JPH0759144B2 - Pulse motor - Google Patents

Description

TECHNICAL FIELD The present invention relates to a pulse motor suitable for use in FA (factory automation) equipment that requires relatively large thrust, such as industrial robots. Is.

"Prior Art" As is well known, a linear pulse motor is a stepping motion of a slider or a secondary scale (hereinafter simply referred to as "scale") based on a pulse signal supplied to the slider. The structure of the magnetic circuit is as shown in FIG. In this figure, 1 is a scale composed of a long plate-shaped magnetic body, and the upper surface of the scale is
The uneven tooth portions 1a, 1a, ... Are formed at equal intervals along the longitudinal direction (left-right direction in the drawing). A slider 2 is mounted on the upper surface of the scale 1 in a state in which the slider 2 is movably instructed in the longitudinal direction of the scale 1 by a support mechanism such as a roller (not shown). The slider 2 is a U-shaped A-phase iron core 4
And B-phase iron core 5, coils 6a and 6b wound around A-phase magnetic poles 4a and 4b of A-phase iron core 4, and B-phase magnetic poles 5a and 5b of B-phase iron core 5, respectively. Coils 7a and 7b, permanent magnets 8 and 9 attached to the upper surfaces of the iron cores 4 and 5 with the polarities shown, and the permanent magnet 8
And a pack plate 10 made of a plate-shaped magnetic material attached to the upper surfaces of the plates 9 and 9. Then, three pole teeth 14a having the same pitch as the pitch P of the tooth portion 1a of the scale 1 are formed on the lower surface of the magnetic pole 4a.
Similarly, polar teeth 14b, 15a, 15b are formed on the lower surfaces of b, 5a, 5b, respectively. Also, these pole teeth 15b, 14b, 15a are pole teeth 14a
Are sequentially shifted by P / 4, and the pole teeth 14
Predetermined gaps G are formed between the lower surfaces of a, 14b, 15a, 15b and the upper surface of the tooth portion 1a. And the coils 6a, 6
By sequentially supplying a predetermined pulse signal to b, 7a, 7b, the magnetic flux generated by the coils 6a, 6b, 7a, 7b and the permanent magnets 8, 9
And the magnetic flux generated by the magnetic poles 4a, 4b, 5a, 5b are sequentially adjusted, and the magnetically stable position of the slider 2 relative to the scale 1 is sequentially moved, whereby the slider 2 is moved along the longitudinal direction of the scale 1. Moving.

Here, a case where the slider 2 is driven by a two-phase excitation method in which current is always supplied to the two sets of coils 6a, 6b and 7a, 7b will be described as an example.

As shown in FIG. 17 (a), terminals 6c to 6 are attached to the coils 6a and 6b.
Apply a predetermined current to d and connect terminals to coils 7a and 7b.
By passing a predetermined current from 7d to 7c, the magnetic flux generated by the coil 6a and the magnetic flux generated by the permanent magnet 8 are added at the A-phase magnetic pole 4a and cancel each other at the phase magnetic pole 4b, while the coil 7a And the magnetic flux generated by the permanent magnet 9 add at the B-phase magnetic pole 5a and cancel each other at the phase magnetic pole 5b, so that the main magnetic flux shown by the solid line φ ₁ in the figure is generated. Phase magnetic pole
The position where the pole teeth 14a and 15a of the B-phase magnetic pole 5a and the tooth portion 1a of the scale 1 vertically face each other is a magnetically stable position.

As shown in FIG. 17 (b), the coils 6a, with flowing a predetermined current to the same direction as in 6b, the coil 7a, by flowing a predetermined current to reverse direction 7b, the solid line in FIG phi ₂ The main magnetic flux indicated by is generated, and as a result, the position where the pole teeth 14a and 15b and the tooth portion 1a face each other becomes a magnetically stable position.

As shown in Figure No. 17 (c), the coil 6a, with flow in the reverse direction to the predetermined current and to 6b, the coil 7a, by flowing a predetermined current in the same direction as in 7b, a solid line phi ₃ in FIG. The main magnetic flux shown is generated, which results in each pole tooth 14b and 15b and the tooth
The position where 1a is vertically opposed is a magnetically stable position.

As shown in Figure No. 17 (d), the coil 6a, with flow to the predetermined current in the same direction 6b, the coil 7a, by flowing backward to the predetermined current and to 7b, a solid line phi ₄ in FIG. The main magnetic flux shown is generated, which results in each pole tooth 14b and 15a
The position vertically opposed to 1a is a magnetically stable position.

