JPH077260A - Automatically soldering apparatus - Google Patents
Automatically soldering apparatusInfo
- Publication number
- JPH077260A JPH077260A JP25741392A JP25741392A JPH077260A JP H077260 A JPH077260 A JP H077260A JP 25741392 A JP25741392 A JP 25741392A JP 25741392 A JP25741392 A JP 25741392A JP H077260 A JPH077260 A JP H077260A
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- heating chamber
- chamber
- concentration
- soldering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005476 soldering Methods 0.000 title claims abstract description 112
- 239000011261 inert gas Substances 0.000 claims abstract description 105
- 238000010438 heat treatment Methods 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims description 30
- 238000001514 detection method Methods 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 43
- 229910001873 dinitrogen Inorganic materials 0.000 abstract description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 18
- 239000001301 oxygen Substances 0.000 abstract description 18
- 229910052760 oxygen Inorganic materials 0.000 abstract description 18
- 239000007789 gas Substances 0.000 abstract description 17
- 230000002542 deteriorative effect Effects 0.000 abstract description 2
- 229910000679 solder Inorganic materials 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 238000010583 slow cooling Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000006200 vaporizer Substances 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000006071 cream Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、自動半田付け装置に係
り、特に不活性ガスが充満した雰囲気中で半田付けを行
う自動半田付け装置の加熱室内に外部空気のみ又は外部
空気と不活性ガスの双方を、その流量を制御しながら供
給し、該加熱室内の不活性ガス濃度を必要最小限の濃度
に抑えると共に該加熱室内を高圧に保持して自動半田付
け装置から常に低濃度の不活性ガスを外部に流出させる
ことにより外部から予定外の空気が流入するのを防止す
ると共に、不活性ガスの消費量を大幅に減少させ、かつ
自動半田付け装置近傍の環境が急激に変化しても自動半
田付け装置内の不活性ガス濃度を一定に保ち、信頼性の
高い半田付けを行うことができるようにした画期的な自
動半田付け装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic soldering device, and more particularly to only external air or external air and an inert gas in a heating chamber of an automatic soldering device for soldering in an atmosphere filled with an inert gas. Both of them are supplied while controlling the flow rate thereof, the inert gas concentration in the heating chamber is suppressed to the necessary minimum concentration, and the heating chamber is kept at a high pressure to keep the inert gas of low concentration from the automatic soldering device. Preventing unscheduled air from entering from the outside by letting gas flow out, greatly reducing the consumption of inert gas, and even if the environment near the automatic soldering device changes suddenly. The present invention relates to an epoch-making automatic soldering device capable of performing reliable soldering while keeping a constant inert gas concentration in the automatic soldering device.
【0002】[0002]
【従来の技術】従来、自動半田付け装置においては、酸
素が多量に存在する大気中で基板及び半田を高温にして
該半田を溶融させて電子部品を基板に半田付けしていた
が、該従来の自動半田付け装置によると、半田及び電子
部品が高温で酸素にさらされることにより半田付け部及
び溶融半田が酸化し、十分な半田付け性能を確保するこ
とができなかったり、面倒な半田の粕取り作業を行わな
ければならないという欠点があった。2. Description of the Related Art Conventionally, in an automatic soldering apparatus, an electronic component is soldered to a substrate by melting the solder by raising the temperature of the substrate and the solder to a high temperature in an atmosphere containing a large amount of oxygen. According to the automatic soldering device, the soldering part and the molten solder are oxidized when the solder and electronic parts are exposed to oxygen at high temperature, and it is not possible to secure sufficient soldering performance, It had the disadvantage of having to do some work.
【0003】特に近年電子部品が小型化し、これに伴な
ってリード線も細くなったことにより、半田付け部の酸
化等のわずかな欠陥も電子製品の信頼性の低下などの重
大結果をもたらす大きな原因となっていた。In particular, as electronic components have become smaller in recent years and the lead wires have become thinner accordingly, even a slight defect such as oxidation of a soldered portion has serious consequences such as deterioration of reliability of electronic products. It was the cause.
【0004】このような欠点を解決するため、自動半田
付け装置内に窒素ガス等の不活性ガスを充満させて酸素
を遮断した状態で半田付けを行い、電子部品、基板及び
半田を高温にしても半田付け部や溶融半田が酸化しない
ようにして半田付けする自動半田付け装置が提案されて
いる。In order to solve such a drawback, the automatic soldering apparatus is filled with an inert gas such as nitrogen gas to perform soldering in a state where oxygen is blocked, and the electronic parts, the substrate and the solder are heated to a high temperature. In addition, an automatic soldering device has been proposed in which soldering is performed so that a soldering portion and molten solder are not oxidized.
【0005】この種の自動半田付け装置に使用される窒
素ガス等の不活性ガスは高価であるので、該不活性ガス
の自動半田付け装置からの漏れを極力少なくする必要が
あり、自動半田付け装置の密閉度を高める種々の方策が
採られている。Since the inert gas such as nitrogen gas used in this type of automatic soldering device is expensive, it is necessary to minimize the leakage of the inert gas from the automatic soldering device. Various measures have been taken to increase the tightness of the device.
【0006】しかし自動半田付け装置には、必ず該装置
の外部から半田付けすべき基板を搬入し、また該装置か
ら外部に搬出しなければならず、従来の自動半田付け装
置では該基板の搬入及び搬出のための搬入口及び搬出口
からの不活性ガスの漏れをほとんど防止することができ
ず、多量の不活性ガスが装置の外部に漏れ出してしま
い、非常に不経済であるという欠点があった。However, a board to be soldered must be carried into the automatic soldering apparatus from the outside of the apparatus, and must be carried out from the apparatus to the outside. In the conventional automatic soldering apparatus, the board is carried in. Moreover, it is almost impossible to prevent the leakage of the inert gas from the carry-in port and the carry-out port for carrying out, and a large amount of the inert gas leaks out of the apparatus, which is very uneconomical. there were.
