JPH07232143A - Ultrasonic cleaning nozzle - Google Patents
Ultrasonic cleaning nozzleInfo
- Publication number
- JPH07232143A JPH07232143A JP2409294A JP2409294A JPH07232143A JP H07232143 A JPH07232143 A JP H07232143A JP 2409294 A JP2409294 A JP 2409294A JP 2409294 A JP2409294 A JP 2409294A JP H07232143 A JPH07232143 A JP H07232143A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- cleaning
- flow path
- ultrasonic
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
(57)【要約】
【目的】 この発明は超音波振動が付与された洗浄液で
被洗浄物を洗浄する場合に、その洗浄効果を高めること
ができるようにした超音波洗浄ノズルを提供することに
ある。
【構成】 洗浄液を流通させる流路５が形成されたノズ
ル本体２と、上記流路に流入する洗浄液に超音波振動を
付与する超音波振動子１１と、上記流路に設けられこの
流路に流入して超音波振動が付与された洗浄液を整流し
て流出させる整流体１２とを具備したことを特徴とす
る。
(57) [Abstract] [PROBLEMS] To provide an ultrasonic cleaning nozzle capable of enhancing the cleaning effect when cleaning an object to be cleaned with a cleaning liquid to which ultrasonic vibration is applied. is there. [Structure] A nozzle body 2 in which a flow path 5 for flowing a cleaning liquid is formed, an ultrasonic vibrator 11 for applying ultrasonic vibration to the cleaning liquid flowing into the flow path, and a flow path provided in the flow path. And a rectifying body 12 for rectifying and flowing out the cleaning liquid that has flowed in and to which ultrasonic vibration has been applied.
Description
【０００１】[0001]
【産業上の利用分野】この発明は被洗浄物に付着した塵
埃（微粒子）を洗浄する洗浄液に超音波振動を付与する
ための超音波振動ノズルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibration nozzle for applying ultrasonic vibration to a cleaning liquid for cleaning dust (fine particles) attached to an object to be cleaned.
【０００２】[0002]
【従来の技術】たとえば液晶表示装置や半導体装置の製
造工程においては、被洗浄物としての液晶用ガラス基板
や半導体ウエハを高い清浄度で洗浄することが要求され
る工程がある。このような被洗浄基板を洗浄する方式と
しては、洗浄液中に複数枚の被洗浄物を浸漬するデイッ
プ方式や被洗浄物に向けて洗浄液を噴射して一枚づつ洗
浄する枚葉方式があり、最近では高い清浄度が得られる
とともに、コスト的に有利な枚葉方式が採用されること
が多くなってきている。2. Description of the Related Art For example, in a manufacturing process of a liquid crystal display device or a semiconductor device, there is a process that requires cleaning a glass substrate for liquid crystal or a semiconductor wafer as an object to be cleaned with high cleanliness. As a method of cleaning such a substrate to be cleaned, there are a dip method of dipping a plurality of objects to be cleaned in a cleaning solution and a single-wafer method of spraying the cleaning solution toward the object to be cleaned one by one, In recent years, a single-wafer method, which provides high cleanliness and is cost-effective, has been increasingly adopted.
【０００３】枚葉方式の１つとして被洗浄物に噴射され
る洗浄液に振動を付与し、その振動作用によって上記被
洗浄物から微粒子を効率よく除去するようにした洗浄方
式が実用化されている。As one of the single-wafer methods, a cleaning method has been put into practical use in which vibration is applied to a cleaning liquid sprayed on an object to be cleaned, and the vibration effect causes the particles to be efficiently removed from the object to be cleaned. .
【０００４】このような洗浄方式においては超音波洗浄
ノズルが用いられている。この超音波洗浄ノズルには、
洗浄液が流通する流路が形成され、この流路には洗浄液
に超音波振動を付与する超音波振動子が設けられてい
る。したがって、上記流路を流通する洗浄液に超音波振
動子によって振動を付与することができる構成となって
いる。In such a cleaning method, an ultrasonic cleaning nozzle is used. In this ultrasonic cleaning nozzle,
A flow path through which the cleaning liquid flows is formed, and an ultrasonic transducer that applies ultrasonic vibration to the cleaning liquid is provided in this flow path. Therefore, the cleaning liquid flowing through the flow path can be vibrated by the ultrasonic vibrator.
