JPH07193295A - Method for manufacturing piezoelectric actuator - Google Patents
Method for manufacturing piezoelectric actuatorInfo
- Publication number
- JPH07193295A JPH07193295A JP33080093A JP33080093A JPH07193295A JP H07193295 A JPH07193295 A JP H07193295A JP 33080093 A JP33080093 A JP 33080093A JP 33080093 A JP33080093 A JP 33080093A JP H07193295 A JPH07193295 A JP H07193295A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- preload
- preload spring
- spring
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 230000036316 preload Effects 0.000 claims abstract description 70
- 125000006850 spacer group Chemical group 0.000 claims abstract description 19
- 238000006073 displacement reaction Methods 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000003825 pressing Methods 0.000 description 3
- 108010054404 Adenylyl-sulfate kinase Proteins 0.000 description 2
- 229910000760 Hardened steel Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- XMXLVNVGGJBUPF-UHFFFAOYSA-N 2-amino-n,n-diethyl-1,3-benzothiazole-6-carboxamide Chemical compound CCN(CC)C(=O)C1=CC=C2N=C(N)SC2=C1 XMXLVNVGGJBUPF-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001240 Maraging steel Inorganic materials 0.000 description 1
- 102000015925 Proto-oncogene Mas Human genes 0.000 description 1
- 108050004181 Proto-oncogene Mas Proteins 0.000 description 1
- 102100039024 Sphingosine kinase 1 Human genes 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- MQLFCIAPVUBEAY-UHFFFAOYSA-N n-[2-(2-nitroimidazol-1-yl)ethyl]acridin-9-amine;hydrochloride Chemical compound Cl.[O-][N+](=O)C1=NC=CN1CCNC1=C(C=CC=C2)C2=NC2=CC=CC=C12 MQLFCIAPVUBEAY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
(57)【要約】
【目的】 圧電素子を加圧する等の手段を用いることな
く容易に圧電素子に予圧を付与することができる圧電ア
クチュエータの製造方法を提供すること。
【構成】 図１（ａ）に示すように、圧電素子１と所定
値以上のバネ定数と正の線膨張係数を持つ予圧バネ３を
例えば２００°Ｃ程度に加熱された恒温炉に入れて加熱
する。ついで、同図（ｂ）に示すように、圧電素子１の
変位方向の両端に取り付けられたスペーサ２に予圧バネ
をレーザ・スポット等の手段により接合し、同図（ｃ）
に示すように、常温まで冷却する。予圧バネ３は加熱す
ることにより長さが膨張するので、予圧バネ３を所定以
上の温度に加熱して圧電素子に接合したのち冷却する
と、加熱により膨張した予圧バネ３が収縮し、圧電素子
１に予圧を付与することができる。
(57) [Abstract] [PROBLEMS] To provide a method for manufacturing a piezoelectric actuator capable of easily applying a preload to a piezoelectric element without using a means such as pressurizing the piezoelectric element. [Structure] As shown in FIG. 1A, a piezoelectric element 1 and a preload spring 3 having a spring constant of a predetermined value or more and a positive linear expansion coefficient are placed in a constant temperature oven heated to, for example, about 200 ° C. to be heated. To do. Then, as shown in FIG. 2B, a preload spring is joined to the spacers 2 attached to both ends of the piezoelectric element 1 in the displacement direction by means of a laser spot or the like.
As shown in, cool to room temperature. Since the length of the preload spring 3 is expanded by heating, the preload spring 3 is heated to a temperature higher than a predetermined temperature, joined to the piezoelectric element, and then cooled. A preload can be applied to.
Description
【０００１】[0001]
【産業上の利用分野】プリンタ・ヘッド等の駆動源とし
て、高速動作を行うことができる圧電アクチュエータが
用いられている。上記した圧電アクチュエータは通常そ
の動作力の２〜３割にあたる予圧が必要とされる。本発
明は上記した圧電アクチュエータの製造方法に関し、特
に本発明は、簡単な工程で圧電アクチュエータに予圧を
付与することができる圧電アクチュエータの製造方法に
関するものである。BACKGROUND OF THE INVENTION Piezoelectric actuators capable of high-speed operation are used as drive sources for printer heads and the like. The above-mentioned piezoelectric actuator usually requires a preload corresponding to 20 to 30% of its operating force. The present invention relates to the above-described method for manufacturing a piezoelectric actuator, and more particularly, the present invention relates to a method for manufacturing a piezoelectric actuator capable of applying a preload to the piezoelectric actuator in a simple process.
