JPH0780871A - Hot-pressing device and hot plate therefor - Google Patents

Abstract

PURPOSE:To efficiently heat a matter to be worked by a constitution wherein each of a plurality of hot plates between a stationary platen and a movable platen consists of an airtight chamber, the top surface and bottom surface of which are made of flexible membrane member, within which far infrared heaters are provided and on which the feed opening and discharge opening or gas are provided. CONSTITUTION:Each of a plurality of hot plates 50a, 50b and the like houses an airtight chamber 54 inside a vertically open rectangular frame-like outer peripheral member 52. The airtight chamber 54 is a shape having the openings of a vertically open inner frame closed with silicone rubber membrane members 58 and 60, a back up frame 72 along the top surface membrane member 58 and an upper and lower far infrared heaters 76a and 76b within the inner frame. At the same time, the chamber is equipped with air feed and discharge passages 70a and 70b. Under the condition that a matter to be worked H is placed on the top surface membrane member 58, by raising a movable platen, the respective outer peripheral members 52 are joined together. An enclosed chamber surrounded by the formed frame body, the movable platen and a stationary platen is evacuated and pressurized air is fed in the airtight chamber 54 so as to pressurize the matter to be worked H with the membrane members 58 and 60 and, the same time, heat it with the heaters 76a and 76b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot press machine used for press molding of a multilayer substrate such as a laminated printed wiring board and a hot plate used in the machine.

[0002]

2. Description of the Related Art Conventionally, a fixed platen whose relative position is fixed, a movable platen opposed to the fixed platen and moved toward and away from the fixed platen by vertical movement, and arranged between the fixed platen and the movable platen. A hot press device is known that includes a plurality of hot plates heated by hot oil, an electric heater, etc., and a container that houses these, and was used for press molding of a multilayer substrate such as a printed wiring board. .

[0003]

However, in the conventional hot pressing apparatus, the hot plate for heating the work piece is made of, for example, steel, so that its heat capacity is large and a large amount of heat energy is required to heat it. It was necessary and there was a problem in the utilization efficiency of heat energy. For this reason, there has been a demand for a hot plate capable of efficiently heating a workpiece and a hot press machine equipped with such a hot plate.

[0004]

As a means for solving the above problems, the present invention adopts the following configurations. That is, the hot plate for the hot press device according to the first invention of the present application is a hot plate for a hot press device that presses a workpiece sandwiched between the hot plates, and both are expandable and contractible. An airtight chamber formed between the face film member and the bottom film member, a far infrared heater arranged in the airtight chamber, a gas supply port for supplying a gas of a desired pressure into the airtight chamber, and a gas exhausted from the airtight chamber. And a gas discharge port for

The hot pressing apparatus of the second invention comprises a fixed plate, a movable plate which is arranged facing the fixed plate so as to be able to move up and down, and a movable plate drive mechanism which drives the movable plate up and down. A hot press device that is provided between the fixed plate and the movable plate and that has a plurality of hot plates that make the relative distance between the movable plate and the movable plate move closer to and away from each other according to ascent and descent of the movable plate. In the above, the hot plate for the hot press device of the first invention is mounted as the hot plate.

[0006]

The hot plate for the hot press device having the above-mentioned structure has one fixed plate and one movable plate of the hot press device, like the conventional hot plate. For example, a step plate is interposed between the fixed plate and the movable plate. And an appropriate number is installed.

In the following, according to the procedure of hot pressing, the work is first placed on the upper surface film member of the hot plate in a state where the movable plate is held in the lowered position and the hot plates are separated from each other. However, since the upper plate member side of the hot plate mounted on the fixed platen is covered with the fixed platen, the workpiece is not placed on the hot plate.

Next, when the movable platen is raised to bring the respective heat plates close to each other, the work piece is placed between the upper film member of the lower heat plate and the lower film member of the upper heat plate between the adjacent hot plates. Sandwiched between. Since the upper surface film and the lower surface film member are expandable and contractible, they are recessed according to the shape of the workpiece and are housed as if they surround the workpiece. When the above-mentioned work piece is placed on the upper surface film member, if the gas is discharged from the airtight chamber and the upper surface and the lower surface film member are recessed to the airtight chamber side in a depressurized state, the work piece can be surrounded well.