【０００５】洗浄液に振動を付与する洗浄方式におい
て、従来は20〜50ｋＨｚ程度の超音波が用いられていた
が、最近では600 〜1.5 ＭＨｚ程度の極超音波帯域の音
波を用いる超音波洗浄が開発されている。In the cleaning system in which vibration is applied to the cleaning liquid, ultrasonic waves of about 20 to 50 kHz have been conventionally used, but recently, ultrasonic cleaning using ultrasonic waves in the ultra-ultrasonic band of about 600 to 1.5 MHz has been developed. Has been done.
【０００６】振動が付与された洗浄液を被洗浄物に噴射
すると、その振動の作用によって被洗浄物に付着した微
粒子の結合力が低下するため、振動を付与しない場合に
比べて洗浄効果を向上させることができる。When the cleaning liquid to which the vibration is applied is jetted onto the object to be cleaned, the effect of the vibration reduces the binding force of the fine particles adhering to the object to be cleaned, so that the cleaning effect is improved as compared with the case where the vibration is not applied. be able to.
【０００７】ところで、超音波振動が付与された洗浄液
によって微粒子の結合力を低下させることができても、
その微粒子を被洗浄物上から確実に流出させることがで
きなければ、その微粒子は被洗浄物上に残留してしまう
から、洗浄効果を十分に向上させることができない。By the way, even if the binding force of fine particles can be reduced by the cleaning liquid to which ultrasonic vibration is applied,
If the fine particles cannot be reliably discharged from the object to be cleaned, the fine particles will remain on the object to be cleaned, so that the cleaning effect cannot be sufficiently improved.
【０００８】そこで、結合力が低下した微粒子を被洗浄
物上から確実に流出させるため、洗浄液の流量を増大さ
せるということが行われる。しかしながら、洗浄液の流
量を増大させると、超音波洗浄ノズルの流路を流通する
上記洗浄液の流れに乱れが生じ易くなる。Therefore, in order to reliably flow out the fine particles having a reduced binding force from the object to be cleaned, the flow rate of the cleaning liquid is increased. However, when the flow rate of the cleaning liquid is increased, the flow of the cleaning liquid flowing through the flow path of the ultrasonic cleaning nozzle tends to be disturbed.
【０００９】洗浄液の流れが乱れると、その乱れによっ
て洗浄液に付与された超音波振動が打ち消され、その振
動強度が低下するということがあるため、超音波振動に
よる洗浄効果も低下するということがある。When the flow of the cleaning liquid is disturbed, the ultrasonic vibration imparted to the cleaning liquid is canceled by the disturbance and the vibration intensity thereof is sometimes lowered, so that the cleaning effect by the ultrasonic vibration is also sometimes lowered. .
【００１０】[0010]
【発明が解決しようとする課題】このように、超音波振
動が付与された洗浄水によって被洗浄物から遊離された
微粒子を確実に流出させるために洗浄液の流量を増大さ
せると、洗浄液の流れが乱れることで洗浄液に付与され
た超音波振動の強度が低下するから、それによって洗浄
効果も低下するということがあった。As described above, when the flow rate of the cleaning liquid is increased in order to reliably discharge the fine particles released from the object to be cleaned by the cleaning water to which the ultrasonic vibration is applied, the flow of the cleaning liquid is increased. Since the strength of the ultrasonic vibration applied to the cleaning liquid is reduced due to the disturbance, the cleaning effect may be reduced accordingly.
【００１１】この発明は上記事情に基づきなされたもの
で、その目的とするところは、洗浄液の流量を増大させ
ても、その洗浄液に付与された超音波振動の強度が低下
することがないようにした超音波洗浄ノズルを提供する
ことにある。The present invention has been made in view of the above circumstances, and an object thereof is to prevent the strength of ultrasonic vibration applied to the cleaning liquid from decreasing even if the flow rate of the cleaning liquid is increased. Another object is to provide an ultrasonic cleaning nozzle.
