to perform an operation to change. At this time, the rate of change of the flow rate does not have to be linear, and it is possible to obtain a desired content rate curve by controlling the flow rate according to a previously designed rate-of-change curve using, for example, a microcomputer.

When the photoreceptive layer is formed by the sputtering method, germanium atoms or tin atoms, atoms (O, C, N),
Alternatively, in order to form a desired distribution state in the layer thickness direction by changing the distribution concentration in the layer thickness direction of the group III atoms or the group V atoms, as in the case of using the glow discharge method,
A starting material for introducing a germanium atom or a tin atom, an atom (O, C, N) or a group III atom or a group V atom is used in a gas state, and a gas flow rate when introducing the gas into the deposition chamber is desired. Change according to the rate of change of.

〔Example〕

Hereinafter, the present invention will be described in more detail with reference to Examples 1 to 15, but the present invention is not limited thereto.

In each of the examples, the light receiving layer was formed by the glow discharge method. FIG. 29 shows an apparatus for manufacturing the light receiving member of the present invention by the glow discharge method.

The gas cylinders 2902, 2903, 2904, 2905, 2906 in the figure are sealed with the raw material gas for forming each layer of the present invention, and as an example thereof, 2902 is SiF ₄ gas (purity 99.999. %) Cylinder, 2903 is GeF ₄ gas (purity 99.9
99%) bomb, 2904 CH ₄ gas (99.999% purity) cylinder, 2905 ₂ H ₆ gas (99.999% purity B diluted with H _2, hereinafter referred to as B ₂ H ₆ / H _2.) Be a bomb , 2906 is a He gas cylinder that is an inert gas, and 2906 'is a closed container containing SnCl ₄ .

A gas cylinder is required to allow these gases to flow into the reaction chamber 2901.
Check that valves 2922-2926 and leak valve 2935 of 2902-2906 are closed, and that inflow valves 2912-2916,
After confirming that the outflow valves 2917 to 2921 and the auxiliary valves 2932 and 2933 are opened, the main valve 2934 is first opened to exhaust the reaction chamber 2901 and the gas pipe. Next, when the reading of the vacuum gauge 2936 reaches about 5 × 10 ^-6 torr, the auxiliary valve 293
2, 2933, close outflow valves 2917-2921.

An example of forming the light receiving layer 100 on the Al cylinder 2937 will be described below.

First, SiF ₄ gas from gas cylinder 2902, GeF ₄ gas from gas cylinder 2903, CH ₄ gas from gas cylinder 2904, gas cylinder 2
Valves 2922, 2923, 292 for B ₂ H ₆ / H ₂ gas respectively from 905
4, 2925 open and outlet pressure gauge 2927, 2928, 2929, 2930
Adjust the pressure of 1kg / cm ² and inflow valves 2912, 2913, 291.
Gradually open 4, 2915, mass flow controller 2907, 2
Inflow into 908, 2909, 2910. Subsequently, the outflow valves 2917, 2918, 2919, 2920 and the auxiliary valve 2932 are gradually opened to allow the gas to flow into the reaction chamber 2901. SiF _{4 at} this time
Outflow valves 2917, 291 so that the ratio of the gas flow rate, GeF ₄ gas flow rate, CH ₄ gas flow rate, B ₂ H ₆ / H ₂ gas flow rate becomes the desired value.
8, 2919 and 2920 are adjusted, and the opening of the main valve 2934 is adjusted while observing the reading of the vacuum gauge 2936 so that the pressure in the reaction chamber 2901 becomes a desired value. And base cylinder 29
After it was confirmed that the temperature of 37 was set to a temperature in the range of 50 to 400 ° C. by the heater 2938, the power supply 2940 was set to the desired power to cause the glow discharge in the reaction chamber 2901, and Using a micro computer (not shown), while controlling the flow rates of SiF ₄ gas, GeF ₄ gas, CH ₄ gas, and B ₂ H ₆ / H ₂ gas according to a predesigned rate-of-change line, the substrate A light receiving layer is formed on the cylinder 2937.

