JPH07337097A - Speed controller for device carrying motor in ic test handler - Google Patents

Abstract

PURPOSE:To enhance throughput in the carriage by realizing a speed control means for measuring the step-out point of a pulse motor and carrying a device at a highest speed without causing step-out in the rotation control means for a motor having step-out detecting function. CONSTITUTION:A motor 22 is driven under a plurality of acceleration/ deceleration conditions. A step-out is then detected based on a signal received from an encoder 20 and a step-out point is determined. A step-out measuring section 12 controls the acceleration/deceleration drive conditions of the motor 22 based on the acceleration/deceleration value at the step-out point.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a motor speed controller for speeding up speed control of a motor as a drive source for carrying and moving a device or a tray containing the device in an IC test handler to shorten the carrying time. .

[0002]

2. Description of the Related Art In an IC test handler, a device 60 is received from a device supply side, and one or a plurality of devices are sequentially conveyed to an internal constant temperature bath section and applied to a desired temperature of high temperature / low temperature. Then, this device 60 is conveyed to a measuring part for performing an electrical test. The device 60 is electrically tested by the measuring section and is identified by non-defective product / defective product / characteristic rank. Then, the device 60 is sorted and stored in the tray on the storage side corresponding to the measurement result.
For carrying these, there are steps of providing a large number of motor driving means inside, and supplying, carrying, carrying out an electrical test, classifying and storing the device 60.

On the other hand, in many cases, unmanned operation is used to reduce the test cost, and continuous operation is often performed to improve the operating rate of the equipment. In order to reduce the test cost, it is an important issue in the IC test handler to shorten the device test / transport time and improve the throughput. On the other hand, there is a jam that causes the operation of the IC handler to be stopped due to defective transportation of devices and magazines. Naturally, the occurrence of such troubles that reduce the operating rate of the device should be minimized. Is also an important issue.

An example of rotation control by a conventional motor will be described with reference to FIGS. 2 and 3. The configuration of this device is
As shown in FIG. 2, the pulse motor 22 and the speed change mechanism 24 are provided.
A rotary encoder 20, a rotary table 30,
Supply arm 40, storage arm 50, and origin sensor 32
And a speed controller 70, a CPU 80, and a parameter memory 82.

The pulse motor 22 receives a drive signal from the drive unit 71 of the speed control unit 70 to accelerate / decelerate / constantly drive the rotating shaft of the motor in the forward direction or the reverse direction, and decelerate it by the transmission mechanism 24. Then, the rotary table 30 is rotationally moved to a predetermined position. Rotary encoder 2
0 detects the rotation angle signal of the actual rotation of the rotation shaft of the motor and supplies it to the out-of-step detection unit 74.

The speed control unit 70 comprises a drive unit 71, a step counter 72, an encoder counter 73 and a step-out detection unit 74. The drive unit 71 is a CP
Rotation direction from U80, pulse frequency and slow-up
Upon receiving the slowdown parameter information, the pulse motor 22 is accelerated / decelerated / constant speed driven. Step counter 7
2 counts the total number of step pulses applied to the pulse motor 22. The encoder counter 73 receives the forward / reverse rotation pulse signal of the rotary shaft from the rotary encoder 20 and counts the number of rotation angles of the actual pulse motor 22. The step-out detection unit 74 detects whether or not the step-out has occurred even once. Upon receiving the signals from the step counter 72 and the encoder counter 73, the two are compared to monitor whether or not there is a step out, and this step out signal is supplied to the CPU 80. CPU80 is
Upon receiving this step-out signal, the transportation device is stopped safely.

Here, "step out" means that even if a step pulse is applied to the pulse motor 22 to drive it,
The state in which the step pulse cannot be dealt with and the rotation is out of synchronization even once is called step out. There are two patterns for this step-out: step-out that causes insufficient step rotation during rapid acceleration and step-out that causes overrun during rapid deceleration. Further, the step-out signal is a detection signal generated when the step-out occurs even once. In addition, the out-of-step point means that when the acceleration / deceleration conditions are made smaller and there is no out-of-step, the acceleration / deceleration conditions are gradually increased.
Eventually, a step-out occurs and a step-out signal is generated.
The acceleration / deceleration condition at this point is called a step out point. This step-out point changes depending on the applied pulse frequency and the inertial force on the load side.

