JPH07209093A - 温度計 - Google Patents
温度計Info
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- JPH07209093A JPH07209093A JP1995994A JP1995994A JPH07209093A JP H07209093 A JPH07209093 A JP H07209093A JP 1995994 A JP1995994 A JP 1995994A JP 1995994 A JP1995994 A JP 1995994A JP H07209093 A JPH07209093 A JP H07209093A
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Abstract
(57)【要約】
【目的】 保護管との接触による熱電対の断線を防止す
ることができ、耐久性の向上を図った温度計を提供する
ことにある。 【構成】 一対の熱電対素線２０ａ，２０ｂを長手方向
に挿通する素線挿通孔２１，２１を有する長尺の絶縁棒
状体１８と、この絶縁棒状体１８の先端部より延出され
た一対の熱電対素線２０ａ，２０ｂを互に接合してなる
熱電対２０と、この熱電対２０を先端部に有する絶縁棒
状体１８を収容する耐熱性保護管１７とを備えた温度計
１４において、前記絶縁棒状体１８の先端部に前記熱電
対２０を長手方向に熱膨張移動可能に収容する所定深さ
ｈの収容穴部２２を形成してなる。従って、熱電対２０
が前記収容穴部２２内で熱膨張移動するようになるた
め、保護管１７との接触による熱電対２０の断線が防止
され、耐久性が向上する。
ることができ、耐久性の向上を図った温度計を提供する
ことにある。 【構成】 一対の熱電対素線２０ａ，２０ｂを長手方向
に挿通する素線挿通孔２１，２１を有する長尺の絶縁棒
状体１８と、この絶縁棒状体１８の先端部より延出され
た一対の熱電対素線２０ａ，２０ｂを互に接合してなる
熱電対２０と、この熱電対２０を先端部に有する絶縁棒
状体１８を収容する耐熱性保護管１７とを備えた温度計
１４において、前記絶縁棒状体１８の先端部に前記熱電
対２０を長手方向に熱膨張移動可能に収容する所定深さ
ｈの収容穴部２２を形成してなる。従って、熱電対２０
が前記収容穴部２２内で熱膨張移動するようになるた
め、保護管１７との接触による熱電対２０の断線が防止
され、耐久性が向上する。
Description
【０００１】
【産業上の利用分野】本発明は、例えば熱処理炉の炉内
温度を測定する温度計に関する。
温度を測定する温度計に関する。
【０００２】
【従来の技術】例えば、半導体ウエハの製造において
は、酸化、拡散、アニールなどの処理を行うために、各
種の熱処理装置が使用されている。その一般的な熱処理
装置は、処理炉内に被処理体である半導体ウエハを収容
する反応管（プロセスチューブともいう）を設け、この
反応管の周囲に反応管内を加熱する加熱部を設けて構成
されている。
は、酸化、拡散、アニールなどの処理を行うために、各
種の熱処理装置が使用されている。その一般的な熱処理
装置は、処理炉内に被処理体である半導体ウエハを収容
する反応管（プロセスチューブともいう）を設け、この
反応管の周囲に反応管内を加熱する加熱部を設けて構成
されている。
【０００３】また、前記半導体ウエハの処理に必要とな
る温度を管理するために、前記加熱部には温度センサが
設けられている。そして、この温度センサの性能を維持
するために、例えば反応管の洗浄等が行われて処理炉内
の条件が変った時などに、処理を開始する前に反応管内
に温度計を挿入して実際の処理と同じように反応管内を
加熱して温度を計り、温度センサが正常に機能している
