JPH073165U - Foreign material removal device for ceramic substrates - Google Patents

Abstract

(57) [Summary] [Purpose] To obtain a high removal rate of foreign substances without the risk of scratching the ceramic substrate. [Configuration] A transport mechanism 2 for transporting a ceramic substrate 1. Ceramic substrate 1 that is arranged above the transport mechanism 2 and is transported
An air nozzle 3 that blows out air onto the upper surface of the substrate to blow away and remove foreign matter adhering to the ceramic substrate 1. In the foreign matter removing device having both of these, an air nozzle 3 having a large number of independent ejection holes 4 arranged in a row at the tip is used. The air can be ejected by advancing straight from each of the independent ejection holes 4, and even if the distance between the ceramic substrate 1 and the air nozzle 3 is made long, the air can be ejected at a high pressure. Can be sprayed on.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a foreign substance removing device for a ceramic substrate used for manufacturing a printed wiring board.

[0002]

[Prior art]

 The insulating substrate of a printed wiring board is manufactured with a ceramic substrate having excellent electrical characteristics and heat resistance. This ceramic substrate is formed as a ceramic green sheet by molding a ceramic molding material and punching it out into a plate shape, and is manufactured by firing this ceramic green sheet. In addition, foreign matter such as punched dust and burrs adheres to the surface of the ceramic substrate created by punching with a press in this way, especially when punching through holes in the ceramic substrate. The generated scraps tended to remain in the through holes as foreign matter, which was a cause of foreign matter defects.

Therefore, in order to remove the foreign matter adhering to the ceramic substrate, air is blown to the ceramic substrate using an air nozzle, the foreign matter adhering to the inside of the through hole is blown away, and the surface of the ceramic substrate is brushed. The foreign matter adhering to the surface is removed. As this air nozzle, a nozzle provided with a slit-shaped ejection hole at its tip is used.

[0004]

[Problems to be solved by the device]

 However, in the air nozzle formed by providing the slit-shaped ejection holes in this way, the air ejected from the slit-shaped ejection holes has the inclination to spread in the width direction of the slit, so that the arrival distance of the air is small. It became shorter, and the air could not be blown to the ceramic substrate with high air pressure, and the removal rate of foreign matter from the through holes was low. In particular, the removal rate of foreign matter was significantly reduced in small-diameter through holes, and for example, the removal rate of foreign matter from 1 mmφ through holes was 30% or less in the 1000-sheet test. Therefore, the distance (clearance) between the ceramic substrate and the air nozzle is shortened to about 1 mm so that the air is blown to the ceramic substrate with a high pressure. If the distance is short, the ceramic substrate may hit the air nozzle if the ceramic substrate dances due to air pressure, etc., and the ceramic substrate may be damaged.

The present invention has been made in view of the above points, and an object thereof is to provide a foreign substance removing apparatus for a ceramic substrate, which can obtain a high foreign substance removal rate without damaging the ceramic substrate. To do.

[0006]

[Means for Solving the Problems]

 According to the present invention, air is blown to the upper surface of the transfer mechanism 2 that transfers the ceramic substrate 1 and the transfer substrate 2 that is disposed above the transfer mechanism 2 to blow away and remove foreign matter adhering to the ceramic substrate 1. A foreign matter removing device formed by including an air nozzle 3 is characterized in that the air nozzle 3 is formed by arranging a large number of independent ejection holes 4 in a row at the tip.

[0007]

[Action]

 By providing a large number of independent ejection holes 4 at the tip of the air nozzle 3, the air can be ejected from each ejection hole 4 by going straight, and the reaching distance of the air can be lengthened and the ceramic substrate 1 and the air nozzles can be extended. Air can be blown to the ceramic substrate 1 with a high pressure even if the distance between the ceramic substrate 1 and the substrate 3 is long.

[0008]

【Example】

 Hereinafter, the present invention will be described in detail with reference to embodiments. FIG. 1 shows the entire foreign matter removing device, which is formed by providing a base 8 with a carrying mechanism 2, an air nozzle 3, and a rotary brush cleaning mechanism 9. The transport mechanism 2 is configured such that an infinite strip mesh belt 10 is suspended between rolls and is driven by driving the rolls with a motor or the like, and the pair of mesh belts 10 are connected to form the transport mechanism 2. Is done. As the mesh belt 10, it is possible to use one having a mesh structure as shown in FIG. 3 (a), which is a material in which glass fiber 11 is coated with Teflon 12 as shown in FIG. 3 (b). It has been created by.

