JPH0765098A - Optical scanner - Google Patents

Abstract

PURPOSE:To provide the compact opticall scanner hard to be affected by the influence of the disturbance and with the large scanning angle by securing the straight line of a scanning pattern. CONSTITUTION:An optical scanner 1 is provided with a base 2 extending a mirror connection part from the conductive and elastic member such as beryllium copper and phosphor bronze in almost a mouth shape, two piezo-electric bimolfs 3 taking one end as a fixed end in a cantilever method on the base 2, connection member 4 connecting the free ends of the two piezo-electric bimolfs 3, torsional deformation member 5 extended upward from the center of the connection member 4, and mirror part 6 provided at the tip of the torsional deformation member 5 are provided. The optical scanner 1 is constructed as the vibration system of the degree of freedom of the bending and torsion. By generating the positive-phase vigration corresponding to the bending resonance frequency in the piezo-electric bimolf 3, the mirror part 6 is bent largely and oscillated. By generating the negative-phase vibration corresponding to the torsion resonance frequency, the mirror part 6 is largely twisted and oscillated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical scanner applied to optical reading devices such as bar code readers and laser radars.

[0002]

2. Description of the Related Art In recent years,
Bar codes are widely used in various fields such as POS fields such as supermarkets and logistics fields. Also, various barcodes are used, from small ones to large ones. In many of these barcode reading devices, a barcode is irradiated with a light beam scanned by a polygon mirror or a galvanometer mirror, and the scattered light is converted into an electric signal by a light receiving element to read the barcode. Has been done.

In recent years, it has been required to reduce the price and size of the device for such a device. However, both the polygon mirror and the galvanometer mirror require a drive mechanism such as a motor, and there is a limit to simplification and size reduction aiming at cost reduction of the device. On the other hand, as an optical scanning mechanism aiming at simplification and miniaturization, there has been proposed an optical scanning mechanism in which a vibrator is resonated by a single laminated piezoelectric element (for example, Japanese Patent Laid-Open No. Hei 4).
-95916). However, since this mechanism uses the inertial force obtained by applying acceleration to the unbalanced structure to obtain the excitation force, the scanning locus changes when the acceleration is applied as a disturbance. Therefore, it was considered difficult to use with a handheld barcode reader.

As another mechanism, a mechanism utilizing the vibration of a tuning fork has been proposed (see, for example, Japanese Patent Laid-Open No. 63-
No. 113517), it is considered that the amplitude of the tuning fork is very small, and it is considered that the beam scanning angle cannot be sufficiently obtained by this mechanism. As a mechanism other than these, a mechanism for exciting a quartz torsion oscillator by electromagnetic force has been proposed, but there is a limit to miniaturization because a magnet for obtaining a magnetic field is required outside the oscillator. It was

On the other hand, recently, an apparatus capable of two-dimensional optical scanning has been proposed for reading a two-dimensional bar code or the like. For example, a mechanism for resonating a vibrator having two vibration modes with a single laminated piezoelectric actuator (Japanese Patent Laid-Open No. Hei 4-
140706) or a mechanism that resonates three bimorphs and uses the phase difference between them (Japanese Patent Publication No. 4-50).
No. 5969) has been proposed. However, the former has a drawback that the linearity of the scanning pattern is poor when the one-dimensional optical scanning is performed in each mode because the two vibration modes are obtained by utilizing the imbalance. Also, the latter is structurally weak because one mirror is connected to three bimorphs using rubber bearings, and the resonance of the bimorph itself is used. However, there is a problem in that a large scanning angle cannot be obtained because of brittle fracture.

Therefore, it is an object of the present invention to provide an optical scanner which is capable of ensuring the linearity of a scanning pattern and capable of performing optical scanning at a large scanning angle and which is suitable for downsizing. .

[0007]

According to the optical scanner of the present invention, as described in claim 1, the light emitted from the light source is reflected by the mirror portion to irradiate the object to be detected, and the mirror portion. In an optical scanner that scans light in a predetermined direction of a detected object by vibrating the object, a driving source for performing two bending motions provided side by side in a cantilever shape with each end being a fixed end, and the two driving sources. A connecting member that connects the free end sides of the source to each other, a torsional deforming member extending from the central portion of the connecting member, and a mirror portion provided on the torsional deforming member, and the center of gravity of the mirror portion is twisted. It is characterized in that it is positioned on the torsion center axis of the deformable member.