か否かの検査及び較正が適宜行われている。
る温度を管理するために、前記加熱部には温度センサが
設けられている。そして、この温度センサの性能を維持
するために、例えば反応管の洗浄等が行われて処理炉内
の条件が変った時などに、処理を開始する前に反応管内
に温度計を挿入して実際の処理と同じように反応管内を
加熱して温度を計り、温度センサが正常に機能している
か否かの検査及び較正が適宜行われている。
【０００４】この場合に使用される前記温度計は、図６
に示すように一対の熱電対素線２０ａ，２０ｂを長手方
向に挿通する素線挿通孔２１，２１を有する長尺の絶縁
棒状体１８と、この絶縁棒状体１８の先端部（上端部）
より延出された一対の熱電対素線２０ａ，２０ｂを互に
接合してなる熱電対２０と、この熱電対２０を先端部に
有する絶縁棒状体１８を収容する保護管１７とから主に
構成されている。なお、前記熱電対素線２０ａ，２０ｂ
は絶縁棒状体１８の基端部（下端部）に固定されてい
る。熱電対２０は例えば白金と白金ロジウムの組合せか
らなり、保護管１７は耐熱性の高い材料例えば炭化ケイ
素（ＳｉＣ）により形成されている。
に示すように一対の熱電対素線２０ａ，２０ｂを長手方
向に挿通する素線挿通孔２１，２１を有する長尺の絶縁
棒状体１８と、この絶縁棒状体１８の先端部（上端部）
より延出された一対の熱電対素線２０ａ，２０ｂを互に
接合してなる熱電対２０と、この熱電対２０を先端部に
有する絶縁棒状体１８を収容する保護管１７とから主に
構成されている。なお、前記熱電対素線２０ａ，２０ｂ
は絶縁棒状体１８の基端部（下端部）に固定されてい
る。熱電対２０は例えば白金と白金ロジウムの組合せか
らなり、保護管１７は耐熱性の高い材料例えば炭化ケイ
素（ＳｉＣ）により形成されている。
【０００５】
【発明が解決しようとする課題】しかしながら、前記温
度計においては、熱電対２０が絶縁棒状体１８の先端部
に延出した状態で設けられていること及び絶縁棒状体１
８の熱膨張率（８．０×１０-6）に対して熱電対素線２
０ａ，２０ｂの熱膨張率（１１．１×１０-6）の方が大
きいことから、熱電線素線２０ａ，２０ｂの熱膨張によ
り熱電対２０が絶縁棒状体１８の先端部から更に延出し
て保護管１７の内壁に接触する場合がある。この場合、
熱電対２０を構成する高融点（１７７０℃）の白金が保
護管１７を構成する炭化ケイ素のケイ素（Ｓｉ）と反応
して低融点（８３０℃）の合金となり、熱電対２０が断
線し易くなるという問題があった。
度計においては、熱電対２０が絶縁棒状体１８の先端部
に延出した状態で設けられていること及び絶縁棒状体１
８の熱膨張率（８．０×１０-6）に対して熱電対素線２
０ａ，２０ｂの熱膨張率（１１．１×１０-6）の方が大
きいことから、熱電線素線２０ａ，２０ｂの熱膨張によ
り熱電対２０が絶縁棒状体１８の先端部から更に延出し
て保護管１７の内壁に接触する場合がある。この場合、
熱電対２０を構成する高融点（１７７０℃）の白金が保
護管１７を構成する炭化ケイ素のケイ素（Ｓｉ）と反応
して低融点（８３０℃）の合金となり、熱電対２０が断
線し易くなるという問題があった。
【０００６】本発明は、前記問題点を解決すべくなされ
たもので、保護管との接触による熱電対の断線を防止す
ることができ、耐久性の向上を図った温度計を提供する
ことを目的とする。
たもので、保護管との接触による熱電対の断線を防止す
ることができ、耐久性の向上を図った温度計を提供する
ことを目的とする。
【０００７】
【課題を解決するための手段】上記目的を達成するため
に本発明は、一対の熱電対素線を長手方向に挿通する素
線挿通孔を有する長尺の絶縁棒状体と、この絶縁棒状体
の先端部より延出された一対の熱電対素線を互に接合し
てなる熱電対と、この熱電対を先端部に有する絶縁棒状