【０００２】[0002]
【従来の技術】図４は圧電アクチュエータに予圧を付与
する従来の工程を示す図であり、同図において、１は積
層体から形成された圧電素子、２はスペーサ、３は圧電
素子に予圧を付与するための、例えばＳＫ−５等の鉄系
の合金で形成された予圧バネである。2. Description of the Related Art FIG. 4 is a diagram showing a conventional process of applying a preload to a piezoelectric actuator. In FIG. 4, 1 is a piezoelectric element formed of a laminated body, 2 is a spacer, and 3 is a preload to the piezoelectric element. For example, the preload spring is made of an iron-based alloy such as SK-5.
【０００３】図４により圧電素子に予圧を付与する従来
の工程について説明する。まず、同図（ａ）に示すよう
に、圧電素子１の両端にスペーサ２を取り付ける。つい
で、同図（ｂ）に示すように、圧電素子１を両側から加
圧力Ｐで加圧しながら、圧電素子１の両側からレーザ・
スポットなどの接合手段により予圧バネを取り付ける。
これにより、同図（ｃ）に示すように、予圧バネ３によ
り予圧が付与された圧電アクチュエータが形成される。A conventional process for applying a preload to the piezoelectric element will be described with reference to FIG. First, as shown in FIG. 3A, the spacers 2 are attached to both ends of the piezoelectric element 1. Then, as shown in FIG. 3B, the laser is applied from both sides of the piezoelectric element 1 while pressing the piezoelectric element 1 with the pressure P from both sides.
Attach the preload spring by connecting means such as a spot.
As a result, a piezoelectric actuator to which a preload is applied by the preload spring 3 is formed as shown in FIG.
【０００４】[0004]
【発明が解決しようとする課題】ところで、上記した従
来の方法は、圧電素子を加圧力Ｐで加圧しながら、その
両側からレーザ・スポットを打つといったかなり複雑な
工程であり、また、圧電素子に加圧力を加える手段を必
要とするなど、簡単に圧電アクチュエータを製造するこ
とができなかった。By the way, the above-mentioned conventional method is a fairly complicated process of hitting the laser spots from both sides of the piezoelectric element while pressurizing the piezoelectric element with the pressure P. It was not possible to easily manufacture a piezoelectric actuator because it requires a means for applying a pressing force.
【０００５】本発明は上記した従来技術の問題点を考慮
してなされたものであって、従来技術のように圧電素子
を加圧する等の手段を用いることなく容易に圧電素子に
予圧を付与することができる圧電アクチュエータの製造
方法を提供することを目的とする。The present invention has been made in consideration of the above-mentioned problems of the prior art, and it is possible to easily apply a preload to the piezoelectric element without using means such as pressurizing the piezoelectric element unlike the prior art. It is an object of the present invention to provide a method for manufacturing a piezoelectric actuator that can perform the above-mentioned manufacturing.
【０００６】[0006]
【課題を解決するための手段】図１は本発明において圧
電素子に予圧を付与する工程を示す図であり、同図にお
いて、１は積層体から形成された圧電素子、２はスペー
サ、３は所定値以上のバネ定数と正の線膨張係数を持つ
予圧バネ、また、同図の点線で囲まれた部分は例えば２
００°Ｃに加熱された恒温炉である。FIG. 1 is a diagram showing a step of applying a preload to a piezoelectric element in the present invention. In the figure, 1 is a piezoelectric element formed of a laminate, 2 is a spacer, and 3 is a spacer. A preload spring having a spring constant greater than a predetermined value and a positive linear expansion coefficient, and a portion surrounded by a dotted line in FIG.
A constant temperature oven heated to 00 ° C.
