JPH0763782A - Acceleration sensor - Google Patents
Acceleration sensorInfo
- Publication number
- JPH0763782A JPH0763782A JP21044693A JP21044693A JPH0763782A JP H0763782 A JPH0763782 A JP H0763782A JP 21044693 A JP21044693 A JP 21044693A JP 21044693 A JP21044693 A JP 21044693A JP H0763782 A JPH0763782 A JP H0763782A
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- sensor
- pair
- elastic plate
- piezoelectric elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 39
- 239000002184 metal Substances 0.000 claims description 30
- 230000010287 polarization Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、加速度センサに関し、
より詳しくは、車両の運転席等に取り付けられるエアバ
ック用として好適な加速度センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration sensor,
More specifically, the present invention relates to an acceleration sensor suitable for an airbag that is attached to a driver's seat of a vehicle.
【0002】[0002]
【従来の技術】この種の加速度センサとしては、機械式
加速度センサ及び電気式加速度センサの双方が実用化さ
れている。2. Description of the Related Art As this type of acceleration sensor, both a mechanical acceleration sensor and an electric acceleration sensor have been put into practical use.
【0003】機械式加速度センサは、ローラマイト式や
バネマス式と称され、板バネや金属板の弾性を利用する
機械的スイッチとして構成されるものであり、板バネ等
の弾性が経時的に変化するため感度調整が困難であると
いう問題がある。The mechanical acceleration sensor is called a roller mite type or a spring mass type and is configured as a mechanical switch utilizing the elasticity of a leaf spring or a metal plate, and the elasticity of the leaf spring or the like changes with time. Therefore, there is a problem that sensitivity adjustment is difficult.
【0004】一方、電気式加速度センサとしては、図9
に示すように、金属板30の両面にピエゾ素子31,3
2を貼り合わせ、ピエゾ素子31,32にリード線3
3,34を接続してピエゾ素子31,32に作用する機
械的衝撃を電気信号に変換してリード線33,34によ
りその電気信号を取り出すようにしたものが知られてい
る(特開昭63−195573号)。尚、図9中、35
は固定部材である。On the other hand, FIG. 9 shows an electric acceleration sensor.
As shown in FIG.
2 is attached, and the lead wire 3 is attached to the piezo elements 31 and 32.
There is known one in which mechanical shocks acting on the piezo elements 31, 32 are connected to each other by converting them into electric signals, and the electric signals are taken out by the lead wires 33, 34 (Japanese Patent Laid-Open No. Sho 63-63). -195573). In addition, in FIG.
Is a fixing member.
【0005】しかしながら、この電気式加速度センサの
場合、ピエゾ素子31,32に作用する機械的衝撃のた
め、これらピエゾ素子31,32が金属板30から剥離
し破壊してしまうという問題がある。このため、金属板
30,ピエゾ素子31,32を図示しない容器内に収納
し、シリコンオイルを入れて機械的共振を防ぐ試みもな
されているが、この場合に構造が複雑化し、組み立てが
面倒になり及び製造コストも高騰するという問題があ
る。However, in the case of this electric acceleration sensor, there is a problem that the piezoelectric elements 31 and 32 are separated from the metal plate 30 and destroyed due to the mechanical shock acting on the piezoelectric elements 31 and 32. For this reason, it has been attempted to store the metal plate 30 and the piezo elements 31, 32 in a container (not shown) and add silicon oil to prevent mechanical resonance. However, in this case, the structure becomes complicated and the assembly is troublesome. However, there is a problem that the manufacturing cost also rises.
【0006】この他、電気式加速度センサとしては、半
導体(シリコンチップ)に組み込んだピエゾ抵抗素子の
ピエゾ抵抗効果を利用するものも知られているが、この
場合には、結線箇所が多く、温度変化によるドリフトも
生じ、信頼性に欠けるという問題がある。In addition, as an electric acceleration sensor, there is also known one which utilizes the piezoresistive effect of a piezoresistive element incorporated in a semiconductor (silicon chip), but in this case, there are many connection points and the temperature is high. There is a problem that the drift is caused by the change and the reliability is poor.
【0007】[0007]
【発明が解決しようとする課題】本発明は、上述した事
情に鑑みてなされたものであり、構造が簡略化し、組み
立ての容易化及び製造コストの低減を図れ、かつ、感度
調整も容易であり、信頼性も向上できる加速度センサを
提供することを目的とするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a simplified structure, facilitates assembly, reduces manufacturing cost, and facilitates sensitivity adjustment. The object of the present invention is to provide an acceleration sensor that can improve reliability.