When hydrogen atoms are contained in the light receiving layer, H ₂ may be further added to the above gas and sent into the reaction chamber.

It goes without saying that all the outflow valves other than the gas outflow valves necessary for forming the respective layers are closed.

Further, in the case of containing tin atoms in the light-receiving layer and using a gas starting from SnCl ₄ as a source gas, the solid SnCl ₄ contained in 2906 ′ is heated by a heating means (not shown). No. ₂ ) is heated, and an inert gas such as Ar or He is blown into the SnCl ₄ from an inert gas cylinder 2906 such as Ar or He for bubbling. The generated SnCl ₄ gas is caused to flow into the reaction chamber by the same procedure as the above-mentioned SiF ₄ gas, GeF ₄ gas, B ₂ H ₆ / H ₂ gas and the like.

Example 1 As a support, a cylindrical Al substrate (length 357 mm, diameter 80 m)
A groove as shown in FIG. 30 (A) was formed in m) by a lathe.
The cross-sectional shape of the groove at this time was as shown in FIG. 30 (B). Incidentally, FIG. 30 (A) is an overall view of the Al support, and FIG. 30 (B) is a view showing a sectional shape of a part of the surface thereof.

Next, on the Al support, under the conditions shown in Table 1 below,
A light-receiving layer was formed by the manufacturing apparatus shown in FIG. The boron atom contained in the light receiving layer is B ₂ H ₆ / SiF ₄
+ GeF ₄ ≈100 ppm, and about 200 ppm was introduced to all the layers.

For each of the light-receiving members thus obtained, the layer thickness of the light-receiving layer was measured by an electron microscope, and the surface of the light-receiving layer was found to be non-parallel to the surface of the support. The difference in average layer thickness between the center and both ends of the body was 2 μm.

Further, these light-receiving members were irradiated with laser light having a wavelength of 780 nm and a spot diameter of 80 μm by using the image exposure device shown in FIG. 31 to perform image exposure, and developed and transferred to obtain an image. In the obtained image, no interference fringe pattern was observed, and an electrophotographic image having good practicability was obtained.

Note that FIG. 31 (A) is a schematic plan view schematically showing the entire exposure apparatus, and FIG. 31 (B) is a side schematic view schematically showing the entire exposure apparatus. In the figure, 3101 is a light receiving member, 3102
Is a semiconductor laser, 3103 is an fθ lens, and 3104 is a polygon mirror.

Example 2 A light-receiving layer was formed on an Al support in the same manner as in Example 1 except that the light-receiving layer was formed according to the layer forming conditions shown in Table 2.

For each of the light-receiving members thus obtained, the difference in the layer thickness of the light-receiving layer in their minute portions was measured by an electron microscope. The surface of the light-receiving layer was found to be non-parallel to the surface of the support. The difference in average layer thickness between the center and both ends of the cylinder of the light receiving layer was 2.3 μm.

Further, when images were formed on these light receiving members in the same manner as in Example 1, no interference fringes were observed in each image, and those showing electrophotographic characteristics with good practicability were obtained. It was

Example 3 In the same manner as in Example 1, Al support members (cylinder Nos. 301 to 303) having the cross-sectional shapes shown in FIGS. 30 (C) to (E) were obtained.

A light-receiving layer was formed on the Al support (cylinder Nos. 301 to 303) under the layer forming conditions shown in Table 3. At this time, the gas flow rates of the SiF ₄ gas, GeF ₄ gas, B ₂ H ₆ / H ₂ gas and CH ₄ gas were automatically adjusted by the micro computer control according to the flow rate change curve shown in FIG. Further, the boron atom contained in the light receiving layer was introduced under the same conditions as in Example 1.

For each of the light-receiving members thus obtained, the difference in the layer thickness of the light-receiving layer in the minute portion was measured in the same manner as in Example 1. As a result, the surface of the light-receiving layer was not It was parallel. Further, the difference in average layer thickness between the center and both ends of the cylinder of the light receiving layer was 2.2 μm.