The parameter memory 82 is a non-volatile memory, and stores the inclination of acceleration / deceleration corresponding to the pulse frequency when the pulse motor 22 is accelerated / decelerated as a parameter value in the memory. The parameter value stores a value obtained by multiplying the inertial force of the rotary table 30 which is a load by a safety factor. This parameter value is obtained and stored in advance during manufacturing adjustment. Then, when controlling the rotation of the pulse motor, the CPU 80 reads the parameter value from the parameter memory 82, and supplies the value obtained by calculating the acceleration / deceleration condition corresponding to the moving distance and the moving speed to the speed control unit 70. By doing so, rotation control is performed without step out.

The supply arm 40 adsorbs one (or a plurality of) devices 60 from the previous process location by the adsorption section 42, conveys them to the rotary table 30, and places them in the pocket 34 immediately below. The accommodating arm 50 adsorbs one (or a plurality of) devices 60 in the pocket 34 immediately below the adsorption section 52 by the adsorption section 52 and lifts the device 60.
Transport and output to the next process location.

The origin sensor 32 is for returning the rotary table 30 to the origin, and uses an optical reflection sensor or a transmission sensor. The sensor is used for setting the rotary table 30 to the initial position when the power is turned on, or for returning to the origin when a step out occurs. One point of the rotary table 30 is marked to identify the origin position. The signal of the origin sensor 32 is supplied to the speed control unit 70.

The rotary table 30 is, for example, a temporary buffer for electrically testing the device, a buffer for giving a heating / cooling time to the device, or the like. For this reason, a large number of recessed pockets 34 are formed on the rotary table 30. The carrying operation of the turntable 30 has a plurality of carrying operation patterns. That is, when simply rotating and moving by one pocket unit angle,
In the case of a jump-over operation in which the rotary movement is performed at an angle of n pockets, or when the supply arm 40 and the storage arm 50 have a plurality of suction portions 42n and 52n, the reciprocating movement is performed while rotating the rotary table 30 in the forward / reverse direction. In the case of dynamic placement,
This is the case when the suction / release operation is performed by moving to an arbitrary pocket position to a rotation position in order to asynchronously supply / accommodate in order to absorb the variation in the conveying capacity between the supply side and the accommodation side.

Next, step out of the pulse motor 22 will be described with reference to FIG. Connect the load to the pulse motor,
If acceleration / deceleration exceeding the rotational torque limit is performed, step out will occur. In other words, if the inertia moment exceeds the limit due to the relationship between the rotational torque performance of the motor and the inertial force of the load, a step error will occur and the motor will not rotate stepwise during acceleration, or conversely, slip rotation will occur during deceleration. I will step. Since the rotation torque of the motor also changes depending on the pulse frequency, it is necessary to control the acceleration / deceleration slope corresponding to the pulse frequency.

FIG. 3 shows the transition of the acceleration / deceleration speed in the case of controlling the rotation on the rotary table at an angle of one pocket unit. In order to prevent step-out, the pulse frequency is controlled so that it will slow up / slow down. This slope of slow-up / slow-down is performed with a sufficient margin from the step-out limit value. For example, speed control is performed in the sequence of acceleration 101, constant speed 102, and deceleration 103.
In the case of a long moving distance, acceleration 111 and acceleration 112
And a sequence of constant speed 113, deceleration 114 and deceleration 115. In any case, make sure that there is no inflection point that rapidly changes the speed gradient.

On the other hand, the inertial force on the load side may change due to changes over time, the required torque may change significantly for each product due to variations in assembly, or may change due to repair / maintenance of the device. is there. Therefore, the pulse motor 22 is controlled with a low acceleration / deceleration inclination having a sufficiently large margin in consideration of these various fluctuations and variation conditions. Further, the pulse motor itself may use a motor having a strong torque characteristic.

[0015]

As described above, in order to prevent step-out, speed control is performed so that the inertial force due to acceleration / deceleration on the load side is kept below the output torque of the pulse motor. The required torque of may change due to changes over time, variations during manufacturing and assembly, and repair / maintenance. The parameter value for controlling the pulse motor 22 with a low acceleration / deceleration gradient having a sufficiently large margin is added to the parameter memory 82 in consideration of these various variation conditions.
I remember it. However, there is a case where the margin is too large, which is a limiting factor for improving the throughput, and the speed control is not always effective.