体を収容する耐熱性保護管とを備えた温度計において、
前記絶縁棒状体の先端部に前記熱電対を長手方向に熱膨
張移動可能に収容する所定深さの収容穴部を形成してな
ることを特徴とする。
に本発明は、一対の熱電対素線を長手方向に挿通する素
線挿通孔を有する長尺の絶縁棒状体と、この絶縁棒状体
の先端部より延出された一対の熱電対素線を互に接合し
てなる熱電対と、この熱電対を先端部に有する絶縁棒状
体を収容する耐熱性保護管とを備えた温度計において、
前記絶縁棒状体の先端部に前記熱電対を長手方向に熱膨
張移動可能に収容する所定深さの収容穴部を形成してな
ることを特徴とする。
【０００８】
【作用】このように構成された本発明の温度計によれ
ば、熱電対が絶縁棒状体先端の収容穴部内で熱膨張移動
するようになるため、熱電対が保護管と接触するような
ことがない。従って、保護管との接触による熱電対の断
線を防止することが可能となり、耐久性の向上が図れ
る。
ば、熱電対が絶縁棒状体先端の収容穴部内で熱膨張移動
するようになるため、熱電対が保護管と接触するような
ことがない。従って、保護管との接触による熱電対の断
線を防止することが可能となり、耐久性の向上が図れ
る。
【０００９】
【実施例】以下に、本発明の一実施例を添付図面に基づ
いて詳述する。
いて詳述する。
【００１０】本発明を熱処理装置の温度計に適用した実
施例を示す図３において、１は被処理体である半導体ウ
エハＷを高温下で処理する縦型の処理炉で、この処理炉
１は中央部に円形の開口部２ａを有する水平のベースプ
レート２を備えている。このベースプレート２の開口部
２ａには下端が開口し且つその開口端にフランジ部３ａ
を有する縦長円筒状の石英製の処理管３が挿通され、こ
の処理管３のフランジ部３ａの周縁部がベースプレート
２にマニホールド４を介して取外可能に取付けられてい
る。また、処理管３の下側部には処理ガスを導入する導
入管部３ｂや処理ガスを排出する図示しない排出管部が
一体に形成されている。
施例を示す図３において、１は被処理体である半導体ウ
エハＷを高温下で処理する縦型の処理炉で、この処理炉
１は中央部に円形の開口部２ａを有する水平のベースプ
レート２を備えている。このベースプレート２の開口部
２ａには下端が開口し且つその開口端にフランジ部３ａ
を有する縦長円筒状の石英製の処理管３が挿通され、こ
の処理管３のフランジ部３ａの周縁部がベースプレート
２にマニホールド４を介して取外可能に取付けられてい
る。また、処理管３の下側部には処理ガスを導入する導
入管部３ｂや処理ガスを排出する図示しない排出管部が
一体に形成されている。
【００１１】前記処理管３の周縁部には処理管３内を加
熱する加熱部５が設けられ、この加熱部５と処理管３と
の間には加熱部５による加熱を均一にするための均熱管
６が処理管３を覆うようにして処理管３と同心円状に設
けられている。前記加熱部５は例えば二ケイ化モリブデ
ン（ＭｏＳｉ2）又はカンタル（商品名）等の抵抗発熱
線５ａをコイル状に巻いてなり、その外側及び上方には
これを覆うように断熱材７が設けられ、この断熱材７の
外側は図示しないアウターシェルで覆われている。加熱
部５は高さ方向に複数（例えば３〜５）のゾーンに分割
されると共に、各ゾーンに温度センサ８が配設され、そ
れぞれのゾーンが独立して温度制御されるようになって
いる。
熱する加熱部５が設けられ、この加熱部５と処理管３と
の間には加熱部５による加熱を均一にするための均熱管
６が処理管３を覆うようにして処理管３と同心円状に設
けられている。前記加熱部５は例えば二ケイ化モリブデ
ン（ＭｏＳｉ2）又はカンタル（商品名）等の抵抗発熱
線５ａをコイル状に巻いてなり、その外側及び上方には
これを覆うように断熱材７が設けられ、この断熱材７の
外側は図示しないアウターシェルで覆われている。加熱