According to this optical scanner, two bending drive sources are provided side by side, and the mirror portion is provided on the torsionally deformable member extending from the central portion of the connecting member for connecting the drive sources, and the mirror portion is provided. Since the center of gravity of is located on the torsion center axis of the torsionally deformable member, the entire vibration system is structurally balanced and is less likely to be affected by disturbance. Further, since there are two bending driving sources, it is possible to cause the torsional deformation of the torsionally deformable member by vibrating them in opposite phases, and the mirror even though the entire vibration system is structurally balanced. It is also possible to generate large vibrations in the section.

Further, as described in claim 2, in the optical scanner according to claim 1, the extended distal end side of the torsionally deformable member is a free end, and the torsionally deformable member also functions as a bending deformable member. According to this structure, the mirror drive unit can be vibrated in the bending direction of the entire system by vibrating the bending drive source in the same phase.

Further, as described in claim 3, in the optical scanner according to claim 1, if the extended tip side of the torsionally deformable member is a fixed end, the linearity of torsional vibration of the mirror portion is further improved. It will be good. By further configuring these vibrators as described below, an optical scanner with a large scanning angle can be obtained.

In order to increase the scanning angle of bending vibration, as described in claim 4, in the optical scanner according to claim 2, bending vibration centering on the mirror portion is used as the excitation means for vibrating the drive source. It is preferable to excite the two drive sources in the same phase at a frequency corresponding to the resonance frequency for bending vibration of the system. If the drive sources are excited only in the same phase, bending vibration occurs in the entire vibration system. Then, as a result of the bending vibration system centering on the mirror portion resonating with the bending vibration, the mirror portion is vibrated greatly in the bending direction. As a result, the scanning angle of the mirror section can be increased.

Further, in order to increase the scanning angle of the torsional vibration, as described in claim 5, claim 2 or claim 3
In the optical scanner described above, as the excitation means for vibrating the drive source, the vibration frequency corresponding to the resonance frequency for the torsional vibration of the torsional vibration system centering on the mirror portion is 2
It is preferable to excite each drive source in the opposite phase. When the bending drive source is excited only in the opposite phase, the entire vibration system causes torsional vibration. Then, as a result of the torsional vibration system centering on the mirror portion resonating with the torsional vibration, the mirror portion is greatly vibrated in the torsional direction. As a result, the scanning angle of the mirror section can be increased.

Further, as described in claim 6, in the optical scanner according to claim 2, as an excitation means for vibrating the drive source, a resonance frequency for bending vibration of a bending vibration system centering on a mirror portion is supported. And a mode in which the two drive sources are excited in the same phase at a frequency that makes the two drive sources have opposite phases at a frequency corresponding to the resonance frequency for the torsional vibration of the torsional vibration system centered on the mirror section. If the excitation mode and the vibration mode are caused to overlap each other, the bending vibration and the torsional vibration are overlapped with each other to enable two-dimensional optical scanning.

As described in claim 7, in the optical scanner according to any one of claims 1 to 6, a plate member made of an elastic material, a wide fixed end portion, and the fixed end portion are provided. A drive source forming portion that extends in parallel, a connecting portion that connects the drive source forming portions, a twist deforming portion that extends from a central portion of the connecting portion, and a twist deforming portion that is provided at a predetermined position. And a mirror bonding portion, and a drive element is bonded to the driving source forming portion of the base to form the drive source, and a mirror is bonded to the mirror bonding portion to form the mirror portion. By configuring the connecting member by the connecting portion, and by forming the torsional deforming member by the torsional deforming portion, if the entire vibration system has an integral structure, there is structural strength, and Since the structure is simple, reduce the overall size. It can become.

[0015]

Next, preferred embodiments of the present invention will be described. The optical scanner 1 as the first embodiment, as shown in FIG.
Two piezoelectric bimorphs 3 and 3 that are provided on the base 2 in a cantilever manner with each one end being a fixed end, and a connecting member 4 that connects the free end sides of these two piezoelectric bimorphs 3 and 3. The torsionally deformable member 5 extending upward from the central portion of the member 4 and the mirror portion 6 provided at the tip of the torsionally deformable member 5.
It has and.