【0008】[0008]
【課題を解決するための手段】本発明の加速度センサ
は、金属弾性板と、この金属弾性板の両面に分極軸方向
が対向する状態で接合した一対の圧電素子と、前記金属
弾性板及び一対の圧電素子に対して絶縁状態で貫通配置
した貫通ボルトとを有する。An acceleration sensor according to the present invention includes a metal elastic plate, a pair of piezoelectric elements bonded to both surfaces of the metal elastic plate in a state where polarization axis directions face each other, the metal elastic plate and the pair. Of the piezoelectric element of FIG.
【0009】前記貫通ボルトを利用して、前記金属弾性
板及び一対の圧電素子を取り付け対象物に取り付ける構
成とした。The metal elastic plate and the pair of piezoelectric elements are attached to an object to be attached using the through bolts.
【0010】[0010]
【作用】上述した構成の加速度センサによれば、金属弾
性板の両面に分極軸方向が対向する状態で一対の圧電素
子を接合し、金属弾性板及び一対の圧電素子に対して絶
縁状態で貫通ボルトを貫通配置するだけで構成できるの
で、構造が簡略化し、組み立ての容易化及び製造コスト
の低減を図れ、かつ、感度調整も容易となる。According to the acceleration sensor having the above-described structure, the pair of piezoelectric elements are bonded to both surfaces of the metal elastic plate with the polarization axis directions facing each other, and the metal elastic plate and the pair of piezoelectric elements are penetrated in an insulated state. Since the structure can be configured by simply disposing the bolts through, the structure is simplified, the assembling can be facilitated, the manufacturing cost can be reduced, and the sensitivity can be easily adjusted.
【0011】また、一対の圧電素子の分極軸方向の相違
を利用して加速度を検出でき、半導体等を用いていない
ため、結線箇所が少なく信頼性を向上できるとともに、
温度変化によるドリフトや、熱応力に起因する無負荷時
の温度ドリフトを低減できる。Further, the acceleration can be detected by utilizing the difference in the polarization axis direction of the pair of piezoelectric elements, and since no semiconductor or the like is used, the number of connection points is small and the reliability can be improved.
It is possible to reduce drift due to temperature change and temperature drift at no load due to thermal stress.
【0012】さらに、前記貫通ボルトを利用して、前記
金属弾性板及び一対の圧電素子を取り付け対象物に取り
付けるようにしたので、別途に取り付け用の部品を用意
する必要がなく取り付け対象物に対する取り付けが極め
て簡便となる。Furthermore, since the metal elastic plate and the pair of piezoelectric elements are attached to the object to be attached by using the through bolts, it is not necessary to prepare a separate component for attachment, and the attachment to the object to be attached is performed. Is extremely simple.
【0013】[0013]
【実施例】以下に本発明の実施例を詳細に説明する。EXAMPLES Examples of the present invention will be described in detail below.
【0014】図1,図2に示す加速度センサ1は、一端
側に円形孔を有し、他端側に質量体8を固着した金属弾
性板2と、この金属弾性板2の両面に予め分極処理した
分極軸方向が対向する状態で、かつ、各々に設けた円形
孔が前記金属弾性板2の円形孔と同心配置となり貫通孔
4を形成する状態で接合した一対の圧電素子3a,3b
と、前記金属弾性板2及び一対の圧電素子3a,3bが
形成する貫通孔4に対して絶縁スリーブ5により絶縁さ
れる状態で貫通配置した中空の貫通ボルト6と、各々リ
ード線取り付け用の突片7c,7dを備え、前記絶縁ス
リーブ5に嵌装して一対の圧電素子3a,3bに各々接
触させた金属端子板7a,7bと、この金属端子板7
a,7bの外側から各々貫通ボルト6に嵌装した一対の
絶縁板9a,9bと、この絶縁板9a,9bの外側から
各々貫通ボルト6に嵌装した一対のワッシャ10a,1
0bと、このワッシャ10a,10bの外側から各々貫
通ボルト6に螺合した一対のナット11a,11bとを
有している。The acceleration sensor 1 shown in FIGS. 1 and 2 has a metal elastic plate 2 having a circular hole at one end and a mass body 8 fixed at the other end, and both surfaces of the metal elastic plate 2 are polarized in advance. A pair of piezoelectric elements 3a, 3b joined in a state in which the processed polarization axes are opposed to each other and the circular holes provided in each are concentric with the circular holes of the metal elastic plate 2 to form the through holes 4.