部５は高さ方向に複数（例えば３〜５）のゾーンに分割
されると共に、各ゾーンに温度センサ８が配設され、そ
れぞれのゾーンが独立して温度制御されるようになって
いる。
【００１２】前記加熱部５、断熱材７及びアウターシェ
ルは前記ベースプレート２上に支持されている。前記均
熱管６は耐熱性を有する材料、例えば炭化ケイ素（Ｓｉ
Ｃ）により下端が開口した縦長円筒状に形成され、その
下端部が前記ベースプレー２上に円環状の断熱支持体９
を介して支持されている。
ルは前記ベースプレート２上に支持されている。前記均
熱管６は耐熱性を有する材料、例えば炭化ケイ素（Ｓｉ
Ｃ）により下端が開口した縦長円筒状に形成され、その
下端部が前記ベースプレー２上に円環状の断熱支持体９
を介して支持されている。
【００１３】前記処理管３の下方にはその下端開口を開
閉する蓋体１０が配置され、この蓋体１０上には多数枚
の半導体ウエハＷを水平状態で上下方向に間隔をおいて
多段に支持するウエハボート１１が保温筒１２を介して
載置されている。前記蓋体１０は昇降機構１３の昇降台
１３ａ上に取付けられ、この昇降機構１３により処理管
３内への前記ウエハボート１１の搬入及び搬出及び蓋体
１０の開閉が行われるようになっている。
閉する蓋体１０が配置され、この蓋体１０上には多数枚
の半導体ウエハＷを水平状態で上下方向に間隔をおいて
多段に支持するウエハボート１１が保温筒１２を介して
載置されている。前記蓋体１０は昇降機構１３の昇降台
１３ａ上に取付けられ、この昇降機構１３により処理管
３内への前記ウエハボート１１の搬入及び搬出及び蓋体
１０の開閉が行われるようになっている。
【００１４】そして、このように構成された熱処理装置
の反応管３内には、例えば反応管３の洗浄等が行われて
処理炉１内の条件が変った時などに、処理を開始する前
に温度計１４が挿入され、実際の処理と同じように反応
管３内を加熱して温度を計ることにより、温度センサ８
の検査及び較正が行われる。この温度計１４は蓋体１０
に設けられた挿入孔１５から保温筒１２及びウエハボー
ト１１と干渉しないように反応管３内に垂直に挿入さ
れ、温度計１４の下端部が昇降機構１３の昇降台１３ａ
にブラケット１６を介して固定される。
の反応管３内には、例えば反応管３の洗浄等が行われて
処理炉１内の条件が変った時などに、処理を開始する前
に温度計１４が挿入され、実際の処理と同じように反応
管３内を加熱して温度を計ることにより、温度センサ８
の検査及び較正が行われる。この温度計１４は蓋体１０
に設けられた挿入孔１５から保温筒１２及びウエハボー
ト１１と干渉しないように反応管３内に垂直に挿入さ
れ、温度計１４の下端部が昇降機構１３の昇降台１３ａ
にブラケット１６を介して固定される。
【００１５】なお、この検査は、実際の処理と同じ条件
すなわち反応管３内に保温筒１２及びウエハボート１１
が存在する状態（但し、ウエハボート１１に半導体ウエ
ハＷがセットされていない状態）で行われる。また、検
査終了後には、前記温度計１４は蓋体１０の挿入孔１５
から引抜かれ、蓋体１０の挿入孔１５に図示しない盲蓋
が取付けられる。
すなわち反応管３内に保温筒１２及びウエハボート１１
が存在する状態（但し、ウエハボート１１に半導体ウエ
ハＷがセットされていない状態）で行われる。また、検
査終了後には、前記温度計１４は蓋体１０の挿入孔１５
から引抜かれ、蓋体１０の挿入孔１５に図示しない盲蓋
が取付けられる。
【００１６】前記温度計１４は、図４ないし図５に示す
ように下端が開放された長尺の保護管１７を有し、この
保護管１７内には前記加熱部５の各ゾーンに対応して長
さを違えた長尺の複数本（図示例では５本）の絶縁棒状
体（碍子）１８が下端開口部１７ａから挿入されてい
る。また、保護管１７の開口部１７ａには、これより前