【０００７】上記課題を解決するため、本発明の請求項
１の発明は、図１に示すように、圧電素子１の変位方向
の両端にスペーサ２を取り付け、所定値以上のバネ定数
と正の線膨張係数を持つ予圧バネ３を所定温度以上に加
熱する。そして、圧電素子１の両端に取り付けられたス
ペーサ部分に、圧電素子１の変位方向と平行に所定温度
以上に加熱された予圧バネ３を接合し、予圧バネ３を常
温まで冷却し、圧電素子１に所定の予圧力を付与するよ
うにしたものである。In order to solve the above-mentioned problems, according to the invention of claim 1 of the present invention, as shown in FIG. 1, spacers 2 are attached to both ends of the piezoelectric element 1 in the displacement direction, and a spring constant and a positive value equal to or more than a predetermined value are set. The preload spring 3 having a linear expansion coefficient is heated to a predetermined temperature or higher. Then, the preload spring 3 heated to a predetermined temperature or more is joined in parallel to the displacement direction of the piezoelectric element 1 to the spacer portions attached to both ends of the piezoelectric element 1, and the preload spring 3 is cooled to room temperature. A predetermined preload is applied to the.
【０００８】本発明の請求項２の発明は、請求項１の発
明において、圧電素子１と予圧バネ３を共に加熱し、ス
ペーサ部分に予圧バネ３を接合するようにしたものであ
る。According to a second aspect of the present invention, in addition to the first aspect of the invention, the piezoelectric element 1 and the preload spring 3 are both heated, and the preload spring 3 is joined to the spacer portion.
【０００９】[0009]
【作用】図１において、同図（ａ）に示すように、圧電
素子１と所定値以上のバネ定数と正の線膨張係数を持つ
予圧バネ３を例えば２００°Ｃ程度に加熱された恒温炉
に入れて加熱する。ついで、同図（ｂ）に示すように、
圧電素子１の変位方向の両端に取り付けられたスペーサ
２に予圧バネをレーザ・スポット等の手段により接合
し、同図（ｃ）に示すように、常温まで冷却する。予圧
バネ３は加熱することにより長さが膨張するので、予圧
バネ３を所定以上の温度に加熱して圧電素子に接合した
のち冷却すると、加熱により膨張した予圧バネ３が収縮
し、圧電素子１に予圧を付与することができる。In FIG. 1, as shown in FIG. 1A, a piezoelectric element 1 and a preload spring 3 having a spring constant of a predetermined value or more and a positive linear expansion coefficient are heated to, for example, about 200 ° C. Put in and heat. Then, as shown in FIG.
Preload springs are joined to the spacers 2 attached to both ends of the piezoelectric element 1 in the displacement direction by means such as a laser spot and cooled to room temperature as shown in FIG. Since the length of the preload spring 3 is expanded by heating, the preload spring 3 is heated to a temperature higher than a predetermined temperature, joined to the piezoelectric element, and then cooled. A preload can be applied to.
【００１０】また、圧電素子は、通常、負の線膨張係数
を持つので、圧電素子１と予圧バネを共に加熱すると、
圧電素子１は収縮し、予圧バネ３は膨張する。このた
め、圧電素子１と予圧バネを恒温炉等の中に入れて共に
加熱することにより、比較的低い温度でも圧電素子１に
所望の予圧力を付与することが可能となる。本発明の請
求項１の発明においては、上記のように、所定値以上の
バネ定数と正の線膨張係数を持つ予圧バネ３を所定温度
以上に加熱し、圧電素子１の両端に取り付けられたスペ
ーサ部分に接合し、予圧バネ３を常温まで冷却するよう
にしたので、圧電素子を加圧する手段等を必要とせず、
簡単に圧電素子に予圧力を付与することができる。Further, since the piezoelectric element usually has a negative linear expansion coefficient, if both the piezoelectric element 1 and the preload spring are heated,
The piezoelectric element 1 contracts and the preload spring 3 expands. Therefore, by placing the piezoelectric element 1 and the preload spring in a constant temperature oven or the like and heating them together, it becomes possible to apply a desired preload to the piezoelectric element 1 even at a relatively low temperature. In the invention of claim 1 of the present invention, as described above, the preload spring 3 having a spring constant of a predetermined value or more and a positive linear expansion coefficient is heated to a predetermined temperature or more and attached to both ends of the piezoelectric element 1. Since it is joined to the spacer portion and the preload spring 3 is cooled to room temperature, there is no need to pressurize the piezoelectric element.