【0007】即ち、予備加熱室からリフロー半田付け室
に向かって次第に高温となるように温度が管理されてい
る、例えばリフロー半田付け装置においては、高温部に
おいてはガス密度が薄く、また低温部においてはガス密
度が濃くなるため、不活性ガスは、ガス密度の濃い低温
部からガス密度の薄い高温部に向かう流れが生じる。That is, the temperature is controlled so that the temperature gradually increases from the preheating chamber to the reflow soldering chamber. For example, in a reflow soldering apparatus, the gas density is thin in the high temperature portion and the temperature is low in the low temperature portion. Since the gas density becomes high, the inert gas causes a flow from the low temperature portion having high gas density to the high temperature portion having low gas density.
【0008】この場合、温度差に起因する不活性ガスの
流れにより、不活性ガスは搬出口から流出して高価な不
活性ガスが消費されてしまっていた。In this case, due to the flow of the inert gas due to the temperature difference, the inert gas flows out from the carry-out port and the expensive inert gas is consumed.
【0009】またこのような場合には、不活性ガスの搬
出口からの流出に伴なって、搬入口から空気が自動半田
付け装置内に流入して予備加熱室内の不活性ガス密度が
薄くなり、酸化防止の効果が低下してしまう。Further, in such a case, with the outflow of the inert gas from the carry-out port, air flows into the automatic soldering apparatus from the carry-in port to reduce the inert gas density in the preheating chamber. However, the effect of preventing oxidation will be reduced.
【0010】また予備加熱室及びリフロー半田付け室等
には、半田溶解用の熱風を循環させるためのファンが配
設されており、該室内の不活性ガスを循環させて高温の
不活性ガスを上方から基板に吹き付けて加熱して予備加
熱と半田付け用の加熱を行っているが、基板に当った不
活性ガスは基板の進行方向前後側に分流し、上記した方
向の不活性ガスの流出を更に助長したり又は反対方向に
流れを生じさせたりして、いずれにしても不活性ガスが
多量に無駄に排出されていた。A fan for circulating hot air for melting the solder is provided in the preheating chamber, the reflow soldering chamber, etc., and the inert gas in the chamber is circulated to generate a high temperature inert gas. The board is sprayed and heated from above to perform preheating and heating for soldering, but the inert gas hitting the board is shunted to the front and rear sides in the direction of travel of the board, and the inert gas flows out in the direction described above. In either case, a large amount of inert gas was exhausted unnecessarily by further promoting the above or causing a flow in the opposite direction.
【0011】搬入口からの空気の流入を防止する方法と
しては、搬出口から流出するよりも更に多くの不活性ガ
スを供給して自動半田付け装置内の内圧を高める装置も
提案されているが、該装置によると極めて多量の不活性
ガスを必要とし、経済的でないという欠点があった。As a method for preventing the inflow of air from the carry-in port, there has been proposed a device for supplying more inert gas than that flowing out of the carry-out port to increase the internal pressure in the automatic soldering device. However, this device has a drawback that it requires an extremely large amount of inert gas and is not economical.
【0012】また上記した方法は、経済的理由から不活
性ガスの消費量を最低限に抑えるために極くわずかの不
活性ガスが搬入口から流出する程度に不活性ガスの噴出
量を制限せざるを得ず、自動半田付け装置外に風が吹く
等の突発的な環境変化があるとこれに対応できずに外部
空気が搬入口或いは搬出口から流入してしまい、半田付
け性能に影響してしまう等、突発的な変化に対してほと
んど対応することができないという欠点があった。Further, in the above method, in order to minimize the consumption of the inert gas, the amount of the inert gas ejected is limited to such an extent that a very small amount of the inert gas flows out from the carry-in port for economic reasons. Inevitably, if there is a sudden environmental change such as wind blown outside the automatic soldering equipment, it will not be able to cope with this and external air will flow in from the carry-in port or carry-out port, affecting the soldering performance. However, there is a drawback that it is difficult to deal with sudden changes such as accidents.
【0013】[0013]
【発明が解決しようとする課題】本発明は,上記した従
来技術の欠点を除くためになされたものであって、その
目的とするところは、加熱室内の不活性ガス濃度を検出
して該不活性ガス濃度に応じて外部空気のみを制御しな
がら供給するか、又は外部空気と不活性ガスの双方を制
御しながら加熱室に供給することにより、加熱室内の不
活性ガス濃度を半田付けに必要な最小限の濃度に保持で
きるようにすることであり、またこれによって半田付け
性能を劣化させることなく不活性ガスの消費量を大幅に
低減させることである。SUMMARY OF THE INVENTION The present invention has been made in order to eliminate the above-mentioned drawbacks of the prior art. The purpose of the present invention is to detect the inert gas concentration in the heating chamber and It is necessary to solder the inert gas concentration in the heating chamber by either supplying only the external air while controlling it according to the active gas concentration, or by supplying both the external air and the inert gas to the heating chamber while controlling both. Is to be maintained at a minimum concentration, and thereby the consumption of the inert gas is significantly reduced without deteriorating the soldering performance.
【0014】また他の目的は、上記構成により不活性ガ
スの消費量を増加させることなく加熱室内の圧力を常に
大気圧以上に保持できるようにすることであり、またこ
れによって自動半田付け装置の基板の搬入口及び搬出口
から不活性ガスを常に外部に流出させて自動半田付け装
置外に風が吹く等の突発的な環境変化があっても外部空
気が直接搬入口又は搬出口から流入するのを防止して、
安定した半田付け性能を確保することである。Another object of the present invention is to allow the pressure in the heating chamber to always be maintained at atmospheric pressure or higher without increasing the consumption of the inert gas by the above-mentioned structure, and thereby to realize the automatic soldering apparatus. Even if there is a sudden environmental change such as blowing out of the automatic soldering equipment by constantly flowing out the inert gas from the loading and unloading port of the board, the external air directly flows in from the loading or unloading port. To prevent
It is to ensure stable soldering performance.