By repeating the pulse excitation in the order of the above →→→ excitation modes, the slider 2 moves in the right direction in the drawing, that is, the direction from the magnetic poles 4a to 5b, and →→
→ By repeating the pulse excitation in the order of each excitation mode, the slider 2 is moved to the left in the drawing, that is, from the magnetic pole 5b.
Move in the direction of 4a. The same applies when the slider 2 is fixed and the scale 1 is moved.

[Problems to be Solved by the Invention] Generally, since a linear pulse motor is capable of high-precision positioning in an open loop, it is used for driving a carriage of a printer of OA (office automation) equipment, etc. Since thrust cannot be obtained, it was difficult to apply it to FA equipment that requires relatively large thrust, such as industrial robots. That is, in the linear pulse motor described above,
As shown in FIGS. (A) to (d), the magnetic flux generated by the oil 6a or 7a and the magnetic flux generated by the permanent magnets 8 and 9 are added to one of the A-phase magnetic pole 4a or the B-phase magnetic pole 5a, and the thrust force is increased. During the generation period, in the other phase magnetic pole 4b or phase magnetic pole 5b, the magnetic flux generated by the coil 6b or 7b and the magnetic flux generated by the permanent magnets 8 and 9 cancel each other, and the thrust is not generated. Has been done. vice versa,
The thrust is not generated in the A-phase magnetic pole 4a or the B-phase magnetic pole 5a while the thrust is generated in the phase magnetic pole 4b or the phase magnetic pole 5b. Therefore, the thrust generation area that actually contributes to the thrust generation is only 50% of the total area of the magnetic poles 4a, 4b, 5a, 5b facing the scale 1, and increasing the thrust generation area will improve the thrust. It was an important issue when trying to Further, in practical application of such a pulse motor with improved thrust, it is also an important issue to have a structure that has a structure as simple as possible, can be easily manufactured, and has sufficient rigidity strength. Was made.

The present invention has been made in view of the above-mentioned circumstances, and the total area of each magnetic pole facing the scale can be effectively used for thrust generation, so that a large thrust can be obtained and a simple configuration can be easily provided. It is an object of the present invention to provide a pulse motor that can be manufactured and has sufficient rigidity strength.

"Means for Solving the Problem" The present invention provides a secondary scale in which teeth are formed at equal intervals P along a specific direction, and a secondary scale movably supported in the specific direction. The primary side magnetic flux generator, each magnetic pole around which the coil of the primary side magnetic flux generator is wound, and the magnetic flux is sequentially applied to each gap formed between each tooth of the secondary side scale. In the pulse motor that relatively moves the primary-side magnetic flux generating section with respect to the secondary-side scale by generating the magnetic flux, each magnetic pole of the primary-side magnetic-flux generating section, on each end surface facing the secondary-side scale, Characteristically, pole teeth and groove portions are alternately formed along a specific direction at regular intervals P / 2, and permanent magnets are inserted and arranged in the respective groove portions such that polarities of adjacent ones are opposite to each other. I am trying.

[Operation] According to the above configuration, when an electric current is passed through the coil wound around each magnetic pole, the primary magnetic flux generating portion is arranged in the groove portion of the magnetic pole from the tooth portion on the S pole side through the permanent magnet. The magnetic flux flowing into the adjacent pole teeth on the N pole side and further flowing from the pole to the tooth portion of the secondary side scale is S of the other magnetic poles of the primary side magnetic flux generating section.
A main magnetic flux loop that flows back to the original magnetic pole after flowing into the pole tooth on the pole side and flowing into the adjacent pole tooth on the N pole side via the permanent magnet arranged in the groove portion of the magnetic pole is formed. The total area of each magnetic pole facing the secondary scale can be effectively used for thrust generation, and a large thrust can be obtained.

[Embodiment] An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing the configuration of a magnetic circuit of a linear pulse motor according to the first embodiment of the present invention.

In the figure, reference numeral 21 denotes a fixed scale, and tooth portions 21a, 21a, ... Are formed at intervals of a pitch P along the longitudinal direction at the center of the upper surface of the scale 21.

On the other hand, reference numeral 22 denotes a slider (primary side magnetic flux generating portion), which is supported by a supporting mechanism (not shown) such as a roller so as to be movable in the longitudinal direction of the scale 21 (direction of arrow M in the figure).
The slider 22 is composed of an A-phase block 23 and a B-phase block 33 which are connected to each other in the illustrated positional relationship.