【００１２】[0012]
【課題を解決するための手段】上記課題を解決するため
にこの発明は、洗浄液を流通させる流路が形成されたノ
ズル本体と、上記流路に流入する洗浄液に超音波振動を
付与する超音波振動子と、上記流路に設けられこの流路
に流入して超音波振動が付与された洗浄液を整流して流
出させる整流手段とを具備したことを特徴とする。In order to solve the above-mentioned problems, the present invention relates to a nozzle body in which a flow path for flowing a cleaning liquid is formed, and ultrasonic waves for applying ultrasonic vibration to the cleaning liquid flowing into the flow path. An oscillator is provided, and a rectifying unit that is provided in the flow path and rectifies and flows out the cleaning liquid that has flowed into the flow path and has been subjected to ultrasonic vibration and flows out.
【００１３】[0013]
【作用】上記構成によれば、超音波振動が付与された洗
浄水は整流手段によって整流されて流路から流出するか
ら、流量が増大しても、その流れに乱れが生じずらい。According to the above construction, the cleaning water to which ultrasonic vibration is applied is rectified by the rectifying means and flows out of the flow path, so that even if the flow rate increases, the flow is not disturbed.
【００１４】[0014]
【実施例】以下、この発明の一実施例を図面を参照して
説明する。図１に示す超音波洗浄ノズル１はノズル本体
２を備えている。このノズル本体２は上部ブロック３と
下部ブロック４とを接合してなり、下部ブロック４には
洗浄液Ｌの流路５が形成されている。この流路５は下部
ブロック４の上端面から下端面にゆくにしたがって幅寸
法が狭くなるよう形成されたテ−パ状をなしていて、先
端は上記下部ブロック４の下端面に開口した流出口６と
なっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. The ultrasonic cleaning nozzle 1 shown in FIG. 1 includes a nozzle body 2. The nozzle body 2 is formed by joining an upper block 3 and a lower block 4, and a channel 5 for the cleaning liquid L is formed in the lower block 4. The flow path 5 has a taper shape whose width is narrowed from the upper end surface to the lower end surface of the lower block 4, and the tip is an outlet opening to the lower end surface of the lower block 4. It is 6.
【００１５】上記下部ブロック４の上部には連通路７の
一端が接続されている。この連通路７の他端は上記ノズ
ル本体２の一側面に形成された供給口８に連通してい
る。したがって、上記洗浄液Ｌは上記供給口８から供給
され、流路５を通過して流出口６から流出するようにな
っている。流出口６から流出した洗浄液Ｌは、図示しな
い被洗浄物に向けて噴出されることになる。One end of a communication passage 7 is connected to the upper portion of the lower block 4. The other end of the communication passage 7 communicates with a supply port 8 formed on one side surface of the nozzle body 2. Therefore, the cleaning liquid L is supplied from the supply port 8, passes through the flow path 5, and flows out through the outflow port 6. The cleaning liquid L flowing out from the outflow port 6 is ejected toward an object to be cleaned (not shown).
【００１６】上記上部ブロック４の流路５の上端開口に
対応する部分は薄い金属板からなる振動板９によって閉
塞されている。つまり、振動板９は上記上部ブロック３
と下部ブロック４とによって周辺部が挟持されて設けら
れている。A portion of the upper block 4 corresponding to the upper end opening of the flow path 5 is closed by a diaphragm 9 made of a thin metal plate. That is, the diaphragm 9 is the upper block 3
The peripheral portion is sandwiched between and and the lower block 4.
【００１７】上記振動板９の上面には超音波振動子１１
が接合固定されている。この超音波振動子１１には駆動
源１０が接続されていて、この駆動源１０からの駆動信
号によって超音波振動を発生するようになっている。超
音波振動子１１が振動すれば、振動板９も振動する。し
たがって、この振動板９の振動が上記流路５を流通する
洗浄液Ｌに付与されることになる。An ultrasonic transducer 11 is provided on the upper surface of the diaphragm 9.