When the hot plate according to claim 2 is used,
Along with the proximity of each hot plate, the outer peripheral members are closely connected in the vertical direction to form a series of frames. At this time, since the workpieces are housed in the recesses of the upper and lower film members as described above, the workpieces between the hot plates do not prevent the hot plates from approaching each other. The frame body, together with the fixed platen and the movable platen, forms therein an airtight chamber and a closed chamber for accommodating a workpiece. If air is discharged from the closed chamber by the pressure reducing means, the closed chamber can be depressurized to a desired vacuum degree.

Subsequently, when gas having a desired pressure, for example, air is supplied to the airtight chamber to raise the pressure in the airtight chamber, the upper surface film member and the lower surface film member swell. The upper surface film member and the lower surface film member closely deform along the surface of the workpiece to surround the workpiece, and exert a pressing force on the workpiece according to the pressure in the airtight chamber. The pressure in the airtight chamber may be increased in parallel with the pressure in the closed chamber.

Further, the airtight chamber is kept at a desired pressure, and the workpiece is heated by the far infrared heater. The heat radiated from the far-infrared heater reaches the object to be processed through the air in the airtight chamber and the upper or lower film member, but the amount of heat absorbed by them is extremely smaller than that of the hot plate made of steel. Therefore, the thermal energy radiated from the far infrared heater is consumed very efficiently for heating the workpiece. Thus, the hot plate of the first invention can efficiently heat the workpiece.

Further, when a closed chamber is formed by the outer peripheral member and only the inside thereof is depressurized, the depressurized volume becomes extremely small as compared with the case where the entire container of the hot press machine is depressurized, so the time required for depressurization is shortened. As a result, the operating efficiency of the hot press machine is improved. Moreover, since it is not necessary to make the container itself a pressure resistant structure, the hot press device is simplified,
Can be miniaturized.

Since the hot pressing apparatus of the second invention is equipped with the hot plate of the first invention, it exhibits the above-described operation.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, in order to further clarify the present invention, a preferred embodiment will be described with reference to the drawings. As shown in FIG. 1, at the bottom of the hot press device 10 of the present embodiment,
A base 12 is arranged, and the base 12 is fixed to the floor via a mount (not shown). A plurality of stays 14 are erected and fixed to the base 12, and a fixing plate 16 facing the base 12 is fixed to the other ends of the stays 14. A cylinder 18 is bored in the center of the base 12, and a supply / discharge hole 18a for communicating the cylinder 18 with the outside is provided.
A supply / discharge pipe 20 for supplying / discharging hydraulic oil to / from the cylinder 18.
Are connected.

The supply / discharge pipe 20 is connected to a discharge side 24a of a pump 24 via a supply check valve 22, and a suction side 24b of the pump 24 is connected to an oil tank 28 via a strainer 26. . Also, the discharge side 24a of the pump 24
A relief valve 32 is interposed in the pipe 30 branched from
The drain side 32 a of the relief valve 32 is connected to the oil tank 28. A solenoid valve 34 for switching the set pressure is connected to the vent side of the relief valve 32, and the set pressure of the relief valve 32 can be switched according to ON / OFF of the solenoid valve 34. On the other hand, a pilot type check valve 38 for discharge is installed in the discharge path 36 branched from the supply / discharge pipe 20, and the secondary side of the check valve 38 for discharge is connected to the oil tank 28 as a drain pipe 38b. Has been done. The pilot port 38p of the discharge check valve 38 is connected to a 2-position 4-port solenoid valve 40 and communicates with the discharge passage 36 or the drain pipe 38b depending on the position of the solenoid valve 40. As is well known, the discharge check valve 38 is closed when the pilot port 38p communicates with the discharge passage 36 and the hydraulic pressure of the discharge passage 36 is introduced. With such a configuration, the pump 24 can be operated and the positions of the solenoid valve 34 and the solenoid valve 40 can be switched to operate the supply and discharge of the hydraulic oil to and from the cylinder 18.