Therefore, the problem to be solved by the present invention is to measure the step out point of the pulse motor 22 and measure the output torque of the pulse motor without step out,
It is an object of the present invention to realize a speed control means for transferring the device 60 at the highest speed to improve the transfer throughput.

[0017]

In order to solve the above problems, in the configuration of the present invention, firstly, the step motor 22 is driven under a plurality of acceleration / deceleration conditions, and a signal from the encoder 20 at this time is transmitted. In response, the presence or absence of step-out is detected, the step-out point is obtained, and the step motor
The step-out measuring unit 12 that supplies the acceleration / deceleration driving conditions of the above to the CPU 80 is used as a constituent means. With this, it has an encoder for detecting the rotation angle of the rotary shaft of the motor, and without stepping out the motor speed control device having the step-out detection function by receiving the signal from the motor drive step pulse number signal and the encoder, The device transport motor speed control in the IC test handler can be driven at high speed.

Secondly, the step motor 22 is driven under a plurality of acceleration / deceleration conditions, and the encoder 20 at this time is driven.
The step-out measuring unit 12 stores the step-out measuring point 12 for detecting the step-out point and storing the acceleration / deceleration condition value of the step-out point in the parameter memory 82. In this way, in the same way, without losing the step, the IC
The device transport motor speed control in the test handler can be driven at high speed.

Thirdly, there is a configuration means for providing the log memory 13 for additionally recording the acceleration / deceleration measurement data of the out-of-step point obtained by the above-mentioned means in the log memory 13 and recording the transition of the change over time. . Fourthly, there is a constituent means for providing a communication means 14 for communicating the acceleration / deceleration measurement data of the out-of-step point obtained by the above means to the upper management machine. As a result, it is possible to compare and manage changes in the out-of-step points over time.

[0020]

The present apparatus is a speed control for conveying the device 60 at the highest speed without causing step out even if the required torque on the load side of the rotary table 30 or the like changes with time or due to variations during assembly. It has the function of realizing the means, and can improve the throughput of the entire transfer device. The out-of-step measuring unit 12
It has a function of actually giving the states of various acceleration / deceleration patterns to the pulse motor 22 to measure the step-out limit point of the rotary table 30 at the present time.

[0021]

The embodiment of the present invention is an example in which means for measuring a step out point and storing it in the parameter memory 82 based on this data is provided. This will be described with reference to FIG. The configuration of the present device includes a pulse motor 22, a speed change mechanism 24, a rotary encoder 20, and a rotary table 3.
0, supply arm 40, housing arm 50, origin sensor 32, speed control unit 70, CPU 80, parameter memory 82, and step-out measurement unit 12. The configuration is such that a step-out measurement unit 12 is added to the conventional configuration.

The step-out measuring unit 12 and the parameter memory 82 will be described. The parameter memory 82 is for writing / writing
It is a readable non-volatile memory. Step-out measurement unit 12
Measures the step-out limit point for each pulse frequency used by the pulse motor 22 and stores the parameter value in the parameter memory 82. Therefore, the state of each acceleration / deceleration pattern is actually given to the pulse motor 22 to change from that state to another shift state, and the step-out limit at that time is measured. In order to obtain the step-out point, at first, the acceleration / deceleration conditions are reduced to start from the state in which there is no step-out, and while confirming the step-out signal from the step-out detection unit 74, the acceleration conditions are successively increased and repeated. To do. Eventually, the step-out signal is detected, so that the acceleration / deceleration condition is required to be the step-out point. This operation is performed similarly for other pattern conditions, and the out-of-step points for all acceleration / deceleration patterns are measured. The value obtained by multiplying the obtained step out point value by the tolerance coefficient is stored in the parameter memory 82, and the measurement is completed. After that, the original transport operation is started. This updating operation is performed when the power is turned on, every fixed number of days, when the transportation conditions are changed, or at the time of repair or maintenance. As a result, each device can be transported under the condition with the highest throughput.