The A-phase block 23 has a U-shaped iron core 24 having an A-phase magnetic pole 24A and a phase magnetic pole 24, which face the tooth portion 21a of the scale 21 with a constant gap G, and are wound around the magnetic poles 24A and 24, respectively. It is composed of rotated coils 25A and 25, and each magnetic pole 24
Polar teeth 24a and concave grooves 24b are alternately formed on the end faces of A and 24 facing the scale 21 at a constant interval P / 2 along the arrow M direction. Permanent magnets 26 are inserted and arranged so that the polarities of the companions are opposite to each other. Similarly, the B-phase block 33 is wound around the U-shaped iron core 34 having the B-phase magnetic pole 34B and the phase magnetic pole 34, which are opposed to the tooth portion 21a with a constant gap G, and the magnetic poles 34B and 34, respectively. It consists of the turned coils 35B and 35,
On each end face of each magnetic pole 34B, 34 facing the scale 21,
The pole teeth 34a and the concave grooves 34b are alternately formed along the direction of the arrow M at regular intervals P / 2, and the permanent magnets are formed in the respective concave grooves 34b so that the polarities of adjacent ones are opposite to each other. 26 are inserted and arranged.

The relative positional relationship between the magnetic poles of the A-phase block 23 and the B-phase block 33 is as follows. That is, A-phase magnetic pole 24A
With reference to, the phase magnetic pole 24 is located (2P + P / 2) apart, the B phase magnetic pole 34B is located (5P + P / 4) apart, and the phase magnetic pole 34 is located (7P + 3 · P / 4) apart. There is. As a result, the phase relationship of the magnetic poles 34A, 34B, 24, 34 with respect to each tooth portion 21a of the scale 21 is displaced by P / 4 in the moving direction (direction of arrow M) by, for example, as shown in the figure, A
In a state where the pole teeth 24a of the phase magnetic pole 24A and the tooth portion 21a of the scale 21 face each other, the pole teeth 34a of the B-phase magnetic pole 34B are the tooth portions 21a.
From the tooth portion 21a to P / 2, and each pole tooth 34a of the phase magnetic pole 34 is displaced from the tooth portion 21a by 3 · P / 4. Become.

In the above configuration, a set of A phase and phase coils 25A, 25,
Alternatively, the operation when the slider 22 is driven by the one-phase excitation method of supplying a current to one of the set of the B-phase and the phase coils 35B, 35 will be described with reference to FIG.

In the state shown in FIG. 2 (a), the A phase and the phase coil
When a predetermined current is applied to 25A and 25 in the direction from the X mark to the A mark shown in the figure, the iron core 24 moves from the phase magnetic pole 24 to the A phase magnetic pole.
A magnetomotive force is generated by the coils 25A, 25 toward 24A, which causes one of the magnetic poles 24 of the iron core 24, as shown by φ ₁ in the figure.
A main magnetic flux loop that flows from the S pole side pole tooth 24a of A into the adjacent N pole side pole tooth 24a through the permanent magnet 26 and returns to the original magnetic pole 24A is formed. As a result, each pole tooth 24a on the N pole side of the A phase magnetic pole 24A faces the tooth portion 21a of the scale 21, and the phase magnetic pole 24A
The position where each pole tooth 24a on the S pole side faces the tooth portion 21a of the scale 21 is a magnetically stable position.

As shown in Fig. 2 (b), the B phase and the phase coils 25B, 25
On the other hand, when a predetermined current is flown in the direction from the mark x to the mark shown in the figure, a main magnetic flux loop indicated by φ ₂ is generated in the figure, and as a result, each pole tooth on the N pole side of the B phase magnetic pole 34B The position where 34a faces the tooth portion 21a of the scale 21 and each pole tooth 34b on the S pole side of the phase magnetic pole 34 faces the tooth portion 21a of the scale 21 is a magnetically stable position.

As shown in FIG. 2 (c), the A phase and the phase coils 25A, 25
When a predetermined current is applied in the direction opposite to, a main magnetic flux loop indicated by φ ₃ in the figure is generated, and as a result, each pole tooth 24a on the S pole side of the A phase magnetic pole 24A faces the tooth portion 21a of the scale 21. And the phase pole
A position where each pole tooth 24a on the N pole side of 24 faces the tooth portion 21a of the scale 21 is a magnetically stable position.

As shown in FIG. 2 (d), the B phase and the phase coils 25B, 25
When a predetermined current is applied in the opposite direction to, a main magnetic flux loop indicated by φ ₄ in the figure is generated, and as a result, each pole tooth 34a on the S pole side of the B-phase real magnetic pole 34B becomes the tooth portion 21a of the scale 21. The position where the pole teeth 34a on the N pole side of the phase magnetic pole 34 that face each other and the tooth portion 21a of the scale 21 face each other is a magnetically stable position.