Further, a ram 42 is slidably inserted in the cylinder 18. A movable plate 44 is fixed to one end of the ram 42 so as to face the fixed plate 16, and the movable plate 44 can be driven up and down together with the ram 42 in accordance with supply and discharge of hydraulic oil to and from the cylinder 18.

A movable plate side heating plate 46 is mounted on the movable platen 44. A fixed plate side heating plate 48 is attached to the fixed plate 16 facing the movable plate 44, and only one sheet is shown between the movable plate 44 and the fixed plate 16, but a plurality of intermediate plates are provided. The heat plates 50 are arranged at predetermined intervals via well-known step plates (not shown).

The structure of the intermediate heating plate 50 will be described with reference to FIGS. 2 and 3, and the structures of the movable platen-side heat plate 46 and the fixed platen-side heat plate 48 will also be described. As shown in FIGS. 2 and 3, the intermediate heating plate 50 is a peripheral frame member 5 having a rectangular frame shape having upper and lower openings and packings 52a at upper and lower edges.
2 and the airtight chamber 54 accommodated inside thereof have a double structure.

The airtight chamber 54 has a shape in which the opening of a rectangular middle frame 56 that opens up and down is closed by a stretchable upper surface film member 58 and a lower surface film member 60 made of silicone rubber. 60 is an upper and lower presser frame 62a,
The upper and lower edges of the middle frame 56 are airtightly attached to each other via bolts 62b. The upper holding frame 62a is provided with one communication groove 64 near the center of each side. The upper and lower film members 58 and 60 thus mounted are easy to replace.

One air passage 66, 66 is provided in each of a pair of opposite side portions of the middle frame 56, and each air passage 66, 66 is provided with a plurality of communication passages 68 through an airtight chamber 54.
It communicates with the inner space. Further, air supply / discharge passages 70a, 70b are provided in the respective air passages 66, 66, and the air supply / discharge passages 70a, 70b penetrate the outer peripheral member 52 and communicate with the outside.

Inside the airtight chamber 54, a lattice-shaped receiving frame 72 is installed along the upper surface film member 58. The receiving frame 72 supports the workpiece to be placed on the upper surface film member 58, and is installed to prevent the upper surface film member 58 from being concavely deformed by the load of the workpiece. A pair of supports 74, 74 are arranged in the airtight chamber 54 so as to traverse the airtight chamber 54, and both ends of the supports 74, 74 are fixed to opposite sides of the middle frame 56 by bolting. These support 7
An upper far infrared heater 76a is provided above the reference numerals 4 and 74, and a lower far infrared heater 76b is provided below the receiving frame 72.
Are arranged substantially in parallel with and are fixed to the supports 74, 74 by bolting. Although not shown, the upper and lower far-infrared heaters 76a for each airtight chamber 54,
A temperature controller 76b is provided, and the temperature of each airtight chamber 54 can be adjusted.

Although the structure of the intermediate hot plate 50 has been described above, the movable plate side hot plate 46 is a structure in which the lower far infrared heater 76b is removed from the structure of the intermediate hot plate 50, and the fixed plate side hot plate 48 is. This is a structure in which the receiving frame 72 and the upper far infrared heater 76a are removed from the intermediate heating plate 50. Therefore,
Regarding the movable platen side heat plate 46 and the fixed platen side heat plate 48,
Members common to the intermediate heating plate 50 are given the same part numbers, and detailed illustration and description thereof are omitted.

As shown in FIG. 1, each heating plate 46, 48, 5
The air supply / exhaust passages 70a and 70b of 0 are respectively the header 78
And the header 80. However, in FIG. 1, in order to distinguish the air supply / exhaust passages 70a and 70b from each other, the air supply / exhaust passages 70a and 70b, which are originally arranged in parallel with each other, are shown at positions facing each other.

