JPH074474Y2 - Heater support tube for hot isostatic press - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a heater support tube for a hot isostatic press.

(Prior Art) As a heater support cylinder of a hot isostatic pressurization device (hereinafter referred to as a HIP device), isotropic pressurization technology is a publication issued by Nikkan Kogyo Shimbun on April 13, 1988. There is a technology disclosed on pages 100 to 104 of the above.

(Problems to be solved by the invention) By the way, when the heater support cylinder is formed by stacking a plurality of metal cylinders formed by connecting both ends of a band-shaped plate material in the height direction, conventionally, each metal The connecting portion (seam portion) of the cylinder was in the same phase in the circumferential direction and was linear in the height direction.

Therefore, the seam is deformed by thermal stress due to HIP treatment,
In addition, the deformation spreads to other joints and there was a problem in durability.

In particular, when operating a HIP device that maintains a high temperature for a long time, the seam of the upper part of the heater support cylinder, that is, the part that is at the highest temperature, is easily deformed, and this deformation affects the seam of the lower stage. There was also something to do.

In view of the problems of the prior art, the present invention divides the joint (connection portion) of the cylinder in the vertical direction (height direction) and shifts the phases of the joints in the circumferential direction so that the deformation of the joint is adjacent. It is an object of the present invention to provide a heater support cylinder that can be restrained by a cylinder.

(Means for Solving the Problem) The present invention is to support a heater of a hot isostatic presser by stacking a plurality of metal cylinders formed by connecting both ends of a band-shaped plate material in the height direction thereof. It is a cylinder, and the following technical measures are taken to achieve the above-mentioned object.

That is, the present invention is characterized in that the connecting portions of the stacked metal cylinders are arranged with their phases shifted in the circumferential direction.

(Operation) According to the present invention, due to thermal stress during HIP processing, each cylinder 16,17,1
Even if the connecting portions 16B, 17B, 18B of 8 are about to be deformed,
Since the phase of 16B, 17B, 18B is shifted in the circumferential direction,
This is constrained by the cylinders 16, 17, 18 that are vertically adjacent to each other.

Embodiment An embodiment of the present invention will be described in detail below with reference to the drawings.

In FIG. 6, 1 is a HIP device, which is an upper lid 2 and a lower middle lid 3.
And a pressure vessel 5 having a lower outer lid 4, a heat insulating layer 7 for insulating the inner wall 5A of the pressure vessel 5 from the processing chamber 6, and a lower inner lid 3
The processing object mounting table 8 placed on the upper part, and the heat insulating layer 7 are mainly constituted by a heater 9 and a heater support cylinder 10 which are arranged between the mounting tables 8.

In order to obtain uniform heat distribution in the vertical direction, the heater 9 has heater elements 9A, 9B divided into several stages in the vertical direction suspended from the heater support cylinder 10 by a pin 12 through a glass 11 as shown in FIG. It is attached to.

The heater support cylinder 10 is fixed on the lower outer lid 4 via a column 13, 14 is an electrode of the heater, and 15 is a gas supply hole.

As shown in FIGS. 1 and 3, the heater support cylinder 10 includes metal cylinders 16, 17, 18 formed by connecting both ends of band-shaped plate members 16A, 17A, 18A by welding or the like. In this case, the connecting portions (seam portions) 16B, 17B, 18B of the cylinders 16 to 18 are shifted in phase in the circumferential direction.

That is, in this example, the phases of 120 ° are shifted by the angles θ1 and θ2 and are equally divided in the circumferential direction.

The band width of the band-shaped plate members 16A, 17A, and 18A is the upper and lower plate members 16 in this example.
A, 18A are narrow widths H1, H3 and intermediate plate material 17A is wide width H2, and the welding position of the stacking edge of each cylinder 16, 17, 18 or the connecting portion 19, 20 is the heat generation of each heater element 9A, 9B. It is supposed to be in the middle of the zone (see Figure 6).

