JPH0762536A - Film forming equipment - Google Patents

Abstract

(57) [Summary] [Object] To provide a film forming apparatus which enables continuous work, for example, continuous vapor deposition, and has a high production yield. A first chamber, a dry plating means arranged in the first chamber, a supply side roll for supplying a support, a winding side roll for winding the support, the supply side roll, and A second chamber for loading a winding-side roll, wherein the support is fed from the supply-side roll in the second chamber into the first chamber, and the support is provided by the dry plating means in the first chamber. A film forming apparatus, in which a metal film is provided on the first chamber, and thereafter, the metal film is wound around a winding-side roll in the first chamber.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film forming apparatus such as a magnetic recording medium manufacturing apparatus.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. It is well known that a metal thin film type that is not used has been proposed.

That is, there has been proposed a magnetic recording medium having a magnetic layer formed by a wet plating means such as electroless plating, or a dry plating means such as vacuum deposition, sputtering or ion plating. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording. In particular, means for forming a magnetic film by vapor deposition means is said to be preferable because the film formation rate is faster than that by sputtering.

An apparatus for manufacturing a magnetic recording medium by such a vapor deposition means is generally constructed as shown in FIG. In FIG. 2, 21 is a cooling can, 22a is a polyethylene terephthalate (PET) film 23 supply side roll, 22b is a PET film 23 winding side roll, 24 is a crucible, 25 is a magnetic metal, and 26 is a vacuum container. is there. Then, after the vacuum container 26 is evacuated to a predetermined vacuum degree, the electron gun is operated to evaporate the magnetic metal 25 in the crucible 24, and the particles of the magnetic metal 25 are deposited (deposited) on the PET film 23. By doing so, a magnetic recording medium is manufactured.

By the way, in the long magnetic recording medium thus manufactured, a new roll must be loaded when the film wound around the supply-side roll 22a is finished. Since the vacuum container 26 has to be an open system during the work, the vapor deposition work must be interrupted, resulting in a decrease in work efficiency.

In addition, the vacuum container 2 is used when starting the work after the interruption.
Since it takes time to evacuate from 6 and the magnetic recording medium produced from the start of the vapor deposition work after the interruption to the transition to the stable system is a defective product, the production yield is low accordingly.

[0007]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a film forming apparatus which enables continuous work, for example, continuous vapor deposition, and has a high production yield. The object of the present invention is to provide a first chamber,
A dry plating means arranged in the first chamber, a supply side roll for supplying a support, a winding side roll for winding the support, and a second loading for the supply side roll and the winding side roll. And the support is sent from the supply-side roll in the second chamber to the first chamber, and a metal film is provided on the support by the dry plating means in the first chamber. The present invention is achieved by a film forming apparatus characterized in that the film forming apparatus is configured to be wound up from a first chamber to a winding-side roll in a second chamber.

In this film forming apparatus, a shutter is provided at a connecting portion between the first chamber and the second chamber so that the first chamber can be kept in a vacuum while the second chamber is opened to the atmosphere. Is preferably provided, and the shutter is preferably provided with an airtight material. That is, for example, by making the first chamber in which the magnetic film is formed and the second chamber in which the supply-side roll and the winding-side roll are loaded different from each other, the magnetic film of the magnetic film is replenished when the support is replenished. It is not necessary to open the large first chamber where the film is formed,
That is, the support can be replenished only by making the second chamber an open system, so that the evaporation work does not have to be interrupted and the evaporation is performed stably, so that a high-quality magnetic recording medium can be obtained with good yield. .

Further, even if the vapor deposition work is interrupted, it takes only a short time, and the vacuum exhaust at the time of replacement and replenishment of the supply side roll and the winding side roll is different from that in the first chamber. Since it is small, it can be done in a short time and the work efficiency is high.

[0010]

1 is a schematic diagram of a film forming apparatus according to the present invention, for example, a magnetic recording medium manufacturing apparatus. In the figure, 1 is the first
Vacuum tank, 2 is a cooling can arranged in the first vacuum tank 1, 3 is a crucible, and 4 is F filled in the crucible 3.
e, Co, Ni and other metals, Co-Ni alloys, Co-Pt
Alloy, Co-Ni-Pt alloy, Fe-Co alloy, Fe-
It is a Ni alloy, an Fe-Co-Ni alloy, an Fe-Co-B alloy, a Co-Ni-Fe-B alloy, a Co-Cr alloy, or a magnetic metal formed by adding Al or Ta to these.

Reference numeral 5 is an electron gun, 6 is a shield plate, and 7 is a cooling can.
It is a support attached to No. 2. This support 7 is an example
For example, polyester such as PET, polyamide, polyimi
, Polysulfone, polycarbonate, polypropylene
Olefin resin such as benzene, cellulose resin, chloride
Polymer materials such as vinyl resins, glass and ceramics
Inorganic materials such as Cu and metallic materials such as aluminum alloys
It is configured. The surface of the non-magnetic support 7 has a magnetic
Undercoat to improve the adhesion of the magnetic layer (magnetic thin film)
A coating layer is provided. That is, the surface roughness is moderate
By roughening to, for example, an oblique deposition method
Improves adhesion of magnetic thin film, and further improves magnetic recording medium surface
In order to improve the runnability by adjusting the surface roughness of the
For example SiO ₂The thickness including particles such as 0.005
Undercoat by providing a 0.1 μm coating film
The layers are made up.