The header 78 has connecting portions 82a and 82b at both ends.
Is equipped with. The air supply pipe 84 connected to the connecting portion 82a is branched into two paths, one path of which is the cooler 8
The 6-port and 2-port 2-position solenoid valve 88 is connected to the air supply pipe 85, and the 2-port 2-position solenoid valve 94 is connected to the air supply pipe 85. It is connected to the compressor 90 via a pressure reducing valve 92 with a relief. Other connection portion 82 of header 78
b is connected to a vacuum pump 100 via a pressure reducing valve 96 with a relief and a 2-port 2-position solenoid valve 98. Further, the vacuum pump 100 is connected to a 2-position 4-port solenoid valve 102. This solenoid valve 102
A suction hole 16 a and a silencer 104, which are formed by penetrating the fixed plate 16, are connected to the solenoid valve 10.
By switching the position of 2, the suction hole 16a and the silencer 1
04 or the vacuum pump 100 can be alternatively placed in a communication state.

On the other hand, a silencer 108 is connected to the header 80 communicating with the air supply / discharge passage 70b via a throttle valve 109 and a 2-port 2-position solenoid valve 106.
With the above configuration, the air discharged from the compressor 90 can be introduced into the airtight chamber 54 of each of the heating plates 46, 48, 50.
At this time, if the cooling air is supplied to the airtight chamber 54 using the line on the cooler 86 side and the electromagnetic valve 106 is opened, the airtight chamber 54 is closed.
Can be cooled while pressurizing. Further, if air of a set pressure is supplied to the airtight chamber 54 using the pressure reducing valve 92 and the line on the electromagnetic valve 94 side and the electromagnetic valve 106 is shut off, the airtight chamber 5 will be closed.
The inside of 4 can be pressurized to the set pressure. Further, if the electromagnetic valve 98 is opened and the vacuum pump 100 is operated, the airtight chamber 54
The air can be sucked in and discharged. The role of the line connected to the suction hole 16a will be described later.

Next, the vertical movement of the heating plates 46, 48 and 50 will be described. First, when hydraulic oil is supplied to the ram 42 to drive the movable platen 44 upward, the movable platen 44 moves to the movable platen-side heat plate 4.
Ascends along with 6 and sequentially pushes up the intermediate hot plate 50,
As shown in FIG. 4, the movable plate 44 and the fixed plate 16 sandwich and press the heat plates 46, 48, 50. At this time, the outer peripheral member 52 of the fixed platen 16 and the fixed plate-side heat plate 48, the outer peripheral member 52 of the movable plate 44 and the movable plate-side heat plate 46, and the outer peripheral member 52 of each of the heat plates 46, 48, and 50 contacting vertically. Are in close contact with each other via the packing 52a. Thereby, each outer peripheral member 52 forms a series of frame bodies C, and
A closed chamber R closed by the frame C, the fixed plate 16 and the movable plate 44 is formed.

With the closed chamber R thus formed, the position of the electromagnetic valve 102 is adjusted so that the suction hole 16a and the vacuum pump 100 are communicated with each other, and the vacuum pump 10 is adjusted.
If 0 is operated, the air in the closed chamber R can be sucked and discharged to reduce the pressure. Further, even if the upper and lower outer peripheral members 52 are in close contact with each other, the inner frames 56 are not in contact with each other, and a communication groove 64 is provided in each of the inner frames 56. Therefore, when decompressing the closed chamber R described above, for example, the fixed plate side hot plate 4
The space inside the middle frame 56 such as between the lower surface film member 60 of FIG. 8 and the upper surface film member 58 of the intermediate heating plate 50 can be sufficiently depressurized.

Next, a case of hot pressing an object to be processed by using the hot pressing device 10 having the above-mentioned structure will be described with reference to FIGS. However, in FIG. 5 to FIG. 7, only a main part of one set of intermediate hot plates 50a and 50b (subscripts a and b are attached for distinction) is schematically illustrated. Of the intermediate heating plate 50, the fixed plate side heating plate 48, and the movable plate side heating plate 46 are omitted.
Further, as in the case of FIG. 1, the air supply / discharge passages 70a and 70b are shown at opposing positions.