【0015】[0015]
【課題を解決するための手段】要するに本発明(請求項
1)は、不活性ガスが充満した加熱室内で電子部品を搭
載した基板を搬送しながら加熱して半田付けする自動半
田付け装置において、前記加熱室内の不活性ガス濃度を
検出する不活性ガス濃度センサと、該不活性ガス濃度セ
ンサからの検出制御信号に応じて外部空気の量を制御し
て前記加熱室に供給する空気供給装置とを備え、前記加
熱室内の不活性ガス濃度を所定の濃度に制御するように
構成したことを特徴とするものである。また本発明(請
求項2)は、不活性ガスが充満した加熱室内で電子部品
を搭載した基板を搬送しながら加熱して半田付けする自
動半田付け装置において、前記加熱室内の不活性ガス濃
度を検出する不活性ガス濃度センサと、該不活性ガス濃
度センサからの検出制御信号に応じて前記不活性ガスの
供給量を制御して前記加熱室に供給する不活性ガス供給
装置と、前記不活性ガス濃度センサからの検出制御信号
に応じて外部空気の量を制御して前記加熱室に供給する
空気供給装置とを備え、前記加熱室内の不活性ガス濃度
を所定の濃度に制御するように構成したことを特徴とす
るものである。SUMMARY OF THE INVENTION In summary, the present invention (Claim 1) relates to an automatic soldering device for heating and soldering a substrate on which electronic components are mounted while being transported in a heating chamber filled with an inert gas, An inert gas concentration sensor for detecting an inert gas concentration in the heating chamber, and an air supply device for controlling the amount of external air according to a detection control signal from the inert gas concentration sensor to supply the heating chamber. And is configured to control the inert gas concentration in the heating chamber to a predetermined concentration. Further, the present invention (Claim 2) is an automatic soldering device for heating and soldering a substrate on which an electronic component is mounted in a heating chamber filled with an inert gas while heating and soldering the substrate. An inert gas concentration sensor for detecting, an inert gas supply device for controlling the supply amount of the inert gas according to a detection control signal from the inert gas concentration sensor and supplying the inert gas to the heating chamber, and the inert gas. An air supply device for controlling the amount of external air according to a detection control signal from a gas concentration sensor and supplying the air to the heating chamber, and configured to control the inert gas concentration in the heating chamber to a predetermined concentration. It is characterized by having done.
【0016】また本発明(請求項3)は、不活性ガスが
充満した加熱室内で電子部品を搭載した基板を搬送しな
がら加熱して半田付けする自動半田付け装置において、
前記加熱室内の不活性ガス濃度を検出する不活性ガス濃
度センサと、該不活性ガス濃度センサからの検出制御信
号に応じて前記不活性ガスの供給量を制御して前記加熱
室に供給する不活性ガス供給装置と、前記不活性ガス濃
度センサからの検出制御信号に応じて外部空気の量を制
御して前記加熱室に供給する空気供給装置とを備え、前
記加熱室内の不活性ガス濃度を所定の濃度に制御すると
共に前記自動半田付け装置内の圧力を大気圧以上に保持
して常に前記自動半田付け装置の前記基板の搬入口及び
搬出口から前記不活性ガスを外部に流出させるように構
成したことを特徴とするものである。The present invention (claim 3) is an automatic soldering device for heating and soldering a substrate on which electronic parts are mounted while being transported in a heating chamber filled with an inert gas.
An inert gas concentration sensor for detecting an inert gas concentration in the heating chamber, and an inert gas concentration sensor for controlling the supply amount of the inert gas according to a detection control signal from the inert gas concentration sensor to supply the inert gas to the heating chamber. An active gas supply device and an air supply device for controlling the amount of external air according to a detection control signal from the inert gas concentration sensor and supplying the air to the heating chamber are provided, and the inert gas concentration in the heating chamber is controlled. Controlling to a predetermined concentration and keeping the pressure in the automatic soldering device at atmospheric pressure or higher so that the inert gas is always flown out from the carry-in port and the carry-out port of the substrate of the automatic soldering device. It is characterized by being configured.
【0017】[0017]
【実施例】以下本発明を図面に示す実施例に基いて説明
する。図1及び図2において本発明に係る自動半田付け
装置1は、不活性ガス濃度センサ2と、不活性ガス供給
装置3と、空気供給装置4とを備えている。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the embodiments shown in the drawings. 1 and 2, an automatic soldering device 1 according to the present invention includes an inert gas concentration sensor 2, an inert gas supply device 3, and an air supply device 4.
【0018】図1を参照して、本発明を、自動半田付け
装置の一例たるリフロー式自動半田付け装置1に適用し
た例について説明する。まず該リフロー式自動半田付け
装置1の基本構成について説明すると、リフロー式自動
半田付け装置1の筺体6は、隔壁8によって予備加熱室
PH1 ,PH2、リフロー半田付け室RF及び徐冷室C
Lに分割された加熱室9が形成されており、各室の構造
は、内部の温度が異なるだけで略同様の構造となってい
る。An example in which the present invention is applied to a reflow type automatic soldering apparatus 1 which is an example of an automatic soldering apparatus will be described with reference to FIG. First, the basic configuration of the reflow-type automatic soldering apparatus 1 will be described. The housing 6 of the reflow-type automatic soldering apparatus 1 is divided into preheating chambers PH 1 and PH 2 , a reflow soldering chamber RF, and a slow cooling chamber C by partition walls 8.
The heating chamber 9 divided into L is formed, and the structure of each chamber is substantially the same except that the internal temperature is different.
【0019】予備加熱室PH1 ,PH2 、リフロー半田
付け室RF及び徐冷室CLには、これを貫通する如く搬
送装置の一例たる公知の無端のチェーンコンベア10が
配設されており、搬入ステーション11において搬入さ
れた基板(図示せず)を図中左方向に搬送して予備加熱
室PH1 ,PH2 、リフロー半田付け室RF、徐冷室C
Lへと順次搬送して搬出ステーション13に搬出するよ
うに構成されている。The preheating chambers PH 1 and PH 2 , the reflow soldering chamber RF and the slow cooling chamber CL are provided with a well-known endless chain conveyor 10 as an example of a conveying device so as to penetrate through them. A substrate (not shown) carried in at the station 11 is conveyed leftward in the drawing to preheat chambers PH 1 and PH 2 , a reflow soldering chamber RF, and a slow cooling chamber C.