By repeating pulse excitation in the order of →→→ above, the slider 22 moves to the left in the drawing, and by repeating pulse excitation in the order of →→→ each excitation mode, the slider 22 moves to the right in the drawing. Move to.

Next, a linear pulse motor according to a second embodiment of the present invention will be described with reference to FIGS.

In FIG. 3 (a), 41 is a fixed scale, and tooth portions 41a, 41a, ... Are formed at intervals of the pitch P along the longitudinal direction in the central portion of the upper surface of the scale 41. , Tooth portions 41b, 41b, ... And tooth portions 41c, 41 at intervals of the pitch P along the longitudinal direction on both sides of the upper surface of the scale 41.
c, ... are formed respectively. In this case, the central tooth 41
The a and the tooth portions 41b and 41c on both sides are formed so as to be displaced by P / 2 from each other.

On the other hand, 42 is a slider, which is movably supported in the longitudinal direction of the scale 41 (direction of arrow M) by a supporting mechanism such as a roller. This slider 42 includes an A-phase block 43 and a B-phase block 43.
The A-phase block 43 and the B-phase block 53 are connected to each other and the positional relationship between them is defined.

As shown in FIG. 3B, the A-phase block 43 has the A-phase magnetic poles 44 facing the central teeth 41a, 41a, ... And the teeth 41 on both sides.
, and 41c, 41c, ..., and an E-shaped iron core 47 having phase magnetic poles 45 and 46 facing each other, and an A-phase coil 48 wound around the A-phase magnetic pole 44, Each magnetic pole 44, 45,
Pole teeth 44a to 44d, 45a to 45d, 46a to 46d are formed on the end surface of the 46 facing the scale 41 at intervals corresponding to the pitch P, and the concave grooves between the pole teeth are adjacent to each other. The permanent magnets 26 are inserted and arranged so that their polarities are opposite to each other (see FIG. 4).

As a result, as shown in FIG.
In a state in which the pole teeth 44a and 44c of the pole poles 44a and 44c of the pair of pole teeth 45a and 44c of the pole poles 45b and 46c of the phase magnetic poles 45 (46) on both sides are
The positional relationship is such that d (46d) faces the tooth portion 41b (41c).

The B-phase block 53 is wound around the B-phase magnetic pole 54 at the center, the E-shaped iron core 57 having the phase magnetic poles 55 and 56 on both sides, and the B-phase magnetic pole 54, similarly to the A-phase block 43. It is composed of the B-phase coil 58 and the scale of each magnetic pole 54, 55, 56.
The pole teeth 54a to 54d, 55a to 55d, 56a to 56d are formed on the end surface facing the 41 at intervals corresponding to the pitch P, and the polarities of the adjacent ones are different from each other in the groove between the pole teeth. The permanent magnets 26 are inserted and arranged so as to be in opposite directions (see FIG. 4).

As a result, the positional relationship between the respective pole teeth 54a to 54d of the B-phase magnetic pole 54 in the central portion and the tooth portion 41a, and the phase magnetic poles 55 (56) on both sides.
The positional relationship between the pole teeth 55a to 55d (56a to 56d) and the tooth portion 41b (41c) is as shown in FIG.

In the above configuration, the A phase coil 48 and the B phase coil 58
When no current is supplied to the scale 41, as shown by the dotted line in FIG. 4, a magnetic flux loop around the scale 41 is formed only by the magnetic flux generated by the permanent magnet 26, and the magnetic flux loop is stationary in this state.

In the above configuration, the A phase coil 48 and the B phase coil 58
When no current is supplied to the scale 41, as shown by the dotted line in FIG. 4, a magnetic flux loop around the scale 41 is formed only by the magnetic flux generated by the permanent magnet 26, and the magnetic flux loop is stationary in this state.

Here, the operation when the slider 42 is driven by the one-phase excitation method of supplying a current to one of the A-phase coil 48 and the B-phase coil 58 will be described with reference to FIG.

As shown in FIG. 5 (a), when a predetermined current is applied to the A-phase coil 48 of the A-phase block 43 in the direction from the x mark to the .circle-solid. Phase magnetic pole 45 (56)
A magnetomotive force is generated by the A-phase coil 48 toward, and the magnetic flux associated with this magnetomotive force and the magnetic flux generated by the permanent magnet 26 reinforce each other by the pole teeth 44b, 44d and 45a (46a), 45c (46c). , The magnetic poles 44a, 44c and 45b (46b), 45d (46d) cancel each other, so that as shown by the dotted line φ ₁ in the figure,
The magnetic flux flowing from the tooth portion 41a of the scale 41 into the respective pole teeth 44b, 44d of the A-phase magnetic pole 44 is guided to the permanent magnet 26 and the adjacent pole teeth 44a,
44c, each pole tooth 45a (46a), 45 of the phase pole 45 (46)
From c (46c), a main magnetic flux loop that flows into the tooth portion 41b (41c) of the scale 41 is formed. As a result, the pole teeth 44b, 44d and the tooth portion 41a face each other, and the pole teeth 45a (46a), 45c (46c) and the tooth portion
The position facing 41b (41c) is a magnetically stable position.