4 and 5 show plate materials 16A, 17A, 18A with a large number of punch holes 2
This is an example in which one provided is used, whereby the heater support cylinder 10 in which gas convection is promoted is obtained. The hatched area in FIG. 4 is the area where the punch holes 21 are formed.

In the case of the embodiment shown in FIGS. 4 and 5, the punch holes 21 are not provided in the connecting portions 16B, 17B, 18B and 19, 20 in order to secure the rigidity of the heater supporting cylinder 10.

The heater elements 9A and 9B are the upper and lower cylinders 16, 17, 18
It is installed over.

6, 7, and 8 show that the support cylinder 10 is deformed by the thermal stress due to the increase of the temperature gradient in the lower part of the support cylinder 10 located below the upper surface of the processing object mounting table 8. 7 is provided with a thick portion 22 having a larger wall thickness than the upper portion to increase the strength of the heater support cylinder 10,
FIG. 8 shows a structure for preventing deformation, and FIG. 8 shows a heater support cylinder.
A flange 23 is formed at the lower end of 10 and this flange 23
A fitting stepped portion 24 is provided on the inner peripheral surface of the, and a fitting convex portion 26 is provided on the upper surface of the support tube mounting table 25, and the stepped portion 24 is fitted and placed to allow expansion and contraction due to thermal expansion. It shows what is going on.

Further, the heater support cylinder 10 of FIG. 6 is mounted on an annular step portion 27 recessed in the upper surface of the support cylinder mounting table 25 so that the lower end of the heater support cylinder 10 does not fall down, and the heater support cylinder due to thermal expansion. Ten
Shows that the expansion and contraction of is free.

In any of the embodiments of FIGS. 6 to 8 described above, the first
As shown in FIGS. 3, 3 and 4, the metal cylinders 16, 17,
The phases of the connecting portions 16B, 17B, 18B of 18 are shifted in the circumferential direction.

In each of the embodiments described above, the heater elements 9A, 9B
Shows that it is vertically divided into two parts, but this is the same in the case of two or more parts (two or more zones). In this case, the heater support cylinder 10 has four or more cylinders, and the vertical connecting portions of the cylinders are out of phase by 120 °,
Similarly to the above, the phases of the vertically adjacent connecting portions are necessarily shifted.

(Effects of the Invention) The present invention is as described above, and in the heater support cylinder formed by stacking metal cylinders, the vertical connecting portions are circumferentially out of phase, so the connecting portions (joint portions) are The deformation can be restrained by vertically adjacent cylinders, and cracking and peeling of the connecting portion can be prevented.

Therefore, it is possible to provide a heater support cylinder that does not cause any trouble even in the operation of maintaining the high temperature state for a long time.

[Brief description of drawings]

The drawings show an embodiment of the present invention, FIG. 1 is a perspective view of the first embodiment, FIG. 2 is an enlarged view of part A of FIG. 1, FIG. 3 is a developed view of the first embodiment, and FIG. Is a developed view of the second embodiment, FIG. 5 is a partially enlarged view of FIG. 4, FIG. 6 is a sectional view of the HIP device according to the third embodiment, and FIGS. 7 and 8 are the fourth and fifth embodiments. 3 is a cross-sectional view of a heater support cylinder according to FIG. 10 ... Heater support cylinder, 16,17,18 ... Metal cylinder, 16A, 17A, 18
A ... band-shaped plate material, 16B, 17B, 18B ... connecting part.

Claims (1)

[Scope of utility model registration request] 1. A heater support cylinder of a hot isostatic press, comprising a plurality of metal cylinders formed by connecting both ends of a band-shaped plate material in a height direction thereof, wherein the metal cylinders are stacked. A heater supporting cylinder of a hot isostatic pressurizing device, characterized in that the respective connecting portions of the metal cylinder are arranged with their phases shifted in the circumferential direction.