The optical scanner 1 is manufactured as follows. First, one elastic material (such as beryllium copper, phosphor bronze, etc.) is machined or etched,
A substrate 2 having a shape as shown in FIG. 2 is created. Then, on the mirror bonding portion 2a formed as a part of the base body 2,
The mirror portion 6 is constructed by adhering a mirror provided with a highly reflective coating (Al vapor deposition, Au vapor deposition, etc.). Also, 2
Piezoelectric bimorphs 3 are formed by bonding piezoelectric elements to both surfaces of each of the two middle band plate portions 2b and 2b in consideration of the polarization direction. On the other hand, the connecting member 4 and the torsionally deforming member 5 are composed of
2d is configured by also serving as these. The lower end of the base body 2 is a wide portion 2e, which functions as a fixed end when the piezoelectric bimorphs 3 are viewed as a cantilever. Hereinafter, the wide portion 2e is also referred to as the fixed end 2e.

In this way, the optical scanner 1 of the first embodiment is
Since the whole body is formed by adhering a mirror and a piezoelectric element to the base body 2 formed of an elastic material, it can be said that it is an integral structure. Therefore, since it is structurally strong and has a simple structure, it is possible to reduce the overall size to the limit of the processing method for producing this structure. In addition, in this embodiment, the fixed end 2e can also function as a common electrode of the piezoelectric bimorphs 3 by making the base body 2 of a conductive material, and wiring is performed as shown in FIG. You can

The mirror section 6 can also be manufactured by mirror-finishing the mirror bonding section 2a and applying a high-reflection coating. The substrate 2 may be any elastic material, and any material such as Si, crystal, and resin can be used. Next, the operation of the optical scanner 1 of the first embodiment will be described.

The optical scanner 1 of the first embodiment constitutes a vibrating body of a spring-mass system. And the torsionally deformable member 5
Since one end is a free end, it can be deformed not only in the torsional deformation direction but also in the bending direction. Therefore, in the optical scanner 1 of the first embodiment, the mirror portion 6 can vibrate in two degrees of freedom such as bending and twisting as shown in FIGS. 4 (a) and 4 (b). In particular, when the optical scanner 1 is supported by the fixed end 2e and the piezoelectric bimorphs 3 and 3 are bent and vibrated, an inertial force acts on the mirror portion 6 and vibrates at a large angle.

At this time, as shown in FIG.
As shown in (a), when a sine wave signal having the same phase and a frequency corresponding to the resonance frequency in the bending direction of the mirror portion 6 is applied, the two piezoelectric bimorphs 3 and 3 vibrate in the same phase, As a result, the mirror portion 6 is vibrated in the bending direction,
As shown in FIG. 4 (a), resonance occurs in the bending direction. In addition, as shown in FIG. 5B, the piezoelectric bimorphs 3 and 3 have opposite phases,
When a sinusoidal signal having a frequency corresponding to the resonance frequency of the mirror section 6 in the torsion direction is applied, the two piezoelectric bimorphs 3 and 3 vibrate in opposite phases, and as a result, the mirror section 6 is excited in the torsion direction. , And resonates in the torsional direction as shown in FIG. By adding the sine wave signals shown in FIGS. 5A and 5B, a signal as shown in FIG. 5C is obtained. When this signal is applied to each of the piezoelectric bimorphs 3, 3, the mirror section 6 makes a motion in which the resonance in the bending direction and the resonance in the twisting direction are combined. The amplitudes in the bending direction and the twisting direction can be controlled by the voltage of each drive signal.

The optical scanner 1 of the first embodiment can perform one-dimensional and two-dimensional optical scanning by irradiating the mirror portion 6 with laser light and causing the above-mentioned vibration. The same operation can be obtained by applying a drive signal corresponding to the resonance frequency in the bending direction to one of the piezoelectric bimorphs 3 and 3, and applying a drive signal corresponding to the resonance frequency in the torsion direction to the other.

Next, FIG. 6 shows an application example in which the optical scanner 1 of the embodiment is applied to the bar code reader 10. The bar code reader 10 reflects the laser light generated from the laser diode 12 driven by the laser driving circuit 11 on the mirror portion 6 of the optical scanner 1 to scan the laser light and scans the bar code 13.
Irradiate on. After the scattered light is condensed by the condenser lens 14, it is converted into an electric signal by the light receiving element 15. Then, the obtained electric signal is input to the binarization circuit 16 to be converted into a binary signal, and the decoding circuit 17 performs signal processing to read the barcode.