A preload can be easily applied to the piezoelectric element.
【００１１】本発明の請求項２の発明は、請求項１の発
明において、圧電素子１と予圧バネ３を共に加熱するよ
うにしたので、上記のように、比較的低い温度で圧電素
子１に所望の予圧力を付与することができる。According to the invention of claim 2 of the present invention, in the invention of claim 1, both the piezoelectric element 1 and the preload spring 3 are heated. Therefore, as described above, the piezoelectric element 1 is heated at a relatively low temperature. A desired preload can be applied.
【００１２】[0012]
【実施例】図２、図３は本発明の実施例を示す図であ
る。本実施例においては、図３（ａ）（ｂ）に示すよう
に、厚さ２ｍｍ、幅３ｍｍ、長さ２０ｍｍの積層体から
形成された圧電素子（トーキン製、商品名：ＮＬＡ−２
×３×２０）を用い、また、予圧バネとしては、厚さ
０．３ｍｍ、幅０．４ｍｍ、長さ２０ｍｍのＳＫ−５焼
入鋼帯を用いた。2 and 3 are views showing an embodiment of the present invention. In the present embodiment, as shown in FIGS. 3A and 3B, a piezoelectric element (manufactured by Tokin Co., Ltd., trade name: NLA-2, which is formed of a laminated body having a thickness of 2 mm, a width of 3 mm, and a length of 20 mm.
× 3 × 20) was used, and as the preload spring, a SK-5 hardened steel strip having a thickness of 0.3 mm, a width of 0.4 mm and a length of 20 mm was used.
【００１３】圧電素子および予圧バネのヤング率、線膨
張係数、バネ定数は図３（ｂ）に示す通りであった。上
記圧電素子１の両端に図２の工程Ｓ１に示すように、常
温（２５°Ｃ）でスペーサ２を取り付け、工程Ｓ２に示
すように、圧電素子１とＳＫ−５焼入鋼帯から形成され
た予圧バネ３を２２５°Ｃの恒温炉に入れ加熱した。The Young's modulus, linear expansion coefficient, and spring constant of the piezoelectric element and the preload spring are as shown in FIG. 3 (b). As shown in step S1 of FIG. 2, spacers 2 are attached to both ends of the piezoelectric element 1 at room temperature (25 ° C.), and the piezoelectric element 1 and the SK-5 hardened steel strip are formed as shown in step S2. The preload spring 3 was placed in a constant temperature oven at 225 ° C and heated.
【００１４】予圧バネ２と圧電素子１の線膨張係数は図
３（ｂ）に示すようにそれぞれ１０×１０-6〔１／°
Ｃ〕、−５×１０-6〔１／°Ｃ〕であるので、常温時を
０ｍｍとすると、２２５°Ｃにおいては図３（ｃ）に示
すように予圧バネ２は０．０４ｍｍ長くなり、また、圧
電素子１は０．０２ｍｍ短くなった。この状態で、図２
の工程Ｓ３に示すように、圧電素子１のスペーサ２に圧
電素子の両側からレーザ・スポットにより予圧バネ３を
溶接した。The linear expansion coefficients of the preload spring 2 and the piezoelectric element 1 are 10 × 10 −6 [1 / °] as shown in FIG.
C], −5 × 10 −6 [1 / ° C], so when the temperature at room temperature is 0 mm, the preload spring 2 becomes 0.04 mm longer at 225 ° C as shown in FIG. The piezoelectric element 1 was shortened by 0.02 mm. In this state,
As shown in step S3 of 1., the preload spring 3 was welded to the spacer 2 of the piezoelectric element 1 from both sides of the piezoelectric element by laser spots.