First, from the state shown in FIG. 1, the solenoid valve 98 is set to the open position (other solenoid valves 34, 40, 88, 9).
4, 102 and 106 are shown in the drawing), the vacuum pump 100
Is operated to reduce the pressure in the airtight chamber 54 of each hot plate 46, 48, 50. As a result, the upper surface film member 58 and the lower surface film member 60 are concavely deformed. However, since the upper surface film member 58 is supported by the receiving frame 72, it is only slightly recessed (see FIG. 5). Here, the workpiece H is placed on the upper surface film member 58. Only the workpiece H on the lower intermediate heating plate 50b is shown. Since the load of the workpiece H is supported by the receiving frame 72, it can be accurately placed horizontally.

After the workpiece H is placed on the upper surface film member 58, the solenoid valve 34 is switched to the shut-off position to supply hydraulic oil to the cylinder 18, and the movable platen 44 is raised via the ram 42. As a result, the outer peripheral members of the respective heat plates 46, 48, 50 are vertically joined to each other to form a series of frame bodies C, and the closed chamber R closed by the frame bodies C, the fixed plate 16 and the movable plate 44. Are formed (see FIGS. 4 and 6).

Subsequently, the position of the solenoid valve 102 is switched to connect the suction hole 16a of the fixed board 16 to the vacuum pump 100, and the position of the solenoid valve 98 is set to the shut-off position. As a result, the air inside the sealed chamber R is exhausted by the vacuum pump 100 and is depressurized to the set degree of vacuum. Further, in parallel with the above operation, the solenoid valve 94 is switched to the open position, and the compressor 90 is placed in the airtight chamber 54.
The compressed air is supplied to pressurize the airtight chamber 54 to the set pressure. By these operations, the upper surface film member 58 and the lower surface film member 60 are bulged and deformed outward, and the workpiece H is adhered and covered along the outer surface thereof (see FIG. 7).
The workpieces H arranged above the intermediate heating plate 50a and below the intermediate heating plate 50b are also covered by the upper surface film member 58 and the lower surface film member 60 in the same manner.

While maintaining the state shown in FIG. 7, the upper and lower far infrared heaters 76a and 76b are caused to generate heat, and the radiant heat heats the workpiece H to a set temperature and holds it for a set time. Since the workpiece H is pressed at a pressure corresponding to the internal pressure of the airtight chamber 54, it is hot-pressed within the heating time. Since the workpiece H is heated from both upper and lower sides, the workpiece H is heated uniformly. Further, since the upper surface film member 58 and the lower surface film member 60 are in close contact with the work piece H and uniformly press along the surface of the work piece H, the work piece H is uniformly pressed. However, the upper surface film member 5
8 and the lower surface film member 60 need only be in close contact with at least substantially the entire upper and lower surfaces of the workpiece H, and need not necessarily be in close contact with the side surface of the workpiece H. Furthermore, since the closed chamber R is maintained in a reduced pressure state throughout the heating time,
Removal of volatile components from the work piece H is performed well.

After the set time has elapsed, heating by the upper and lower far infrared heaters 76a and 76b is stopped. At the same time, the solenoid valve 94 is switched to the shut-off position and the solenoid valves 88 and 106 are switched to the open position to supply and discharge the pressurized air into the airtight chamber 54. Since the pressurized air is cooled when passing through the cooler 86, the workpiece H is efficiently cooled by supplying / discharging the pressurized air to / from the airtight chamber 54.

After cooling the workpiece H to a predetermined temperature,
The silencer 10 is operated by switching the position of the solenoid valve 102.
4 and the suction hole 16a are communicated with each other, and the pressure in the sealed chamber R is increased to about atmospheric pressure. Next, the solenoid valves 88 and 106 are set to the shutoff position
Switching the solenoid valve 98 to the open position, the vacuum pump 100
The inside of the airtight chamber 54 is decompressed by, and the workpiece H is released from the covering state by the upper surface film member 58 and the lower surface film member 60, and the state shown in FIG. 6 is obtained.

