JPH07505583A - 研磨具 - Google Patents

研磨具

Info

Publication number: JPH07505583A
Authority: JP; Japan
Prior art keywords: support; polishing tool; display; polishing; adhesive
Prior art date: 1992-04-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP5518301A

Other languages

English (en)

Japanese (ja)

Inventor

リンドホーム、ジーン・オー

スターナー、マーク・エル

トッチ、セオドア・シー

Original Assignee

ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-04-13

Filing date

1993-03-01

Publication date

1995-06-22

1993-03-01 Application filed by ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー filed Critical ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー

1995-06-22 Publication of JPH07505583A publication Critical patent/JPH07505583A/ja

Status Pending legal-status Critical Current

Links

238000005498 polishing Methods 0.000 title claims description 49
239000000463 material Substances 0.000 claims description 21
239000000853 adhesive Substances 0.000 claims description 17
230000001070 adhesive effect Effects 0.000 claims description 17
239000003082 abrasive agent Substances 0.000 claims description 7
229920006254 polymer film Polymers 0.000 claims description 5
239000000049 pigment Substances 0.000 claims description 3
229920000642 polymer Polymers 0.000 claims description 3
238000002834 transmittance Methods 0.000 claims description 3
230000003287 optical effect Effects 0.000 claims 1
239000000758 substrate Substances 0.000 claims 1
238000007639 printing Methods 0.000 description 12
239000006061 abrasive grain Substances 0.000 description 10
239000002245 particle Substances 0.000 description 6
239000004820 Pressure-sensitive adhesive Substances 0.000 description 5
238000004519 manufacturing process Methods 0.000 description 5
229920001971 elastomer Polymers 0.000 description 4
239000010410 layer Substances 0.000 description 4
238000007644 letterpress printing Methods 0.000 description 4
239000005060 rubber Substances 0.000 description 4
239000000126 substance Substances 0.000 description 4
239000002253 acid Substances 0.000 description 3
229920001577 copolymer Polymers 0.000 description 3
238000005516 engineering process Methods 0.000 description 3
239000000203 mixture Substances 0.000 description 3
TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
-1 polyethylene Polymers 0.000 description 3
239000004753 textile Substances 0.000 description 3
KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
239000004831 Hot glue Substances 0.000 description 2
XUMBMVFBXHLACL-UHFFFAOYSA-N Melanin Chemical compound O=C1C(=O)C(C2=CNC3=C(C(C(=O)C4=C32)=O)C)=C2C4=CNC2=C1C XUMBMVFBXHLACL-UHFFFAOYSA-N 0.000 description 2
239000004677 Nylon Substances 0.000 description 2
239000004743 Polypropylene Substances 0.000 description 2
239000012790 adhesive layer Substances 0.000 description 2
229910052782 aluminium Inorganic materials 0.000 description 2
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
239000000835 fiber Substances 0.000 description 2
239000002657 fibrous material Substances 0.000 description 2
238000007646 gravure printing Methods 0.000 description 2
239000004816 latex Substances 0.000 description 2
229920000126 latex Polymers 0.000 description 2
238000001459 lithography Methods 0.000 description 2
238000000034 method Methods 0.000 description 2
238000005065 mining Methods 0.000 description 2
239000003607 modifier Substances 0.000 description 2
229920001778 nylon Polymers 0.000 description 2
238000004806 packaging method and process Methods 0.000 description 2
229920001568 phenolic resin Polymers 0.000 description 2
239000005011 phenolic resin Substances 0.000 description 2
229920006267 polyester film Polymers 0.000 description 2
229920001155 polypropylene Polymers 0.000 description 2
238000007650 screen-printing Methods 0.000 description 2
210000002784 stomach Anatomy 0.000 description 2
DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 1
WROUWQQRXUBECT-UHFFFAOYSA-N 2-ethylacrylic acid Chemical compound CCC(=C)C(O)=O WROUWQQRXUBECT-UHFFFAOYSA-N 0.000 description 1
YDWRZBOKATXNFI-UHFFFAOYSA-N 6-methylheptyl prop-2-enoate;prop-2-enoic acid Chemical group OC(=O)C=C.CC(C)CCCCCOC(=O)C=C YDWRZBOKATXNFI-UHFFFAOYSA-N 0.000 description 1
RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
NIXOWILDQLNWCW-UHFFFAOYSA-N Acrylic acid Chemical compound OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
239000004925 Acrylic resin Substances 0.000 description 1
NOWKCMXCCJGMRR-UHFFFAOYSA-N Aziridine Chemical compound C1CN1 NOWKCMXCCJGMRR-UHFFFAOYSA-N 0.000 description 1