記絶縁棒状体１８の下端部を少し延出させた状態で例え
ば保護管１７と同質のセラミック接着材からなる充填材
１９が充填され、これにより保護管１７内が密封される
と共に絶縁棒状体１８が固定されている。
ように下端が開放された長尺の保護管１７を有し、この
保護管１７内には前記加熱部５の各ゾーンに対応して長
さを違えた長尺の複数本（図示例では５本）の絶縁棒状
体（碍子）１８が下端開口部１７ａから挿入されてい
る。また、保護管１７の開口部１７ａには、これより前
記絶縁棒状体１８の下端部を少し延出させた状態で例え
ば保護管１７と同質のセラミック接着材からなる充填材
１９が充填され、これにより保護管１７内が密封される
と共に絶縁棒状体１８が固定されている。
【００１７】前記保護管１７は、耐熱性の高い材料例え
ば炭化ケイ素により、反応管３内の深さ以上の長さ例え
ば１ｍ程度以上の長さ及び所定の径例えば直径が１０ｍ
ｍ程度、内径が７ｍｍ程度の細管状に形成されている。
また、前記絶縁棒状体１８は、図１ないし図２に示すよ
うに絶縁材料である例えば高純度のアルミナ（Ａｌ
2Ｏ3）により例えば長径ｄ1が２．４ｍｍ程度、短径ｄ2
が１．７ｍｍ程度の断面楕円形の棒状に形成され、内部
にはその長手方向に一対の例えば直径が０．５ｍｍ程度
の熱電対素線２０ａ，２０ｂを挿通するための例えば内
径ｄ3が０．７ｍｍ程度の素線挿通孔２１，２１が所定
の間隔ｐ例えば１ｍｍ程度で形成されている。
ば炭化ケイ素により、反応管３内の深さ以上の長さ例え
ば１ｍ程度以上の長さ及び所定の径例えば直径が１０ｍ
ｍ程度、内径が７ｍｍ程度の細管状に形成されている。
また、前記絶縁棒状体１８は、図１ないし図２に示すよ
うに絶縁材料である例えば高純度のアルミナ（Ａｌ
2Ｏ3）により例えば長径ｄ1が２．４ｍｍ程度、短径ｄ2
が１．７ｍｍ程度の断面楕円形の棒状に形成され、内部
にはその長手方向に一対の例えば直径が０．５ｍｍ程度
の熱電対素線２０ａ，２０ｂを挿通するための例えば内
径ｄ3が０．７ｍｍ程度の素線挿通孔２１，２１が所定
の間隔ｐ例えば１ｍｍ程度で形成されている。
【００１８】これら素線挿通孔２１，２１に例えば白金
からなる素線２０ａと白金ロジウムからなる素線２０ｂ
を別々に挿通し、素線挿通孔２１，２１の上端部から延
出された両素線２０ａ，２０ｂの上端部を互に所定の曲
率例えば半径が０．５ｍｍ程度で湾曲させて端部同士を
プラズマ溶接で接合することによりいわゆるＲ型の熱電
対２０が形成される。そして、この熱電対２０が熱電対
素線２０ａ，２０ｂの熱膨張により絶縁棒状体１８の上
端部から延出して保護管１７の内壁に接触することを防
止するために、絶縁棒状体１７の上端部には熱電対２０
を熱膨張移動可能に収容する収容穴部２２が形成されて
いる。
からなる素線２０ａと白金ロジウムからなる素線２０ｂ
を別々に挿通し、素線挿通孔２１，２１の上端部から延
出された両素線２０ａ，２０ｂの上端部を互に所定の曲
率例えば半径が０．５ｍｍ程度で湾曲させて端部同士を
プラズマ溶接で接合することによりいわゆるＲ型の熱電
対２０が形成される。そして、この熱電対２０が熱電対
素線２０ａ，２０ｂの熱膨張により絶縁棒状体１８の上
端部から延出して保護管１７の内壁に接触することを防
止するために、絶縁棒状体１７の上端部には熱電対２０
を熱膨張移動可能に収容する収容穴部２２が形成されて
いる。
【００１９】この収容穴部２２は、前記一対の素線挿通
孔２１，２１が内接する例えば長径ｄ4が１．７ｍｍ程
度、短径ｄ5が０．７ｍｍ程度の断面長円形に形成され
ると共に、熱電対素線２０ａ，２０ｂ及び絶縁棒状体１
８の長さ、熱膨張率並びに受ける熱を考慮して所定の深
さｈに形成されている。例えば、熱電対素線２０ａ，２
０ｂ及び絶縁棒状体１８の長さが１ｍ程度、熱膨張率が