Reference numeral 8a denotes a supply side roll, 8b denotes a winding side roll, and these supply side roll 8a and winding side roll 8b.
Are arranged in the second vacuum chamber 9. The second vacuum chamber 9 is provided adjacent to the first vacuum chamber 1 so as to be detachable, for example, a cassette type system.
Reference numeral 10 denotes a shutter provided at the connecting portion between the first vacuum chamber 1 and the second vacuum chamber 9, and when the second vacuum chamber 9 is removed, the shutter is closed and the shutter inside the first vacuum chamber 1 is closed. The degree of vacuum is maintained, the second vacuum chamber 9 is attached,
The shutter is opened at a stage after the inside of the second vacuum chamber 9 is evacuated, and the supply side roll 8a moves to the support 7
Are configured to be sent out. Note that the shutter 10 is provided with rubber for increasing airtightness. The support 7 sent out is the cooling can 2
And is taken up by the take-up side roll 8b in the second vacuum chamber 9 through a predetermined path.

Reference numeral 11 is a passage connected to the exhaust system of the first vacuum chamber 1, and 12 is a passage connected to the exhaust system of the second vacuum chamber 9. Each vacuum chamber is evacuated by a vacuum pump connected to these. To be done. In the apparatus configured as described above, the inside of the first vacuum chamber 1 and the second vacuum chamber 9 is 10 ⁻⁴ to
After evacuation to a vacuum degree of about 10 ^-6 Torr, the magnetic metal 4 in the crucible 3 is melted and evaporated by electron beam heating, and the support 7 such as a PET film attached to the cooling can 2 is attached to the support 7. A metal thin film type magnetic recording medium is manufactured by evaporating the magnetic metal 4 having a thickness of 0.04 to 1 μm. At the time of forming the magnetic thin film, it is preferable to supply oxygen to the vapor deposition portion and forcibly oxidize it to oxidize the surface layer portion of the magnetic thin film to form a protective layer of an oxide film. However, the thickness of the protective layer composed of this oxide film is about several tens of liters, and an oxide film of this thickness may be composed of natural oxidation. In some cases, no action is required.

By the way, when the support 7 wound around the supply-side roll 8a is running low or has run out, the following operation is performed. First, shutter 10
Closed, the second vacuum tank 9 installed so far is replaced with a second cassette-type vacuum tank 9 in which new supply-side roll 8a and winding-side roll 8b are loaded, and the support 7 Are connected with a splicing tape, the second vacuum chamber 9 is immediately evacuated, and the shutter 10 is opened when a predetermined degree of vacuum is reached. After that, the same process as the above film forming process is continued.

As described above, according to the present invention, the film forming operation can be continued without the first vacuum chamber 1 being an open system, that is, without interrupting the vapor deposition operation. Therefore, since the vapor deposition is carried out stably, a high quality magnetic recording medium can be obtained with a high yield. Then, the winding side roll 8b on which the support 7 having the magnetic thin film is wound is taken out, and carbon black having an average particle diameter of 20 nm and a binder resin made of a vinyl chloride resin and a urethane prepolymer are dispersed. The back coating composition is applied to the surface of the support 7 opposite to the magnetic layer by the direct gravure method to form a back coating layer having a dry thickness of 0.5 μm.

Fluorine perfluoropolyether (grade: FOMBLIN Z DIAC carboxyl group modified, manufactured by Nippon Montedison Co., Ltd.) is added to a fluorine inert liquid (Fluorinert, FC-84, manufactured by Sumitomo 3M Co., Ltd.) so that the concentration of the fluorine perfluoropolyether becomes 0.1%. The diluted / dispersed paint is applied to the magnetic surface by a die coating method so that the thickness after drying is about 20Å, and dried at 70 ° C.

After that, a magnetic tape or the like is obtained by slitting to a predetermined width.

[0018]

According to the present invention, a high-performance magnetic recording medium can be efficiently manufactured with a high yield, and an inexpensive magnetic recording medium can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of an embodiment of an apparatus for manufacturing a magnetic recording medium according to the present invention.

FIG. 2 is a schematic explanatory diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 First Vacuum Tank 2 Cooling Can 3 Crucible 4 Magnetic Metal 7 Support 8a Supply Side Roll 8b Winding Side Roll 9 Second Vacuum Tank 10 Shutter

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Shiga 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.

Claims (3)

[Claims] 1. A first chamber, a dry plating means arranged in the first chamber, a supply side roll for supplying a support, a winding side roll for winding the support, and the supply side. A second chamber for loading a roll and a winding-side roll, wherein the support is sent from the supply-side roll in the second chamber into the first chamber, and the dry plating means is used in the first chamber. A film forming apparatus, wherein a metal film is provided on a support, and thereafter, the metal film is wound from a first chamber to a winding-side roll in a second chamber. 2. A shutter is provided at a connecting portion between the first chamber and the second chamber so that the first chamber can be kept in a vacuum in a state where the second chamber is opened to the atmosphere. The film forming apparatus according to claim 1, wherein 3. The film forming apparatus according to claim 2, wherein the shutter is provided with an airtight material.