Further, there is a means for storing the information of the step-out point value obtained above in the parameter memory 82 and additionally recording the information in the log memory 13 at the same time. In this case, the CPU 80 may be able to detect a trouble in the transport mechanism in advance by statistically comparing the changes in the out-of-step point value over time, which can be effectively used as a self-diagnosis function. There is also means for reading out the information of the out-of-step point value obtained above from the parameter memory 82, providing the communication means 14 and supplying it to the host management machine, and collectively managing the out-of-step point information of a plurality of IC handlers. .
In this case as well, by statistically comparing the changes over time, it may be possible to detect a trouble in the transport mechanism in advance, which can be effectively used as a diagnostic function.

In the above description of the embodiment, the case has been described in which the out-of-step points for all acceleration / deceleration patterns are measured. However, if necessary, only one point or a typical out-of-step point is measured, and the rest are The analogy value may be calculated and stored in the parameter memory 82.

[0025]

Since the present invention is configured as described above, it has the following effects. The step-out measuring unit 12 can drive the pulse motor 22 using the acceleration / deceleration parameter obtained as a result of measuring the step-out point at the present time. As a result, even if there is a temporal change in the required torque on the load side or a variation change during assembly, there is no step out, and the device 6 operates at the highest speed.
A speed control means for carrying 0 can be realized, and an effect of improving the throughput of the entire carrying device can be obtained. Log memory 1
When 3 is provided, the information about the out-of-step point value is additionally recorded in the log memory 13. As a result, it is possible to store information for statistically comparing the changes in the out-of-step point value over time, and it is possible to detect a trouble in the transport mechanism in advance and to use it as a self-diagnosis function. When the communication unit 14 is provided, the step-out point value information obtained above can be communicated to the host management machine to collectively manage the step-out point information of a plurality of IC handlers. As a result, similarly, there is an effect that a trouble of the transport mechanism can be detected in advance and can be used as a diagnostic function of the IC handler.

[0026]

[Brief description of drawings]

FIG. 1 is a configuration diagram provided with means for measuring a step out point of a motor of the present invention and storing acceleration / deceleration parameters in a parameter memory 82.

FIG. 2 is a configuration diagram of a rotation control of a conventional motor.

FIG. 3 is a diagram illustrating a transition of acceleration / deceleration speed of a pulse motor.

[Explanation of symbols]

 12 step-out measurement section 13 log memory 14 communication means 20 encoder (rotary encoder) 22 pulse motor (step motor) 24 speed change mechanism 30 rotary table 32 origin sensor 34 pocket 40 supply arm 42, 42n, 52, 52n suction section 50 storage arm 60 device 70 speed control unit 71 drive unit 72 step counter 73 encoder counter 74 out-of-step detection unit 80 CPU 82 parameter memory

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location G05D 13/62 P

Claims (4)

[Claims] 1. An encoder (20) for detecting a rotation angle of a rotary shaft of a step motor, which receives a counter (72) signal of a step pulse number for driving the step motor and a signal from the encoder (20). In a motor speed control device having a step-out detection function, the step motor (22) is driven under a plurality of acceleration / deceleration conditions, and the presence or absence of step-out is detected by receiving a signal from the encoder (20) at this time. , A step-out measuring unit (12) which obtains a step-out point and supplies driving conditions for acceleration / deceleration of the step motor (22) thereafter to the CPU (80) based on the step-out point value.
And a device transportation motor speed control device in an IC test handler, characterized by comprising the above. 2. An encoder (20) for detecting a rotation angle of a rotary shaft of a step motor, the step pulse counter (72) signal for driving the step motor, and a signal from the encoder (20). Has a step-out detection function, and parameter memory for acceleration / deceleration drive conditions (82)
In the motor speed control device that reads out and controls the step motor (22), the step motor (22) is driven under a plurality of acceleration / deceleration conditions, the signal from the encoder (20) at this time is received to detect the presence or absence of step-out, and A device in an IC test handler characterized in that it is provided with a step-out measuring section (12) for obtaining a key point and storing the acceleration / deceleration condition value of this step-out point in a parameter memory (82). Transport motor speed control device. 3. The step-out measuring unit (12) according to claim 1 or 2, further comprising a log memory (13) for receiving the measurement data of the step-out point and additionally recording the log memory (13), A device transfer motor speed control device in an IC test handler, comprising the above. 4. The out-of-step measuring unit (12) according to claim 1 or 2, further comprising communication means (14) for receiving measurement data of the out-of-step point and communicating with a higher-level management machine. A motor speed control device for device transportation in an IC test handler, characterized in that