The optical scanner 1 is driven by drive circuits 21 and 22, a phase inversion circuit 23, and amplifier circuits 24 and 25. The drive circuit 21 generates a sine wave signal having a frequency equal to the resonance frequency of the torsional vibration of the torsional vibration system centering on the mirror section 6 of the optical scanner 1. The signal is divided into two, and one of them is input to the phase inverting circuit 23 and its phase is inverted. Then, after being amplified by the amplifier circuits 24 and 25, they are applied to the piezoelectric bimorphs 3 and 3. Then 2
The individual piezoelectric bimorphs 3 and 3 vibrate in opposite phases. This vibration acts as an exciting force in the direction of torsionally vibrating the mirror section 6 of the optical scanner 1, and as a result, the mirror section 6 resonates in torsion.

The drive circuit 22 generates a sine wave signal having a frequency equal to the resonance frequency of the bending vibration of the bending vibration system centering on the mirror section 6 of the optical scanner 1. This signal is divided into two, amplified by the amplifier circuits 24 and 25, respectively, and then applied to the piezoelectric bimorphs 3 and 3. As a result, the two piezoelectric bimorphs 3 and 3 vibrate in the same phase. This vibration acts as an exciting force in a direction of bending and vibrating the mirror section 6 of the optical scanner 1, and as a result, the mirror section 6 resonates by bending.

Therefore, the mirror section 6 causes torsional resonance when the drive circuit 21 is operated, and bending resonance when the drive circuit 22 is operated. The optical scanning at this time is one-dimensional scanning. By operating the drive circuits 21 and 22 at the same time, the mirror portion 6 makes a motion in which torsional resonance and bending resonance are combined, and the optical scanning at this time is 2
It becomes a dimensional scan.

Resonant frequencies of torsional vibration and bending vibration are ωt and ωb, respectively. The ratio of ωt and ωb is 1: 2
When the optical scanner 1 is designed as described above, the optical scanning locus by the optical scanner 1 is as shown in FIG. ωt
, Ωb is increased, the number of torsional vibrations during one cycle of bending vibration is increased. Therefore, the scanning locus becomes raster scanning, and two-dimensional image information within the scanning range can be obtained. This can be used for reading pictures and characters, reading two-dimensional barcodes, and the like.

When the optical scanner 1 is designed so that the ratio of ωt and ωb is 1: 2 or less, the optical scanner 1 draws a scanning locus as shown in FIG. At this time, by bringing the frequency ratio close to 1, multi-scanning in which a trajectory slightly shifted for each cycle is drawn, and the barcode can be read in all directions.

Next, the second embodiment will be described. Second
The embodiment is an optical scanner 31 for one-dimensional optical scanning. As shown in FIG. 9, the optical scanner 31 includes two piezoelectric bimorphs 33 and 33, which are attached to the fixed end 32 in a cantilever manner with each one end being a fixed end, and the two piezoelectric bimorphs 33 and 33. A connecting member 34 for connecting the free end sides of
The torsionally deformable member 35 extends downward from the central portion of the connecting member 34 and is fixed to the fixed end 32, and the mirror portion 36 provided in the middle of the torsionally deformable member 35.

The optical scanner 31 is also the same as in the first embodiment.
Substrate 37 cut out from a piece of elastic material as shown in FIG.
It is manufactured by bonding a mirror and a piezoelectric element on the basis of. The mirror portion 36 is configured by mirror bonding to both surfaces of the mirror bonding portion 37a, and the piezoelectric bimorphs 33, 33 are also configured by bonding piezoelectric elements to both surfaces of the strip plate portions 37b and 37b in consideration of the polarization direction. Here, the polarization directions of the piezoelectric elements are configured such that when the same signal is applied to the respective bimorphs, they bend and vibrate in opposite phases. The fixed end 32 is configured by hardening the wide portion 37e with resin or the like. The reason why the mirrors are bonded to both sides is to balance the weight of the front and back.

This optical scanner 31 also has a continuous substrate 37.
Since a mirror, a piezoelectric element and the like are adhered on the whole to form the whole structure, the structure is strong, and since it has a simple structure, it can be easily processed and assembled, and a small optical scanner can be provided. Further, since the torsion center axis of the torsionally deformable member 35 and the center of gravity of the mirror are aligned with each other, there is no eccentricity with respect to the center axis, and the torsional motion is not excited even when acceleration is applied as a disturbance. In addition, the piezoelectric bimorphs 33, 33
Has a very large spring constant, and movement in the bending direction is not easily excited. That is, the optical scanner 31 of the second embodiment
Has a structure that is less susceptible to disturbance.

