JPH0726840Y2 - 集束イオンビーム装置のガス導入装置 - Google Patents

集束イオンビーム装置のガス導入装置

Info

Publication number
JPH0726840Y2
JPH0726840Y2 JP9338588U JP9338588U JPH0726840Y2 JP H0726840 Y2 JPH0726840 Y2 JP H0726840Y2 JP 9338588 U JP9338588 U JP 9338588U JP 9338588 U JP9338588 U JP 9338588U JP H0726840 Y2 JPH0726840 Y2 JP H0726840Y2
Authority
JP
Japan
Prior art keywords
shaft
gas
nozzle
gas introduction
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9338588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0215725U (ko
Inventor
昌克 荷田
良知 中川
Original Assignee
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー電子工業株式会社 filed Critical セイコー電子工業株式会社
Priority to JP9338588U priority Critical patent/JPH0726840Y2/ja
Publication of JPH0215725U publication Critical patent/JPH0215725U/ja
Application granted granted Critical
Publication of JPH0726840Y2 publication Critical patent/JPH0726840Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Drying Of Semiconductors (AREA)
JP9338588U 1988-07-13 1988-07-13 集束イオンビーム装置のガス導入装置 Expired - Lifetime JPH0726840Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9338588U JPH0726840Y2 (ja) 1988-07-13 1988-07-13 集束イオンビーム装置のガス導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9338588U JPH0726840Y2 (ja) 1988-07-13 1988-07-13 集束イオンビーム装置のガス導入装置

Publications (2)

Publication Number Publication Date
JPH0215725U JPH0215725U (ko) 1990-01-31
JPH0726840Y2 true JPH0726840Y2 (ja) 1995-06-14

Family

ID=31317841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9338588U Expired - Lifetime JPH0726840Y2 (ja) 1988-07-13 1988-07-13 集束イオンビーム装置のガス導入装置

Country Status (1)

Country Link
JP (1) JPH0726840Y2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102176189B1 (ko) * 2013-03-12 2020-11-09 어플라이드 머티어리얼스, 인코포레이티드 방위각 및 방사상 분배 제어되는 다중-구역 가스 주입 조립체

Also Published As

Publication number Publication date
JPH0215725U (ko) 1990-01-31

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