Thereafter, the solenoid valve 34 is switched to the open position, and the pilot valve 38p of the discharge check valve 38 is connected to the drain pipe 38b by switching the position of the solenoid valve 40.
The hydraulic fluid is discharged from the cylinder 18 and the movable platen 44 is lowered. As a result, each hot plate 4
The mutual intervals of 6, 48 and 50 are enlarged to reach the state shown in FIG. Furthermore, the solenoid valves 34, 40, 88, 94, 98,
With the states 102 and 106 shown in FIG. 1, the hot-pressed workpiece H is taken out from the hot press device 10.

As described above, in the hot press apparatus 10 of this embodiment, the airtight chamber 54 including the upper surface film member 58 and the lower surface film member 60 is kept at a desired pressure, and the upper and lower far infrared heaters 76a. , 76b to heat the workpiece. Therefore, the upper and lower far infrared heaters 76a,
The heat radiated from 76 b passes through the air in the airtight chamber 54 and the upper surface film member 58 or the lower surface film member 60, and the workpiece H.
However, the amount of heat absorbed in the middle of this route is extremely small compared to the conventional steel hot plate. Therefore, the thermal energy radiated from the upper and lower far-infrared heaters 76a and 76b is consumed very efficiently for heating the workpiece H, and the workpiece H is efficiently heated. Moreover, the workpiece H is uniformly heated from both upper and lower surfaces.

Further, since the closed chamber R is formed by the outer peripheral member 52 and only the inside thereof is depressurized, the depressurized volume becomes extremely small. Therefore, the time required for depressurization is shortened and the operation efficiency of the hot press device 10 is improved. Further, since the container itself does not need to have a pressure resistant structure, the hot pressing device 10 can be simplified and downsized.

Moreover, since water, oil, etc. are not used as the heating / cooling medium, pipes, pumps, etc. for circulating such a heating medium are unnecessary. By adjusting the temperature of the upper and lower far-infrared heaters 76a and 76b for each airtight chamber 54, it is possible to hot press the workpiece H at different temperatures for each press stage.

Although the embodiments of the present invention have been described above, the present invention is not limited to such embodiments and can be implemented in various modes without departing from the scope of the invention.
For example, although air is used as the pressure fluid and the cooling medium in the above embodiments, gases other than air such as nitrogen, carbon dioxide, and argon may be used. The material of the membrane member is not limited to the above silicone rubber, but a material having both flexibility and strength such as fluororubber can be used. In the above embodiment, the air supply / exhaust passage 70a is used for air supply and decompression, and the air supply / exhaust passage 70b is used for air discharge, but both can be interchanged.

If the hot plate of the embodiment is attached to a conventional hot press machine, the thermal efficiency and operating efficiency of the existing equipment can be improved, and the existing equipment can be effectively used. Further, although not particularly installed in the above-mentioned embodiment, if a shield is installed on the outer periphery of the hot press device, the heat retention effect can be improved, and even if an accident such as rupture of the airtight chamber occurs, it will affect the outside. The damage can be reduced.

[0041]

As described above, in the hot plate for the hot press apparatus of the present invention and the hot press apparatus equipped with the hot plate, the airtight chamber including the upper surface film member and the lower surface film member is maintained at a desired pressure. Then, the far-infrared heater heats the workpiece. Therefore, the heat radiated from the far infrared heater is
Although it reaches the workpiece through the gas in the hermetic chamber and the upper surface film member or the lower surface film member, the amount of heat absorbed in the middle of this path is extremely smaller than that of the conventional steel hot plate. Therefore, the thermal energy radiated from the far infrared heater will be consumed very efficiently to heat the workpiece,
The work piece is efficiently heated.

Further, since the closed chamber is formed by the outer peripheral member and only the inside thereof is depressurized, the depressurized volume becomes extremely small. Therefore, the time required for depressurization is shortened and the operation efficiency of the hot press machine is improved. Further, since the container itself does not need to have a pressure resistant structure, the hot pressing device can be simplified and downsized.

