JPH073377B2 - Piezoelectric pressure distribution sensor - Google Patents
Piezoelectric pressure distribution sensorInfo
- Publication number
- JPH073377B2 JPH073377B2 JP8886090A JP8886090A JPH073377B2 JP H073377 B2 JPH073377 B2 JP H073377B2 JP 8886090 A JP8886090 A JP 8886090A JP 8886090 A JP8886090 A JP 8886090A JP H073377 B2 JPH073377 B2 JP H073377B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure distribution
- piezoelectric
- distribution sensor
- sheet material
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） この発明は圧電型圧力分布センサに関し、特に、マトリ
クス状に配置された複数の圧電素子により接触圧力分布
を検出することができる圧電型圧力分布センサに関す
る。Description: TECHNICAL FIELD The present invention relates to a piezoelectric pressure distribution sensor, and in particular, a piezoelectric pressure distribution sensor capable of detecting contact pressure distribution by a plurality of piezoelectric elements arranged in a matrix. Regarding sensors.
（従来技術） 第３図はこの発明の背景となる従来の圧電型圧力分布セ
ンサの一例を示す分解斜視図である。この圧電型圧力分
布センサ１は、剛体で形成された基台２を含む。基台２
上には、複数の圧電素子３が、マトリクス状に配置され
る。これらの圧電素子３の上面は、シート材４で被覆さ
れる。(Prior Art) FIG. 3 is an exploded perspective view showing an example of a conventional piezoelectric pressure distribution sensor which is the background of the present invention. The piezoelectric pressure distribution sensor 1 includes a base 2 formed of a rigid body. Base 2
A plurality of piezoelectric elements 3 are arranged in a matrix on the top. The upper surfaces of these piezoelectric elements 3 are covered with the sheet material 4.
シート材４は、第４図に示すように、フェルト層５を含
み、フェルト層５の主面上に銅張フレキシブル基板６お
よびゴム層７が形成される。この圧電型圧力分布センサ
１を使用する際には、銅張フレキシブル基板６が接地し
て用いられる。As shown in FIG. 4, the sheet material 4 includes a felt layer 5, and a copper-clad flexible substrate 6 and a rubber layer 7 are formed on the main surface of the felt layer 5. When the piezoelectric pressure distribution sensor 1 is used, the copper clad flexible substrate 6 is grounded and used.
この圧電型圧力分布センサ１では、各圧電素子３に与え
られる圧力を測定することによって圧力の分布を知るこ
とができる。さらに、各圧電素子３に与えられる圧力を
時分割的に測定することによって、圧力分布の時間的な
変化を知ることができる。In the piezoelectric pressure distribution sensor 1, the pressure distribution can be known by measuring the pressure applied to each piezoelectric element 3. Further, by measuring the pressure applied to each piezoelectric element 3 in a time-division manner, it is possible to know the temporal change of the pressure distribution.
この圧力分布センサ１では、シート材４の銅張フレキシ
ブル基板６を接地することによって、圧電素子３が電磁
ノイズからシールドされる。In the pressure distribution sensor 1, the piezoelectric element 3 is shielded from electromagnetic noise by grounding the copper-clad flexible substrate 6 of the sheet material 4.
（発明が解決しようとする課題） しかしながら、この圧電型圧力分布センサでは、銅張フ
レキシブル基板の張力のため、１つの圧電素子上に与え
られた圧力によって、近くにある他の圧電素子もシート
材で押さえられる。そのため、たとえば１つの圧電素子
上に与えられた圧力が、その近くの他の圧電素子によっ
ても検出され、正確な圧力分布を測定することができな
い。(Problems to be Solved by the Invention) However, in this piezoelectric type pressure distribution sensor, due to the tension of the copper-clad flexible substrate, the pressure applied to one piezoelectric element causes other piezoelectric elements in the vicinity to be sheet materials. Can be held down with. Therefore, for example, the pressure applied on one piezoelectric element is also detected by other piezoelectric elements in the vicinity thereof, and the accurate pressure distribution cannot be measured.
