JPH0766872B2 - モジュール分割陰極を有するプラズマ発生装置 - Google Patents

モジュール分割陰極を有するプラズマ発生装置

Info

Publication number
JPH0766872B2
JPH0766872B2 JP1187503A JP18750389A JPH0766872B2 JP H0766872 B2 JPH0766872 B2 JP H0766872B2 JP 1187503 A JP1187503 A JP 1187503A JP 18750389 A JP18750389 A JP 18750389A JP H0766872 B2 JPH0766872 B2 JP H0766872B2
Authority
JP
Japan
Prior art keywords
anode
powder
plasma
cathode
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1187503A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02256200A (ja
Inventor
正実知 古賀
紘一 武田
強志 篠田
ミュールバーガー エリック
シィキンガー アルバート
エリック ミュールバーガー スティーブン
エベレット ベイリー ドン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Publication of JPH02256200A publication Critical patent/JPH02256200A/ja
Publication of JPH0766872B2 publication Critical patent/JPH0766872B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/44—Plasma torches using an arc using more than one torch
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/137—Spraying in vacuum or in an inert atmosphere
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma Technology (AREA)
  • Nozzles (AREA)
JP1187503A 1988-07-21 1989-07-21 モジュール分割陰極を有するプラズマ発生装置 Expired - Lifetime JPH0766872B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22250788A 1988-07-21 1988-07-21
US222507 1988-07-21

Publications (2)

Publication Number Publication Date
JPH02256200A JPH02256200A (ja) 1990-10-16
JPH0766872B2 true JPH0766872B2 (ja) 1995-07-19

Family

ID=22832511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1187503A Expired - Lifetime JPH0766872B2 (ja) 1988-07-21 1989-07-21 モジュール分割陰極を有するプラズマ発生装置

Country Status (2)

Country Link
EP (1) EP0351847A3 (de)
JP (1) JPH0766872B2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5247152A (en) * 1991-02-25 1993-09-21 Blankenship George D Plasma torch with improved cooling
US5556558A (en) * 1994-12-05 1996-09-17 The University Of British Columbia Plasma jet converging system
DE60308341T2 (de) * 2002-03-28 2007-05-03 Apit Corp. Sa Verfahren zur oberflächenbehandlung durch atmosphärisches plasma und vorrichtung zu seiner herstellung
JP2005085917A (ja) 2003-09-08 2005-03-31 Sharp Corp プラズマプロセス装置
JP5515277B2 (ja) * 2008-11-04 2014-06-11 株式会社日本セラテック プラズマ溶射装置
CN105682334B (zh) * 2016-02-03 2018-11-20 中国科学技术大学先进技术研究院 一种电弧等离子体反应器装置
CN107124814A (zh) * 2017-06-20 2017-09-01 四川大学 一种多阴极层流等离子体粉末球化装置
DE102019126640A1 (de) * 2019-10-02 2021-04-08 Gebr. Heller Maschinenfabrik Gmbh Lichtbogen-Drahtspritzeinrichtung
CN119425986A (zh) * 2024-11-21 2025-02-14 苏州休玛热喷涂设备有限公司 一种适用于喷涂超小超深的等离子内孔喷枪

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3839618A (en) * 1972-01-03 1974-10-01 Geotel Inc Method and apparatus for effecting high-energy dynamic coating of substrates
US3823302A (en) * 1972-01-03 1974-07-09 Geotel Inc Apparatus and method for plasma spraying
JPS517556A (en) * 1974-07-08 1976-01-21 Rikiichi Kimata Keifunnadono mushiukikansoho
EP0195052A4 (de) * 1984-09-27 1987-12-10 Univ Minnesota Verfahren zur stabilizierung eines durch einen mehrfachkathodengenerator erzeugten plasmas.
JPS61230300A (ja) * 1985-04-05 1986-10-14 プラズマ技研工業株式会社 プラズマア−ク用ト−チ
FR2611340B1 (fr) * 1987-02-24 1992-01-17 Pechiney Aluminium Generateur de plasma multicathodique comportant un gainage de cathode
NL8701530A (nl) * 1987-06-30 1989-01-16 Stichting Fund Ond Material Werkwijze voor het behandelen van oppervlakken van substraten met behulp van een plasma en reactor voor het uitvoeren van die werkwijze.

Also Published As

Publication number Publication date
EP0351847A3 (de) 1991-03-20
EP0351847A2 (de) 1990-01-24
JPH02256200A (ja) 1990-10-16

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