It is configured to be sequentially conveyed to the L and carried out to the carry-out station 13.
【0020】窒素ガス等の不活性ガスが充満する互いに
独立して構成された予備加熱室PH1 ,PH2 、リフロ
ー半田付け室RF及び徐冷室CL内には、ケーシング
(図示せず)が配設されており、加熱室9の外壁との間
(図において紙面裏側)に上昇循環通路が、またケーシ
ング内に下降循環通路が形成されている。A casing (not shown) is provided in each of the preheating chambers PH 1 and PH 2 , the reflow soldering chamber RF and the slow cooling chamber CL which are independently filled with an inert gas such as nitrogen gas. An ascending circulation passage is formed between the heating chamber 9 and the outer wall of the heating chamber 9 (on the back side of the drawing), and a descending circulation passage is formed in the casing.
【0021】ケーシング内のチェーンコンベア10の上
方には、電熱器が多数の穴があけられた金属板で挟持さ
れてサンドイッチ構造とされた加熱装置18が配設され
ており、予備加熱室PH1 内を約190℃に、予備加熱
室PH2 内を約150℃に、リフロー半田付け室RF内
を約250℃に、また徐冷室CL内を約130℃となる
ように加熱制御するようになっている。Above the chain conveyor 10 in the casing, there is provided a heating device 18 having a sandwich structure in which an electric heater is sandwiched between metal plates having a large number of holes, and a preheating chamber PH 1 The heating is controlled so that the inside is about 190 ° C., the inside of the preheating chamber PH 2 is about 150 ° C., the inside of the reflow soldering chamber RF is about 250 ° C., and the inside of the slow cooling chamber CL is about 130 ° C. Has become.
【0022】チェーンコンベア10に積載された基板
は、搬送されながら予備加熱室PH1,PH2 で予備加
熱された後、リフロー半田付け室RFで急速に半田付け
温度にまで加熱され半田付けされ、徐冷室CLで徐々に
冷却されて搬出ステーション13から搬出されるように
なっている。The substrates loaded on the chain conveyor 10 are preheated in the preheating chambers PH 1 and PH 2 while being conveyed, and then rapidly heated to the soldering temperature in the reflow soldering chamber RF to be soldered. It is designed to be gradually cooled in the slow cooling chamber CL and carried out from the carry-out station 13.
【0023】送風機19は、加熱室9内に充満する加熱
された窒素ガス等の不活性ガスを強制循環させるための
ものであって、予備加熱室PH1 、PH2 、リフロー半
田付け室RF及び徐冷室CLの下部に夫々配設された例
えばシロッコファン等の遠心送風機でボールベアリング
等の軸受20によって支持された軸21に固定されたプ
ーリ22と図示しないモータのプーリとの間にベルト
(図示せず)が巻き掛けられており、該モータによって
駆動されるようになっている。The blower 19 is for forcibly circulating the heated inert gas such as nitrogen gas filled in the heating chamber 9, and the preheating chambers PH 1 , PH 2 , reflow soldering chamber RF and A belt is provided between a pulley 22 fixed to a shaft 21 supported by a bearing 20 such as a ball bearing in a centrifugal blower such as a sirocco fan or the like, which is disposed in the lower part of the slow cooling chamber CL, and a pulley of a motor (not shown) ( (Not shown) is wound around and is driven by the motor.
【0024】そして加熱室9内に充満する窒素ガスを吸
引して加熱装置18で加熱した後、下降循環通路中を降
下させ、チェーンコンベア10によって搬送される基板
を加熱した後、送風機19で圧送し、上昇循環通路を通
して再び上昇させ、循環させるように構成されている。Then, after the nitrogen gas filled in the heating chamber 9 is sucked and heated by the heating device 18, it is lowered in the descending circulation passage to heat the substrate conveyed by the chain conveyor 10 and then pressure-fed by the blower 19. However, it is configured to be raised again and circulated through the rising circulation passage.
【0025】そして該加熱された窒素ガスにより基板を
半田付け温度まで徐々に加熱して電子部品を基板に半田
付けするように構成されている。The substrate is gradually heated to the soldering temperature by the heated nitrogen gas to solder the electronic component to the substrate.
【0026】不活性ガス濃度センサ2は、加熱室9、特
に半田付け性能に最も影響の大きなリフロー半田付け室
RF内の不活性ガスの一例たる窒素ガス濃度を検出する
ためのものであって、パイプ23によってリフロー半田
付け室RFと連通しており、該リフロー半田付け室RF
内の窒素ガスを不活性ガス濃度センサ2に導いて窒素ガ
ス濃度を検出するようになっている。The inert gas concentration sensor 2 is for detecting the nitrogen gas concentration which is an example of the inert gas in the heating chamber 9, especially in the reflow soldering chamber RF which has the greatest effect on the soldering performance. The pipe 23 communicates with the reflow soldering chamber RF, and the reflow soldering chamber RF is connected.
The nitrogen gas therein is guided to the inert gas concentration sensor 2 to detect the nitrogen gas concentration.
【0027】不活性ガス濃度センサ2は、該不活性ガス
濃度センサ2からの検出信号に応答してPID制御を行
う電子回路として構成された窒素ガス制御装置24及び
空気制御装置25に電線27によって電気的に接続され
ており、窒素ガスの濃度を該濃度に比例した電流又は電
圧等の電気量に変換して検出信号を窒素ガス制御装置2
4及び空気制御装置25に伝達するようになっている。The inert gas concentration sensor 2 is connected to a nitrogen gas control device 24 and an air control device 25, which are electronic circuits for performing PID control in response to a detection signal from the inert gas concentration sensor 2, by an electric wire 27. The nitrogen gas control device 2 is electrically connected and converts the concentration of nitrogen gas into an electric quantity such as current or voltage proportional to the concentration and outputs a detection signal.
4 and the air control device 25.