Further, the mirror portion 36 and the torsionally deformable member 3
Reference numeral 5 constitutes a vibrator having a high mechanical Q value, and can greatly expand the amplitude of vibration of the piezoelectric bimorphs 33, 33. Further, the connecting member 34 has a shape as shown in FIGS. 9 and 10, and portions 34a and 34a for connecting to the piezoelectric bimorphs 33 and 33 are wide, and the displacing portion 3 is formed.
By bringing 5b closer to the center, piezoelectric bimorphs 33, 33
The structure is such that the displacement of is converted into a torsion displacement as large as possible. Further, since the connecting member 34 has a spring structure having the square ring portions 34c, 34c, it can be expanded when the piezoelectric bimorphs 33, 33 are displaced, and the displacement of the piezoelectric bimorphs in the bending direction can be efficiently performed by the mirror portion. This can be converted into a displacement of 36 in the twisting direction.
As a result, the amount of static displacement of the mirror section 36 can be increased, which can contribute to the realization of a large scanning angle during torsional resonance.

The optical scanner 31 constitutes a vibration system having one degree of freedom by fixing the fixed end 32. When a sine wave signal corresponding to the resonance frequency of the torsional vibration system centering on the mirror portion 36 is applied to the piezoelectric bimorphs 33, 33 and bending vibrations are made in opposite phases, the vibrations pass through the connecting member 34. It is converted into torsional vibration of the torsionally deformable member 35 and the mirror portion 36, and the mirror portion 36 resonates in torsion.
By utilizing this vibration and irradiating the mirror portion 36 with laser light, one-dimensional optical scanning can be performed.

FIG. 11 shows an example in which the optical scanner 31 of the second embodiment is applied to the bar code reader 40. The barcode reader 40 reflects the laser light generated from the laser diode 42 driven by the laser drive circuit 41 on the mirror portion 36 of the optical scanner 31 to scan the laser light, and irradiates the barcode 43 with the laser light. After the scattered light is condensed by the condenser lens 44, it is converted into an electric signal by the light receiving element 45.
Then, the obtained electric signal is input to the binarization circuit 46 to be converted into a binary signal, and the decoding circuit 47 performs signal processing to read the barcode.

The optical scanner 31 is driven by a drive circuit 51 and an amplifier circuit 52. The drive circuit 51 generates a sine wave signal having a frequency equal to the resonance frequency of the torsional vibration of the vibrator portion of the optical scanner 31. This signal is amplified by the amplifier circuit 52 and then applied to the piezoelectric bimorphs 33, 33. As described above, the two piezoelectric bimorphs 33, 33 are configured such that when the same signal is applied, each bends and vibrates in opposite phases. Therefore, when a sine wave signal is given by the drive circuit 51 and the amplifier circuit 52, the two piezoelectric bimorphs 33, 33 vibrate in opposite phases. This vibration acts as an exciting force in the direction of torsionally vibrating the mirror portion 36, and as a result, the mirror portion 36 resonates in torsion. By utilizing this vibration, one-dimensional optical scanning can be performed at a large scanning angle.

Incidentally, the optical scanner 31 of the second embodiment.
As shown in FIG. 12, an upper frame 39 that surrounds the entire vibrator is continuously formed from the fixed end 32, and the upper end side of the torsionally deformable member 35 is extended and fixed to the upper frame 39 so that both ends are fixed. As a fixed value, it is possible to further improve the stability when acceleration is applied as a disturbance.

Although the embodiments of the present invention have been described above, the present invention is not limited to these, and various embodiments can be adopted without departing from the scope of the invention. For example, in each of the above embodiments, the piezoelectric bimorph was used as the drive source, but in addition, a piezoelectric unimorph, a piezoelectric monomorph, a magnetostrictive element, an electromagnetic solenoid, an electrostatic force, etc. can be used.

[0037]

According to the optical scanner of the present invention, miniaturization is possible, the influence of disturbance is less likely to occur, and the linearity of the scanning pattern can be secured. Particularly, in the apparatus according to the second aspect, two-dimensional optical scanning is possible, and linearity in each scanning direction can be secured when used as a one-dimensional optical scanner. Further, in the apparatus according to the third aspect, although it is for one-dimensional optical scanning, the function of ensuring its linearity is exerted more strongly. Further, according to the apparatus of claims 4 to 6, the scanning angle can be made extremely large. Further, the optical scanner of the present invention has an integrated structure and sufficient strength by being configured as described in claim 7, and can be further downsized because of its simple structure.