229910052580 B4C Inorganic materials 0.000 description 1
229910052582 BN Inorganic materials 0.000 description 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
241000282994 Cervidae Species 0.000 description 1
229920000742 Cotton Polymers 0.000 description 1
239000005977 Ethylene Substances 0.000 description 1
244000043261 Hevea brasiliensis Species 0.000 description 1
101000893549 Homo sapiens Growth/differentiation factor 15 Proteins 0.000 description 1
101000692878 Homo sapiens Regulator of MON1-CCZ1 complex Proteins 0.000 description 1
239000004698 Polyethylene Substances 0.000 description 1
229920005830 Polyurethane Foam Polymers 0.000 description 1
229920000297 Rayon Polymers 0.000 description 1
102100026436 Regulator of MON1-CCZ1 complex Human genes 0.000 description 1
KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
229920001807 Urea-formaldehyde Polymers 0.000 description 1
QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
238000004026 adhesive bonding Methods 0.000 description 1
GZCGUPFRVQAUEE-SLPGGIOYSA-N aldehydo-D-glucose Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C=O GZCGUPFRVQAUEE-SLPGGIOYSA-N 0.000 description 1
229920000180 alkyd Polymers 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
AFIUHSVJMNJWGW-UHFFFAOYSA-N butane;prop-2-enenitrile;styrene Chemical compound CCCC.C=CC#N.C=CC1=CC=CC=C1 AFIUHSVJMNJWGW-UHFFFAOYSA-N 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
229910000420 cerium oxide Inorganic materials 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
239000003086 colorant Substances 0.000 description 1
239000002131 composite material Substances 0.000 description 1
238000003851 corona treatment Methods 0.000 description 1
239000013078 crystal Substances 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
150000002148 esters Chemical class 0.000 description 1
239000004744 fabric Substances 0.000 description 1
239000003292 glue Substances 0.000 description 1
238000007373 indentation Methods 0.000 description 1
238000002372 labelling Methods 0.000 description 1
238000010030 laminating Methods 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
229920003052 natural elastomer Polymers 0.000 description 1
229920001194 natural rubber Polymers 0.000 description 1
239000004745 nonwoven fabric Substances 0.000 description 1
BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
239000000123 paper Substances 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
239000002984 plastic foam Substances 0.000 description 1
229920001485 poly(butyl acrylate) polymer Polymers 0.000 description 1
229920001084 poly(chloroprene) Polymers 0.000 description 1
229920000058 polyacrylate Polymers 0.000 description 1
229920000728 polyester Polymers 0.000 description 1
229920001225 polyester resin Polymers 0.000 description 1
239000004645 polyester resin Substances 0.000 description 1
229920000573 polyethylene Polymers 0.000 description 1
239000011496 polyurethane foam Substances 0.000 description 1
238000003825 pressing Methods 0.000 description 1
239000002964 rayon Substances 0.000 description 1
239000002990 reinforced plastic Substances 0.000 description 1
229920005989 resin Polymers 0.000 description 1
239000011347 resin Substances 0.000 description 1
229920003987 resole Polymers 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
229920003051 synthetic elastomer Polymers 0.000 description 1
239000005061 synthetic rubber Substances 0.000 description 1
229920001169 thermoplastic Polymers 0.000 description 1
229920002803 thermoplastic polyurethane Polymers 0.000 description 1
229920001187 thermosetting polymer Polymers 0.000 description 1
239000004416 thermosoftening plastic Substances 0.000 description 1
KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
229920002554 vinyl polymer Polymers 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
- B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Manufacturing & Machinery (AREA)
Polishing Bodies And Polishing Tools (AREA)

JP5518301A 1992-04-13 1993-03-01 研磨具 Pending JPH07505583A (ja)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US86800792A	1992-04-13	1992-04-13
US868,007		1992-04-13
PCT/US1993/001789 WO1993020976A1 (en)	1992-04-13	1993-03-01	Abrasive article

Publications (1)

Publication Number	Publication Date
JPH07505583A true JPH07505583A (ja)	1995-06-22

Family

ID=25350905

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP5518301A Pending JPH07505583A (ja)	1992-04-13	1993-03-01	研磨具

Country Status (8)