Are joined and fixed. A drive source 10 is connected to the ultrasonic oscillator 11, and ultrasonic vibration is generated by a drive signal from the drive source 10. When the ultrasonic vibrator 11 vibrates, the diaphragm 9 also vibrates. Therefore, the vibration of the vibrating plate 9 is applied to the cleaning liquid L flowing through the flow path 5.
【００１８】上記流路５の中途部の、上記振動板９より
も下流側の部分には、整流手段としてのハニカム状の整
流体１２が設けられている。この整流体１２は細分化さ
れた多数の通孔１３を有し、これら通孔１３を洗浄液Ｌ
の流れ方向と平行にして配置されている。それによっ
て、流路５を流れる洗浄液Ｌは、上記整流体１２によっ
て整流されて流出口６から流出することになる。A honeycomb rectifying body 12 as a rectifying means is provided at a part of the flow path 5 at a downstream side of the vibrating plate 9. The rectifying body 12 has a large number of subdivided through holes 13, and these through holes 13 are used as the cleaning liquid L.
Are arranged in parallel with the flow direction of. As a result, the cleaning liquid L flowing through the flow path 5 is rectified by the rectifying body 12 and flows out from the outlet 6.
【００１９】このような構成の超音波洗浄ノズル１によ
れば、供給口８から流路５に流入し、振動板９によって
超音波振動が付与された洗浄液Ｌは、整流体１２によっ
て整流されて流出口６から流出する。そのため、洗浄液
Ｌの流量を増大させても、流出口６から流出する洗浄液
Ｌの流れに乱れが生じずらいから、洗浄液Ｌに付与され
た超音波振動の強度が低下するのが防止される。According to the ultrasonic cleaning nozzle 1 having such a structure, the cleaning liquid L which has flowed into the flow path 5 through the supply port 8 and has been subjected to ultrasonic vibration by the vibrating plate 9 is rectified by the rectifying body 12. It flows out from the outlet 6. Therefore, even if the flow rate of the cleaning liquid L is increased, it is difficult for the flow of the cleaning liquid L flowing out from the outlet 6 to be disturbed, so that the strength of the ultrasonic vibration applied to the cleaning liquid L is prevented from being lowered.
【００２０】つまり、洗浄液Ｌに付与された超音波振動
の強度を低下させずに、洗浄液Ｌの流量を増大させるこ
とができるから、被洗浄物に付着した微粒子の結合力を
弱める作用と、その微粒子を被洗浄物上から流出させる
作用とを両立させ、洗浄効果を高めることができる。That is, since the flow rate of the cleaning liquid L can be increased without lowering the intensity of the ultrasonic vibration applied to the cleaning liquid L, the action of weakening the binding force of the fine particles adhering to the object to be cleaned and its effect It is possible to improve the cleaning effect by making the fine particles compatible with the action of flowing out from the object to be cleaned.
【００２１】なお、この発明は上記一実施例に限定され
ず、種々変形可能である。たとえば、上記一実施例に示
された整流体１２の上流側に、整流体１２に形成された
通孔１３よりも目の細かいメッシュ（金網などの網状
体）を配設すれば、洗浄液Ｌをさらに乱れの少ない流れ
に整流することができるから、流量をさらに増大させる
ことが可能となる。The present invention is not limited to the above-mentioned embodiment, but can be variously modified. For example, if a mesh (mesh-like body such as a wire mesh) having finer meshes than the through holes 13 formed in the rectifying body 12 is arranged on the upstream side of the rectifying body 12 shown in the above-described embodiment, the cleaning liquid L can be obtained. Since the flow can be rectified into a flow with less turbulence, the flow rate can be further increased.
【００２２】[0022]
【発明の効果】以上述べたようにこの発明は、ノズル本
体の流路に整流体を設け、上記流路に流入して超音波振
動が付与された洗浄液を上記整流体によって整流してか
ら流出させるようにした。As described above, according to the present invention, a rectifying body is provided in the flow path of the nozzle body, and the cleaning liquid that has flowed into the flow path and has been subjected to ultrasonic vibration is rectified by the rectifying body and then flows out. I was allowed to.