An image was formed on each of the light-receiving members in the same manner as in Example 1. In each of the obtained images, no interference fringes were observed, and those showing good electrophotographic properties were obtained. Was given.

Examples 4 to 15 Al support (sample) was prepared in the same manner as in Example 3 except that the light receiving layer was formed according to the layer forming conditions shown in Tables 4 to 15.
No.301-303), the light-receiving layer was formed on it. At this time, the gas flow rates of the used gases in Examples 4 to 6 and 8 to 14 were automatically adjusted by the micro computer control according to the flow rate change curves shown in FIGS. 33 to 35 and 36 to 42, respectively. The boron atom contained in the light-receiving layer in the examples was introduced under the same conditions as in the example 1.

An image was formed on the obtained light receiving member in the same manner as in Example 1.

In each of the obtained images, no occurrence of interference fringes was observed,
And it was of very good quality.

[Outline of Effects of the Invention] The light-receiving member of the present invention has the above-mentioned layer structure, whereby all the problems of the light-receiving member having the light-receiving layer composed of amorphous silicon can be solved. In particular, even when a laser light which is a coherent monochromatic light is used as a light source, it is possible to remarkably prevent the appearance of an interference fringe pattern in a formed image due to an interference phenomenon and form a very high quality visible image. it can.

Further, the light-receiving member of the present invention has a high photosensitivity in the entire visible light region, and is particularly excellent in the photosensitivity characteristic on the long wavelength side, so that it is particularly excellent in matching with a semiconductor laser, and has an optical response. It exhibits high electrical properties, excellent electrical, optical and photoconductive properties, electrical withstand voltage and use environment characteristics.

In particular, when it is applied as a photoreceptive member for electrophotography, it has no influence of residual potential on image formation, its electrical characteristics are stable, high sensitivity, and high SN ratio. Therefore, it is possible to stably and repeatedly obtain a high-quality image having excellent light fatigue resistance, repeated use characteristics, high density, clear halftone, and high resolution.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing an example of the light receiving member of the present invention, and FIGS. 2 to 4 are for explaining the principle of preventing the generation of interference fringes in the light receiving member of the present invention. FIG. 2 is a partially enlarged view, FIG. 2 is a diagram showing that interference fringes can be prevented when the interfaces of the constituent layers of the light-receiving layer are non-parallel, and FIG. 3 is a constituent layer of the light-receiving layer. FIG. 4 is a diagram comparing the reflected light intensities when the interfaces of the layers are parallel and when they are not parallel, and FIG. 4 shows the prevention of the generation of interference fringes when the light receiving layer is composed of three or more layers. It is a figure explaining. Figure 5 shows
It is a figure which shows the typical example of the surface shape of the support body of the light receiving member of this invention. 6 to 10 are views for explaining the generation of interference fringes in the conventional light receiving member, FIG. 6 is the generation of interference fringes in the light receiving layer, and FIG. 7 is a light receiving layer having a multilayer structure. 8 shows the generation of interference fringes by scattered light, FIG. 8 shows the generation of interference fringes by scattered light, FIG. 9 shows the generation of interference fringes by scattered light in a multi-layered light-receiving layer, and FIG. 10 shows the constituent layers of the light-receiving layer. The respective occurrences of interference fringes when the interfaces of the layers are parallel are shown. 11 to 19 are diagrams showing the distribution state of germanium atoms or tin atoms in the layer thickness direction in the photoreceptor layer of the present invention, and FIGS. 20 to 28 are oxygen atoms and carbon in the photoreceptor layer of the present invention. FIG. 3 is a diagram showing a distribution state of at least one selected from atoms and nitrogen atoms, and a group III atom or a group V atom in a layer thickness direction, in each figure, the vertical axis represents the layer thickness of the light-receiving layer. The horizontal axis represents the distribution concentration of each atom. FIG. 29 is an example of an apparatus for producing the light receiving layer of the light receiving member of the present invention, and is a schematic explanatory view of a production apparatus by a glow discharge method. FIG. 30 (A) is an overall view of the support of the light receiving member of the present invention formed by mechanical processing with a lathe, and FIGS. 30 (B) to (E) show the surface of the support. It is a figure which shows the cross-sectional shape of a part of. FIG. 31 is a diagram for explaining an image exposure device using laser light.
32 to 42 are views showing a change state of the gas flow rate ratio in the formation of the light receiving layer of the present invention, the vertical axis shows the layer thickness of the light receiving layer, and the horizontal axis shows the gas flow rate of the used gas. 1 to 4, 100 ... Photoreceptive layer, 101 ... Support, 102, 202, 302, 402
...... First layer, 103, 203, 303, 403 ...... Second layer, 404
...... Third layer, 104,204,304 …… Free surface, 205,305
...... The interface between the first layer and the second layer, and regarding FIGS. 6 to 10, 601 ... lower interface, 602 ... upper interface, 701 ... support, 7
02, 703 ... Photoreceptive layer, 801 ... Support, 802 ... Photoreceptive layer, 901 ... Support, 902 ... First layer, 903 ... Second layer, 1
001 ... Support, 1002 ... Photoreceptive layer, 1003 ... Support surface, 1004 ... Photoreceptive layer surface, in Fig. 29, 2901 ... Reaction chamber, 2902-2906 ... Gas cylinder, 2906 '...
… SnCl ₄ tank, 2907 to 2911 …… Mass flow controller, 291
2 to 2916 …… Inflow valve, 2917 to 2921 …… Outflow valve, 2
922〜2926 …… Valve, 2927〜2931 …… Pressure regulator, 293
2, 2933 …… Auxiliary valve, 2934 …… Main valve, 2935
...... Leak valve, 2936 …… Vacuum gauge, 2937 …… Base cylinder, 2938 …… Heating heater, 2939 …… Motor, 29
40 …… High frequency power source, in FIG. 31, 3101 …… Light receiving member, 3102 …… Semiconductor laser, 3103…
... fθ lens, 3104 ... polygon mirror.