A hollow through bolt 6 penetrating the through hole 4 formed by the metal elastic plate 2 and the pair of piezoelectric elements 3a, 3b in a state of being insulated by an insulating sleeve 5, and a lead wire mounting protrusion. Metal terminal plates 7a and 7b that are provided with pieces 7c and 7d and are fitted into the insulating sleeve 5 and are in contact with the pair of piezoelectric elements 3a and 3b, respectively, and the metal terminal plate 7
a pair of insulating plates 9a and 9b fitted to the through bolts 6 from the outside of a and 7b, and a pair of washers 10a and 1a fitted to the through bolts 6 from the outside of the insulating plates 9a and 9b, respectively.
0b and a pair of nuts 11a and 11b screwed into the through bolt 6 from the outside of the washers 10a and 10b, respectively.
【0015】ここで、加速度センサ1の原理的説明を図
3乃至図5を参照して行う。Here, the principle of the acceleration sensor 1 will be described with reference to FIGS.
【0016】図3に示すように、予め分極処理した板状
の圧電素子23を2個用意し、各圧電素子23を、図4
に示すように、端部に質量体24を固着した金属弾性板
22の両面に分極軸方向が対向する状態で接合する。As shown in FIG. 3, two plate-shaped piezoelectric elements 23, which are pre-polarized, are prepared, and each piezoelectric element 23 is formed as shown in FIG.
As shown in, the metal elastic plate 22 having the mass body 24 fixed to the ends is bonded to both surfaces in a state where the polarization axis directions face each other.
【0017】そして、図5に示すように各圧電素子23
に出力電極25,26を取り付け、この出力電極25,
26にリード線27,28を接続する。Then, as shown in FIG. 5, each piezoelectric element 23
The output electrodes 25, 26 are attached to the
Lead wires 27 and 28 are connected to 26.
【0018】前記質量体24に対して大きな衝撃(加速
度)が作用した場合、質量体24を介して金属弾性板2
2が図5に示すように湾曲し、これにより、一方の圧電
素子23には伸び力が作用し、他方の圧電素子23には
圧縮力が作用して、両圧電素子には逆極性の電荷が生
じ、前記リード線27,28の端部間に質量体24に対
して作用する衝撃に応じた電位差Vが生じる。When a large impact (acceleration) is applied to the mass body 24, the metal elastic plate 2 is passed through the mass body 24.
2 is curved as shown in FIG. 5, whereby an extension force acts on one piezoelectric element 23 and a compression force acts on the other piezoelectric element 23, and charges of opposite polarities are applied to both piezoelectric elements. Occurs, and a potential difference V is generated between the ends of the lead wires 27 and 28 according to the impact acting on the mass body 24.
【0019】本実施例の加速度センサ1はこのような原
理に基づくものである。The acceleration sensor 1 of this embodiment is based on such a principle.
【0020】上述した構成の加速度センサ1によれば、
金属弾性板2の両面に分極軸方向が対向する状態で一対
の圧電素子3a,3bを接合し、金属弾性板2及び一対
の圧電素子3a,3bに対して絶縁状態で貫通ボルト6
を貫通配置することにより構成できるので、構造が簡略
化し、組み立ての容易化及び製造コストの低減を図れ、
かつ、感度調整も容易となる。According to the acceleration sensor 1 having the above structure,
A pair of piezoelectric elements 3a and 3b are joined to both surfaces of the metal elastic plate 2 so that their polarization axis directions face each other, and the through bolt 6 is insulated from the metal elastic plate 2 and the pair of piezoelectric elements 3a and 3b.
Since it can be configured by arranging through, it is possible to simplify the structure, facilitate the assembly and reduce the manufacturing cost,
In addition, sensitivity adjustment becomes easy.