【００２３】そのため、洗浄液の流量を増大させても、
その流れに乱れが生じて洗浄液に付与された超音波振動
の強度が低下するということがないから、被洗浄物に対
する微粒子の結合力を弱め、その微粒子を被洗浄物上か
ら確実に排出させることができる。Therefore, even if the flow rate of the cleaning liquid is increased,
Since the flow does not become turbulent and the intensity of ultrasonic vibrations applied to the cleaning liquid does not decrease, the binding force of fine particles to the object to be cleaned is weakened and the particles are reliably discharged from the object to be cleaned. You can
【図１】この発明の一実施例の全体構成を示す縦断面
図。FIG. 1 is a vertical sectional view showing the overall configuration of an embodiment of the present invention.
【図２】同じく図１のＡ−Ａ線に沿う横断面図。FIG. 2 is a transverse cross-sectional view taken along line AA of FIG.
２…ノズル本体、５…流路、１１…超音波振動子、１２
…整流体、Ｌ…洗浄液。2 ... Nozzle body, 5 ... Flow path, 11 ... Ultrasonic transducer, 12
... Rectifier, L ... Cleaning liquid.
Claims (1)
ズル本体と、上記流路に流入する洗浄液に超音波振動を
付与する超音波振動子と、上記流路に設けられこの流路
に流入して超音波振動が付与された洗浄液を整流して流
出させる整流手段とを具備したことを特徴とする超音波
洗浄ノズル。1. A nozzle body in which a flow path for flowing a cleaning liquid is formed, an ultrasonic vibrator for applying ultrasonic vibration to the cleaning liquid flowing into the flow path, and an ultrasonic vibrator provided in the flow path and flowing into the flow path. And a rectifying means for rectifying and flowing out the cleaning liquid to which the ultrasonic vibration is applied, the ultrasonic cleaning nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2409294A JP3350205B2 (en) | 1994-02-22 | 1994-02-22 | Ultrasonic cleaning nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2409294A JP3350205B2 (en) | 1994-02-22 | 1994-02-22 | Ultrasonic cleaning nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07232143A true JPH07232143A (en) | 1995-09-05 |
| JP3350205B2 JP3350205B2 (en) | 2002-11-25 |
Family
ID=12128743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2409294A Expired - Fee Related JP3350205B2 (en) | 1994-02-22 | 1994-02-22 | Ultrasonic cleaning nozzle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3350205B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10163153A (en) * | 1996-11-29 | 1998-06-19 | Tadahiro Omi | Liquid-saving liquid supply nozzle, wet processing apparatus and wet processing method used for wet processing including cleaning, etching, development, peeling, etc. |
| CN108717251A (en) * | 2018-04-19 | 2018-10-30 | 德淮半导体有限公司 | Cleaning device and method, toning system and method |
| WO2022084160A1 (en) * | 2020-10-22 | 2022-04-28 | Lam Research Ag | Apparatus for processing a wafer-shaped article |
| JP2022544343A (en) * | 2019-08-16 | 2022-10-17 | コスメティック エッジ ピーティーワイ リミテッド | Portable handheld underwater ultrasonic cleaner |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101407619B1 (en) | 2014-02-13 | 2014-06-13 | 최호성 | Megasonic washing apparatus of ultra thin type glass substrate having inclined structure |
-
1994
- 1994-02-22 JP JP2409294A patent/JP3350205B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10163153A (en) * | 1996-11-29 | 1998-06-19 | Tadahiro Omi | Liquid-saving liquid supply nozzle, wet processing apparatus and wet processing method used for wet processing including cleaning, etching, development, peeling, etc. |
| CN108717251A (en) * | 2018-04-19 | 2018-10-30 | 德淮半导体有限公司 | Cleaning device and method, toning system and method |
| JP2022544343A (en) * | 2019-08-16 | 2022-10-17 | コスメティック エッジ ピーティーワイ リミテッド | Portable handheld underwater ultrasonic cleaner |
| WO2022084160A1 (en) * | 2020-10-22 | 2022-04-28 | Lam Research Ag | Apparatus for processing a wafer-shaped article |
| JP2023546464A (en) * | 2020-10-22 | 2023-11-02 | ラム・リサーチ・アーゲー | Equipment for processing wafer-shaped articles |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3350205B2 (en) | 2002-11-25 |
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