【0028】不活性ガス供給装置3は、窒素ガス等の不
活性ガスを供給するためのものであって、本実施例にお
いては液体窒素が収納されたガスボンベ26、気化器2
8、電空レギュレータ29、流量制御弁30及び供給パ
イプ31とから構成されており、ガスボンベ26中の液
体窒素を供給パイプ31で気化器28に導き気化させて
窒素ガスとした後、電空レギュレータ29及び流量制御
弁30で流量を制御してリフロー半田付け室RFに供給
パイプ31を介して供給するようになっている。The inert gas supply device 3 is for supplying an inert gas such as nitrogen gas. In this embodiment, the gas cylinder 26 containing liquid nitrogen and the vaporizer 2 are used.
8, an electropneumatic regulator 29, a flow control valve 30 and a supply pipe 31. Liquid nitrogen in the gas cylinder 26 is introduced into the vaporizer 28 by the supply pipe 31 to be vaporized into nitrogen gas, and then the electropneumatic regulator. The flow rate is controlled by 29 and the flow rate control valve 30, and is supplied to the reflow soldering chamber RF via the supply pipe 31.
【0029】空気供給装置4は、リフロー半田付け室R
F内に外部空気を供給するためのものであって、コンプ
レッサ32、電空レギュレータ33、流量制御弁34及
び供給パイプ35とから構成されており、外部の空気を
コンプレッサ32で圧縮した後、電空レギュレータ33
及び流量制御弁34で該圧縮空気の流量を制御してリフ
ロー半田付け室RFに供給パイプ35を介して供給する
ようになっている。The air supply device 4 includes a reflow soldering chamber R.
It is for supplying external air into F, and is composed of a compressor 32, an electropneumatic regulator 33, a flow control valve 34, and a supply pipe 35. After the external air is compressed by the compressor 32, Empty regulator 33
The flow rate control valve 34 controls the flow rate of the compressed air and supplies the compressed air to the reflow soldering chamber RF via the supply pipe 35.
【0030】本発明は、上記のように構成されており、
以下その作用について説明する。図2及び図3におい
て、まず搬入ステーション11の搬入口36において、
基板をチェーンコンベア10に積載すると、基板は図中
左方向に搬送され、窒素ガスが約190℃に加熱されて
いる予備加熱室PH1 において急速に加熱され、比較的
小型の熱容量の小さい電子部品は、すぐに窒素ガスの温
度と同じ約190℃まで加熱されるが、比較的大型の熱
容量の大きい電子部品は、表面部は約190℃まで加熱
されるが、内部は十分加熱されずにこれより低い温度と
なつている。The present invention is configured as described above,
The operation will be described below. 2 and 3, first, at the carry-in port 36 of the carry-in station 11,
When the substrates are loaded on the chain conveyor 10, the substrates are conveyed to the left in the figure, and are rapidly heated in the preheating chamber PH 1 where nitrogen gas is heated to about 190 ° C., which is a relatively small electronic component with a small heat capacity. Is immediately heated to about 190 ° C, which is the same as the temperature of nitrogen gas, but for relatively large electronic components with large heat capacity, the surface is heated to about 190 ° C, but the inside is not sufficiently heated. The temperature is lower.
【0031】次いで約150℃に加熱されている予備加
熱室PH2 に搬送され、熱容量の小さい電子部品は温度
が下げられ、また熱容量の大きい電子部品は更に徐々に
加熱されて全体の温度が調整されて基板及び電子部品の
全部品が約150℃の均一な温度になって予備加熱が終
了する。Next, the temperature of the electronic parts having a small heat capacity is lowered, and the temperature of the electronic parts having a large heat capacity is gradually transferred to the preheating chamber PH 2 heated to about 150 ° C. to adjust the whole temperature. Then, all the components of the substrate and the electronic components reach a uniform temperature of about 150 ° C., and the preheating is completed.
【0032】基板に上方から接触した窒素ガスは、左右
方向に分岐して流れるが、該流れの方向は基板と送風機
19との位置関係により決定され、搬送されている基板
は常に位置が変化しているので流れの方向も右方向から
左方向に、また左方向から右方向に変化し、例えば予備
加熱室PH1 においては、窒素ガスは第1予備室39に
流出する方向に、或いは予備加熱室PH2 方向に流れ
る。The nitrogen gas that comes into contact with the substrate from above branches in the left-right direction and flows. The direction of the flow is determined by the positional relationship between the substrate and the blower 19, and the position of the substrate being conveyed always changes. Therefore, the flow direction also changes from the right direction to the left direction and from the left direction to the right direction. For example, in the preheating chamber PH 1 , the nitrogen gas flows in the first prechamber 39 or in the preheating chamber 39. It flows toward the room PH 2 .
【0033】そしてチェーンコンベア10を通過して更
に下降した窒素ガスは、送風機19により吸引され、左
右に流れて上昇循環通路内を上昇して加熱装置18の上
方に戻る。The nitrogen gas that has passed through the chain conveyor 10 and further descended is sucked by the blower 19, flows to the left and right, rises in the ascending circulation passage, and returns to above the heating device 18.
【0034】このとき、窒素ガスの温度は図示しない温
度センサにより検出されて制御装置(図示せず)に伝達
され、該制御装置の指令によって加熱装置18に供給す
る電力の調節が行われ、加熱室9内の窒素ガスが所定の
温度となるように制御される。At this time, the temperature of the nitrogen gas is detected by a temperature sensor (not shown) and transmitted to a control device (not shown), and the electric power supplied to the heating device 18 is adjusted by the command of the control device to heat the heating device 18. The nitrogen gas in the chamber 9 is controlled to have a predetermined temperature.
【0035】次いで基板は、リフロー半田付け室RFに
搬送され、ここで予備加熱室PH1,PH2 と同様にし
て約250℃に加熱された窒素ガスと接触して加熱され
るので、クリーム半田が溶融して電子部品が基板の所定
の箇所に半田付けされる。Next, the substrate is transferred to the reflow soldering chamber RF, where it is heated in contact with the nitrogen gas heated to about 250 ° C. in the same manner as in the preheating chambers PH 1 and PH 2 , so that the cream solder is applied. Melts and the electronic component is soldered to a predetermined portion of the substrate.