As shown in Fig. 5 (b), when a predetermined current is applied to the B-phase coil 58 of the B-phase block 53 in the direction from the mark x to the mark shown in the figure, the main magnetic flux shown by the dotted line φ ₂ in the figure. Occurs, and as a result, the pole teeth 54b and 54d of the B-phase magnetic pole 54 and the tooth portion 41a face each other,
The positions where the pole teeth 55a (56a) and the pole teeth 55c (56c) of the magnetic pole 55 (56) and the tooth portions 41b (41c) face each other are magnetically stable positions.

As shown in FIG. 5 (c), when a predetermined current is applied to the A-phase coil 48 in the opposite direction, a main magnetic flux indicated by the dotted line φ ₃ in the figure is generated. As a result, each pole of the A-phase magnetic pole 44 is generated. Tooth 44a, 44c and tooth 41a
Face each other, and the pole teeth 45b (46b), 45d (4
The position where 6d) and the tooth portion 41b (41c) face each other is a magnetically stable position.

As shown in FIG. 4 (d), when a predetermined current is passed through the B-phase coil 58 in the opposite direction, a main magnetic flux indicated by the dotted line φ ₄ in the figure is generated, and as a result, each pole of the B-phase magnetic pole 54 is generated. Teeth 54a, 54c and tooth 41a
Face each other, and the pole teeth 55b (56b), 55d (5
The position where 6d) and the tooth portion 41b (41c) face each other is a magnetically stable position.

By repeating the pulse excitation in the order of →→→ above, the slider 42 moves to the right of the screen, and by repeating the pulse excitation in the order of →→→ each of the excitation modes, the slider 42 moves to the left in the drawing. Move to.

Here, in the case where the slider 42 is driven by a two-phase excitation method in which current is always supplied to both the A-phase coil 48 and the B-phase coil 58, in the order shown in FIGS. 6 (a) to 6 (d), A predetermined current may be applied to the coils 48 and 58 in the direction from the mark x to the mark shown in the figure.

Next, a linear pulse motor according to a third embodiment of the present invention will be described with reference to FIG. In the third embodiment, the A-phase magnetic pole 24A, the phase magnetic pole 24 shown in FIG.
The B-phase magnetic pole 34B and the four magnetic poles 64A, 64, 64B, and 64 corresponding to the phase magnetic pole 34 are configured by the same iron core 64, and the coils 65A, 65, 65B, 65 are wound around the respective magnetic poles. There is. Then, the magnetic poles 64A on the A phase side, the permanent magnet 26 inserted and arranged in the concave groove of the end face of the 64, and the magnetic poles on the B phase side
The permanent magnets 26 inserted and arranged in the concave grooves of 64B and 64 are arranged so that their polarities are opposite to each other, whereby the tooth portions 21a of the scale 21 are arranged in one row.

Next, a three-phase linear pulse motor according to a fourth embodiment of the present invention will be described with reference to FIG. In this figure, the scale 21 is supported by a supporting mechanism such as a roller (not shown).
The slider 82 movably supported in the longitudinal direction (direction of arrow M shown in the figure) has an A-phase magnetic pole 83A, a B-phase magnetic pole 83B, and a C-phase magnetic pole 83B.
An iron core 83 having a phase magnetic pole 83C, and coils 84A to 84C wound around the magnetic poles 83A to 83C, respectively. Then, pole teeth and concave grooves are formed at a constant interval P / 2 on the end surface of each magnetic pole 83A, 83B, 83C facing the scale 21, and the permanent magnet 26 is adjacent to each concave groove. Are inserted and arranged so that they are in mutually opposite directions. In this case, the magnetic pole 83A located on one side, the magnetic pole 83B located on the center, and the magnetic pole 83C located on the other side are arranged in this order in the longitudinal direction (M
Direction) and are sequentially displaced by P / 3, and by this,
With the pole teeth of the A-phase magnetic pole 83A facing the teeth 21a of the scale 21, the poles of the B-phase magnetic pole 83B are displaced by P / 3 from the teeth 21a, and the poles of the C-phase magnetic pole 83C. Teeth are from teeth 21a to 2 · P
/ 3 The positional relationship is such that it is displaced.