１１．１×１０-6と８．０×１０-6、受ける温度が１０
００℃程度とした場合、熱電対素線２０ａ，２０ｂの方
が絶縁棒状体１８よりも３．１ｍｍ余計に伸びるので、
前記収容穴部２２の深さｈは余裕をとって６〜７ｍｍ程
度に形成されている。
孔２１，２１が内接する例えば長径ｄ4が１．７ｍｍ程
度、短径ｄ5が０．７ｍｍ程度の断面長円形に形成され
ると共に、熱電対素線２０ａ，２０ｂ及び絶縁棒状体１
８の長さ、熱膨張率並びに受ける熱を考慮して所定の深
さｈに形成されている。例えば、熱電対素線２０ａ，２
０ｂ及び絶縁棒状体１８の長さが１ｍ程度、熱膨張率が
１１．１×１０-6と８．０×１０-6、受ける温度が１０
００℃程度とした場合、熱電対素線２０ａ，２０ｂの方
が絶縁棒状体１８よりも３．１ｍｍ余計に伸びるので、
前記収容穴部２２の深さｈは余裕をとって６〜７ｍｍ程
度に形成されている。
【００２０】そして、前記熱電対２０は収容穴部２２の
底部に配置され、この状態で熱電対素線２０ａ，２０ｂ
は絶縁棒状体１８の下端部から延出されており、且つ絶
縁棒状体１８の素線挿通孔２１，２１の下端部に例えば
絶縁棒状体１８と同質のセラミック接着材からなる充填
材を充填することにより固定されている（図示省略）。
底部に配置され、この状態で熱電対素線２０ａ，２０ｂ
は絶縁棒状体１８の下端部から延出されており、且つ絶
縁棒状体１８の素線挿通孔２１，２１の下端部に例えば
絶縁棒状体１８と同質のセラミック接着材からなる充填
材を充填することにより固定されている（図示省略）。
【００２１】なお、前記絶縁棒状体１８は素線挿通孔２
１が形成された状態で焼成されており、この絶縁棒状体
１８の上端部に収容穴部２２をフライスカッターなどの
加工機械により加工することになる。この場合、加工機
械の関係で現状では加工物である絶縁棒状体１８の長さ
が制限されるため、例えば長さが３０ｃｍ程度の絶縁棒
状体に収容穴部２２を加工してから、この絶縁棒状体を
例えば長さが７０ｃｍ程度の絶縁棒状体に接合すること
により所望長さの絶縁棒状体１８を得る。なお、この加
工方法を用いずに、例えば焼成前の絶縁棒状体１８に素
線挿通孔２１と共に収容穴部２２を形成してから焼成す
るようにしてもよく、この方法によれば収容穴部２２を
有する所望長さの絶縁棒状体１８が容易に得られる。
１が形成された状態で焼成されており、この絶縁棒状体
１８の上端部に収容穴部２２をフライスカッターなどの
加工機械により加工することになる。この場合、加工機
械の関係で現状では加工物である絶縁棒状体１８の長さ
が制限されるため、例えば長さが３０ｃｍ程度の絶縁棒
状体に収容穴部２２を加工してから、この絶縁棒状体を
例えば長さが７０ｃｍ程度の絶縁棒状体に接合すること
により所望長さの絶縁棒状体１８を得る。なお、この加
工方法を用いずに、例えば焼成前の絶縁棒状体１８に素
線挿通孔２１と共に収容穴部２２を形成してから焼成す
るようにしてもよく、この方法によれば収容穴部２２を
有する所望長さの絶縁棒状体１８が容易に得られる。
【００２２】次に、実施例の作用を述べる。先ず、図３
に示すように温度計１４を熱処理装置における蓋体１０
の挿入孔１５に挿入して昇降機構１３の昇降台１３ａに
ブラケット１６を介して取付けたなら、昇降機構１３に
よりウエハボート１１、保温筒１２及び温度計１４を反
応管３内に挿入すると共に蓋体１０を閉める。次いで、
温度センサ８を介して制御される加熱部５により反応管
３内を所定の温度例えば１０００℃程度に加熱し、この
時の反応管３内の温度を温度計１４の熱電対２０により
検知して測定する。そして、この温度計１４により測定
される温度に基づいて温度センサ８の較正を行ったり、
温度センサ８が正常に機能しているか否かの検査を行
う。