[Brief description of drawings]

FIG. 1 is a schematic perspective view of an optical scanner according to a first embodiment.

FIG. 2 is a plan view of a substrate of the optical scanner according to the first embodiment.

FIG. 3 is an explanatory diagram of an electrode structure in the optical scanner of the first embodiment.

FIG. 4 is an explanatory diagram of a vibration mode with two degrees of freedom in the optical scanner according to the first embodiment.

FIG. 5 is an explanatory diagram of drive signals for the optical scanner according to the first embodiment.

FIG. 6 is a schematic configuration diagram of a bar code reader to which the optical scanner of the first embodiment is applied.

FIG. 7 is an explanatory diagram exemplifying a scanning locus by the barcode reader according to the application of the first embodiment.

FIG. 8 is an explanatory diagram similarly illustrating a scanning locus by the barcode reader.

FIG. 9 is a schematic perspective view of an optical scanner according to a second embodiment.

FIG. 10 is a plan view of a base body of an optical scanner according to a second embodiment.

FIG. 11 is a schematic configuration diagram of a bar code reader to which the optical scanner of the second embodiment is applied.

FIG. 12 is a front view of a modified example of the optical scanner according to the second embodiment.

[Explanation of symbols]

1, 31 ... Optical scanner, 2, 37 ... Substrate, 2
e, 32 ... Fixed end, 3, 33 ... Piezoelectric bimorph, 4, 34 ... Connection member, 5, 35 ... Torsional deformation member, 6, 36 ... Mirror portion, 10, 40. ..Bar code readers, 11, 41 ... Laser drive circuits, 1
2, 42 ... Laser diode, 13, 43 ... Bar code, 14, 44 ... Condensing lens, 15, 45 ...
..Light receiving elements, 16, 46 ... Binarizing circuits, 17, 4
7 ... Decode circuit, 21, 22, 51 ... Drive circuit, 23 ... Phase inversion circuit, 24, 25, 52 ...
Amplifier circuit.

Claims (7)

[Claims] 1. An optical scanner, wherein light emitted from a light source is reflected by a mirror portion to irradiate an object to be detected, and the mirror portion is vibrated to scan the light in a predetermined direction of the object to be detected. Two drive sources that perform a bending motion are provided side by side in a beam shape with each one end being a fixed end, a connecting member that connects the free end sides of the two drive sources, and a connecting member that extends from the central portion of the connecting member. An optical scanner, comprising: a torsionally deformable member and a mirror portion provided on the torsionally deformable member, wherein a center of gravity of the mirror portion is located on a torsion center axis of the torsionally deformable member. 2. The optical scanner according to claim 1, wherein the extending distal end side of the torsionally deformable member is a free end.
An optical scanner, wherein the torsionally deformable member is configured to function also as a bending and deformable member. 3. The optical scanner according to claim 1, wherein the extended distal end side of the torsionally deformable member is a fixed end. 4. The optical scanner according to claim 2, wherein as the excitation means for vibrating the drive source, the two drives are driven at a frequency corresponding to a resonance frequency for bending vibration of a bending vibration system centering on a mirror portion. An optical scanner characterized by exciting sources in phase. 5. The optical scanner according to claim 2 or 3, wherein the excitation means for vibrating the drive source is:
An optical scanner characterized in that the two drive sources are excited in opposite phases at a frequency corresponding to a resonance frequency for torsional vibration of a torsional vibration system centering on a mirror portion. 6. The optical scanner according to claim 2, wherein as the excitation means for vibrating the drive source, the two drives are driven at a frequency corresponding to a resonance frequency for bending vibration of a bending vibration system centering on a mirror portion. Acts by superimposing a mode for exciting the two sources in the same phase and a mode for exciting the two drive sources in opposite phases at a frequency corresponding to the resonance frequency for the torsional vibration of the torsional vibration system centering on the mirror An optical scanner that is characterized by: 7. The optical scanner according to claim 1, further comprising: a plate member made of an elastic material, a wide fixed end portion, and a drive source forming portion extending in parallel from the fixed end portion. An integral base body comprising a connecting portion for connecting the drive source forming portions, a twist deforming portion extending from a central portion of the connecting portion, and a mirror bonding portion provided at a predetermined position of the twist deforming portion. And forming a drive element by adhering a drive element to a drive source forming portion of the base body, and forming a mirror portion by adhering a mirror to a mirror adhering portion. And the torsionally deformable member is constituted by the torsionally deformable portion, so that the entire vibration system has an integrated structure.