JPH0735706A - Thin film X-ray diffractometer using X-ray conduit optical system - Google Patents

Abstract

(57) [Summary] [Object] To provide a thin film X-ray diffractometer capable of measuring diffracted X-rays with sufficient intensity even when X-rays are incident at a shallow angle. [Arrangement] In an X-ray diffractometer for injecting X-rays at a predetermined angle onto a sample surface, detecting secondary X-rays emitted from the sample surface with a detector, and examining the structure or composition of the sample for identification. Thin film sample (2) or 2 from a certain area on the sample surface
Between the sample (2) and the detector (5), an optical system (4) consisting of an X-ray conduit for selectively detecting only parallel secondary X-rays of a specific angle from the next X-rays (3) is installed. It is an optical system in which a plurality of X-ray conduits are bundled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray diffractometer, and more particularly to an X-ray diffractometer suitable for identifying the structure and composition of thin films.

[0002]

2. Description of the Related Art In the process of synthesizing materials and manufacturing products,
It is necessary to know the structure and composition of substances for performance improvement and quality control. Various devices are used as a measuring device for that purpose, and the X-ray diffractometer is used in many fields to know the structure. In particular, thin film materials and materials using the surface are being researched and developed as materials with new functions, and it is very important to investigate the structure and composition, and this is a major field in which X-ray diffractometers are used. There is.

Since the conventional powder X-ray diffractometer uses the Zeeman-Bollin type optical system, the detector is rotated by 2θ while the sample is rotated by θ. Therefore, generally, as the diffraction angle (θ) increases, the X-ray irradiation area decreases. Diffraction X
Since the line intensity is weak, make sure that X-rays are widely incident on the surface.
Is fixed shallowly and only the detector is rotated for measurement.

[0004]

However, when the structure of the surface of the material or substance of the thin film is to be investigated, in order to increase the intensity of the diffracted X-ray from the surface, θ is fixed and the X-ray is made shallow. Although the light is incident at an angle, the conditions of the Zeeman-Bohlin optical system are not satisfied, and the high-angle diffracted X-rays (second-order X-rays) are not focused on the position of the detector. Therefore,
There is a problem that the peak of the diffracted X-ray spreads and the angle accuracy deteriorates.

An object of the present invention is to solve the above problems and to provide a thin film X-ray diffractometer capable of measuring diffracted X-rays with sufficient intensity even when X-rays are incident at a shallow angle.

[0006]

In order to solve this problem, in view of the need to efficiently detect only parallel X-rays, the present inventor has found that parallel X-rays emitted from a certain specific area. Find an X-ray optical system that bundles X-ray conduits (XGT) to extract rays and uses it as a parallel X-ray flux filter.
It is the invention.

[0007]

The present invention will be described in more detail below.

Since the X-ray conduit guides X-rays through the inner wall of the glass tube by utilizing total internal reflection, it is possible to guide only substantially parallel X-rays that satisfy the shallow critical angle in the glass tube. By using the utilized X-ray conduit optical system, it is possible to measure diffracted X-rays such as a thin film sample with sufficient intensity. The operation of the thin film X-ray diffractometer using the X-ray conduit optical system is as follows.

FIG. 1 is a principle diagram of the X-ray optical system of the present invention. First, the X-ray (1) generated from the X-ray source is incident on the surface of the sample (2) as a parallel beam at a very shallow angle.
The sample is a thin film or a certain area on the surface of the substance. Diffracted X-rays (3) from the sample go out in various directions depending on the energy of the X-ray conduit optical system that bundles the X-ray conduits.
By setting (4) at a specific angle, only the X-rays emitted in this direction from the entire sample surface can be selectively detected by the detector (5). That is, according to this optical system, it is possible to measure diffracted X-rays having a higher intensity than that of a normal X-ray diffractometer. At this time, if a solid-state detector having energy resolution is used as the detector, a plurality of diffracted X-rays can be detected, and the fluorescent X-rays can also provide information on the composition.

Next, examples of the present invention will be described.

[0011]

【Example】

FIG. 2 shows an example in which the thin film X-ray diffractometer using the X-ray conduit optical system of the present invention is constituted by a vertical goniometer.

The X-ray (1) generated by the X-ray source (7) is incident on the thin film sample (2) arranged at the center of the goniometer (6) at a shallow angle. All the specific parallel X-rays diffracted on the entire sample surface are attached to the 2θ axis of the goniometer (6).
It is measured by the detector (5) through the line conduit optics (4). At this time, X-rays diffracting in other directions cannot be detected because they cannot pass through the X-ray conduit optical system.

As the X-ray source, radiation light or the like can be used in addition to the usual X-ray source. Also, for incident X-rays on the sample, a solar slit or similar X-ray conduit optical system can be used if necessary.

[0015]

As described above, according to the present invention,
Since only parallel diffracted X-rays from the entire surface of the thin film sample can be efficiently captured and X-rays with different diffraction angles can be blocked, the intensity is higher and the angular accuracy is higher than the conventional powder X-ray diffractometer of the related art. It enables measurement and is particularly effective for thin film samples.

[Brief description of drawings]

FIG. 1 is a principle diagram of an X-ray optical system of the present invention.

FIG. 2 is a diagram showing an example in which a thin film X-ray diffractometer using the X-ray conduit optical system of the present invention is constituted by a vertical goniometer.

[Explanation of symbols]

 1 incident X-ray 2 sample 3 diffracted X-ray 4 X-ray conduit optical system 5 detector 6 goniometer 7 X-ray source

Claims (2)

[Claims] 1. An X-ray is incident on a sample surface at a predetermined angle,
An X-ray diffractometer for detecting secondary X-rays emitted from the surface of a sample with a detector and performing identification by examining the structure or composition of the sample.
Thin-film X-ray diffraction, characterized in that an optical system consisting of an X-ray conduit for selectively detecting only parallel secondary X-rays of a specific angle from the next X-rays is arranged between the sample and the detector. apparatus. 2. The apparatus according to claim 1, which is an optical system in which a plurality of X-ray conduits are bundled.