In the above configuration, the A phase coil 84A, the B phase coil 84B, and the C phase coil are arranged in the excitation sequence as shown in FIG.
An operation in the case of so-called bipolar driving in which a pulse current whose polarity is inverted is supplied to 84C will be described.

First, FIG. 11 shows each magnetic pole 83A to 83C of the slider 82 and the scale.
FIG. 5 is a diagram showing a thrust vector generated between each tooth portion 21a of 21. In this figure, A indicates a thrust vector generated when a drive current is supplied to the A-phase coil 84A in the positive direction, and A indicates a thrust vector generated when a drive current is supplied to the A-phase coil 84A in the negative direction. , B and C
Indicates thrust vectors generated when a drive current is supplied to the B-phase coil 84B and the C-phase coil 84C in the positive direction,
And indicate the thrust vectors respectively generated when the drive current is supplied to the B-phase coil 84B and the C-phase coil 84C in the negative direction.

During the period shown in Fig. 10, the A-phase coil
Drive current is supplied to 84A in the positive direction, and phase B coils 84B and C
Drive current is supplied to the phase coil 84C in the negative direction,
As shown in FIG. 11, the vector A, the vector, and the combined vector are the thrust vector,
It acts between the scale 21 and the slider 82. Then →
When a drive current is supplied to the coils 84A to 84C in the order shown by → ... →, the magnetic poles 83A to 83C of the slider 82 and the scale 21 are fed.
The thrust vector generated between each tooth 21a of the slider 82 changes in the order shown by →→ ... → in FIG. 11, and the magnetic stable point of the slider 82 relative to the scale 21 changes. In this way, →→→… → in the order of each excitation mode, or →
The slider 82 is moved by repeating the pulse excitation in the order of →→→→.

A three-phase linear pulse motor according to the fifth embodiment of the present invention will be described with reference to FIG. In the fifth embodiment, the A-phase magnetic pole 83A and the B-phase magnetic pole 8 shown in FIG.
Three magnetic poles 93A and 9A corresponding to 3B and C-phase magnetic poles 83C, respectively
By arranging 3B and 93C in parallel in the width direction of the scale 91, the iron core 93 is configured, and the coils 95A, 95B, and 95 are arranged on the respective magnetic poles.
Each C is wound. Then, pole teeth and concave grooves are formed at a constant interval P / 2 on the end faces of the magnetic poles 93A, 93B, 93C facing the scale 91, and the permanent magnets 26 are adjacent to each concave groove. They are inserted and arranged in opposite directions. On the other hand, on the upper surface of the scale 91, three rows of tooth portions 91a, 91a, ..., 91b, 91 are arranged at intervals of the pitch P along the longitudinal direction.
b, ... And 91c, 91c ... Are formed respectively. In this case, the tooth portions 91a, 91b, 91c are arranged so as to be offset by P / 3 from each other, so that in the state where each pole tooth of the A-phase magnetic pole 93A faces the tooth portion 91a of the scale 91, the B-phase Each pole tooth of the magnetic pole 93B is displaced by P / 3 from the tooth portion 91a, and the C-phase magnetic pole 93C is displaced by 2.P / 3 from the tooth portion 91a. In such a configuration, the A-phase coil 94A and the B-phase coil 9 are used in the excitation sequence shown in FIG.
The slider 92 moves by supplying a pulse current to the 4B and C-phase coils 94C.

Next, a modified example of the three-phase linear pulse motor according to the above-described fourth and fifth embodiments is shown in FIGS. 12 and 13.
It will be described with reference to the drawings.

First, in FIG. 12, in the longitudinal direction of the scale 21 (arrow M
Supported by the slider 102, the iron core 103 includes an A-phase magnetic pole 103A, a phase magnetic pole 103, a B-phase magnetic pole 103B, a phase magnetic pole 103, a C-phase magnetic pole 103C, and a phase magnetic pole 103. , And coils 104A to 104 wound around these magnetic poles 103A to 103, respectively. And
On the end face of each magnetic pole 103A to 103 facing the scale 21, pole teeth and concave grooves are formed at a constant interval P / 2, and the permanent magnets 26 are adjacent to each concave groove. It is inserted and arranged in each. In this case, the iron core 103
The magnetic poles 103A to 103 are sequentially arranged in the longitudinal direction (M direction) of the scale 21 while being displaced by P / 6.