【0021】また、一対の圧電素子3a,3bの分極軸
方向の相違を利用して加速度を検出でき半導体等を用い
ていないため温度変化によるドリフトや、熱応力に起因
する無負荷時の温度ドリフトを低減できる。Further, since the acceleration can be detected by utilizing the difference in the polarization axis directions of the pair of piezoelectric elements 3a and 3b, since no semiconductor or the like is used, the drift due to the temperature change and the temperature drift at the time of no load due to the thermal stress are caused. Can be reduced.
【0022】さらに、この加速度センサ1によれば、圧
電素子3a,3bに生じる衝撃に応じた電位差Vを金属
端子板7a,7bから取り出せるので、半田付け等が不
要となり、結線箇所が少なく信頼性を向上できる。Further, according to the acceleration sensor 1, since the potential difference V depending on the impact generated on the piezoelectric elements 3a and 3b can be taken out from the metal terminal plates 7a and 7b, soldering is not required, and the number of connection points is small and the reliability is low. Can be improved.
【0023】次に、前記加速度センサ1の取り付け対象
物に対する取り付け例を図6乃至図8を参照して説明す
る。Next, an example of mounting the acceleration sensor 1 on a mounting object will be described with reference to FIGS. 6 to 8.
【0024】図6,図7に示すように、直方体状のケー
シング15に対して前記加速度センサ1の貫通ボルト6
の両端部が各々外方に露出するように組み込み、前記金
属端子板7a,7bに各々リード線16a,16bを接
続してこれらリード線16a,16bをケーシング15
の側方に導出する。As shown in FIGS. 6 and 7, the through bolt 6 of the acceleration sensor 1 is inserted into the casing 15 having a rectangular parallelepiped shape.
Are assembled so that both ends thereof are exposed to the outside, and lead wires 16a and 16b are connected to the metal terminal plates 7a and 7b, respectively, and these lead wires 16a and 16b are connected to the casing 15.
To the side of.
【0025】そして、図8に示すように、例えば、自動
車等の車体やハンドル部等の取り付け対象物18に設け
たねじ部にケーシング15から露出する貫通ボルト6の
一方の端部をねじ込み、ケーシング15から露出する貫
通ボルト6の他方の端部にナット19を螺合してねじ込
むことで、このケーシング15を用意に取り付け対象物
18に取り付けることができる。Then, as shown in FIG. 8, for example, one end portion of the through bolt 6 exposed from the casing 15 is screwed into a screw portion provided on a mounting object 18 such as a vehicle body of an automobile or a handle portion, and the casing is screwed. The casing 15 can be easily attached to the attachment target 18 by screwing the nut 19 into the other end of the penetrating bolt 6 exposed from the screw 15.
【0026】これにより、別途に取り付け用のボルト,
ナット等の部品を用意する必要がなく、取り付け対象物
18に対する取り付けが極めて簡便となる。As a result, a separate mounting bolt,
Since it is not necessary to prepare parts such as nuts, the attachment to the attachment object 18 becomes extremely simple.
【0027】本発明は、上述した実施例に限定されるも
のではなく、その要旨の範囲内で種々の変形が可能であ
る。The present invention is not limited to the above-described embodiments, but various modifications can be made within the scope of the gist thereof.
【0028】[0028]
【発明の効果】以上詳述した本発明によれば、金属弾性
板の両面に一対の圧電素子を接合し、金属弾性板及び一
対の圧電素子に対して絶縁状態で貫通ボルトを貫通配置
するだけで構成できるので、構造が簡略化し、組み立て
の容易化及び製造コストの低減を図れ、かつ、感度調整
が容易で、信頼性が高く温度変化の影響を受けない加速
度センサを提供することができる。According to the present invention described above in detail, a pair of piezoelectric elements are bonded to both surfaces of a metal elastic plate, and a through bolt is arranged to penetrate the metal elastic plate and the pair of piezoelectric elements in an insulated state. It is possible to provide an acceleration sensor having a simplified structure, facilitating assembly, and reducing manufacturing cost, facilitating sensitivity adjustment, having high reliability, and being unaffected by temperature changes.
【0029】また、貫通ボルトを利用して、金属弾性板
及び一対の圧電素子を取り付け対象物に取り付けること
ができるため、別途に取り付け用の部品を用意する必要
がなく取り付け対象物に対する取り付けが極めて簡便な
加速度センサを提供することができる。Further, since the metal elastic plate and the pair of piezoelectric elements can be attached to the object to be attached by using the through bolts, it is not necessary to prepare a separate component for attachment, and the attachment to the object to be attached is extremely easy. It is possible to provide a simple acceleration sensor.