それゆえに、この発明の主たる目的は、従来のものに比
べて、より正確に圧力分布を測定することができる圧電
型圧力分布センサを提供することである。Therefore, a main object of the present invention is to provide a piezoelectric pressure distribution sensor that can measure the pressure distribution more accurately than the conventional one.
（課題を解決するための手段） この発明は、マトリクス状に配置され、圧力変化に応じ
た電圧を出力する複数の圧電素子と、圧電素子を覆うシ
ート材とを含み、シート材には導電ゴム層が形成され
る、圧電型圧力分布センサである。(Means for Solving the Problem) The present invention includes a plurality of piezoelectric elements arranged in a matrix and outputting a voltage according to a pressure change, and a sheet material covering the piezoelectric elements. A piezoelectric pressure distribution sensor in which layers are formed.
（作用） 圧電素子が、シート材に形成された導電ゴム層によって
電磁シールドされる。導電ゴム層は、銅張フレキシブル
基板に比べて、小さい張力を有する。(Operation) The piezoelectric element is electromagnetically shielded by the conductive rubber layer formed on the sheet material. The conductive rubber layer has a smaller tension than the copper-clad flexible substrate.
（発明の効果） この発明によれば、張力の小さい導電ゴム層によって圧
電素子が電磁シールドされるため、圧力が与えられた部
分以外の圧電素子は、その圧力の影響を受けにくい。し
たがって、各圧電素子は、それぞれに与えられた圧力の
みを正確に測定することができ、正確な圧力分布を把握
することができる。(Effect of the Invention) According to the present invention, since the piezoelectric element is electromagnetically shielded by the conductive rubber layer having a small tension, the piezoelectric element other than the portion to which the pressure is applied is less likely to be affected by the pressure. Therefore, each piezoelectric element can accurately measure only the pressure applied thereto, and can grasp an accurate pressure distribution.
この発明の上述の目的，その他の目的，特徴および利点
は、図面を参照して行う以下の実施例の詳細な説明から
一層明らかとなろう。The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of the embodiments with reference to the drawings.
（実施例） 第１図はこの発明の一実施例を示す分解斜視図である。
この圧電型圧力分布センサ10は、たとえばステンレス鋼
などの剛体で形成された基台12を含む。基台12上には、
複数の圧電素子14がマトリクス状に配置される。これら
の圧電素子14は、シート材16で覆われる。(Embodiment) FIG. 1 is an exploded perspective view showing an embodiment of the present invention.
The piezoelectric pressure distribution sensor 10 includes a base 12 formed of a rigid body such as stainless steel. On the base 12,
A plurality of piezoelectric elements 14 are arranged in a matrix. These piezoelectric elements 14 are covered with a sheet material 16.
シート材16は、第２図に示すように、たとえばフェルト
層18を含む。このフェルト層18が、圧電素子14上に載置
される。フェルト層18の主面上には、導電ゴム層20が形
成される。圧電型圧力分布センサ10の使用時には、導電
ゴム層20は接地される。The sheet material 16 includes, for example, a felt layer 18 as shown in FIG. This felt layer 18 is placed on the piezoelectric element 14. A conductive rubber layer 20 is formed on the main surface of the felt layer 18. When the piezoelectric pressure distribution sensor 10 is used, the conductive rubber layer 20 is grounded.
この圧電型圧力分布センサ10を用いる場合、シート材16
上に被測定物が載せられる。被測定物によって与えられ
た圧力は、圧電素子14によって検出され、圧電素子14に
は圧力に応じた電圧が発生する。したがって、各圧電素
子14に発生した電圧を測定すれば、被測定物の圧力分布
を知ることができる。When using this piezoelectric pressure distribution sensor 10, the sheet material 16
The object to be measured is placed on top. The pressure applied by the object to be measured is detected by the piezoelectric element 14, and a voltage corresponding to the pressure is generated in the piezoelectric element 14. Therefore, by measuring the voltage generated in each piezoelectric element 14, the pressure distribution of the measured object can be known.