Further, in FIG. 13, the slider 112 is an A-phase magnetic pole 113A.
, Phase magnetic pole 113, B phase magnetic pole 113B, and phase magnetic pole 113
, An iron core 113 having a C-phase magnetic pole 113C and a phase-magnetic pole 113
And coils 114A to 114 wound around these magnetic poles 113A to 113, respectively. And each magnetic pole 1
On the end faces of 13A to 113 facing the scale 21, pole teeth and concave grooves are formed at a constant interval P / 2, and a permanent magnet 26 is formed in each concave groove.
Are adjacent to each other and are inserted and arranged so that the polarities of each other are opposite to each other. In this case, the set of magnetic poles 113A and 113, the set of magnetic poles 113B and 113, and the set of magnetic poles 113C and 113 are arranged so as to be sequentially displaced by P / 3 in the longitudinal direction (M direction) of the scale 21.

Also in such a configuration shown in FIG. 12 and FIG.
The sliders 102 and 112 move according to the same operation principle as that of the fourth embodiment.

Next, the structure in the case of being applied to the disk / rotor / double-sided drive type pulse motor according to the sixth embodiment of the present invention will be described with reference to FIGS. 14 (a) to 14 (d). In these drawings, reference numeral 150 denotes a housing, and 151 denotes a shaft rotatably supported by the housing 150 via bearings 152 and 153. A disc-shaped rotor 154 is fixed to the shaft 151 by a key 155, and
In the housing 150, annular stators 156 and 167 are mounted, which are opposed to both surfaces of the rotor 154 with a predetermined gap therebetween. The rotor 154 is supported by the annular member 159 composed of a non-magnetic material and the member 159,
Tooth portions 161a, 161a, ... and concave grooves 161b, 161 radially and at equal intervals.
and a disk-shaped magnetic member 161 in which b, ... Are formed. In addition, the stator 156 has the magnetic poles 24 shown in FIG.
Magnetic poles 165a-1 having the same positional relationship as A, 24, 34B, 34
An iron core 165 having 65d formed therein and coils 166a to 166d wound around these magnetic poles 165a to 165d, respectively, and tooth portions 161 are formed on the end faces of the magnetic poles 165a to 165d facing the rotor 154.
The pole teeth are formed radially and at equal intervals in correspondence with the formation interval a, and the permanent magnets 162 are formed in the concave grooves between the pole teeth so that the polarities of adjacent ones are opposite to each other. Each is inserted and arranged. Further, the stator 157 has the same structure. In the above structure, the rotor 154 is rotationally driven and the shaft 151 is rotated based on the same operation principle as that of the first embodiment (FIGS. 1 and 2) described above.

Next, the configuration of the seventh embodiment of the invention applied to the outer rotor type pulse motor will be described with reference to FIG. In this figure, 170 is a cylindrical outer rotor, which has tooth portions 171a, 171 at equal intervals on the inner peripheral surface.
The magnetic member 171 has a formed therein. The stator 174 includes an A-phase magnetic pole 175A, a B-phase magnetic pole 175B, a C-phase magnetic pole 175C, a phase magnetic pole 175, a phase magnetic pole 175, and a phase magnetic pole which have the same positional relationship as the magnetic poles 103A to 103 shown in FIG.
175 formed iron core 175 and these magnetic poles 175A ~ 175
Each of the magnetic poles 175A to 175 is formed with a coil 176A to 176, and pole teeth are formed at equal intervals on the end surface of each of the magnetic poles 175A to 175 facing the rotor 170. The permanent magnets 172 are inserted and arranged in the concave grooves between the pole teeth such that the polarities of the adjacent magnets are opposite to each other. Such a stator 174 is fixed to the shaft 178. In the above structure, the outer rotor 170 is rotationally driven according to the same operation principle as that of the third embodiment (FIG. 8) described above.

The present invention is not limited to the above-described embodiments, and various modifications described below are possible.

The primary slider may be provided with a sensor that detects the amount of relative movement with respect to the secondary scale, and may be driven as a servo motor.

A skew structure or a slight pitch shift (equivalent skew) within the same pole may be applied in order to remove cogging or improve thrust waveform distortion.

[Advantages of the Invention] As described above, according to the present invention, on each end face of each magnetic pole of the primary side magnetic flux generating section, which faces the secondary side scale,
The pole teeth and the groove are alternately formed along the specific direction at regular intervals, and the permanent magnets are inserted and arranged in the grooves so that the polarities of the adjacent ones are opposite to each other. When a current is passed through the rotated coil, it flows from the pole tooth on the S pole side of the magnetic pole of the primary side magnetic flux generating section to the pole tooth on the adjacent N pole side through the permanent magnet arranged in the groove portion of the magnetic pole, and The magnetic flux flowing from the pole teeth into the tooth portion of the secondary side scale flows into the pole tooth on the S pole side of the other magnetic poles of the primary side magnetic flux generating section, and through the permanent magnet arranged in the groove portion of the magnetic pole. After flowing into the adjacent pole teeth on the N pole side, a main magnetic flux loop returning to the original magnetic pole is formed, which makes it possible to effectively use the total area of each magnetic pole facing the secondary scale for thrust generation. It is possible to obtain twice as much thrust as before, and it is relatively Effect is obtained that it becomes possible to apply to FA equipment kina thrust is required.