Country	Link
EP (1)	EP0636057B1 (es)
JP (1)	JPH07505583A (es)
KR (1)	KR950700809A (es)
AU (1)	AU3781293A (es)
CA (1)	CA2131526A1 (es)
DE (1)	DE69311105T2 (es)
ES (1)	ES2104137T3 (es)
WO (1)	WO1993020976A1 (es)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH1058333A (ja) *	1996-08-08	1998-03-03	Dainippon Printing Co Ltd	研磨シート
JP2001252878A (ja) *	2000-03-08	2001-09-18	Fuji Photo Film Co Ltd	研磨シート
JP2012066328A (ja) *	2010-09-22	2012-04-05	Disco Corp	ドレッシングボードおよびドレッシングボード収容ケース
JP2012109616A (ja) *	1995-08-21	2012-06-07	Rohm & Haas Electronic Materials Cmp Holdings Inc	研磨パッド

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6614529B1 (en)	1992-12-28	2003-09-02	Applied Materials, Inc.	In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization
US7037403B1 (en)	1992-12-28	2006-05-02	Applied Materials Inc.	In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization
GB9322174D0 (en) *	1993-10-28	1993-12-15	Minnesota Mining & Mfg	Abrasive article
TW317223U (en)	1994-01-13	1997-10-01	Minnesota Mining & Mfg	Abrasive article
US5607345A (en) *	1994-01-13	1997-03-04	Minnesota Mining And Manufacturing Company	Abrading apparatus
US6876454B1 (en)	1995-03-28	2005-04-05	Applied Materials, Inc.	Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US6676717B1 (en)	1995-03-28	2004-01-13	Applied Materials Inc	Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US5893796A (en)	1995-03-28	1999-04-13	Applied Materials, Inc.	Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US6537133B1 (en)	1995-03-28	2003-03-25	Applied Materials, Inc.	Method for in-situ endpoint detection for chemical mechanical polishing operations
JP3431115B2 (ja)	1995-03-28	2003-07-28	アプライドマテリアルズインコーポレイテッド	ケミカルメカニカルポリシングの操作をインシチュウでモニタするための装置及び方法
US6719818B1 (en)	1995-03-28	2004-04-13	Applied Materials, Inc.	Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
US6106922A (en) *	1997-10-03	2000-08-22	3M Innovative Company	Coextruded mechanical fastener constructions
US6994607B2 (en)	2001-12-28	2006-02-07	Applied Materials, Inc.	Polishing pad with window
US6179709B1 (en)	1999-02-04	2001-01-30	Applied Materials, Inc.	In-situ monitoring of linear substrate polishing operations
EP1165313B2 (en)	1999-02-25	2014-09-17	3M Innovative Properties Company	Method for the production of a web having discrete stem regions
US6524164B1 (en)	1999-09-14	2003-02-25	Applied Materials, Inc.	Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
US20020019206A1 (en) *	2000-05-12	2002-02-14	Deka Ganesh Chandra	Colored loop substrate for releasably attachable abrasive sheet material
US8485862B2 (en)	2000-05-19	2013-07-16	Applied Materials, Inc.	Polishing pad for endpoint detection and related methods
US6599177B2 (en) *	2001-06-25	2003-07-29	Saint-Gobain Abrasives Technology Company	Coated abrasives with indicia
US7001242B2 (en)	2002-02-06	2006-02-21	Applied Materials, Inc.	Method and apparatus of eddy current monitoring for chemical mechanical polishing
US7264536B2 (en)	2003-09-23	2007-09-04	Applied Materials, Inc.	Polishing pad with window
US20090044458A1 (en) *	2006-03-03	2009-02-19	Sandro Giovanni Giuseppe Ferronato	System for indicating the grade of an abrasive
WO2007144915A1 (en) *	2006-06-16	2007-12-21	Power-Tech Srl	Abrasive member
US10245705B2 (en)	2014-11-07	2019-04-02	3M Innovative Properties Company	Printed abrasive article
DE102021215121A1 (de)	2021-12-30	2023-07-06	Robert Bosch Gesellschaft mit beschränkter Haftung	Schleifmittel

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4437269A (en) *	1979-08-17	1984-03-20	S.I.A.C.O. Limited	Abrasive and polishing sheets
DE3942301C1 (es) *	1989-12-21	1991-02-14	Robert Bosch Gmbh, 7000 Stuttgart, De