【００１５】ついで、予圧バネ３が溶接された圧電素子
１を図２の工程Ｓ４に示すように恒温炉から取り出し、
常温（２５°Ｃ）中で放置し、常温まで冷却した。その
結果、図３（ｃ）に示すように、予圧バネ３は溶接前の
常温時の長さより０．０５４６６ｍｍ伸び、圧電素子１
には−０．００５３４ｍｍの変位が残った。これは、圧
電素子１のバネ定数１２９０kgf/mmを考慮すると、圧電
素子１に６．８kgf の圧力が加わっていることに相当す
る。Then, the piezoelectric element 1 to which the preload spring 3 is welded is taken out from the constant temperature oven as shown in step S4 of FIG.
It was left at room temperature (25 ° C) and cooled to room temperature. As a result, as shown in FIG. 3C, the preload spring 3 extends 0.05466 mm from the length at room temperature before welding, and the piezoelectric element 1
Displacement of -0.00534 mm remained. This corresponds to the fact that a pressure of 6.8 kgf is applied to the piezoelectric element 1 in consideration of the spring constant of 1290 kgf / mm of the piezoelectric element 1.
【００１６】本実施例で使用した圧電素子の発生力は、
２０kgf 程度であるので、予圧力は下式に示すように約
３４％となり、圧電素子の発生力に対して約２〜３割の
予圧を必要とするという条件を充分満足する結果が得ら
れた。 ６．８／２０×１００＝３４％ 上記実施例においては、予圧バネ材としてＳＫ−５焼入
鋼帯を用いた例を示したが、予圧バネ材としては、ＳＫ
−５焼入鋼帯に限られるものではなく、次の条件を満足
する材料を用いることができる。 （１）線膨張係数が正であること。 （２）高い弾性を持つバネ材であること。 （３）２００°Ｃ程度の高温に耐えること（熱処理など
もこの温度以上でおこなわれていること）。The force generated by the piezoelectric element used in this embodiment is
Since it is about 20 kgf, the preload is about 34% as shown in the following formula, and the result that sufficiently satisfies the condition that the preload of about 20 to 30% of the generated force of the piezoelectric element is required was obtained. . 6.8 / 20 × 100 = 34% In the above embodiment, an example using the SK-5 quenched steel strip as the preload spring material is shown. However, as the preload spring material, SK
-5 The material is not limited to the quenched steel strip, and materials satisfying the following conditions can be used. (1) The coefficient of linear expansion is positive. (2) A spring material having high elasticity. (3) Withstanding a high temperature of about 200 ° C. (heat treatment and the like are also performed at this temperature or higher).
【００１７】上記条件を満足する材料としては、例え
ば、マルエージング鋼（商品名：ＭＡＳ１，ＹＡＧ）、
工具鋼（ＳＫ−１，ＳＫ−２，…，ＳＫ−５，商品名：
ＰＫ）、炭素鋼を用いることができ、また、その他ＪＩ
Ｓに含まれる鉄系の材料であれば大抵の材料を用いるこ
とが可能である。なお、上記実施例では、圧電素子と予
圧バネを共に恒温炉に入れて加熱する例を示したが、本
発明は上記実施例に限定されるものではなく、例えば、
予圧バネのみを加熱して圧電素子のスペーサに溶接して
もよい。Materials satisfying the above conditions include, for example, maraging steel (trade name: MAS1, YAG),
Tool steel (SK-1, SK-2, ..., SK-5, product name:
PK), carbon steel can be used, and other JI
Most of the iron-based materials contained in S can be used. In the above embodiment, an example in which both the piezoelectric element and the preload spring are placed in a constant temperature oven for heating is shown, but the present invention is not limited to the above embodiment, and for example,
Only the preload spring may be heated and welded to the spacer of the piezoelectric element.
【００１８】また、上記実施例においては、恒温炉内で
予圧バネを圧電素子のスペーサ部分にスポット溶接して
いるが、本発明は上記実施例に限定されるものではな
く、予圧バネを加熱した後、恒温炉から取り出し、予圧
バネが冷却する前に圧電素子に溶接してもよい。さら
に、加熱手段は恒温炉に限定されるものではなく、その
他周知な加熱手段を用いることができる。Further, in the above embodiment, the preload spring is spot welded to the spacer portion of the piezoelectric element in the constant temperature oven, but the present invention is not limited to the above embodiment, and the preload spring is heated. Then, it may be taken out from the constant temperature furnace and welded to the piezoelectric element before the preload spring cools. Further, the heating means is not limited to the constant temperature furnace, and other well-known heating means can be used.