[Brief description of drawings]

FIG. 1 is a front view showing the structure of a linear pulse motor according to the first embodiment of the present invention, and FIGS. 2A to 2D show the linear pulse motor according to the same embodiment driven by a one-phase excitation method. A front view for explaining the operation, FIG. 3 (a) is a partially cutaway perspective view showing the configuration of the linear pulse motor according to the second embodiment of the present invention, and FIG. 3 (b) is an A phase of the linear pulse motor. 4 is a perspective view showing the structure of the block, FIG.
The figure is a diagram for explaining a magnetic flux path when the linear pulse motor is at rest, and FIGS. 5A to 5D are diagrams for explaining the operation when the linear pulse motor is driven by a one-phase excitation method. FIGS. 6 (a) to 6 (d) are views for explaining the operation when the linear pulse motor is driven by a two-phase excitation method, and FIG. 7 (a) is the third embodiment of the present invention.
The front view showing the configuration of the linear pulse motor according to the embodiment,
8B is a bottom view showing the structure of the slider of the linear pulse motor, FIG. 8 is a front view showing the structure of a multi-phase linear pulse motor according to the fourth embodiment of the present invention, and FIG. 9A.
Is a front view showing the structure of the slider of the multi-phase linear pulse motor according to the fifth embodiment of the present invention, and FIG. 6B is a partially cutaway side view showing the structure of the slider of the same linear pulse motor.
FIG. 10C is a plan view showing the structure of the scale of the linear pulse motor, and FIG. 10 is a fourth embodiment and a fifth embodiment of the present invention.
FIG. 11 is a diagram for explaining an excitation sequence in the linear pulse motor according to the embodiment, FIG. 11 is a diagram for explaining a thrust vector in each excitation mode of the linear pulse motor, FIGS. 12 and 13 are diagrams of the present invention. 14 is a front view for explaining the configuration of a modified example of the fourth embodiment, and FIG. 14 (a) is a partial sectional view showing the configuration of a disk rotor type pulse motor according to the sixth embodiment of the present invention, FIG. Is a partial front view showing the configuration of the pulse motor on the stator side, FIG. 6C is a partial sectional view showing the configuration of the rotor of the pulse motor, and FIG. FIG. 15 is a partial front view of the outer casing according to the seventh embodiment of the present invention.
The front view showing the internal structure of the rotor type pulse motor, FIG. 16 is a view showing the magnetic circuit structure of a conventional linear pulse motor,
FIGS. 17 (a) to 17 (d) are views for explaining the operation when the linear pulse motor is driven by the two-phase excitation method. 21 …… Scale (secondary side scale), 21a …… Tooth portion, 22 …… Slider (primary side magnetic flux generating portion), 24a, 34a …… Pole tooth, 24b, 34b …… Concave groove (groove portion), 26… … Permanent magnet, 24,34 …… Iron core, 24A …… A phase magnetic pole, 25A …… A phase coil, 24 …… Phase magnetic pole, 25 …… Phase coil, 34B …… B phase magnetic pole, 35B …… B phase coil , 34 …… phase magnetic pole, 35 …… phase coil.

Claims (2)

[Claims] 1. A secondary-side scale having teeth formed at equal intervals P along a specific direction, and a primary-side magnetic flux generator movably supported on the secondary-side scale in the specific direction. The primary side magnetic flux generating section is formed by sequentially generating magnetic flux in each gap formed between each magnetic pole around which the coil of the primary side magnetic flux generating section is wound and each tooth section of the secondary side scale. In a pulse motor that moves the magnetic flux generator relative to the secondary scale, each magnetic pole of the primary magnetic flux generator has an end surface facing the secondary scale at a fixed interval P along the specific direction. /
2. A pulse motor characterized in that pole teeth and groove portions are alternately formed at 2, and permanent magnets are inserted and arranged in the groove portions such that polarities of adjacent ones are opposite to each other. 2. A pair of the primary side magnetic flux generating sections facing the respective tooth sections on both sides of the secondary side scale are provided while forming the tooth sections on both sides of the secondary side scale. 2. The pulse motor according to claim 1, wherein the side magnetic flux generators are connected to each other and are supported so as to be relatively movable in the specific direction with respect to the secondary scale.