【図1】本発明の加速度センサの実施例を示す斜視図FIG. 1 is a perspective view showing an embodiment of an acceleration sensor of the present invention.
【図2】本実施例の加速度センサの分解斜視図FIG. 2 is an exploded perspective view of the acceleration sensor according to the present embodiment.
【図3】本実施例の加速度センサの原理説明図FIG. 3 is an explanatory view of the principle of the acceleration sensor of this embodiment.
【図4】本実施例の加速度センサにおける圧電素子の分
極状態を示す図FIG. 4 is a diagram showing a polarization state of a piezoelectric element in the acceleration sensor of this embodiment.
【図5】本実施例の加速度センサにおける圧電素子の分
極状態を示す図FIG. 5 is a diagram showing a polarization state of a piezoelectric element in the acceleration sensor of this embodiment.
【図6】本実施例の加速度センサをケーシングに組み込
んだ状態を示す平面図FIG. 6 is a plan view showing a state in which the acceleration sensor of this embodiment is incorporated in a casing.
【図7】本実施例の加速度センサをケーシングに組み込
んだ状態を示す正面図FIG. 7 is a front view showing a state in which the acceleration sensor of this embodiment is incorporated in a casing.
【図8】本実施例の加速度センサを組み込んだケーシン
グの取り付け対象物に対する取り付け例を示す説明図FIG. 8 is an explanatory diagram showing a mounting example of a casing incorporating the acceleration sensor of the present embodiment to a mounting target.
【図9】従来の加速度センサの一例を示す斜視図FIG. 9 is a perspective view showing an example of a conventional acceleration sensor.
1 加速度センサ 2 金属弾性板 3a,3b 圧電素子 6 貫通ボルト 8 質量体 15 ケーシング 1 Acceleration sensor 2 Metal elastic plates 3a, 3b Piezoelectric element 6 Penetration bolt 8 Mass body 15 Casing
Claims (2)
分極軸方向が対向する状態で接合した一対の圧電素子
と、前記金属弾性板及び一対の圧電素子に対して絶縁状
態で貫通配置した貫通ボルトとを有することを特徴とす
る加速度センサ。1. A metal elastic plate, a pair of piezoelectric elements joined to both surfaces of the metal elastic plate in a state where polarization axis directions face each other, and a through-hole disposed in an insulating state with respect to the metal elastic plate and the pair of piezoelectric elements. An acceleration sensor having a through bolt.
性板及び一対の圧電素子を取り付け対象物に取り付ける
ものである請求項1記載の加速度センサ。2. The acceleration sensor according to claim 1, wherein the metal elastic plate and the pair of piezoelectric elements are attached to an attachment target by using the through bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21044693A JPH0763782A (en) | 1993-08-25 | 1993-08-25 | Acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21044693A JPH0763782A (en) | 1993-08-25 | 1993-08-25 | Acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0763782A true JPH0763782A (en) | 1995-03-10 |
Family
ID=16589469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21044693A Withdrawn JPH0763782A (en) | 1993-08-25 | 1993-08-25 | Acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0763782A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014163870A (en) * | 2013-02-27 | 2014-09-08 | Seiko Epson Corp | Force detection device, robot, electronic component transport device, electronic component inspection device, component processing device and moving body |
| JP2015075020A (en) * | 2013-10-08 | 2015-04-20 | 学校法人明治大学 | Cylinder outer sensor for monitoring combustion, and method of adjusting output of cylinder outer sensor for monitoring combustion |
| US9873201B2 (en) | 2013-02-19 | 2018-01-23 | Seiko Epson Corporation | Force detection device, robot, and moving object |
-
1993
- 1993-08-25 JP JP21044693A patent/JPH0763782A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9873201B2 (en) | 2013-02-19 | 2018-01-23 | Seiko Epson Corporation | Force detection device, robot, and moving object |
| JP2014163870A (en) * | 2013-02-27 | 2014-09-08 | Seiko Epson Corp | Force detection device, robot, electronic component transport device, electronic component inspection device, component processing device and moving body |
| JP2015075020A (en) * | 2013-10-08 | 2015-04-20 | 学校法人明治大学 | Cylinder outer sensor for monitoring combustion, and method of adjusting output of cylinder outer sensor for monitoring combustion |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20001031 |