【００１９】[0019]
【発明の効果】以上説明したように、本発明において
は、所定値以上のバネ定数と正の線膨張係数を持つ予圧
バネを所定温度以上に加熱し、圧電素子の両端に取り付
けられたスペーサ部分に溶接し、予圧バネを常温まで冷
却するようにしたので、圧電素子を加圧する手段等を必
要とせず、簡単に圧電素子に予圧力を付与することがで
きる。As described above, in the present invention, the preload spring having a spring constant of a predetermined value or more and a positive linear expansion coefficient is heated to a predetermined temperature or more, and the spacer portions attached to both ends of the piezoelectric element. Since the preload spring is cooled to room temperature by welding, it is possible to easily apply a preload to the piezoelectric element without requiring a means for pressing the piezoelectric element.
【００２０】また、圧電素子と予圧バネを共に恒温炉等
で加熱することにより、比較的低い温度で圧電素子に所
望の予圧力を付与することができる。By heating both the piezoelectric element and the preload spring in a constant temperature oven or the like, a desired preload can be applied to the piezoelectric element at a relatively low temperature.
【図１】本発明において圧電素子に予圧を付与する工程
を示す図である。FIG. 1 is a diagram showing a step of applying a preload to a piezoelectric element in the present invention.
【図２】本発明の実施例の工程を示す図である。FIG. 2 is a diagram showing a process of an example of the present invention.
【図３】本発明の実施例で用いた圧電素子と予圧バネの
寸法、特性を示す図である。FIG. 3 is a diagram showing dimensions and characteristics of a piezoelectric element and a preload spring used in an example of the present invention.
【図４】圧電素子に予圧を付与するための従来の工程を
示す図である。FIG. 4 is a diagram showing a conventional process for applying a preload to a piezoelectric element.
１ 圧電素子 ２ スペーサ ３ 予圧バネ 1 Piezoelectric element 2 Spacer 3 Preload spring
Claims (2)
サ(2) を取り付け、 所定値以上のバネ定数と正の線膨張係数を持つ予圧バネ
(3) を所定温度以上に加熱し、 圧電素子(1) の両端に取り付けられたスペーサ部分に、
圧電素子(1) の変位方向と平行に所定温度以上に加熱さ
れた予圧バネ(3) を接合し、 予圧バネ(3) を常温まで冷却することにより、圧電素子
(1) に所定の予圧力を付与することを特徴とする圧電ア
クチュエータの製造方法。1. A preload spring having a spring constant of a predetermined value or more and a positive linear expansion coefficient, with spacers (2) attached to both ends of the piezoelectric element (1) in the displacement direction.
(3) is heated above a specified temperature, and the spacers attached to both ends of the piezoelectric element (1)
By joining the preload spring (3) heated above the specified temperature in parallel with the displacement direction of the piezoelectric element (1) and cooling the preload spring (3) to room temperature, the piezoelectric element
A method for manufacturing a piezoelectric actuator, which comprises applying a predetermined preload to (1).
し、スペーサ部分に予圧バネ(3) を接合することを特徴
とする請求項１の圧電アクチュエータの製造方法。2. The method of manufacturing a piezoelectric actuator according to claim 1, wherein the piezoelectric element (1) and the preload spring (3) are heated together, and the preload spring (3) is joined to the spacer portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33080093A JPH07193295A (en) | 1993-12-27 | 1993-12-27 | Method for manufacturing piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33080093A JPH07193295A (en) | 1993-12-27 | 1993-12-27 | Method for manufacturing piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07193295A true JPH07193295A (en) | 1995-07-28 |
Family
ID=18236700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33080093A Pending JPH07193295A (en) | 1993-12-27 | 1993-12-27 | Method for manufacturing piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07193295A (en) |
-
1993
- 1993-12-27 JP JP33080093A patent/JPH07193295A/en active Pending
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