【0036】予備加熱室PH1 ,PH2 及びリフロー半
田付け室RFには、後述する如くガス濃度が制御されて
酸素濃度が500ppm程度と非常に低く保たれた窒素
ガスが充満しているので、溶融した半田及び電子部品の
リード線等が酸化することはなく、理想的な半田付けが
行われる。Since the preheating chambers PH 1 and PH 2 and the reflow soldering chamber RF are filled with nitrogen gas whose gas concentration is controlled to be extremely low as about 500 ppm as described later, The molten solder and the lead wires of the electronic component are not oxidized, and ideal soldering is performed.
【0037】リフロー半田付け室RFにおいて半田付け
され、まだ高温状態にある基板は、更に約130℃にな
っている徐冷室CLに搬送されてゆっくりと冷却された
後、搬出ステーション13に搬送され、搬出口38から
搬出される。The substrate which has been soldered in the reflow soldering chamber RF and is still in a high temperature state is further conveyed to the slow cooling chamber CL at a temperature of about 130 ° C. and slowly cooled, and then conveyed to the carry-out station 13. , And is carried out from the carry-out port 38.
【0038】電子部品は、上記した如く基板に半田付け
されるが、加熱室9内の酸素濃度を種々変化させて半田
付け性能に与える影響を長年にわたり調査、研究した結
果、500ppm程度以下であれば半田付け性能はほと
んど変化がなく、実用上問題のないことが判明した。The electronic parts are soldered to the substrate as described above, and as a result of investigating and studying for a long time the effect of changing the oxygen concentration in the heating chamber 9 on the soldering performance, it is about 500 ppm or less. If so, the soldering performance showed almost no change, and it was found that there was no practical problem.
【0039】加熱室9内の酸素濃度を単に500ppm
程度とするだけであるならば、窒素ガスのみを加熱室9
に供給することでも可能ではあるが、該方法によると窒
素ガスの供給量はそれほど多くはなく、従って加熱室9
内の圧力も外気圧と大差ない程度のものとなり、もし自
動半田付け装置1外に風が吹く等の突発的な環境変化が
あると、外部の空気が直接自動半田付け装置1内に流入
して窒素ガス濃度を変化させ、安定した半田付けを行う
ことができない。The oxygen concentration in the heating chamber 9 is simply 500 ppm.
If it is only about the degree, only the nitrogen gas is heated in the heating chamber 9
It is also possible to supply it to the heating chamber 9, but according to this method, the supply amount of the nitrogen gas is not so large, and therefore the heating chamber 9
The internal pressure also becomes almost the same as the external pressure, and if there is a sudden environmental change such as blowing of air outside the automatic soldering device 1, the outside air will flow directly into the automatic soldering device 1. Therefore, it is not possible to change the nitrogen gas concentration and perform stable soldering.
【0040】また外部の空気が直接自動半田付け装置1
内に流入しない程度に加熱室9内の圧力を高めるために
は、非常に多くの窒素ガスを供給して常に搬入口36及
び搬出口38から矢印N及びO方向に流出させておくこ
とが必要となり、加熱室9内の酸素濃度は低下するもの
の、不必要な低濃度となり、極めて無駄に高価な窒素ガ
スが消費される結果となる。In addition, the outside air is directly connected to the automatic soldering apparatus 1
In order to increase the pressure in the heating chamber 9 to the extent that it does not flow into the inside, it is necessary to supply a very large amount of nitrogen gas and always make it flow out from the carry-in port 36 and the carry-out port 38 in the directions of arrows N and O. Therefore, although the oxygen concentration in the heating chamber 9 is reduced, the oxygen concentration becomes unnecessarily low, resulting in extremely wasteful consumption of expensive nitrogen gas.
【0041】ここが本発明の主要な点であり、図3を参
照して、その作用を説明すると、まずパイプ23によっ
てリフロー半田付け室RF内の不活性ガスを矢印A方向
に不活性ガス濃度センサ2に導き、ステップS1 で不活
性ガス濃度センサ2によりリフロー半田付け室RF内の
酸素濃度を検出する。This is the main point of the present invention, and the operation thereof will be described with reference to FIG. 3. First, the inert gas concentration in the reflow soldering chamber RF in the direction of arrow A is measured by the pipe 23. the leading sensor 2, the inert gas concentration sensor 2 in step S 1 for detecting the oxygen concentration in the reflow soldering chamber RF.
【0042】ついでステップS2 で該酸素濃度が500
ppm以下であるかどうかが判別され、500ppm以
上であるとステップS3 に進み、該検出信号を電線27
を介して窒素ガス制御装置24に伝達し(矢印B方
向)、該窒素ガス制御装置24からの電気信号(矢印C
方向)によって、電空レギュレータ29に内蔵された弁
の開度を制御する。Then, in step S 2 , the oxygen concentration is adjusted to 500
It is determined whether it is less than or equal to ppm, and if it is more than or equal to 500 ppm, the process proceeds to step S 3 , and the detection signal is sent to the electric wire 27.
To the nitrogen gas control device 24 (direction of arrow B), and an electric signal from the nitrogen gas control device 24 (arrow C).
Direction) to control the opening degree of the valve built in the electropneumatic regulator 29.
【0043】一方ガスボンベ26中の液体窒素は、気化
器28に矢印D方向に供給されて気化されて窒素ガスと
なる。On the other hand, the liquid nitrogen in the gas cylinder 26 is supplied to the vaporizer 28 in the direction of the arrow D and vaporized to become nitrogen gas.
【0044】そして電空レギュレータ29に矢印E方向
に供給された窒素ガスは、その圧力が電空レギュレータ
29に内蔵された弁によって調整された後、更に流量制
御弁30で流量が制御されて供給パイプ31により矢印
G方向にリフロー半田付け室RFに供給され、リフロー
半田付け室RF内の酸素濃度を低下させる。The pressure of the nitrogen gas supplied to the electropneumatic regulator 29 in the direction of arrow E is adjusted by the valve built in the electropneumatic regulator 29, and then the flow rate is controlled by the flow rate control valve 30 to be supplied. It is supplied to the reflow soldering chamber RF by the pipe 31 in the direction of arrow G, and the oxygen concentration in the reflow soldering chamber RF is reduced.