Moreover, since water, oil, etc. are not used as the heating and cooling medium, pipes, pumps, etc. for circulating such a heating medium are unnecessary.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a hot pressing apparatus according to an embodiment.

FIG. 2 is a partial cross-sectional view of a hot plate of the hot pressing apparatus according to the embodiment.

FIG. 3 is a plan view of a hot plate of the hot pressing apparatus according to the embodiment, in which the right half shows a state in which the upper surface film member is removed.

FIG. 4 is an explanatory diagram of a hot plate between the movable platen and the fixed platen when the movable platen is raised in the hot pressing apparatus of the embodiment.

FIG. 5 is an explanatory diagram of a hot plate in a state where the airtight chamber is depressurized and the upper surface film member and the lower surface film member are recessed in the hot pressing apparatus of the embodiment.

FIG. 6 is an explanatory diagram of a hot plate when the hot plates are brought close to each other from the state of FIG.

FIG. 7 is an explanatory diagram of a hot plate when the airtight chamber is pressurized from the state of FIG.

[Explanation of symbols]

10 ... Hot press device, 16 ... Fixed platen, 16
a ... suction hole (pressure reducing means), 18 ... cylinder (movable plate drive mechanism), 42 ... ram (movable plate drive mechanism),
44: movable plate, 46: movable plate side heating plate (heating plate),
48 ... Fixed plate side hot plate (hot plate), 50, 50a, 50
b ... Intermediate hot plate (hot plate), 52 ... Peripheral member, 54
... Airtight chamber, 58 ... Top film member, 60 ... Bottom film member, 70a, 70b ... Air supply / discharge path (gas supply port, gas discharge port) 76a ... Upper far infrared heater, 76b ... Lower far infrared heater, 100 ... Vacuum pump (pressure reducing means),
102 ... Solenoid valve (pressure reducing means), C ... Frame, H ...
..Workpiece, R ... closed chamber

Claims (5)

[Claims] 1. A hot plate for a hot press device for sandwiching and pressing a workpiece between a plurality of hot plates arranged between a fixed platen and a movable platen, both of which are expandable and contractible. An airtight chamber formed between the surface film member and the lower film member, a far-infrared heater arranged in the airtight chamber, a gas supply port for supplying a gas of a desired pressure into the airtight chamber, and a gas exhausted from the airtight chamber. A hot plate for a hot press device, which is provided with a gas discharge port. 2. A frame-shaped outer peripheral member that surrounds the airtight chamber along the outer periphery of the airtight chamber, wherein when a plurality of hot plates for the hot press device are brought close to each other along the axial direction, By providing the outer peripheral member that is closely connected to form a series of frames, when the fixed plate and the movable plate are brought close to each other, the frame and the fixed plate and the movable plate are divided. The hot plate for a hot press device according to claim 1, wherein a closed chamber can be formed. 3. A fixed plate, a movable plate that is arranged opposite to the fixed plate and can be moved up and down, a movable plate drive mechanism that drives the movable plate up and down, and between the fixed plate and the movable plate. And a plurality of hot plates that are arranged in the hot plate to move the movable plate closer and farther relative to each other according to ascent and descent of the movable plate, wherein the hot press device presses a workpiece. A hot press device, characterized in that a hot plate for the hot press device described above is mounted. 4. A fixed plate, a movable plate that is arranged opposite to the fixed plate and is capable of moving up and down, a movable plate drive mechanism that vertically drives the movable plate, and between the fixed plate and the movable plate. And a plurality of hot plates that are arranged in a plurality of positions so that their relative distances approach and separate from each other according to ascent and descent of the movable plate, wherein the hot press device presses a workpiece. A hot press device, characterized in that a hot plate for the hot press device described above is mounted. 5. The hot pressing apparatus according to claim 4, further comprising decompression means for decompressing a region including a workpiece inserted between the hot plates for the plurality of hot pressing apparatuses.