An air nozzle 3 is arranged above the transport mechanism 2. As shown in FIG. 2, the air nozzle 3 is formed by providing one air introduction port 14 at the base end of a thin plate-shaped nozzle body 13 and arranging a large number of ejection holes 4 in a row at the tip. The ejection holes 4 are formed as independent orifices that are opened in parallel in the same direction. Each of the ejection holes 4 is connected to the air introduction port 14 by a communication passage 17 in the nozzle body 13. By connecting an air pipe 18 to the air introduction port 14, the air nozzle 3 is arranged above the conveying mechanism 2 with the ejection hole 4 facing downward, and the arrangement direction of the ejection holes 4 is the conveying mechanism. It is arranged so as to be orthogonal to the feeding direction according to 2. When the width of the air nozzles 3 is smaller than that of the ceramic substrate 1, a plurality of air nozzles 3 may be arranged side by side in the width direction, and when the air ejection amount is insufficient, two air nozzles 3 may be used. The air nozzles 3 may be used as a set of two by overlapping the flat surfaces 13a with each other. Further, the air pipe 18 is oscillated by an oscillating mechanism formed by including a motor, a crank mechanism, etc., and the air nozzle 3 is reciprocally swung in parallel to the feeding direction of the transport mechanism 2. I am allowed to do it. The period of the swing motion is arbitrary, but a cycle of about 1 Hz is preferable.

The rotary brush cleaning mechanism 9 is composed of an infinite belt-shaped transport belt 15 and a plurality of rotary brushes 16 provided above and below the transport belt 15, respectively. In the foreign matter removing apparatus formed as described above, the ceramic substrate 1 having the through holes processed is supplied to the transport mechanism 2 as shown by the arrow in FIG. It is placed on and transported. On the other hand, the air nozzle 3 is oscillating as shown by the arrow in FIG. 1, and air is ejected from each ejection hole 4 at the tip, and the ejection holes 4 are ejected because they are arranged in close proximity. The air is a series of air curtains. When the ceramic substrate 1 passes below the air nozzle 3, the air ejected from each ejection hole 4 is blown against the upper surface of the ceramic substrate 1 to mesh the foreign matters attached in the through holes of the ceramic substrate 1. It can be blown down and removed through the mesh of the belt 10. Here, since each ejection hole 4 of the air nozzle 3 is formed as an independent hole, the air ejected from each ejection hole 4 does not spread and the straightness is high, and the ejection pressure is also set high. As a result, the reaching distance of the air can be lengthened. Therefore, even if the distance between the ceramic substrate 1 and the air nozzle 3 is long, the air can be blown onto the ceramic substrate 1 with high pressure. For example, even if the distance between the ceramic substrate 1 and the air nozzle 3 is set to about 20 mm, the removal rate of foreign matter from the through hole having a size of 1 mmφ is 90% or more in the 1000-sheet test. Since the distance between the ceramic substrate 1 and the air nozzle 3 can be made large in this way, the ceramic substrate 1 will not hit the air nozzle 3 even if the ceramic substrate 1 dances with air pressure or the like. It is possible to prevent the ceramic substrate 1 from being scratched.

The ceramic substrate 1 from which the foreign matter in the through hole is removed by the air nozzle 3 as described above is transferred from the mesh belt 10 of the transport mechanism 2 to the transport belt 15 of the rotary brush cleaning mechanism 9. Then, the ceramic substrate 1 is sent by the conveyor belt 15 and rubbed on the surface by the rotary brush 16 to remove foreign matters adhering to the surface. The ceramic substrate 1 from which the foreign matter is removed in this way is taken out in the direction of the arrow in FIG. 1 and sent to the next step.

[0012]

[Effect of device]

 As described above, according to the present invention, the air nozzle is formed by arranging a large number of independent ejection holes at the tip, so that the air nozzle ejects the air by directly advancing the air from each independent ejection hole. It is possible to blow the air to the ceramic substrate with high pressure even if the distance between the ceramic substrate and the air nozzle is long by increasing the reaching distance of the air. However, since the ceramic substrate does not hit the air nozzle, it is possible to obtain a high foreign matter removal rate without fear of scratching the ceramic substrate.

[Brief description of drawings]

FIG. 1 is an overall front view of an embodiment of the present invention.

FIG. 2 shows an air nozzle used in the above,
(A) is an enlarged front view and (b) is an enlarged sectional view.

3A and 3B are views showing a mesh belt used in the above, wherein FIG. 3A is an enlarged perspective view and FIG. 3B is a further enlarged partial perspective view.

[Explanation of symbols]

 1 Ceramic Substrate 2 Transfer Mechanism 3 Air Nozzle 4 Jetting Hole

Claims (1)

[Scope of utility model registration request] 1. A transfer mechanism for transferring a ceramic substrate,
In a foreign matter removing device for a ceramic substrate, which is provided above the carrying mechanism and is provided with an air nozzle that blows air onto the upper surface of the ceramic substrate to be blown and blows off and removes foreign substances adhering to the ceramic substrate, A foreign substance removing device for a ceramic substrate, characterized in that an air nozzle formed by arranging a large number of independent ejection holes in a row at the tip is used.