1993
- 1993-03-01 ES ES93907085T patent/ES2104137T3/es not_active Expired - Lifetime
- 1993-03-01 AU AU37812/93A patent/AU3781293A/en not_active Abandoned
- 1993-03-01 WO PCT/US1993/001789 patent/WO1993020976A1/en not_active Ceased
- 1993-03-01 CA CA002131526A patent/CA2131526A1/en not_active Abandoned
- 1993-03-01 EP EP93907085A patent/EP0636057B1/en not_active Expired - Lifetime
- 1993-03-01 JP JP5518301A patent/JPH07505583A/ja active Pending
- 1993-03-01 DE DE69311105T patent/DE69311105T2/de not_active Expired - Fee Related
1994
- 1994-10-12 KR KR1019940703622A patent/KR950700809A/ko not_active Withdrawn

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2012109616A (ja) *	1995-08-21	2012-06-07	Rohm & Haas Electronic Materials Cmp Holdings Inc	研磨パッド
JPH1058333A (ja) *	1996-08-08	1998-03-03	Dainippon Printing Co Ltd	研磨シート
JP2001252878A (ja) *	2000-03-08	2001-09-18	Fuji Photo Film Co Ltd	研磨シート
JP2012066328A (ja) *	2010-09-22	2012-04-05	Disco Corp	ドレッシングボードおよびドレッシングボード収容ケース

Also Published As

Publication number	Publication date
EP0636057B1 (en)	1997-05-28
WO1993020976A1 (en)	1993-10-28
KR950700809A (ko)	1995-02-20
AU3781293A (en)	1993-11-18
EP0636057A1 (en)	1995-02-01
ES2104137T3 (es)	1997-10-01
DE69311105D1 (de)	1997-07-03
DE69311105T2 (de)	1997-10-30
CA2131526A1 (en)	1993-10-28

Publication	Publication Date	Title
EP0636057B1 (en)	1997-05-28	Abrasive article
US6503591B2 (en)	2003-01-07	Repositionable doubled-sided adhesive pad having a display
US4437269A (en)	1984-03-20	Abrasive and polishing sheets
US4747619A (en)	1988-05-31	Pressure-sensitive label
JP2000502462A (ja)	2000-02-29	デスクトッププリンタノート
JP2001508365A (ja)	2001-06-26	シート状研磨又はポリシング手段を磁化支持に取付けるための取付け手段及びかかる手段の使用
EP0638873A3 (en)	1998-02-04	Sheet-framed IC carrier, method for producing the same, and IC carrier case
JPS6091112U (ja)	1985-06-21	▲はく▼離可能な印刷されたアツプリケ物品
CN1711571A (zh)	2005-12-21	包括粘胶片和制件的可印刷外形结构的制造方法
US5002311A (en)	1991-03-26	Parcel waybill
EP1532001A2 (en)	2005-05-25	Repositionable pad of tabs
EP1225208A1 (en)	2002-07-24	Repositionable double-sided adhesive pad having a display
EP0725705B1 (en)	2000-04-05	Abrasive article having a colored substrate
JPH0569687A (ja)	1993-03-23	剥離可能な感圧接着剤組成物及びこの感圧接着剤組成物を塗布した情報担体用シート
JPH08100158A (ja)	1996-04-16	両面粘着テープとこのテープを用いたカード
US20030129349A1 (en)	2003-07-10	Label product with a repositionable backing substrate for adhesively and repositionably attaching to a document
JP2008502003A (ja)	2008-01-24	再配置可能な機構のこけら板状組立体
JP3021850U (ja)	1996-03-12	貼着メモおよび貼着メモ集
JP3089160U (ja)	2002-10-11	布製織物保護パット
GB2056332A (en)	1981-03-18	Improvements in abrasive and polishing sheets
KR200292442Y1 (ko)	2002-10-25	서류에 접착식으로 위치이동 가능하게 부착하기 위한위치이동 가능한 지지 기재를 갖는 라벨 제품
JP3245708B2 (ja)	2002-01-15	保持用具
JP2003105281A (ja)	2003-04-09	タックシート
EP1329866A1 (en)	2003-07-23	Index tab label insert sheets
JP2002348549A (ja)	2002-12-04	標識層を有し貼直し可能な両面接着パッド

JPH07505583A - 研磨具 - Google Patents

Info

Links

Classifications

Landscapes

Applications Claiming Priority (3)

Publications (1)

Family

ID=25350905

Family Applications (1)

Country Status (8)

Cited By (4)

Families Citing this family (25)

Family Cites Families (2)

Cited By (4)

Also Published As

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