に示すように温度計１４を熱処理装置における蓋体１０
の挿入孔１５に挿入して昇降機構１３の昇降台１３ａに
ブラケット１６を介して取付けたなら、昇降機構１３に
よりウエハボート１１、保温筒１２及び温度計１４を反
応管３内に挿入すると共に蓋体１０を閉める。次いで、
温度センサ８を介して制御される加熱部５により反応管
３内を所定の温度例えば１０００℃程度に加熱し、この
時の反応管３内の温度を温度計１４の熱電対２０により
検知して測定する。そして、この温度計１４により測定
される温度に基づいて温度センサ８の較正を行ったり、
温度センサ８が正常に機能しているか否かの検査を行
う。
【００２３】このような検査状態において、温度計１４
が高温に加熱されているので、温度計１４を構成してい
る熱電対素線２０ａ，２０ｂや絶縁棒状体１８などが熱
膨張し、これら熱電対素線２０ａ，２０ｂ及び絶縁棒状
体１８の熱膨張差により熱電対２０が絶縁棒状体１８に
対して相対的に移動するようになる。
が高温に加熱されているので、温度計１４を構成してい
る熱電対素線２０ａ，２０ｂや絶縁棒状体１８などが熱
膨張し、これら熱電対素線２０ａ，２０ｂ及び絶縁棒状
体１８の熱膨張差により熱電対２０が絶縁棒状体１８に
対して相対的に移動するようになる。
【００２４】しかしながら、前記温度計１４において
は、絶縁棒状体１８の先端部に熱電対２０を長手方向に
熱膨張移動可能に収容する所定深さｈの収容穴部２２を
形成してあるため、熱電対２０が前記収容穴部２２内で
熱膨張移動するようになり、熱電対２０が保護管１７の
内壁と接触するようなことがない。従って、保護管１７
との接触による熱電対２０の断線を防止することが可能
となり、温度計１４の耐久性の向上が図れる。
は、絶縁棒状体１８の先端部に熱電対２０を長手方向に
熱膨張移動可能に収容する所定深さｈの収容穴部２２を
形成してあるため、熱電対２０が前記収容穴部２２内で
熱膨張移動するようになり、熱電対２０が保護管１７の
内壁と接触するようなことがない。従って、保護管１７
との接触による熱電対２０の断線を防止することが可能
となり、温度計１４の耐久性の向上が図れる。
【００２５】なお、本発明は、前記実施例に限定される
ものではなく、本発明の要旨の範囲内で種々の変形実施
が可能である。例えば、実施例では縦型の処理炉１が例
示されているが、処理炉１としては横型のものであって
もよい。また、実施例では熱処理装置の反応管３内に温
度計１４を挿入するようにしたが、反応管３と均熱管６
との間に温度計１４を常設するようにしてもよい。更
に、本発明の温度計は熱処理装置以外にも適用可能であ
る。
ものではなく、本発明の要旨の範囲内で種々の変形実施
が可能である。例えば、実施例では縦型の処理炉１が例
示されているが、処理炉１としては横型のものであって
もよい。また、実施例では熱処理装置の反応管３内に温
度計１４を挿入するようにしたが、反応管３と均熱管６
との間に温度計１４を常設するようにしてもよい。更
に、本発明の温度計は熱処理装置以外にも適用可能であ
る。
【００２６】また、実施例では細管の保護管１７内に収
容される絶縁棒状体１８の収容本数を多くするため、す
なわち収容効率を上げるために絶縁棒状体１８が断面楕
円形に形成されているが、絶縁棒状体１８の断面形状は
楕円形以外の例えば円形、方形、多角形等であってもよ
く、この絶縁棒状体１８の断面形状に対応して収容穴部
２２の断面形状も長円形以外の円形、方形、多角形等で
あってもよい。更に、収容穴部２２の上端部を例えば絶
縁棒状体１８と同質のセラミック接着材からなる充填材
で閉塞して収容穴部２２を密封するようにしてもよい。
これによれば、保護管１７から拡散等してくる重金属に
よる熱電対２０を構成する白金の合金化を防止すること
ができ、更に耐久性の向上が図れる。