また、各圧電素子14について、時分割的に電圧を測定す
れば、シート材16上の被測定物の圧力分布が変化して
も、その時間的な変化を知ることができる。Further, by measuring the voltage of each piezoelectric element 14 in a time-division manner, even if the pressure distribution of the object to be measured on the sheet material 16 changes, the change over time can be known.
この圧電型圧力分布センサ10では、導電ゴム層20によっ
て、圧電素子14が電磁ノイズからシールドされる。した
がって、電磁ノイズによる測定誤差が小さくなる。この
導電ゴム層20は、従来の銅張フレキシブル基板に比べ
て、張力が小さい。そのため、ある圧電素子14上に与え
られた圧力によって、他の圧電素子14がシート材16で押
さえられることが少なく、従来の圧電型圧力分布センサ
に比べて、正確に圧力分布を測定することができる。In this piezoelectric type pressure distribution sensor 10, the conductive rubber layer 20 shields the piezoelectric element 14 from electromagnetic noise. Therefore, the measurement error due to electromagnetic noise is reduced. The conductive rubber layer 20 has a smaller tension than the conventional copper-clad flexible substrate. Therefore, due to the pressure applied on a certain piezoelectric element 14, other piezoelectric elements 14 are less likely to be pressed by the sheet material 16, and the pressure distribution can be accurately measured as compared with the conventional piezoelectric pressure distribution sensor. it can.
第１図はこの発明の一実施例を示す分解斜視図である。 第２図は第１図に示す圧電型圧力分布センサの部分断面
図である。 第３図はこの発明の背景となる従来の圧電型圧力分布セ
ンサの一例を示す分解斜視図である。 第４図は第３図に示す従来の圧電型圧力分布センサの部
分断面図である。 図において、10は圧電型圧力分布センサ、14は圧電素
子、16はシート材、20は導電ゴム層を示す。FIG. 1 is an exploded perspective view showing an embodiment of the present invention. FIG. 2 is a partial sectional view of the piezoelectric pressure distribution sensor shown in FIG. FIG. 3 is an exploded perspective view showing an example of a conventional piezoelectric pressure distribution sensor which is the background of the present invention. FIG. 4 is a partial sectional view of the conventional piezoelectric type pressure distribution sensor shown in FIG. In the figure, 10 is a piezoelectric pressure distribution sensor, 14 is a piezoelectric element, 16 is a sheet material, and 20 is a conductive rubber layer.
Claims (1)
た電圧を出力する複数の圧電素子、および 前記圧電素子を覆うシート材を含み、 前記シート材には導電ゴム層が形成される、圧電型圧力
分布センサ。1. A piezoelectric device comprising a plurality of piezoelectric elements arranged in a matrix and outputting a voltage according to a pressure change, and a sheet material covering the piezoelectric elements, wherein a conductive rubber layer is formed on the sheet material. Type pressure distribution sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8886090A JPH073377B2 (en) | 1990-04-02 | 1990-04-02 | Piezoelectric pressure distribution sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8886090A JPH073377B2 (en) | 1990-04-02 | 1990-04-02 | Piezoelectric pressure distribution sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03287033A JPH03287033A (en) | 1991-12-17 |
| JPH073377B2 true JPH073377B2 (en) | 1995-01-18 |
Family
ID=13954752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8886090A Expired - Lifetime JPH073377B2 (en) | 1990-04-02 | 1990-04-02 | Piezoelectric pressure distribution sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073377B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012122790A (en) * | 2010-12-07 | 2012-06-28 | Seiko Epson Corp | Sensor device and sensor device array |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116907725B (en) * | 2023-09-13 | 2023-12-08 | 合肥工业大学 | Method for measuring discharge pressure in liquid in closed environment |
-
1990
- 1990-04-02 JP JP8886090A patent/JPH073377B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012122790A (en) * | 2010-12-07 | 2012-06-28 | Seiko Epson Corp | Sensor device and sensor device array |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03287033A (en) | 1991-12-17 |
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