【0045】ステップS2 で該酸素濃度が500ppm
以下であると判断されると、ステップS4 に進み、不活
性ガス濃度センサ2の検出信号が電線27を介して空気
制御装置25に伝達され(矢印H方向)、該空気制御装
置25からの電気信号(矢印I方向)によって、電空レ
ギュレータ33に内蔵された弁の開度が制御される。In step S 2 , the oxygen concentration is 500 ppm.
If it is determined that the following is true, the process proceeds to step S 4 , and the detection signal of the inert gas concentration sensor 2 is transmitted to the air control device 25 via the electric wire 27 (direction of arrow H), and the air control device 25 outputs the signal. The opening degree of the valve built in the electropneumatic regulator 33 is controlled by the electric signal (direction of arrow I).
【0046】そしてコンプレッサ32により矢印J方向
に吸引され、矢印K方向に供給される外部空気の圧力が
該電空レギュレータ33によって調整された後、更に流
量制御弁34で流量が制御されて供給パイプ35により
矢印M方向にリフロー半田付け室RFに供給され、リフ
ロー半田付け室RF内の酸素濃度を500ppmまで高
める。Then, after the pressure of the external air sucked in the direction of arrow J by the compressor 32 and supplied in the direction of arrow K is adjusted by the electropneumatic regulator 33, the flow rate is further controlled by the flow rate control valve 34 and the supply pipe. It is supplied to the reflow soldering chamber RF in the direction of arrow M by 35, and the oxygen concentration in the reflow soldering chamber RF is increased to 500 ppm.
【0047】上記した如くリフロー半田付け室RF内の
酸素濃度は、窒素ガスだけでなく外部空気をも供給して
500ppmに制御されるので、窒素ガスのみを供給す
る場合に比較してはるかに多量のガスを供給することが
でき、従って自動半田付け装置1内の圧力を外気よりか
なり高い圧力に保つことができる。As described above, the oxygen concentration in the reflow soldering chamber RF is controlled to 500 ppm by supplying not only nitrogen gas but also external air. Therefore, the oxygen concentration is much larger than that in the case of supplying only nitrogen gas. Gas can be supplied, so that the pressure in the automatic soldering device 1 can be maintained at a pressure considerably higher than the outside air.
【0048】また自動半田付け装置1内のガスを搬入口
36及び搬出口38から矢印N及びO方向に常に流出さ
せているので、自動半田付け装置1に風が吹き付ける等
の突発的な事態が発生しても自動半田付け装置1内のガ
ス濃度には何ら影響を与えることはなく、安定した半田
付けを行うことができる。Further, since the gas in the automatic soldering device 1 is constantly flown out from the carry-in port 36 and the carry-out port 38 in the directions of the arrows N and O, there may be a sudden situation such as wind blowing on the automatic soldering device 1. Even if it occurs, it has no effect on the gas concentration in the automatic soldering apparatus 1, and stable soldering can be performed.
【0049】なお、上記実施例においては、本発明をリ
フロー自動半田付け装置に適用したものとして説明した
が、本発明はリフロー自動半田付け装置にその用途が限
定されるものではなく、噴流式やディップ式の自動半田
付け装置に適用することも勿論可能である。In the above embodiments, the present invention has been described as being applied to a reflow automatic soldering device, but the present invention is not limited to the use in a reflow automatic soldering device. Of course, it can be applied to a dip-type automatic soldering device.
【0050】[0050]
【発明の効果】本発明は、上記のように加熱室内の不活
性ガス濃度を検出して該不活性ガス濃度に応じて外部空
気のみを制御しながら供給するか、又は外部空気と不活
性ガスの双方を制御しながら加熱室に供給するようにし
たので、加熱室内の不活性ガス濃度を半田付けに必要な
最小限の濃度に保持できる効果があり、またこの結果半
田付け性能を劣化させることなく不活性ガスの消費量を
大幅に低減させることができるという画期的な効果が得
られる。As described above, the present invention detects the concentration of the inert gas in the heating chamber and supplies only the external air while controlling only the external air according to the concentration of the inert gas, or the external air and the inert gas. Since both of them are supplied to the heating chamber while being controlled, there is an effect that the inert gas concentration in the heating chamber can be maintained at the minimum concentration required for soldering, and as a result, the soldering performance is deteriorated. The epoch-making effect that the consumption of the inert gas can be greatly reduced is obtained.
【0051】また上記構成により不活性ガスの消費量を
増加させることなく加熱室内の圧力を常に大気圧以上に
保持できる効果があり、またこの結果自動半田付け装置
の基板の搬入口及び搬出口から不活性ガスを常に外部に
流出させて自動半田付け装置外に風が吹く等の突発的な
環境変化があっても外部空気が直接搬入口又は搬出口か
ら流入するのを防止できるため、安定した半田付け性能
を確保することができる効果がある。Further, the above-mentioned structure has an effect that the pressure in the heating chamber can be always maintained at the atmospheric pressure or higher without increasing the consumption amount of the inert gas, and as a result, from the carry-in port and the carry-out port of the substrate of the automatic soldering apparatus. Even if there is a sudden environmental change such as the flow of inert gas to the outside and the wind blows outside the automatic soldering device, it is possible to prevent external air from directly flowing in from the carry-in port or carry-out port, which is stable. This has the effect of ensuring soldering performance.
【図面の簡単な説明】[Brief description of drawings]
【図1】自動半田付け装置の全体構成を示す縦断面図で
ある。FIG. 1 is a vertical cross-sectional view showing the overall configuration of an automatic soldering device.
【図2】自動半田付け装置の作動状態を示す縦断面図で
ある。FIG. 2 is a vertical sectional view showing an operating state of the automatic soldering device.
【図3】自動半田付け装置の作動のルーチンを示すフロ
ーチャート図である。FIG. 3 is a flowchart showing an operation routine of the automatic soldering device.