容される絶縁棒状体１８の収容本数を多くするため、す
なわち収容効率を上げるために絶縁棒状体１８が断面楕
円形に形成されているが、絶縁棒状体１８の断面形状は
楕円形以外の例えば円形、方形、多角形等であってもよ
く、この絶縁棒状体１８の断面形状に対応して収容穴部
２２の断面形状も長円形以外の円形、方形、多角形等で
あってもよい。更に、収容穴部２２の上端部を例えば絶
縁棒状体１８と同質のセラミック接着材からなる充填材
で閉塞して収容穴部２２を密封するようにしてもよい。
これによれば、保護管１７から拡散等してくる重金属に
よる熱電対２０を構成する白金の合金化を防止すること
ができ、更に耐久性の向上が図れる。
【００２７】
【発明の効果】以上要するに本発明によれば、絶縁棒状
体の先端部に熱電対を長手方向に熱膨張移動可能に収容
する所定深さの収容穴部を形成したので、熱電対が前記
収容穴部内で熱膨張移動するようになり、熱電対が保護
管と接触することがなくなり、保護管との接触による熱
電対の断線を防止することができ、耐久性の向上が図れ
る。
体の先端部に熱電対を長手方向に熱膨張移動可能に収容
する所定深さの収容穴部を形成したので、熱電対が前記
収容穴部内で熱膨張移動するようになり、熱電対が保護
管と接触することがなくなり、保護管との接触による熱
電対の断線を防止することができ、耐久性の向上が図れ
る。
【図１】本発明の一実施例を示す温度計の要部の一部切
欠拡大斜視図である。
欠拡大斜視図である。
【図２】図１の温度計の熱電対を取付けない状態の拡大
斜視図である。
斜視図である。
【図３】熱処理装置の縦断面図である。
【図４】温度計の拡大縦断面図である。
【図５】図４のＡ−Ａ線拡大断面図である。
【図６】従来の温度計の概略斜視図である。
１４ 温度計 １７ 保護管 １８ 絶縁棒状体 ２０ 熱電対 ２０ａ，２０ｂ 熱電対素線 ２１ 素線挿通孔 ２２ 収容穴部
───────────────────────────────────────────────────── フロントページの続き (72)発明者 川上 俊二 神奈川県津久井群城山町町屋１丁目２番41 号 東京エレクトロン東北株式会社相模事 業所内
Claims (1)
- 【請求項１】 一対の熱電対素線を長手方向に挿通する
素線挿通孔を有する長尺の絶縁棒状体と、この絶縁棒状
体の先端部より延出された一対の熱電対素線を互に接合
してなる熱電対と、この熱電対を先端部に有する絶縁棒
状体を収容する耐熱性保護管とを備えた温度計におい
て、前記絶縁棒状体の先端部に前記熱電対を長手方向に
熱膨張移動可能に収容する所定深さの収容穴部を形成し
てなることを特徴とする温度計。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1995994A JPH07209093A (ja) | 1994-01-20 | 1994-01-20 | 温度計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1995994A JPH07209093A (ja) | 1994-01-20 | 1994-01-20 | 温度計 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07209093A true JPH07209093A (ja) | 1995-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1995994A Pending JPH07209093A (ja) | 1994-01-20 | 1994-01-20 | 温度計 |
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