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Kyosuke Ogawa 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) References JP-A-60-144750 (JP, A) JP-A-58 -139153 (JP, A) JP-A-60-225854 (JP, A)

Claims (8)

[Claims] 1. A silicon atom, at least one of a germanium atom and a tin atom, and an oxygen atom, a carbon atom and nitrogen are formed on the surface of a cylindrical support having periodic projections forming a spiral structure. At least one selected from the atoms, and a light-receiving member having a multilayer light-receiving layer having at least a photosensitive layer composed of an amorphous material containing, the surface of the cylindrical support, The cross-sectional shape of the convex portion in a plane including the central axis of the cylindrical support is a convex shape in which a sub-peak is superposed on the main peak, and the size of one cycle of the main peak is the cylindrical support. The diameter of the coherent irradiation light with which the body is irradiated is made smaller, and the light receiving layer on the surface of the cylindrical support has at least a pair of non-parallel interfaces in the short range, and the non-parallel. In-plane where the interface is perpendicular to the layer thickness direction Light-receiving member, characterized in that those that are arrayed in at least one direction. 2. The light-receiving layer contains an atom belonging to Group III or Group V of the periodic table.
Item 7. The light receiving member according to item. 3. The light receiving layer according to claim 1, wherein the light receiving layer has a charge injection blocking layer containing an atom belonging to Group III or Group V of the periodic table as one of the constituent layers. Receiving member. 4. The light receiving member according to claim 1, wherein the light receiving layer has a barrier layer as one of the constituent layers. 5. The light receiving member according to claim 1, wherein the short range is 0.3 to 500 μm. 6. The light receiving member according to claim 1, wherein the spiral structure is a multiple spiral structure. 7. The light receiving member according to claim 1, wherein the convex shape has an inclined surface. 8. The light receiving member according to claim 7, wherein the inclined surface is mirror-finished.