【符号の説明】 1 自動半田付け装置 2 不活性ガス濃度センサ 3 不活性ガス供給装置 4 空気供給装置 9 加熱室 36 基板の搬入口 38 基板の搬出口[Explanation of reference numerals] 1 automatic soldering device 2 inert gas concentration sensor 3 inert gas supply device 4 air supply device 9 heating chamber 36 substrate loading port 38 substrate loading port
Claims (3)
品を搭載した基板を搬送しながら加熱して半田付けする
自動半田付け装置において、前記加熱室内の不活性ガス
濃度を検出する不活性ガス濃度センサと、該不活性ガス
濃度センサからの検出制御信号に応じて外部空気の量を
制御して前記加熱室に供給する空気供給装置とを備え、
前記加熱室内の不活性ガス濃度を所定の濃度に制御する
ように構成したことを特徴とする自動半田付け装置。1. An automatic soldering device for heating and soldering a substrate on which electronic components are mounted while being transported in a heating chamber filled with an inert gas, the inert gas detecting an inert gas concentration in the heating chamber. A concentration sensor, and an air supply device that controls the amount of external air according to a detection control signal from the inert gas concentration sensor and supplies the air to the heating chamber,
An automatic soldering device, characterized in that the inert gas concentration in the heating chamber is controlled to a predetermined concentration.
品を搭載した基板を搬送しながら加熱して半田付けする
自動半田付け装置において、前記加熱室内の不活性ガス
濃度を検出する不活性ガス濃度センサと、該不活性ガス
濃度センサからの検出制御信号に応じて前記不活性ガス
の供給量を制御して前記加熱室に供給する不活性ガス供
給装置と、前記不活性ガス濃度センサからの検出制御信
号に応じて外部空気の量を制御して前記加熱室に供給す
る空気供給装置とを備え、前記加熱室内の不活性ガス濃
度を所定の濃度に制御するように構成したことを特徴と
する自動半田付け装置。2. An automatic soldering device for heating and soldering a substrate on which electronic components are mounted while being transported in a heating chamber filled with an inert gas, the inert gas detecting an inert gas concentration in the heating chamber. A concentration sensor, an inert gas supply device for controlling the supply amount of the inert gas according to a detection control signal from the inert gas concentration sensor to supply the heating chamber to the heating chamber, and an inert gas concentration sensor. An air supply device for controlling the amount of external air according to a detection control signal and supplying the air to the heating chamber, and being configured to control the inert gas concentration in the heating chamber to a predetermined concentration. Automatic soldering device.
品を搭載した基板を搬送しながら加熱して半田付けする
自動半田付け装置において、前記加熱室内の不活性ガス
濃度を検出する不活性ガス濃度センサと、該不活性ガス
濃度センサからの検出制御信号に応じて前記不活性ガス
の供給量を制御して前記加熱室に供給する不活性ガス供
給装置と、前記不活性ガス濃度センサからの検出制御信
号に応じて外部空気の量を制御して前記加熱室に供給す
る空気供給装置とを備え、前記加熱室内の不活性ガス濃
度を所定の濃度に制御すると共に前記自動半田付け装置
内の圧力を大気圧以上に保持して常に前記自動半田付け
装置の前記基板の搬入口及び搬出口から前記不活性ガス
を外部に流出させるように構成したことを特徴とする自
動半田付け装置。3. An automatic soldering device for heating and soldering a substrate on which electronic parts are mounted while being transported in a heating chamber filled with an inert gas, the inert gas detecting an inert gas concentration in the heating chamber. A concentration sensor, an inert gas supply device for controlling the supply amount of the inert gas according to a detection control signal from the inert gas concentration sensor to supply the heating chamber to the heating chamber, and an inert gas concentration sensor. An air supply device for controlling the amount of external air according to a detection control signal and supplying the air to the heating chamber, and controlling the inert gas concentration in the heating chamber to a predetermined concentration and in the automatic soldering device. An automatic soldering device, characterized in that the pressure is maintained at atmospheric pressure or more and the inert gas is always discharged to the outside through a carry-in port and a carry-out port of the substrate of the automatic soldering device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25741392A JP3252333B2 (en) | 1992-08-31 | 1992-08-31 | Automatic soldering equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25741392A JP3252333B2 (en) | 1992-08-31 | 1992-08-31 | Automatic soldering equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH077260A true JPH077260A (en) | 1995-01-10 |
| JP3252333B2 JP3252333B2 (en) | 2002-02-04 |
Family
ID=17306036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25741392A Expired - Fee Related JP3252333B2 (en) | 1992-08-31 | 1992-08-31 | Automatic soldering equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3252333B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774462A (en) * | 1993-09-01 | 1995-03-17 | Nippon Dennetsu Keiki Kk | Inert gas atmosphere controller for soldering apparatus |
| KR100396699B1 (en) * | 2001-01-10 | 2003-09-03 | 주식회사 하이닉스반도체 | reflow bake system in fabrication of semiconductor device |
| CN103203509A (en) * | 2011-11-15 | 2013-07-17 | Tsm有限公司 | Real time monitoring system of nitrogen concentration in reflow oven |
| EP4227637A4 (en) * | 2021-09-18 | 2024-04-03 | Honor Device Co., Ltd. | METHOD AND DEVICE FOR DETECTING THE CONCENTRATION OF A SOLDER FLUX IN A REFLOW OVEN |
-
1992
- 1992-08-31 JP JP25741392A patent/JP3252333B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0774462A (en) * | 1993-09-01 | 1995-03-17 | Nippon Dennetsu Keiki Kk | Inert gas atmosphere controller for soldering apparatus |
| KR100396699B1 (en) * | 2001-01-10 | 2003-09-03 | 주식회사 하이닉스반도체 | reflow bake system in fabrication of semiconductor device |
| CN103203509A (en) * | 2011-11-15 | 2013-07-17 | Tsm有限公司 | Real time monitoring system of nitrogen concentration in reflow oven |
| EP4227637A4 (en) * | 2021-09-18 | 2024-04-03 | Honor Device Co., Ltd. | METHOD AND DEVICE FOR DETECTING THE CONCENTRATION OF A SOLDER FLUX IN A REFLOW OVEN |
| US12360040B2 (en) | 2021-09-18 | 2025-07-15 | Honor Device Co., Ltd. | Detection method and detection device for detecting concentration of solder flux in reflow oven |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3252333B2 (en) | 2002-02-04 |
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